JP2946844B2 - Manufacturing method of multilayer ceramic capacitor - Google Patents

Manufacturing method of multilayer ceramic capacitor

Info

Publication number
JP2946844B2
JP2946844B2 JP16816491A JP16816491A JP2946844B2 JP 2946844 B2 JP2946844 B2 JP 2946844B2 JP 16816491 A JP16816491 A JP 16816491A JP 16816491 A JP16816491 A JP 16816491A JP 2946844 B2 JP2946844 B2 JP 2946844B2
Authority
JP
Japan
Prior art keywords
ceramic laminate
ceramic
manufacturing
multilayer ceramic
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16816491A
Other languages
Japanese (ja)
Other versions
JPH0521268A (en
Inventor
淳夫 長井
立郎 菊池
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP16816491A priority Critical patent/JP2946844B2/en
Publication of JPH0521268A publication Critical patent/JPH0521268A/en
Application granted granted Critical
Publication of JP2946844B2 publication Critical patent/JP2946844B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】[Industrial applications]

【0002】本発明はビデオテープレコーダ・液晶テレ
ビ等の電気製品に広く用いられる積層セラミックコンデ
ンサの製造方法に関するものである。
[0002] The present invention relates to a method for manufacturing a multilayer ceramic capacitor widely used for electric appliances such as a video tape recorder and a liquid crystal television.

【0003】[0003]

【従来の技術】近年、電子機器の小型化,高周波化に伴
って、ますますの微少化が望まれており、そういった観
点から積層セラミックコンデンサの需要が高まってい
る。
2. Description of the Related Art In recent years, with miniaturization and higher frequency of electronic devices, further miniaturization has been desired, and from such a viewpoint, demand for multilayer ceramic capacitors has been increasing.

【0004】以下に従来の積層セラミックコンデンサの
構成について説明する。図3は、積層セラミックコンデ
ンサの一部を断面にて示す斜視図である。図3におい
て、11はセラミック誘電体層、12は内部電極、13
は外部電極である。前記内部電極12は、おのおの外部
電極13に接続されている。
[0004] The structure of a conventional multilayer ceramic capacitor will be described below. FIG. 3 is a perspective view showing a cross section of a part of the multilayer ceramic capacitor. In FIG. 3, 11 is a ceramic dielectric layer, 12 is an internal electrode, 13
Is an external electrode. The internal electrodes 12 are each connected to external electrodes 13.

【0005】以下に、前記従来の積層セラミックコンデ
ンサの構成における製造方法について図を用いて説明す
る。図4は製造途中におけるセラミック積層体の構造を
示す図である。
Hereinafter, a method of manufacturing the conventional multilayer ceramic capacitor will be described with reference to the drawings. FIG. 4 is a view showing the structure of the ceramic laminate during the manufacturing.

【0006】まず、チタン酸バリウム等の誘電粉末,有
機バインダーと、可塑剤および有機溶剤とからなるスラ
リーを用いてドクターブレード法によりグリーンシート
を作製する。
First, a green sheet is prepared by a doctor blade method using a slurry comprising a dielectric powder such as barium titanate, an organic binder, a plasticizer and an organic solvent.

【0007】次に、このシートの上にパラジウム,白金
等の貴金属を主成分とした電極ペーストを用いてスクリ
ーン印刷法等により内部電極を形成する。
Next, internal electrodes are formed on the sheet by a screen printing method or the like using an electrode paste containing a noble metal such as palladium or platinum as a main component.

【0008】次に、内部電極を形成したグリーンシート
を内部電極層がセラミック誘電体層を挟んで交互に対向
するように配置して順次積層し、所望の積層数まで積層
を繰り返し、セラミック積層体14を形成する。
Next, the green sheets on which the internal electrodes are formed are arranged so that the internal electrode layers are alternately opposed to each other with the ceramic dielectric layer interposed therebetween, and are sequentially laminated. 14 is formed.

【0009】次に、セラミック積層体14を接着フィル
ム15を備えた金属板16上に接着し、これをセラミッ
ク積層体14の層間の密着性を向上させるために気密性
のある袋17中に保持し、水等の液体を圧力媒体として
静水加圧を行い圧縮成形する。
Next, the ceramic laminate 14 is bonded onto a metal plate 16 provided with an adhesive film 15 and held in an airtight bag 17 to improve the adhesion between the layers of the ceramic laminate 14. Then, hydrostatic pressurization is performed using a liquid such as water as a pressure medium to perform compression molding.

