1254122 玖、發明說明： 一、 發明所屬之技術領域 本發明係關於一種具補償功能之視覺檢測裝置及聚焦誤 差補偵方法，特別係關於一種量測裝置以機器視覺來自動 掃描及檢測一薄型待測物尺寸之量測裝置。 二、 先前技術 印刷電路板是電子、電腦及通信等產品之主要零組件， 為能因應消費市場上輕、薄、短、小之產品特性，及在高 密度及高可靠性的需求催化下，高階印刷電路板在目前的 發展趨勢已大多使用盲孔（blindhQle或以）及埋孔（b此以 hole)之技術。該種盲孔及埋孔之印刷電路板，是藉由盲 孔將内部幾層之佈線板與表面之佈線連接，不須穿透整個 板子而浪費其他層佈線板之佈局空間，預估可較一般印刷 電路板之體積縮小至2〇%。因此對電路板而言，無論是半 成=或成品之品質檢測工作都變的非常重要，特別是關於 次見孔k &垂直度、孔真圓度及銅墊尺寸等都需要進 行量測及規袼判讀。 二二知之自動視覺檢測裝置之示意圖。該視覺檢測 衣“匕3可置放待測物80之固定平臺14、一視 像模組1 8及一可作二祕 模組18至少包括取動機構19。—般視覺取像 構19垂直… 15及光源16,並固定在運動機 構! ”直方向之γ轴移動單元12上 括有水平方向之χΗ戍稱19還包 軸私動單元11及承載固定平臺14 軸移動單元1 3，因此可 6 此了以自動掃描及檢測待測物8 〇表面之 H:\Hu\lgc\ 牧德科技台灣專利 \92468\92468.d〇c 1254122 幾何尺寸或圖型尺寸，而整個運動機構19係固定在一基座 17上。 固定平臺14因著本身之自重以及承載待測物8〇之重量 會產生連縯分佈之垂直撓曲量，如圖2所示。圖3係視覺 檢測裝置沿著圖2中1 一 1剖面線檢測之示意圖。該固定平 堂14因兩側受到支撐，所以中央相較於兩側固定端有最大 之垂直撓曲量5 max。當視覺取像模組18移至中央時，取 像單元15原本已對準之焦距會因垂直撓曲量5max而變得 失焦（focusing error)，因此造成量測結果之準確性大受 影響。雖然於自動掃描時，可利用γ軸移動單元12垂直移 動，以進行待測物80表面聚焦的校正動作，但一再地執行 對焦會造成整個量測時間耗費過久。 三、發明内容 本發明之主要目的係提供一種具補償功能之視覺檢測裝 置及其聚焦誤差補償方法，其中待測物係固定於一固定平 s，該固定平臺之垂直撓曲量已預先記錄或估算，因此可 以補償該撓曲量所造成之焦距誤差。 為達成上述目的，本發明揭示一種具補償功能之視覺檢 測I置及其聚焦誤差補償方法。該視覺檢測裝置包含一可 握持待測物之固定平臺、一視覺取像模組、一可作三維移 動之運動機構及一控制運算模組，其中視覺取像模組固定 於该運動機構。該控制運算模組會藉由預先量測之記錄以 估算固定平臺之垂直撓曲量，再依據該垂直撓曲量命令運 動機構進行相對應之垂直運動，而得以補償該視覺取像模 H:\Hn\lgC\牧德科技台灣專利您仞·浙 1254122 組至該待測物之表面的焦距變異。 該視覺取像模組可與該待測物位於該固定平臺之同一表 面侧，或者该視覺取像模組與該待測物位於該固定平臺相 對之表面側，因此該固定平臺必須是一透明材料，而 測物之待側面要緊貼於該固定平臺表面。 本發明之聚焦誤差補償方法係預先量取固定平臺上複數 個點之撓曲量，再根據該撓曲量建立一數學模式以得到整 個固定平臺之撓曲量分佈。然後根據該撓曲量分佈以補償 聚焦之誤差，同時進行待測物之影像掃描。最後需要判二 所擷取影像，並根據影像之特徵或圖形來量測相關尺寸。項 四、實施方式 圖4係本發明具補償功能之自動視覺檢測裝置之立體干 意圖。該視覺檢測裝置40包含—可固定待測物8〇之固二 平臺44、一視覺取像模組48、一可作三維移動之運動機構 4a及控制運算模組49。待測物 ν t里測面需面向視覺取 像模組48，並固定於固定平臺44 至44之弟一表面。又視覺取像 模組48係設於該固定平臺44之第一表面側，並固定於運 動機構4a上’其至少包括—取像單元45及—光源“。取 像早兀45可以是電㈣合元件（ccd)或互補式金屬氧化 物半導體（CMOS)攝影機。又光 入尤原46可以是能產生光線 之環狀發光元件，待測物80之#、、目4⑽ 里測面會將光線反射及成像 在取像單元45内。 。亥控制運异模組4 9根據該取像單 1豕早兀Μ内產生之影像資 料進行運算，並藉由控制運動機 再4a之移動途徑以完成待 H:\Hu\lgc\ft德科技台灣專利\92468\92468.板 1254122 測物80需要量測之項目。另運動機構4a包括有水平方向 移動之X軸移動單元41與承載固定平臺44之Z軸移動單 元43，以及垂直方向移動之γ軸移動單元42。因此可以自 動知^田及檢測待測物8 0表面之幾何尺寸或圖型尺寸，而運 動機構4a之X軸移動單元41係藉由兩邊門柱固定在一基 座47上，此一運動機構4a或可稱為門型結構。 本發明可預先量測固定平臺44之垂直撓曲量，最佳之方 式係以三維座標量測儀（Coordinate Measuring Machine ; CMM)或其他高度量測裝置在χ、γ、z三軸同時進行矩陣 狀格點之撓曲虽量測，例如：量測圖2中虛線交錯之複數 個格點的垂直撓曲量。然後可以依照袼點的垂直撓曲量建 立一數學模式时算其他各處之撓曲量分佈情形，一般可 、内插或外插之數學公式估算固定平臺上每—點之捷曲 量。當視覺取像模組48掃描待測物8〇表面時，控制運算 模組49會依據上述垂直撓曲量命令運動機構^進行相對 應之垂直運動，而得以補償取像單元45至待測物8〇 面的焦距變異。 & "’、毛明之聚焦誤差補償方法之流程圖。如步驟 所示，本流程開始後依照步驟52之指令去量取 ： 複數個點之撓曲景奢 至 點。由於述方式選取複數個矩陣狀 、 至之垂直撓曲量係構成一連續曲面，因 可根據撓曲量^ 遂立一數學模式以得到整個固 量分佈，如步驟53。拉# 疋十至之撓1254122 发明, invention description: 1. Field of the Invention The present invention relates to a visual detection device with compensation function and a focus error compensation method, in particular to a measurement device for automatically scanning and detecting a thin type of machine vision. Measuring device for measuring the size of the object. 2. Prior art printed circuit boards are the main components of products such as electronics, computers and communications. In order to respond to the light, thin, short and small product characteristics of the consumer market, and to catalyze the demand for high density and high reliability, High-order printed circuit boards have mostly used blind holes (blindhQle or) and buried holes (b) in the current development trend. The printed circuit board of the blind hole and the buried hole is connected with the wiring of the inner layer by the blind hole, and the layout space of the other layer wiring board is wasted without penetrating the entire board, and the estimated space can be compared. The size of a typical printed circuit board is reduced to 2%. Therefore, for the circuit board, whether it is semi-finished = or the quality inspection work of the finished product becomes very important, especially for the secondary hole k & verticality, hole roundness and copper pad size, etc. need to be measured And the interpretation of the rules. A schematic diagram of the automatic vision detecting device of the second and second known. The visual inspection garment "匕3 can be placed on the fixed platform 14 of the object to be tested 80, a video module 18 and a second module 18 can include at least the taking mechanism 19. The visual image capturing structure 19 is vertical. 