JPH07218244A - Method and device for measuring plate thickness with ultrasonic wave - Google Patents

Abstract

PURPOSE:To obtain a method and device for measuring plate thickness with ultrasonic wave with an improved reliabity CONSTITUTION:When an ultrasonic probe 3 is pushed against a measuring surface 1a, it detects that the ultrasonic probe 3 is out of proper slope angle range alpha and proper vertical stroke range beta. Especially when automatic mechanical measurement is conducted for an object with large level difference, high measurement reliability is assured.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic plate thickness measuring method and an ultrasonic plate thickness measuring device, and in particular, when the plate thickness of a steel plate such as a tank bottom plate is ultrasonically measured, a false indication of the plate thickness is made. The present invention relates to an ultrasonic plate thickness measuring method and an ultrasonic plate thickness measuring device for preventing the same.

[0002]

2. Description of the Related Art FIG. 10 and FIG.
FIG. 11 is a schematic plan view showing a conventional ultrasonic plate thickness measuring device described in Japanese Patent Publication No. 008415 and a sectional view taken along line XI-XI in FIG. 10.

The ultrasonic plate thickness device shown in FIGS. 10 and 11 is a bogie 2 as a main body of a device which is self-propelled on a tank bottom plate 1 as an object to be measured via wheels A, and is moved up and down by the bogie 2. The ultrasonic probe 3 for plate thickness measurement, which is mounted so that it can be pressed against the upper surface 1a of the tank bottom plate 1 having the coating layer B at a predetermined pressure, and the measured value of the plate thickness is abnormal. In order to improve the adhesion between the ultrasonic probe 3 and the tank bottom plate 1 and the marking nozzle 4 that sprays the paint toward the measurement position when there is, the contact medium is measured. A couplant injection nozzle 5 for injecting to a position, an air nozzle 6 for injecting compressed air to clean an upper surface 1a as a surface to be measured of the tank bottom plate 1, and a plurality of super-parallel nozzles arranged in parallel in the carriage 2. Having ultrasonic probe 3 and ultrasonic probe And a ultrasonic probe pushing device 7 for raising and lowering the 3.

This ultrasonic probe pressing device 7 comprises a carriage 2
A link-type lifting mechanism 8 for lifting and lowering the ultrasonic probe 3 in the direction perpendicular to the surface 1a to be measured of the tank bottom plate 1
have. The lifting mechanism 8 includes a lifting drive motor 9 fixed in the carriage 2, a pair of link rods 11 fixed at one end to a rotation shaft 10 of the lifting drive motor 9, and the other end of each link rod 11. A plurality of ultrasonic probes 3 that are pivotally attached
And a support plate 12 for arranging the
2 and a guide post 12a for guiding the up and down movement.

Further, the ultrasonic probe pressing device 7 is
As shown in FIG. 12, a substantially cylindrical support frame 13 attached to the support plate 12 of the elevating mechanism 8 and the support frame 13 are rotatably attached inside the support frame 13 and the ultrasonic probe 3 is turned downward. The gimbal type joint 14 for holding the gimbal type joint 14 and a rotary drive device fixed to the upper portion of the support frame 13 for rotating the gimbal type joint 14, for example, an air actuator 15 are provided.

The gimbal type joint 14 has a cylindrical outer ring 16 which is fixed to the rotary shaft 15a of the air actuator 15 and is rotatably held in the support frame 13, and in the outer ring 16. , A pair of first
An inner ring 18 is pivotally supported via a support pin 17. Further, in the inner ring 18, the ultrasonic probe 3
A flange portion 19 formed on the outer periphery of is provided, and the flange portion 19 is pivotally supported via a pair of second support pins 20. The line connecting the first support pins 17 is orthogonal to the line connecting the second support pins 20, and the ultrasonic probe 3 swings in all directions with respect to the outer ring 16 of the gimbal type joint 14. You can move.

Therefore, the contact surface 3a of the ultrasonic probe 3 can be inclined at an arbitrary angle in accordance with the uneven shape of the upper surface 1a of the tank bottom plate 1 having the coating layer B,
Contact surface 3a of ultrasonic probe 3 and upper surface 1a of tank bottom plate 1
It is possible to improve the adhesiveness with and to reduce the thickness measurement error. The cable 21 of the ultrasonic probe 3 is connected to an oscillating device and a data collecting / recording device (not shown).