【0010】次に、この成形されたセラミック積層体を
袋17から取り出した後、所望の大きさのチップ状に切
断し、1200〜1400℃で焼成する。こうして得ら
れた焼結体の両端部に、その両端部に現れる内部電極
に、これらの内部電極が電気的に接続されるように銀,
銀−パラジウム等を塗布し、焼付けることによって外部
電極を形成し、積層セラミックコンデンサ製造してい
た。
Next, after taking out the formed ceramic laminate from the bag 17, it is cut into chips of a desired size and fired at 1200 to 1400 ° C. Silver and silver were added to both ends of the sintered body thus obtained, and to internal electrodes appearing at both ends so that these internal electrodes were electrically connected.
External electrodes were formed by coating and baking silver-palladium or the like to manufacture a multilayer ceramic capacitor.

【0011】[0011]

【発明が解決しようとする課題】しかしながら、前記の
製造プロセスにおける静水加圧は、前工程で作製したセ
ラミック積層体を気密性のある袋中に保持し、真空密封
した後に行うために、積層中の誘電体層間に発生した気
泡を残したまま加圧していた。そのため、特にスラリー
中のバインダー量が多い場合には、誘電体層間に残留し
ている気泡を外部に除去できず、焼成後、焼結体にクラ
ックが発生するといった問題点があった。
However, the hydrostatic pressurization in the above-described manufacturing process is performed after the ceramic laminate produced in the preceding step is held in an airtight bag and sealed after vacuum sealing. The pressure was applied while leaving bubbles generated between the dielectric layers. Therefore, particularly when the amount of binder in the slurry is large, bubbles remaining between the dielectric layers cannot be removed to the outside, and there is a problem that cracks occur in the sintered body after firing.

【0012】そこで本発明は、前記問題点に鑑み、積層
セラミックコンデンサの製造工程における静水加圧の際
に、誘電体層間に気泡を残留させることなく、静水加圧
を行うことができ、誘電体層間の密着性の優れた積層セ
ラミックコンデンサの製造方法を提供しようとするもの
である。
In view of the above problems, the present invention can perform hydrostatic pressurization without leaving air bubbles between dielectric layers during hydrostatic pressurization in the manufacturing process of a multilayer ceramic capacitor. An object of the present invention is to provide a method for manufacturing a multilayer ceramic capacitor having excellent interlayer adhesion.

【0013】[0013]

【課題を解決するための手段】前記課題を解決するため
に本発明の積層セラミックコンデンサの製造方法は、内
部電極を形成したグリーンシートを内部電極層がセラミ
ック誘電体層を挟んで交互に対向するように順次積層
し、所望の積層数まで積層を繰り返してセラミック積層
体を得る工程と、所望の大きさのチップ形状に沿って前
記積層体の積層方向に切断溝を設ける工程と、前記積層
セラミック積層体を気密性のある袋中に保持して真空密
封し、静水加圧付与して圧縮成形する工程と、圧縮成形
後、この成形されたセラミック積層体を各チップ状に分
割し、焼成する工程とを有したものである。
In order to solve the above-mentioned problems, a method of manufacturing a multilayer ceramic capacitor according to the present invention is directed to a method of manufacturing a multilayer ceramic capacitor, in which green sheets on which internal electrodes are formed alternately face internal electrode layers with a ceramic dielectric layer interposed therebetween. In order to obtain a ceramic laminate by repeating lamination up to a desired number of laminations, a step of providing cutting grooves in the lamination direction of the laminate along a chip shape of a desired size, and Holding the laminate in an airtight bag, vacuum-sealing, applying hydrostatic pressure and compression molding, and, after compression molding, dividing the molded ceramic laminate into chips and firing. And a process.

【0014】また、本発明の他の方法としては、前記工
程の中で、前記切断溝を設ける工程に換えて、所望の大
きさのチップ形状の一部にそれぞれ少なくとも1つの孔
を有するように前記セラミック積層体の積層方向に孔を
設ける工程とを有するものである。
According to another method of the present invention, at least one hole is formed in a part of a chip having a desired size, instead of the step of providing the cutting groove in the step. Providing a hole in the laminating direction of the ceramic laminate.

