JPH0725266Y2 - 基板洗浄装置 - Google Patents

基板洗浄装置

Info

Publication number
JPH0725266Y2
JPH0725266Y2 JP1990025814U JP2581490U JPH0725266Y2 JP H0725266 Y2 JPH0725266 Y2 JP H0725266Y2 JP 1990025814 U JP1990025814 U JP 1990025814U JP 2581490 U JP2581490 U JP 2581490U JP H0725266 Y2 JPH0725266 Y2 JP H0725266Y2
Authority
JP
Japan
Prior art keywords
brush
substrate
cleaning
cleaning liquid
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990025814U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03119483U (enExample
Inventor
知己 和田
潤 高林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Inc filed Critical Toppan Inc
Priority to JP1990025814U priority Critical patent/JPH0725266Y2/ja
Publication of JPH03119483U publication Critical patent/JPH03119483U/ja
Application granted granted Critical
Publication of JPH0725266Y2 publication Critical patent/JPH0725266Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1990025814U 1990-03-14 1990-03-14 基板洗浄装置 Expired - Lifetime JPH0725266Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990025814U JPH0725266Y2 (ja) 1990-03-14 1990-03-14 基板洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990025814U JPH0725266Y2 (ja) 1990-03-14 1990-03-14 基板洗浄装置

Publications (2)

Publication Number Publication Date
JPH03119483U JPH03119483U (enExample) 1991-12-10
JPH0725266Y2 true JPH0725266Y2 (ja) 1995-06-07

Family

ID=31528735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990025814U Expired - Lifetime JPH0725266Y2 (ja) 1990-03-14 1990-03-14 基板洗浄装置

Country Status (1)

Country Link
JP (1) JPH0725266Y2 (enExample)

Also Published As

Publication number Publication date
JPH03119483U (enExample) 1991-12-10

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