15 and the light source 16 are fixed to the moving mechanism! "The y-axis moving unit 12 in the straight direction includes a horizontal nickname 19 and a shaft private unit 11 and a fixed platform 14 axis moving unit 13 This can be used to automatically scan and detect the surface of the object to be tested 8 HH:\Hu\lgc\ 牧德科技Taiwan patent\92468\92468.d〇c 1254122 geometric size or pattern size, and the entire movement mechanism 19 series It is fixed to a base 17. The fixed platform 14 generates a vertical deflection amount of the continuous distribution due to its own weight and the weight of the object to be tested, as shown in Fig. 2. Fig. 3 is a schematic view of the visual inspection device taken along the line 1 - 1 of Fig. 2. Since the fixed hall 14 is supported on both sides, the center has a maximum vertical deflection amount of 5 max compared to the fixed ends on both sides. When the visual image capturing module 18 is moved to the center, the focal length of the imaging unit 15 that has been aligned will become a focus error due to the vertical deflection amount 5max, so that the accuracy of the measurement result is greatly affected. Although the γ-axis moving unit 12 can be vertically moved during the automatic scanning to perform the correcting action of the surface focus of the object to be tested 80, repeatedly performing the focusing causes the entire measuring time to take too long. SUMMARY OF THE INVENTION The main object of the present invention is to provide a visual inspection device with a compensation function and a focus error compensation method thereof, wherein the object to be tested is fixed to a fixed flat s, and the vertical deflection amount of the fixed platform is pre-recorded or Estimated, therefore, can compensate for the focal length error caused by the amount of deflection. In order to achieve the above object, the present invention discloses a visual detection I set with a compensation function and a focus error compensation method thereof. The visual inspection device comprises a fixed platform for holding the object to be tested, a visual image capturing module, a motion mechanism capable of three-dimensional movement and a control computing module, wherein the visual image capturing module is fixed to the motion mechanism. The control computing module compensates the visual imaging mode H by estimating the vertical deflection of the fixed platform by pre-measuring the recording, and then commanding the moving mechanism to perform the corresponding vertical motion according to the vertical deflection amount: \Hn\lgC\Mudtech Taiwan patents You 仞·Zhejiang 1254122 Group to the surface of the object to be tested the focal length variation. The visual image capturing module may be located on the same surface side of the fixed platform as the object to be tested, or the visual image capturing module and the object to be tested are located on the opposite surface side of the fixed platform, so the fixed platform must be transparent. Material, while the side to be measured is to be in close contact with the surface of the fixed platform. The focus error compensation method of the present invention pre-measures the amount of deflection of a plurality of points on a fixed platform, and then establishes a mathematical mode according to the amount of deflection