【0015】[0015]

【作用】以上のように、接着シートに固定したセラミッ
ク積層体を静水加圧前に予め、所望の大きさのチップ形
状に沿って積層方向に切断溝を設けるか、所望の大きさ
のチップ形状の一部にそれぞれ少なくとも1つの孔を有
するようにセラミック積層体の積層方向に孔を設けるこ
とにより、静水加圧中に、その部分が気泡の逃げ場とな
って、積層チップ内に残留していた気泡が移動し、クラ
ックの発生を抑えることができる。
As described above, before the hydrostatic pressing of the ceramic laminate fixed to the adhesive sheet, a cutting groove is provided in the laminating direction along a chip shape of a desired size, or a chip shape of a desired size is formed. By providing holes in the laminating direction of the ceramic laminate so as to have at least one hole in each of the parts, the part became an escape for air bubbles during hydrostatic pressurization and remained in the laminated chip. The bubbles move, and the occurrence of cracks can be suppressed.

【0016】[0016]

【実施例】【Example】

(実施例1)以下、本発明の一実施例について図面を参
照しながら説明する。
(Embodiment 1) Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

【0017】図1は、本発明の実施例1にかかる製造途
中のセラミック積層体の構造を示したものである。図1
において、1は内部電極を形成したグリーンシートを内
部電極層がセラミック誘電体層を挟んで交互に対向する
ように順次積層し、所望の積層数まで積層を繰り返して
得られたセラミック積層体、2は切断溝、3は接着フィ
ルム、4は金属板、5は気密性のある袋である。
FIG. 1 shows the structure of a ceramic laminate during manufacture according to the first embodiment of the present invention. FIG.
Wherein 1 is a ceramic laminate obtained by repeatedly laminating green sheets on which internal electrodes are formed so that the internal electrode layers alternately face each other with the ceramic dielectric layer interposed therebetween and repeating the lamination to a desired number of laminations. Is a cutting groove, 3 is an adhesive film, 4 is a metal plate, and 5 is an airtight bag.

【0018】以下に、本発明における積層セラミックコ
ンデンサの製造方法の実施例1について図1を用いて説
明する。ここで、従来の技術と同様なセラミック積層体
の作製工程については、詳しい説明を省略する。
Hereinafter, a first embodiment of a method for manufacturing a multilayer ceramic capacitor according to the present invention will be described with reference to FIG. Here, the detailed description of the manufacturing process of the ceramic laminate similar to the conventional technology is omitted.

【0019】まず、チタン酸バリウムを主成分とする高
誘電体材料を用い、バインダーとしてブチラール樹脂,
ケトン樹脂,フェノール樹脂のいずれかを用い、有機溶
剤としてブチルカルビトール,ブチルカルビトールアセ
テートのいずれかを、それぞれ配合し、バインダー量を
変化させ、有効積層数100層,無効積層数上下各10
層、1層当たり誘電体厚み8.0μm、1層当たり電極
厚み2.5μm、総厚み1.2mmからなるセラミック積
層体1を作製し、これを接着フィルム3を設けた金属板
4の上に接着する。
First, a high dielectric material containing barium titanate as a main component is used, butyral resin is used as a binder,
Either butyl carbitol or butyl carbitol acetate is blended as an organic solvent using either a ketone resin or a phenol resin, and the amount of binder is changed.
A ceramic laminate 1 consisting of a layer, a dielectric thickness of 8.0 μm per layer, an electrode thickness of 2.5 μm, a total thickness of 1.2 mm, and a total thickness of 1.2 mm was prepared and placed on a metal plate 4 provided with an adhesive film 3. Glue.

【0020】次に、セラミック積層体1を4mm×2mm角
のチップ形状となるように、刃厚0.5mmの金属刃を用
いて、押切り方式でセラミック積層体1の積層方向に切
断溝2を設ける。このとき、接着フィルム3の一部が切
断されるようにして、セラミック積層体1を完全に切断
される形とする。
Next, using a metal blade having a blade thickness of 0.5 mm, a cutting groove 2 is formed in the laminating direction of the ceramic laminate 1 by using a metal blade having a blade thickness of 0.5 mm so that the ceramic laminate 1 has a chip shape of 4 mm × 2 mm square. Is provided. At this time, the ceramic laminate 1 is completely cut so that a part of the adhesive film 3 is cut.

【0021】次に、切断溝2が導入された金属板付セラ
ミック積層体全体を気密性のある袋5の中に入れ、減圧
密封し、水を圧力媒体として静水加圧が100kg/cm2
で加圧し、圧縮成形する。このとき、静水加圧が250
kg/cm2以上になると、切断溝2が閉じ、チップ同士が
接着する恐れがあるので、静水加圧は50〜250kg/
cm2が適当である。この静水加圧は、積層数やバインダ
ーの配合量等によって適宜決定される。
Next, the entire ceramic laminate with a metal plate into which the cut grooves 2 are introduced is put into an airtight bag 5, sealed under reduced pressure, and subjected to a hydrostatic pressure of 100 kg / cm 2 using water as a pressure medium.
And compression molding. At this time, the hydrostatic pressure is 250
When the pressure is more than kg / cm 2 , the cutting groove 2 is closed and the chips may adhere to each other.
cm 2 is appropriate. The hydrostatic pressure is appropriately determined depending on the number of layers, the amount of the binder, and the like.