Further, a pair of flange portions 22 project from the side surfaces of the support frame 13 in opposite directions, and the support plates 12 of the elevating mechanism 8 are slidably passed through the respective flange portions 22 downward. The lower end of the extending support shaft 23 is screwed. Each support shaft 23 has a compression spring 24.
The compression spring 24 is disposed between the support plate 12 and the flange portion 22 of the support frame 13. Therefore, via the compression spring 24, the support frame 13
Can be urged to move up and down with a predetermined stroke, so that the ultrasonic probe 3, the gimbal-type joint 14, and the support frame 13 can be operated normally, that is, while traveling.
Can be suspended from the support plate 12 via the support shaft 23. Then, when the contact surface 3 a of the ultrasonic probe 3 is pressed against the upper surface 1 a of the tank bottom plate 1, the ultrasonic probe 3 can be elastically moved up and down via the compression spring 24.

Next, the operation of the conventional ultrasonic plate thickness measuring device based on the above configuration will be described. First, in response to a travel command signal from an external control device, the truck 2 moves on the tank bottom plate 1 and stops at a predetermined measurement position, and compressed air is blown from the air nozzle 6 to blow off residual oil and the like on the tank bottom plate 1. After jetting, the contact medium is jetted or dropped from the control medium jet nozzle 5 toward the upper surface 1a as the measured surface.

Thereafter, the lifting drive motor 9 of the lifting mechanism 8 is controlled by an external control device to lower the support plate 12 so that the contact surface 3a of the ultrasonic probe 3 is brought to the upper surface 1a of the tank bottom plate 1. The coating layer B is pressed and contacted with a predetermined pressure. At this time, in order to further enhance the adhesiveness between the contact surface 3a and the upper surface 1a with the coating layer B interposed, the ultrasonic probe 3 corresponding to the degree of corrosion of the upper surface 1a.
Tilts. After that, the air actuator 15 is driven to rotate the ultrasonic probe 3, and the contact surface 3a of the ultrasonic probe 3 is rubbed against the upper surface 1a.

Then, as shown in FIG. 13, the oscillating section 3A and the receiving section 3B in the ultrasonic probe 3 are actuated to emit ultrasonic waves from the ultrasonic probe 3 so that the boundary surface C Using the reflected wave D and the reflected wave E from the bottom surface 1b of the tank bottom plate 1, the thickness T of the tank bottom plate 1 is measured, and the value is recorded in the data sampling / recording device. After the plate thickness measurement, the ultrasonic probe 3 is lifted up from the tank bottom plate 1 by the reverse operation to the above to return to the initial state shown in FIG. After that, the truck 2 is run to the next measurement position, and the thickness of the tank bottom plate 1 is continuously measured while repeating the above operation.

[0012]

Since the conventional ultrasonic plate thickness measuring apparatus is configured as described above, there are the following problems. That is, the contact surface 3a of the ultrasonic probe 3 is pressed against the upper surface 1a as the surface to be measured with a predetermined pressure with the coating layer B interposed, and also the uneven shape of the upper surface 1a of the tank bottom surface 1 is formed. On the other hand, it can be tilted at a predetermined tilt angle. Therefore, when the contact surface 3a of the ultrasonic probe 3 does not properly contact the upper surface 1a, for example, when the contact surface 3a is not pressed against the upper surface 1a with an appropriate pressing force, When the probe 3 is tilted more than necessary, the reflected wave F from the surface B1 of the coating layer B is mistakenly recognized as the reflected wave D from the boundary surface C, as a result, as shown in FIG. A value obtained by adding the thickness T of the bottom plate 1 and the thickness R of the coating layer B may be measured as the thickness of the tank bottom plate 1. Therefore, when inspecting the thickness of the bottom plate 1 of the tank,
There was a problem that high reliability could not be obtained.

The present invention has been made to solve the above problems, and in particular, an ultrasonic plate thickness measuring method and an ultrasonic plate thickness measuring device for improving the reliability of measurement of an object to be measured. Aim to get.

