JPH07211576A - Manufacture of laminated ceramic capacitor - Google Patents
Manufacture of laminated ceramic capacitorInfo
- Publication number
- JPH07211576A JPH07211576A JP240694A JP240694A JPH07211576A JP H07211576 A JPH07211576 A JP H07211576A JP 240694 A JP240694 A JP 240694A JP 240694 A JP240694 A JP 240694A JP H07211576 A JPH07211576 A JP H07211576A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic capacitor
- laminated body
- pressure
- internal
- relative humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、積層セラミックコンデ
ンサの製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a monolithic ceramic capacitor.
【0002】[0002]
【従来の技術】近年、電子機器の小型化、高周波化に伴
い積層セラミックコンデンサの需要がますます高まって
いる。2. Description of the Related Art In recent years, the demand for monolithic ceramic capacitors has increased more and more with the miniaturization and higher frequency of electronic equipment.
【0003】図2は、従来の一般的な積層セラミックコ
ンデンサの製造工程を示したものである。図3(a)は
積層セラミックコンデンサの縦断面図で図3(b)は横
断面図である。以下、図に従って一般的な製造方法を説
明する。まず、セラミック原料をドクターブレード等に
よりシート状に成形した誘電体グリーンシート1を作製
し、その上に、内部電極2となる金属、例えばパラジウ
ムを含むペーストを、所定のパターン形状でスクリーン
印刷する。次に、内部電極2となる導電体層を形成した
誘電体グリーンシート1を、内部電極2となる誘電体層
が、誘電体グリーンシート1を挟んで交互に対向するよ
うに配置して、順次積層し、所望の積層数まで積層を繰
り返す。こうして得られた積層体を常温、常湿下で加圧
圧着した後、所望の大きさのチップに切断する。そして
このグリーンチップを高温焼成して焼結体を得る。次
に、この焼結体の端面の所定部分に外部電極3となる金
属ペーストを塗布し、焼き付けることにより外部電極3
を形成し積層セラミックコンデンサが完成する。FIG. 2 shows a manufacturing process of a conventional general laminated ceramic capacitor. 3A is a vertical sectional view of the monolithic ceramic capacitor, and FIG. 3B is a horizontal sectional view thereof. Hereinafter, a general manufacturing method will be described with reference to the drawings. First, a dielectric green sheet 1 is formed by molding a ceramic raw material into a sheet with a doctor blade or the like, and a paste containing a metal to be the internal electrode 2, for example, palladium is screen-printed on the dielectric green sheet 1 in a predetermined pattern. Next, the dielectric green sheets 1 on which the conductor layers serving as the internal electrodes 2 are formed are arranged so that the dielectric layers serving as the internal electrodes 2 are alternately opposed to each other with the dielectric green sheet 1 interposed therebetween, and the layers are sequentially arranged. Lamination is performed, and the lamination is repeated until the desired number of layers is laminated. The laminated body thus obtained is pressure-bonded at room temperature and normal humidity and then cut into chips of a desired size. Then, the green chip is fired at a high temperature to obtain a sintered body. Next, a metal paste to be the external electrode 3 is applied to a predetermined portion of the end surface of this sintered body, and baked to form the external electrode 3
To form a monolithic ceramic capacitor.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記の
従来の構成では、積層時において、セラミック誘電体層
間で、内部電極の厚み段差を吸収しきれないための接着
不良が生じ、焼成後の素子において、デラミネーション
等の構造欠陥が発生するという問題点を有していた。However, in the above-mentioned conventional structure, when the ceramic dielectric layers are laminated, an adhesion failure occurs because the thickness difference of the internal electrodes cannot be completely absorbed, and the element after firing has a problem. However, there is a problem that structural defects such as delamination occur.
【0005】そこで本発明は、デラミネーション等の構
造欠陥の発生のない積層セラミックコンデンサの製造方
法を提供することを目的とする。Therefore, an object of the present invention is to provide a method for manufacturing a monolithic ceramic capacitor which does not cause structural defects such as delamination.
【0006】[0006]
【課題を解決するための手段】この目的を達成するため
に、本発明の積層セラミックコンデンサの製造方法は、
少なくとも、積層体の加圧圧着工程時の周辺湿度環境
を、相対湿度70%以上の高湿度雰囲気に保持するもの
である。In order to achieve this object, a method for manufacturing a monolithic ceramic capacitor according to the present invention comprises:
At least, the ambient humidity environment during the pressure-bonding step of the laminate is maintained in a high humidity atmosphere having a relative humidity of 70% or more.
【0007】[0007]
【作用】この構成によれば、積層時の誘電体層間の接着
不良を抑制し、デラミネーション等の構造欠陥を防止す
ることが可能となる。According to this structure, it is possible to suppress the adhesion failure between the dielectric layers during lamination and prevent structural defects such as delamination.