【0022】次に、金属板4および接着フィルム3の層
から成形されたセラミック積層体1を分離し、前工程の
切断溝2にあわせてチップ状に分割した後、それを電気
炉内でバインダー除去のため400℃で途中4時間保持
した後、1300℃で2時間焼成する。この焼成後、得
られた焼結体1000個についてクラックの発生数につ
いて調べた結果を(表1)に示している。また、(表
1)には、切断溝以外には本発明と全く同様にして作製
された従来の方法による焼結体1000個と、後述する
本発明の実施例2により得られた焼結体1000個につ
いてのクラックの発生状況を、バインダー量を5〜25
%と変化させた場合について、比較して示している。
Next, the formed ceramic laminate 1 is separated from the metal plate 4 and the layer of the adhesive film 3 and divided into chips according to the cut grooves 2 in the previous step. After removal at 400 ° C. for 4 hours in the middle for removal, baking is performed at 1300 ° C. for 2 hours. After firing, the results of examining the number of cracks generated in 1000 of the obtained sintered bodies are shown in (Table 1). Further, (Table 1) shows that 1000 sintered bodies produced by the conventional method produced in exactly the same manner as the present invention except for the cut grooves, and sintered bodies obtained by Example 2 of the present invention described later. The occurrence of cracks for 1000 pieces was determined by using a binder amount of 5 to 25.
% Is shown in comparison.

【0023】[0023]

【表1】 [Table 1]

【0024】以上の(表1)より明らかなように、この
製造方法のように静水加圧する前に、予めセラミック積
層体に切断溝を設けることで、シート内に残留していた
気泡が除去され、かつ、バインダー量が多くても緻密な
焼結体が得られ、クラックが発生しにくい積層セラミッ
クコンデンサが提供できる。
As is clear from the above (Table 1), before the hydrostatic pressure is applied as in this manufacturing method, by forming a cutting groove in the ceramic laminate in advance, the air bubbles remaining in the sheet are removed. In addition, even if the amount of the binder is large, a dense sintered body can be obtained, and a multilayer ceramic capacitor in which cracks hardly occur can be provided.

【0025】(実施例2)以下、本発明の他の実施例に
ついて図面を参照しながら説明する。
Embodiment 2 Hereinafter, another embodiment of the present invention will be described with reference to the drawings.

【0026】図2は、本発明の実施例2にかかる製造途
中のセラミック積層体の構造を示したものである。図2
において、図1に示す部分と同一の部分については同一
番号を付し、製造方法においても同一の工程については
説明を省略する。
FIG. 2 shows the structure of a ceramic laminate during manufacture according to a second embodiment of the present invention. FIG.
In the figure, the same parts as those shown in FIG. 1 are denoted by the same reference numerals, and the description of the same steps in the manufacturing method will be omitted.

【0027】本実施例2の製造方法は、切断溝を設ける
工程に換えて、4mm×2mm角の大きさのチップ形状の4
隅に孔6を有するようにセラミック積層体1の積層方向
に孔を設ける工程とし、焼成工程に換えて、圧縮成形
後、この成形されたセラミック積層体を4mm×2mm角の
チップ形状となるように、刃厚0.5mmの金属刃を用い
て、押切り方式で各チップ状に分割し、焼成する工程と
する。
In the manufacturing method of the second embodiment, a chip-shaped 4 mm × 2 mm square
In the step of forming holes in the laminating direction of the ceramic laminate 1 so as to have holes 6 at the corners, instead of the firing step, after compression molding, the formed ceramic laminate is formed into a chip shape of 4 mm × 2 mm square. Then, using a metal blade having a blade thickness of 0.5 mm, a step of dividing into chips by a press-cutting method and firing it.

【0028】なお、本実施例2では、セラミック積層体
1を4mm×2mm角のチップ形状の四隅にセラミック積層
体の積層方向に孔6を設ける工程としたが、孔6は4mm
×2mm角のチップ形状の少なくとも1箇所に有すればよ
い。
In the second embodiment, the ceramic laminated body 1 is provided with holes 6 at four corners of a chip shape of 4 mm × 2 mm square in the laminating direction of the ceramic laminated body.
What is necessary is just to have it in at least one location of the chip shape of 2 mm square.