to obtain a deflection distribution of the entire fixed platform. Then, according to the deflection amount distribution, the error of the focus is compensated, and the image scanning of the object to be tested is simultaneously performed. Finally, it is necessary to judge two captured images and measure the relevant dimensions according to the features or graphics of the images. Item 4. Embodiment FIG. 4 is a perspective view of an automatic visual inspection device with a compensation function according to the present invention. The visual inspection device 40 includes a solid platform 44 for fixing the object to be tested, a visual image capturing module 48, a motion mechanism 4a for three-dimensional movement, and a control computing module 49. The measuring surface of the object to be tested ν t faces the visual imaging module 48 and is fixed to the surface of the fixed platform 44 to 44. The visual image capturing module 48 is disposed on the first surface side of the fixed platform 44, and is fixed to the moving mechanism 4a, which includes at least the image capturing unit 45 and the light source. The image early 45 can be electric (4). Combined component (ccd) or complementary metal-oxide-semiconductor (CMOS) camera, and light into the Yuyuan 46 can be a ring-shaped light-emitting element capable of generating light, and the light-measuring surface of the object 80, the object (4) The reflection and imaging are performed in the image capturing unit 45. The sea control and transportation module 4 is operated according to the image data generated in the image capturing unit 1 and is controlled by the movement of the moving machine 4a. Waiting for H:\Hu\lgc\fttech Taiwan patent\92468\92468. Board 1254122 The object 80 needs to be measured. The other motion mechanism 4a includes the X-axis moving unit 41 and the bearing fixed platform 44 which are moved horizontally. The Z-axis moving unit 43 and the γ-axis moving unit 42 moving in the vertical direction. Therefore, the geometrical size or the pattern size of the surface of the object to be tested 80 can be automatically known and the X-axis moving unit 41 of the moving mechanism 4a is Fixed on a base 47 by two door posts, this The motion mechanism 4a may be referred to as a door type structure. The present invention can pre-measure the vertical deflection amount of the fixed platform 44, and the best method is a Coordinate Measuring Machine (CMM) or other height measuring device. The deflection of the matrix lattice points is simultaneously measured on the three axes of χ, γ, and z, for example, measuring the vertical deflection amount of a plurality of lattice points staggered by a broken line in Fig. 2. Then, the vertical deflection according to the defect point can be measured. When a mathematical model is established to calculate the distribution of deflections in other places, the mathematical formula of interpolation, interpolation or extrapolation can be used to estimate the amount of each point on the fixed platform. When the visual image capturing module 48 scans the test When the surface of the object is 8〇, the control operation module 49 commands the motion mechanism to perform the corresponding vertical motion according to the vertical deflection amount, thereby compensating for the focal length variation of the image capturing unit 45 to the surface of the object to be tested 8. &" ',Ma Ming's flow chart of the focus error compensation method. As shown in the step, after the start of the process, according to the instruction of step 52 to measure: the deflection point of the plurality of points is extravagant to the point. , The vertical deflection amount constitutes a continuous curved surface, because a mathematical model can be established according to the amount of deflection to obtain the entire solid distribution, as in step 53. Pull #疋十至之挠