[0014]

[Means for Solving the Problems] Claim 1 according to the present invention
The ultrasonic plate thickness measurement method in, the ultrasonic probe for plate thickness measurement, by pressing a predetermined pressure against the surface to be measured of the object to be measured, ultrasonic waves emitted from the ultrasonic probe. According to the ultrasonic plate thickness measuring method for measuring the thickness of the object to be measured, when the ultrasonic probe is pressed against the surface to be measured, the ultrasonic probe is out of the proper tilt angle range. It is a method of detecting that.

In the ultrasonic plate thickness measuring method according to a second aspect of the present invention, the ultrasonic probe for plate thickness measurement is pressed against the surface to be measured of the object to be measured with a predetermined pressure, In the ultrasonic plate thickness measuring method for measuring the thickness of the object to be measured by the ultrasonic waves emitted from the ultrasonic probe, when the ultrasonic probe is pressed against the surface to be measured, the ultrasonic probe This is a method of detecting that the tentacle is out of the proper vertical stroke range.

In the ultrasonic plate thickness measuring method according to a third aspect of the present invention, the ultrasonic probe for plate thickness measurement is pressed against the surface to be measured of the object to be measured with a predetermined pressure, In the ultrasonic plate thickness measuring method for measuring the thickness of the object to be measured by the ultrasonic waves emitted from the ultrasonic probe, when the ultrasonic probe is pressed against the surface to be measured, the ultrasonic probe This is a method of detecting that the tentacle is outside the proper range of the tilt angle and outside the proper range of the vertical stroke.

According to a fourth aspect of the present invention, there is provided an ultrasonic plate thickness measuring device, wherein a support frame is urged to move up and down with a predetermined stroke, and a support frame is rotated within the support frame. It is equipped with a joint that is freely supported and that holds the ultrasonic probe for plate thickness measurement so that it can swing freely. In the ultrasonic plate thickness measuring device configured to measure the thickness of the object to be measured by the ultrasonic waves emitted from the ultrasonic probe, the ultrasonic probe is tilted. The tilt angle detecting unit for detecting that the angle is out of the proper angle range is arranged within the swing range of the ultrasonic probe.

According to a fifth aspect of the present invention, there is provided an ultrasonic plate thickness measuring apparatus, wherein a support frame is urged to move up and down with respect to a movable apparatus body with a predetermined stroke, and the support frame rotates within the support frame. It is equipped with a joint that is freely supported and that holds the ultrasonic probe for plate thickness measurement so that it can swing freely. In the ultrasonic plate thickness measuring device configured to measure the thickness of the object to be measured by the ultrasonic waves emitted from the ultrasonic probe, the ultrasonic probe is pressed up and down. This is a configuration in which a stroke detection mechanism that detects that the stroke is outside the proper range is provided.

According to a sixth aspect of the present invention, there is provided an ultrasonic plate thickness measuring apparatus, wherein a support frame is urged to move up and down with a predetermined stroke, and a support frame is rotated within the support frame. It is equipped with a joint that is freely supported and that holds the ultrasonic probe for plate thickness measurement so that it can swing freely. In the ultrasonic plate thickness measuring device configured to measure the thickness of the object to be measured by the ultrasonic waves emitted from the ultrasonic probe, the ultrasonic probe is tilted. An inclination angle detection unit that detects that the ultrasonic probe is out of the proper range is provided within the swing range of the ultrasonic probe, and the ultrasonic probe detects that the ultrasonic probe is out of the proper vertical stroke range. This is a configuration in which a stroke detection mechanism is provided.

[0020]

In the ultrasonic plate thickness measuring method according to the first aspect of the present invention, when the ultrasonic probe is pressed against the surface to be measured with a predetermined pressure, it is aligned with the unevenness of the surface to be measured having the coating layer. If the ultrasonic probe is tilted and the tilt angle is out of the predetermined appropriate range, an angle deviation signal is output to the control device, and the ultrasonic probe corrects the thickness of the measured object. Do not display the measured value of the object to be measured, judging that it cannot be measured.

In the ultrasonic plate thickness measuring method according to the second aspect of the present invention, when the ultrasonic probe is pressed against the surface to be measured with a predetermined pressure, the ultrasonic wave corresponding to the thickness of the object is measured. The ultrasonic probe moves upward or downward from the reference position, and as a result, the pressing force of the ultrasonic probe changes. When the ultrasonic probe is out of the appropriate vertical stroke range, a stroke deviation signal is output to the control device, and it is determined that the ultrasonic probe cannot correctly measure the thickness of the measured object. Do not display the measured value of the DUT.