【0008】すなわち、本発明は、加圧圧着時の周辺湿
度環境を相対湿度で70%以上の高湿度に保持すること
により、セラミック誘電体層に多量の水分子が吸着す
る。そのため、セラミック誘電体の可塑性が増大し、内
部電極厚み段差を吸収し、加圧圧着時の圧縮率が増大す
るという現象を利用したものである。That is, according to the present invention, a large amount of water molecules are adsorbed to the ceramic dielectric layer by maintaining the ambient humidity environment at the time of pressure bonding under high humidity of 70% or more in relative humidity. Therefore, the phenomenon that the plasticity of the ceramic dielectric is increased, the internal electrode thickness step difference is absorbed, and the compression rate at the time of pressure bonding is increased is utilized.
【0009】[0009]
【実施例】以下、本発明の一実施例について図3を用い
て、具体的に説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be specifically described below with reference to FIG.
【0010】まずセラミック原料を混合、造粒し積層用
パレットの上に誘電体グリーンシート1を用いて容量に
関与しない下部支持層を形成した。次にこの下部支持層
の上に市販のパラジウムペーストを用いて、スクリーン
印刷により内部電極2を形成し、乾燥後、その上に誘電
体グリーンシート1を積層圧着した。以後全く同様の方
法で、容量取得のために積層用パレットを所定の寸法だ
け一回ごとに位置ずらしを行いながら、内部電極2の形
成と誘電体グリーンシート1の積層を繰り返した。その
後、有効層が30層となった時点で、最上層に上記下部
支持層と同様の厚さを有する支持層を誘電体グリーンシ
ート1で形成して積層体を作製した。次に、この積層体
を通常の相対湿度である50%の雰囲気下に1時間放置
した後、その湿度雰囲気を保持したまま、圧力49MP
aで圧着した。また、同様に作製した別の積層体をそれ
ぞれ、60%、70%、80%、90%の相対湿度雰囲
気下1時間放置した後、その湿度雰囲気を保持したま
ま、それぞれ圧力49MPaで圧着した。こうして得ら
れた積層圧着体をそれぞれ所望の寸法のチップに切断
し、グリーンチップを作製した。次に、これらグリーン
チップを空気中において1350℃の温度で2時間焼成
した。この焼結体に外部電極3を形成して、積層セラミ
ックコンデンサが得られる。そこで、上記焼結体につい
てそれぞれ外観、及び素子内部の観察を行い、デラミネ
ーション等の構造欠陥の有無を調べた。以上の結果を、
サンプル1000個に対する良品率(%)として(表
1)に示している。First, a ceramic raw material was mixed and granulated, and a dielectric green sheet 1 was used to form a lower support layer that did not contribute to the capacity on a pallet for lamination. Next, a commercially available palladium paste was used on the lower support layer to form the internal electrode 2 by screen printing, and after drying, the dielectric green sheet 1 was laminated and pressure-bonded. After that, the formation of the internal electrodes 2 and the lamination of the dielectric green sheets 1 were repeated while the lamination pallet was displaced by a predetermined size each time in order to obtain the capacitance in the same manner. After that, when the number of effective layers reached 30 layers, a supporting layer having the same thickness as the lower supporting layer was formed of the dielectric green sheet 1 on the uppermost layer to prepare a laminate. Next, after leaving this laminated body in an atmosphere of normal relative humidity of 50% for 1 hour, the pressure of 49MPa was maintained while maintaining the humidity atmosphere.
It was crimped with a. Further, the other laminates produced in the same manner were left under an atmosphere of relative humidity of 60%, 70%, 80%, 90% for 1 hour, and then pressure-bonded under a pressure of 49 MPa while maintaining the humidity atmosphere. The laminated pressure-bonded body thus obtained was cut into chips each having a desired size to produce a green chip. Next, these green chips were fired in air at a temperature of 1350 ° C. for 2 hours. The external electrode 3 is formed on this sintered body to obtain a monolithic ceramic capacitor. Therefore, the appearance and the inside of the element of each of the above-mentioned sintered bodies were observed to examine the presence or absence of structural defects such as delamination. The above results
The yield rate (%) for 1000 samples is shown in (Table 1).
【0011】[0011]
【表1】 [Table 1]
【0012】(表1)から明らかなように、相対湿度7
0%以上で加圧圧着して作成したものは、デラミネーシ
ョン等の構造欠陥不良に対し、優れた効果が得られてい
ることがわかる。As is clear from Table 1, the relative humidity 7
It can be seen that the one produced by pressure-bonding at 0% or more has an excellent effect on structural defect defects such as delamination.