輝53接者可進行步驟54之指入 量分佈以補償聚隹 7 乂康I 焦之^，同時進行待測物之影像掃描 H:\Hu\lgc\牧德科技台灣專利\92468\92468.d〇c 1254122 量。該記憶單元82用於記憶該處理單元81估算之垂直撓曲 量，且該記憶單元82並不限於某些特定硬體，舉凡積體電 =記憶體、光碟片、硬碟等均可適用。該命令單元=用於 命令該運動機構4a運動以補償該垂直撓曲量造成該視覺取 像模組48之焦距變異，如此會使焦距位置仍保持在待測面 上。該判讀單元84根據該視覺取像模組48所擷取電子影像 之資料判讀該待測物8〇之圖型及幾何尺寸。 本發明之技術内容及技術特點巳揭示如上，然而熟悉本 項技術之人士仍可能基於本發明之教示及揭#而作種種不 背離本發明精神之替換及修飾。因此，本發明之保護範圍 應不限於實施例所揭示者’而應包括各種不背離本發明 替換及修飾，並為以下之申請專利範圍所涵蓋。 五、圖式簡要說明 圖1係習知之自動視覺檢測裝置之示意圖； 圖2係固定平臺之垂直撓曲量分佈之示意圖； 圖3係視覺檢測裝置沿著圖2中1 _ 1剖面線檢測之示意 圖； ’ 圖4係本發明具補償功能之自動視覺檢測裝置之立體示 意圖； 圖5係本备明之聚焦誤差補償方法之流程圖； 圖6係本發明視覺檢測裝置補償聚焦誤差之動作的示意 圖； ’ 圖7係本發明另一視覺檢測裝置補償聚焦誤差之動作的 示意圖；以及 H:\Hu\lgc\ 牧德科技台灣專利\92468\92468.doc 1254122 圖8係本發明之控制運算模 六、 元件符號說明 10 視覺檢測裝置 12 γ軸移動單元 14 固定平臺 16 光源 18 視覺取像模組 40 視覺檢測裝置 42 γ軸移動單元 44、 44’ 固定平臺 46、 46’ 光源 48、 48’ 視覺取像模組 4a 運動機構 80 待測物 82 記憶單元 84 判讀單元 示意圖。 X軸移動單元 z軸移動單元 取像單元 基座 運動機構 X軸移動單元 0 Z軸移動單元 45’ 取像單元 基座 控制運算模組 處理單元 命令單元The Hui 53 receiver can perform the index distribution of step 54 to compensate for the convergence of the image of the object to be tested, and at the same time, the image scanning of the object to be tested is H:\Hu\lgc\Mudtech Taiwan patent\92468\92468. D〇c 1254122 quantity. The memory unit 82 is configured to memorize the amount of vertical deflection estimated by the processing unit 81, and the memory unit 82 is not limited to certain specific hardware, and may be applicable to a memory, a compact disc, a hard disk, or the like. The command unit = is used to command the movement of the motion mechanism 4a to compensate for the vertical deflection amount causing the focal length variation of the visual imaging module 48, so that the focal length position remains on the surface to be tested. The interpretation unit 84 interprets the pattern and geometric size of the object to be tested 8 according to the data captured by the visual image capturing module 48. The technical content and technical features of the present invention are disclosed above, but those skilled in the art can still make various substitutions and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is not to be construed as limited by the scope of the invention, and BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a conventional automatic visual inspection device; Fig. 2 is a schematic view showing a vertical deflection distribution of a fixed platform; Fig. 3 is a visual inspection device detected along a 1 _ 1 cross-sectional line of Fig. 2. Figure 4 is a perspective view of the automatic visual inspection device with compensation function of the present invention; Figure 5 is a flow chart of the focus error compensation method of the present invention; Figure 6 is a schematic diagram of the action of the visual inspection device of the present invention for compensating for focus error; Figure 7 is a schematic diagram of another visual inspection device of the present invention for compensating for focus error; and H:\Hu\lgc\ 牧德科技Taiwan Patent\92468\92468.doc 1254122 FIG. 8 is a control operation model of the present invention. DESCRIPTION OF SYMBOLS 10 Vision detecting device 12 γ-axis moving unit 14 Fixed platform 16 Light source 18 Vision imaging module 40 Vision detecting device 42 γ-axis moving unit 44, 44' Fixed platform 46, 46' Light source 48, 48' Visual imaging Module 4a Motion Mechanism 80 Object to be tested 82 Memory unit 84 Schematic diagram of the interpretation unit. X-axis moving unit z-axis moving unit Image capturing unit Base Motion mechanism X-axis moving unit 0 Z-axis moving unit 45' Image taking unit Base Control arithmetic module Processing unit Command unit
H:\Hu\lgc^德科技台灣專利 \92468\92468. d〇C -12-H:\Hu\lgc^德科技Taiwan Patent \92468\92468. d〇C -12-