In the ultrasonic plate thickness measuring method according to the third aspect of the present invention, when the ultrasonic probe is pressed against the surface to be measured with a predetermined pressure, the ultrasonic probe is aligned with the unevenness of the surface to be measured having the coating layer. As a result, the ultrasonic probe tilts, or the ultrasonic probe moves upward or downward from the reference position according to the thickness of the object to be measured. When the tilt angle is outside the predetermined proper range, the angle deviation signal is output to the control device, and when the ultrasonic probe is out of the proper vertical stroke range, the stroke deviation signal is output to the control device. Then, thereafter, in this control device, when either one of the angle deviation signal and the stroke deviation signal is input, the ultrasonic probe cannot correctly measure the thickness of the object to be measured. Therefore, the measured value of the DUT is not displayed.

In the ultrasonic plate thickness measuring device according to the fourth aspect of the present invention, the ultrasonic probe is applied to the surface to be measured at a predetermined pressure via the support frame biased to the device body. When pressed, the ultrasonic probe, which is configured to be swingable by the joint, tilts in accordance with the unevenness of the surface to be measured having the coating layer. At this time, when it is detected that the ultrasonic probe is out of the predetermined proper inclination angle range by the inclination angle detection unit arranged in the swing range of the ultrasonic probe, the inclination angle detection unit detects The angle deviation signal is output to the control device so that the ultrasonic probe determines that the thickness of the object to be measured cannot be correctly measured, and the measured value of the object to be measured is not displayed.

In the ultrasonic plate thickness measuring apparatus according to the fifth aspect of the present invention, the ultrasonic probe is applied to the surface to be measured at a predetermined pressure via the support frame biased to the apparatus main body. When pressed, the ultrasonic probe moves upward or downward in accordance with the thickness of the object to be measured,
As a result, the pressing force of the ultrasonic probe changes. And
By the stroke detection mechanism arranged in the stroke of the ultrasonic probe, when it is detected that the ultrasonic probe is outside the predetermined vertical stroke proper range, it outputs a stroke deviation signal to the control device, The ultrasonic probe determines that the thickness of the object to be measured cannot be correctly measured and does not display the measured value of the object to be measured.

In the ultrasonic plate thickness measuring apparatus according to the sixth aspect of the present invention, the ultrasonic probe is applied to the surface to be measured at a predetermined pressure through the support frame biased to the apparatus body. When pressed, the ultrasonic probe, which is configured to swing by the joint, tilts according to the unevenness of the surface to be measured with the coating layer, or corresponds to the thickness of the object to be measured. The probe moves upward or downward. At this time, when it is detected that the ultrasonic probe is out of the predetermined proper inclination angle range by the inclination angle detection unit arranged in the swing range of the ultrasonic probe, the inclination angle detection unit detects An angle deviation signal is output to the control device, and further, it is detected that the ultrasonic probe is out of the predetermined proper vertical stroke range by the stroke detection mechanism arranged in the stroke of the ultrasonic probe. In this case, a stroke departure signal is output to the control device, and then, when either one of the angle departure signal and the stroke departure signal is input in this control device, the ultrasonic probe causes the measured object to be measured. It is determined that the thickness of the object cannot be measured correctly, and the measured value of the object is not displayed.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an ultrasonic plate thickness measuring device according to the present invention will be described below with reference to the drawings. The same or equivalent parts as those of the conventional example are designated by the same reference numerals.

In FIG. 1, reference numeral 7A is an ultrasonic probe pressing device which is a main part of the ultrasonic plate thickness measuring device of the present invention. This ultrasonic probe pressing device 7A
Has a support plate 12 that is moved up and down by a link rod 11 of the lifting mechanism 8, and a substantially cylindrical support frame 13 is arranged at a position facing the support plate 12.
Inside the support frame 13, a gimbal type joint 14 that is rotatably attached and holds the ultrasonic probe 3 downward is provided.