【0013】また、図1に加圧圧着時の相対湿度雰囲気
と誘電体グリーンシートの加圧圧縮率の関係を示してい
る。この図を見ると、加圧圧着時の相対湿度が高い程、
誘電体グリーンシートの加圧圧縮率も大きくなってお
り、誘電体グリーンシート間の接着強度が向上する。FIG. 1 shows the relationship between the relative humidity atmosphere at the time of pressure bonding and the compression ratio of the dielectric green sheet. Looking at this figure, the higher the relative humidity during pressure bonding,
The pressure compression ratio of the dielectric green sheets is also increased, and the adhesive strength between the dielectric green sheets is improved.
【0014】なお、本実施例においては、積層体を形成
後に湿度雰囲気を管理し、加圧圧着を行っているが、積
層を行う段階で湿度雰囲気を管理し、加圧圧着を行った
としても、その効果に変わりはない。また、加圧圧着を
行う前に、相対湿度70%以上の雰囲気中に積層体を放
置してもその効果に変わりはない。In this embodiment, the humidity atmosphere is controlled after the laminated body is formed and pressure bonding is performed. However, even if the humidity atmosphere is controlled and pressure bonding is performed at the stage of stacking. , Its effect is the same. Further, even if the laminated body is left in an atmosphere having a relative humidity of 70% or more before the pressure-bonding, the effect remains the same.
【0015】[0015]
【発明の効果】以上、本発明によると、誘電体セラミッ
クシートが、内部電極厚み段差を吸収し、誘電体セラミ
ックシート間の接着強度を向上させることができる。そ
の結果、デラミネーション等の構造欠陥のない積層セラ
ミックコンデンサを提供することができる。As described above, according to the present invention, the dielectric ceramic sheet can absorb the step difference in the thickness of the internal electrodes and improve the adhesive strength between the dielectric ceramic sheets. As a result, it is possible to provide a monolithic ceramic capacitor free from structural defects such as delamination.
【図1】本発明の一実施例における誘電体グリーンシー
トの加圧圧着時の相対湿度と加圧圧縮率の関係を示すグ
ラフFIG. 1 is a graph showing the relationship between the relative humidity and the compressibility under pressure of a dielectric green sheet in one embodiment of the present invention during pressure bonding.
【図2】従来の積層セラミックコンデンサの製造工程図FIG. 2 is a manufacturing process diagram of a conventional monolithic ceramic capacitor.
【図3】(a)積層セラミックコンデンサの縦断面図 (b)積層セラミックコンデンサの横断面図FIG. 3A is a vertical sectional view of a monolithic ceramic capacitor, and FIG. 3B is a transverse sectional view of a monolithic ceramic capacitor.
1 誘電体グリーンシート 2 内部電極 3 外部電極 1 Dielectric green sheet 2 Internal electrode 3 External electrode
Claims (2)
極層が前記誘電体層の相対向する端部に交互に露出する
ように積層して積層体を形成し、次に前記積層体を相対
湿度70%以上の雰囲気中で加圧圧着し、その後前記積
層体の前記内部電極が露出した両端部に外部電極を形成
する積層セラミックコンデンサの製造方法。1. A laminated body is formed by laminating dielectric layers and internal electrode layers such that the internal electrode layers are alternately exposed at opposite ends of the dielectric layer to form a laminated body, and then the laminated body is formed. A method for manufacturing a monolithic ceramic capacitor, wherein a body is pressure-bonded in an atmosphere having a relative humidity of 70% or more, and then external electrodes are formed on both ends of the laminate where the internal electrodes are exposed.
極層が前記誘電体層の相対向する端部に交互に露出する
ように、積層、加圧圧着を繰り返して積層体を形成する
際相対湿度70%以上の雰囲気で行い、その後、前記積
層体の前記内部電極が露出した両端部に外部電極を形成
する積層セラミックコンデンサの製造方法。2. A laminated body is formed by repeating lamination and pressure bonding so that the dielectric layer and the internal electrode layer are alternately exposed at opposite ends of the dielectric layer. A method for manufacturing a monolithic ceramic capacitor, wherein the relative humidity is 70% or more, and then external electrodes are formed on both ends of the multilayer body where the internal electrodes are exposed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP06002406A JP3094769B2 (en) | 1994-01-14 | 1994-01-14 | Manufacturing method of multilayer ceramic capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP06002406A JP3094769B2 (en) | 1994-01-14 | 1994-01-14 | Manufacturing method of multilayer ceramic capacitor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH07211576A true JPH07211576A (en) | 1995-08-11 |
JP3094769B2 JP3094769B2 (en) | 2000-10-03 |
Family
ID=11528368
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP06002406A Expired - Fee Related JP3094769B2 (en) | 1994-01-14 | 1994-01-14 | Manufacturing method of multilayer ceramic capacitor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3094769B2 (en) |
-
1994
- 1994-01-14 JP JP06002406A patent/JP3094769B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3094769B2 (en) | 2000-10-03 |
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