JPH0725225Y2 - 蒸発気体定量取出装置 - Google Patents
蒸発気体定量取出装置Info
- Publication number
- JPH0725225Y2 JPH0725225Y2 JP1989019188U JP1918889U JPH0725225Y2 JP H0725225 Y2 JPH0725225 Y2 JP H0725225Y2 JP 1989019188 U JP1989019188 U JP 1989019188U JP 1918889 U JP1918889 U JP 1918889U JP H0725225 Y2 JPH0725225 Y2 JP H0725225Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- liquid
- liquid raw
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000605 extraction Methods 0.000 title claims description 11
- 239000002994 raw material Substances 0.000 claims description 79
- 239000007788 liquid Substances 0.000 claims description 77
- 230000001174 ascending effect Effects 0.000 claims description 8
- 239000006185 dispersion Substances 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000011344 liquid material Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 33
- 238000010438 heat treatment Methods 0.000 description 23
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 8
- 230000005587 bubbling Effects 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989019188U JPH0725225Y2 (ja) | 1989-02-20 | 1989-02-20 | 蒸発気体定量取出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989019188U JPH0725225Y2 (ja) | 1989-02-20 | 1989-02-20 | 蒸発気体定量取出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02112327U JPH02112327U (enrdf_load_stackoverflow) | 1990-09-07 |
| JPH0725225Y2 true JPH0725225Y2 (ja) | 1995-06-07 |
Family
ID=31234480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989019188U Expired - Lifetime JPH0725225Y2 (ja) | 1989-02-20 | 1989-02-20 | 蒸発気体定量取出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0725225Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2872891B2 (ja) * | 1993-08-06 | 1999-03-24 | 株式会社東芝 | 気化装置 |
| JP7240993B2 (ja) * | 2019-08-27 | 2023-03-16 | 東京エレクトロン株式会社 | 原料ガス供給システム及び原料ガス供給方法 |
| JP7589890B2 (ja) * | 2020-10-07 | 2024-11-26 | 株式会社フジキン | 気化装置、ガス供給装置及びガス供給装置の制御方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62261864A (ja) * | 1986-05-06 | 1987-11-14 | 三菱電機株式会社 | ヒ−トポンプ装置 |
| JPS63108102A (ja) * | 1986-10-25 | 1988-05-13 | バブコツク日立株式会社 | 脱気装置 |
-
1989
- 1989-02-20 JP JP1989019188U patent/JPH0725225Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02112327U (enrdf_load_stackoverflow) | 1990-09-07 |
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