This gimbal type joint 14 has a cylindrical outer ring 16 rotatably held in a support frame 13.
The inner ring 18 is pivotally supported in the outer ring 16 via a pair of first support pins 17. Further, a flange portion 19 formed on the outer circumference of the ultrasonic probe 3 is arranged in the inner ring 18, and the flange portion 19 is a pair of second support pins orthogonal to the first support pin 17. It is pivoted through 20. Therefore, the ultrasonic probe 3 can be swung in any direction with respect to the outer ring 16 of the gimbal type joint 14, and the ultrasonic probe 3 can be made to correspond to the uneven shape of the upper surface 1 a of the tank bottom plate 1. The contact surface 3a of 3 can be inclined at an arbitrary angle.

The support plate 12 and the support frame 13
A pair of support shafts 23 each having a compression spring 24 on the outer periphery thereof are disposed between and. One end of each support shaft 23 is screwed into the flange portion 22 of the support frame 13, and the other end is slidably inserted into the support plate 12. Therefore, the support frame 13 can be urged and arranged via the compression spring 24 so as to be movable up and down with a predetermined stroke. An air actuator 15 is fixedly mounted on the carriage 2, and a rotary shaft 15a of the air actuator 15 is provided with a support plate 12 and an outer ring 16.
And is connected to the ultrasonic probe 3. A guide pipe 25 is provided upright at the center of the outer ring 16, and the guide pipe 25 is slidably arranged with respect to the central portion of the support plate 12 and surrounds the outer circumference of the rotary shaft 15a. ing.

Here, on the inner wall surface 16a of the outer ring 16, as shown in FIG. 2, the ultrasonic probe 3 has reached the limit point of the proper inclination angle range α, that is, the proper inclination angle range α.
An inclination angle detection unit 26 is fixedly installed to detect the outside. The inclination angle detecting unit 26 is provided in the ultrasonic probe 3
It is disposed within the swing range of the end portion 3b and is provided at a position close to the end portion 3b. Further, the inclination angle detection unit 26 is arranged in a ring shape so as to surround the end portion 3b, and a conductive brass ring 26b is provided on the inner surface of the base portion 26a fixed to the inner wall surface 16a of the outer ring 16.
Is fixed. Since the brass ring 26b and the end portion 3b of the ultrasonic probe 3 are electrically connected to each other, when the end portion 3b comes into contact with the brass ring 26b, a current flows and a cable (not shown) is used. Then, the angle deviation signal 27 is output from the tilt angle detector 26 to the controller 28 (see FIG. 9).

In place of the brass ring 26b, the base 2
A well-known optical or electrical limit switch is arranged on 6a to direct the angle deviation signal 27 to the control device 28 when the ultrasonic probe 3 is out of the tilt angle suitability range α. You may make it output it.

Next, at a position close to the ultrasonic probe pressing device 7A, a stroke detection mechanism 3 for detecting that the ultrasonic probe 3 is outside the proper vertical stroke range β.
0 is placed. This stroke detection mechanism 30
As shown in FIG. 3, the flange portion 22 of the support frame 13
The stroke lever 31 installed upright on the support plate 1
2 and a sensor portion 32 fixedly provided at the end portion thereof.
A photo sensor 32a is embedded in the sensor portion 32, and the photo sensor 32a is composed of a light emitting element and a light receiving element facing each other with the slit portion 33 interposed therebetween.

Further, at the upper end of the stroke lever 31,
A plate-shaped shield portion 31a inserted into the slit portion 33
The shielding portion 31a has a length L that matches the vertical stroke proper range β (see FIG. 1).
Therefore, the shield plate 31a of the stroke lever 31 can also be moved up and down by following up and down of the support frame 13 and the ultrasonic probe 3. As a result, the photo sensor 32a
When the sensor unit 32 of the stroke detection mechanism 30 detects that the ultrasonic probe 3 is outside the predetermined vertical stroke proper range β by breaking the shield between the light emitting element and the light receiving element of The deviation signal 33 can be output to the control device 28 (see FIG. 9).

As shown in FIG. 4, the shield surface of the shield plate 31a can be arranged so as to be parallel to the end surface of the support plate 12. Also, although not shown,
In the structure of the stroke detection mechanism 30, the stroke lever 31 may be provided at the end of the support plate 12, and the sensor portion 32 may be provided at the flange portion 22 of the support frame 13. Further, a pair of upper and lower light receiving elements separated by the length L is provided at the end of the stroke lever 31, and one light emitting element is provided at the end surface of the support plate 12, and when the upper light receiving element receives light. The lower limit of the vertical stroke suitability range β may be detected, and when the lower light receiving element receives light, the upper limit of the vertical stroke suitability range β may be detected.

Here, in the ultrasonic plate thickness measuring device of the present invention, the angle deviation signal 2 inputted to the control device 28 is inputted.
7 and an alarm device 34 (see FIG. 9) for issuing an alarm in response to the stroke deviation signal 33, and the angle deviation signal 2
7 and a stroke deviation signal 33, a paint injection nozzle 35 (see FIG. 1) for injecting paint toward the measurement point on the upper surface 1a of the tank bottom plate 1 is provided.

Next, the ultrasonic plate thickness measuring method of the present invention based on the above-mentioned structure will be described. First, in response to a travel command signal from an external control device, the truck 2 moves on the tank bottom plate 1 and stops at a predetermined measurement position, and compressed air is blown from the air nozzle 6 to blow off residual oil and the like on the tank bottom plate 1. After jetting, the contact medium is jetted or dropped from the control medium jet nozzle 5 toward the upper surface 1a as the measured surface.

After that, the support plate 12 is lowered through the link rod 11 of the lifting mechanism 8 so that the contact surface 3a of the ultrasonic probe 3 is placed on the upper surface 1a of the tank bottom plate 1 through the coating layer B. It is brought into pressure contact with a predetermined pressure. This time,
The ultrasonic probe 3 is inclined corresponding to the uneven shape of the upper surface 1a having the coating layer B, and the inside of the slit portion 33 of the sensor portion 32 is moved into the slit portion 33 of the stroke lever 31 according to the thickness of the tank bottom plate 1. The shield plate 31a slides.

Here, as shown in FIG. 2, the brass ring 2
When 6b and the end portion 3b of the ultrasonic probe 3 come into contact with each other and become electrically conductive, the ultrasonic probe 3 has reached the limit point of the predetermined proper inclination angle range α, that is, The tilt angle detection unit 26 detects that the tilt angle is out of the proper range α,
An angle deviation signal 27 is output from the tilt angle detection unit 26 to the control device 28 via a cable (not shown).

Further, as shown in FIG. 5, the ultrasonic probe 3
However, when it moves further upward from the upper limit β1 of the proper vertical stroke range β, as shown in FIG. 6, the shielding plate 32a is disengaged from the slit portion 33, and the shielding between the light emitting element and the light receiving element of the photo sensor 32a is eliminated. To be solved. As a result, the sensor unit 32 of the stroke detection mechanism 30 detects that the ultrasonic probe 3 is out of the predetermined proper vertical stroke range β, and outputs the stroke deviation signal 33 to the control device 28. Further, as shown in FIG. 7, when the ultrasonic probe 3 moves further downward from the lower limit β2 of the proper vertical stroke range β, the shield plate 32a is disengaged from the slit portion 33, and the light emitting element of the photosensor 32a and the light receiving element are received. The shield between the elements is released, so that the stroke deviation signal 3
3 is output to the controller 28.

When one of the angle deviation signal 27 and the stroke deviation signal 33 is input to the control device 28, the ultrasonic probe 3 causes the tank bottom plate as an object to be measured. When it is determined that the thickness of No. 1 cannot be measured correctly, an alarm is issued from the alarm device 34, and at the same time, an error is displayed on the data display unit 36. After that, the support plate 12 is raised via the link rod 11 of the elevating mechanism 8 to separate the contact surface 3a of the ultrasonic probe 3 from the upper surface 1a of the tank bottom plate 1. Then, by spraying the paint from the paint spraying nozzle 35 toward the measurement point on the upper surface 1a of the tank bottom plate 1, it is possible to mark an unmeasurable point on the upper surface 1a of the tank bottom plate 1, which is useful for subsequent remeasurement. You can

Next, when the ultrasonic probe 3 is between the upper limit β1 and the lower limit β2 of the vertical stroke proper range β, as shown in FIG. 8, the light emitting element and the light receiving element of the photo sensor 32a are connected. The space is blocked by a shield plate 31a. As a result, it is determined that the ultrasonic probe 3 is within the predetermined vertical stroke proper range β, and the stroke deviation signal 33 is transmitted to the control device 28.
Is not output to. In addition, when the brass ring 26b and the end 3b of the ultrasonic probe 3 are not in contact with each other and are not electrically connected to each other, the ultrasonic probe 3 is within the predetermined inclination angle proper range α. Therefore, the angle deviation signal 27 is not output to the control device 28.

Therefore, when neither the stroke deviation signal 33 nor the angle deviation signal 27 is output to the control device 28, the air actuator 15 is driven to rotate the ultrasonic probe 3 and the ultrasonic probe. Contact surface 3a of child 3
Are rubbed against the upper surface 1a. Then, after ultrasonic waves are emitted from the ultrasonic probe 3 to measure the thickness of the tank bottom plate 1, the value is displayed or recorded on the data display unit 36. After the plate thickness is measured, the ultrasonic probe 3 is lifted from the tank bottom plate 1 by the reverse operation to return to the initial state shown in FIG. Then, the carriage 2 is run to the next measurement position, and the thickness of the tank bottom plate 1 is continuously measured while repeating the above operation.

[0043]

The ultrasonic plate thickness measuring method and the ultrasonic plate thickness measuring device according to claims 1 and 4 according to the present invention, when the ultrasonic probe is pressed against the surface to be measured, Since it is possible to detect that the tentacle is out of the proper tilt angle range, there is an excellent effect that the object to be measured having the surface to be measured with a large step can be measured with high reliability.

According to the ultrasonic plate thickness measuring method and the ultrasonic plate thickness measuring device of claims 2 and 5 according to the present invention, when the ultrasonic probe is pressed against the surface to be measured, the ultrasonic probe is Since it is possible to detect that the vertical stroke is out of the proper range, there is an excellent effect that even an object to be measured having a large step can be measured with high reliability.

In the ultrasonic plate thickness measuring method and the ultrasonic plate thickness measuring device according to the third and sixth aspects of the present invention, when the ultrasonic probe is pressed against the surface to be measured, the ultrasonic probe is Since it can detect that it is out of the proper range of the tilt angle and out of the proper range of the vertical stroke, it has high reliability especially for the mechanical measurement of the DUT with a large step. It has an excellent effect that it can be measured.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an ultrasonic probe pressing device which is a main part of an ultrasonic plate thickness measuring device of the present invention.

FIG. 2 is a cross-sectional view showing a tilt angle detection unit which is a main part of the ultrasonic plate thickness measuring device of the present invention.

FIG. 3 is a perspective view showing a first embodiment of a stroke detection mechanism which is a main part of the ultrasonic plate thickness measuring device of the present invention.

FIG. 4 is a perspective view showing a second embodiment of a stroke detection mechanism which is a main part of the ultrasonic plate thickness measuring device of the present invention.

FIG. 5 is a front view showing an operating state of the ultrasonic plate thickness measuring device of the present invention.

FIG. 6 is an enlarged view of an essential part showing a state of the stroke detection mechanism when the ultrasonic probe is out of the upper limit.

FIG. 7 is an enlarged view of an essential part showing a state of the stroke detection mechanism when the ultrasonic probe is out of the lower limit.

FIG. 8 is an enlarged view of a main part showing a state of a stroke detection mechanism when the ultrasonic probe is in a measurable range.

FIG. 9 is a block diagram for explaining the operation of the ultrasonic plate thickness measuring device of the present invention.

FIG. 10 is a schematic plan view showing a conventional ultrasonic plate thickness measuring device.

11 is a sectional view taken along line XI-XI in FIG.

FIG. 12 is a cross-sectional view showing a conventional ultrasonic probe pressing device.

FIG. 13 is a schematic diagram showing a measurement state of the ultrasonic probe.

[Explanation of symbols]

 α Inclination angle suitability range β Vertical stroke suitability range 1 Object to be measured (tank bottom plate) 1a Object to be measured (upper surface) 2 Device body (trolley) 3 Ultrasonic probe 13 Support frame 14 Joint 26 Inclination angle detector 30 Stroke detection mechanism

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Mitsuo Ohno 1720 Ishikawa Kawashima Inspection & Measurement Co., Ltd. Higashimura, Inashiki-gun, Ibaraki Prefecture (72) Inventor Yosuke Nakanishi 8-19-20 Higashisuna, Koto-ku, Tokyo Toyo Kanetsu Co., Ltd.

Claims (6)

[Claims] 1. An ultrasonic probe (3) for plate thickness measurement is pressed against a surface (1a) to be measured of an object (1) to be measured with a predetermined pressure, and the ultrasonic probe (3) 3) In the ultrasonic plate thickness measuring method for measuring the thickness of the object to be measured (1) by the ultrasonic waves emitted from the ultrasonic wave (3), the ultrasonic probe (3) is pressed against the surface to be measured (1a). In this case, it is detected that the ultrasonic probe (3) is out of the proper tilt angle range (α). 2. An ultrasonic probe (3) for plate thickness measurement is pressed against a surface (1a) to be measured of an object (1) to be measured with a predetermined pressure, and the ultrasonic probe (3) 3) In the ultrasonic plate thickness measuring method for measuring the thickness of the object to be measured (1) by the ultrasonic waves emitted from the ultrasonic wave (3), the ultrasonic probe (3) is pressed against the surface to be measured (1a). In this case, it is detected that the ultrasonic probe (3) is out of the appropriate vertical stroke range (β). 3. An ultrasonic probe (3) for plate thickness measurement is pressed against a surface (1a) to be measured of an object (1) to be measured with a predetermined pressure, and the ultrasonic probe (3) 3) In the ultrasonic plate thickness measuring method for measuring the thickness of the object to be measured (1) by the ultrasonic waves emitted from the ultrasonic wave (3), the ultrasonic probe (3) is pressed against the surface to be measured (1a). In this case, it is detected that the ultrasonic probe (3) is outside the proper tilt angle range (α) and outside the proper vertical stroke range (β). . 4. A support frame (13), which is urged to move up and down with a predetermined stroke with respect to a movable device body (2), and is rotatably supported in the support frame (13). Along with the joint (14) for swingably holding the ultrasonic probe (3) for plate thickness measurement, the ultrasonic probe (3) for plate thickness measurement is used as the object to be measured (1). The surface to be measured (1a) is pressed with a predetermined pressure, and the ultrasonic wave emitted from the ultrasonic probe (3) is used to measure the thickness of the object to be measured (1). In the ultrasonic plate thickness measuring device, a tilt angle detection unit (26) for detecting that the ultrasonic probe (3) is outside a proper tilt angle range (α) is provided with the ultrasonic probe (3). An ultrasonic plate thickness measuring device characterized in that the ultrasonic plate thickness measuring device is arranged within the swing range of the. 5. A support frame (13), which is urged to move up and down with a predetermined stroke, with respect to a movable device body (2), and is rotatably supported in the support frame (13). Along with the joint (14) for swingably holding the ultrasonic probe (3) for plate thickness measurement, the ultrasonic probe (3) for plate thickness measurement is used as the object to be measured (1). The surface to be measured (1a) is pressed with a predetermined pressure, and the ultrasonic wave emitted from the ultrasonic probe (3) is used to measure the thickness of the object to be measured (1). In the ultrasonic plate thickness measuring device, a stroke detection mechanism (3) for detecting that the ultrasonic probe (3) is out of a proper vertical stroke range (β).
0) is provided, and an ultrasonic plate thickness measuring device is provided. 6. A support frame (13) that is urged to move up and down with a predetermined stroke with respect to a movable device body (2), and is rotatably supported in the support frame (13). Along with the joint (14) for swingably holding the ultrasonic probe (3) for plate thickness measurement, the ultrasonic probe (3) for plate thickness measurement is used as the object to be measured (1). The surface to be measured (1a) is pressed with a predetermined pressure, and the ultrasonic wave emitted from the ultrasonic probe (3) is used to measure the thickness of the object to be measured (1). In the ultrasonic plate thickness measuring device, a tilt angle detection unit (26) for detecting that the ultrasonic probe (3) is outside a proper tilt angle range (α) is provided with the ultrasonic probe (3). The ultrasonic probe (3) is outside the proper vertical stroke range (β). Ultrasonic thickness measuring apparatus characterized by being arranged to stroke detecting mechanism (30) to be detected.