【0029】この製造方法における積層セラミックコン
デンサも、(表1)より明らかなように、予めセラミッ
ク積層体の積層方向に孔を設けることで、シート内に残
留していた気泡が除去され、かつ、バインダー量が多く
ても緻密な焼結体が得られ、クラックが発生しにくい積
層セラミックコンデンサが提供できる。
As is clear from Table 1, by providing holes in the lamination direction of the ceramic laminate, bubbles remaining in the sheet are also removed, as is clear from (Table 1). Even if the amount of the binder is large, a dense sintered body can be obtained, and a multilayer ceramic capacitor in which cracks hardly occur can be provided.

【0030】[0030]

【発明の効果】以上のように本発明は、内部電極を形成
したグリーンシートを内部電極層がセラミック誘電体層
を挟んで交互に対向するように所望の積層数まで積層を
繰り返して得られたセラミック積層体の静水加圧工程に
おいて、前工程で、セラミック積層体を所望の大きさの
チップ形状に沿って各積層方向に切断溝を設けるか、所
望の大きさのチップ形状の一部にそれぞれ少なくとも1
つの孔を設ける工程を有することによって、誘電体層間
に残留している気泡が除去されることにより、誘電体層
間の密着性に優れ、クラックを防止した積層セラミック
コンデンサの製造方法を提供でき、同時に生産性の優れ
た効果を実現できるものである。
As described above, the present invention is obtained by repeatedly laminating green sheets on which internal electrodes are formed up to a desired number of laminations such that the internal electrode layers alternately face each other with the ceramic dielectric layer interposed therebetween. In the hydrostatic pressing step of the ceramic laminate, in the previous step, the ceramic laminate is provided with a cutting groove in each laminating direction along a chip shape of a desired size, or a part of a chip shape of a desired size. At least one
By having the step of providing two holes, bubbles remaining between the dielectric layers are removed, thereby providing a method of manufacturing a multilayer ceramic capacitor having excellent adhesion between the dielectric layers and preventing cracks. It is possible to realize an excellent effect of productivity.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施例における製造途中のセラ
ミック積層体の構造を示した図
FIG. 1 is a diagram showing a structure of a ceramic laminate during manufacturing according to a first embodiment of the present invention.

【図2】本発明の第2の実施例における製造途中のセラ
ミック積層体の構造を示した図
FIG. 2 is a diagram showing a structure of a ceramic laminate during manufacture according to a second embodiment of the present invention.

【図3】積層セラミックコンデンサの一部を断面にて示
す斜視図
FIG. 3 is a perspective view showing a cross section of a part of the multilayer ceramic capacitor.

【図4】従来例における積層セラミック積層体の構造を
示す図
FIG. 4 is a diagram showing a structure of a multilayer ceramic laminate in a conventional example.

【符号の説明】[Explanation of symbols]

1 セラミック積層体 2 切断溝 3 接着フィルム 4 金属板 5 袋 6 孔 DESCRIPTION OF SYMBOLS 1 Ceramic laminated body 2 Cutting groove 3 Adhesive film 4 Metal plate 5 Bag 6 Hole

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】内部電極を形成したグリーンシートを内部
電極層がセラミック誘電体層を挟んで交互に対向するよ
うに順次積層し、所望の積層数まで積層を繰り返してセ
ラミック積層体を得る工程と、所望の大きさのチップ形
状に沿って前記セラミック積層体の積層方向に切断溝を
設ける工程と、前記積層セラミック積層体を気密性のあ
る袋中に保持して真空密封し、静水加圧して圧縮成形す
る工程と、圧縮成形後、この成形されたセラミック積層
体を各チップ状に分割し、焼成する工程とを有する積層
セラミックコンデンサの製造方法。
A step of laminating green sheets on which internal electrodes are formed so that the internal electrode layers are alternately opposed to each other with the ceramic dielectric layer interposed therebetween, and repeating the lamination to a desired number of layers to obtain a ceramic laminate. Providing a cutting groove in the laminating direction of the ceramic laminate along a chip shape of a desired size, holding the laminated ceramic laminate in an airtight bag, vacuum-sealing, and isostatic pressing. A method for manufacturing a multilayer ceramic capacitor, comprising: a step of compression-molding; and a step of, after compression-molding, dividing the formed ceramic laminate into chips and firing.
【請求項2】内部電極を形成したグリーンシートを内部
電極層がセラミック誘電体層を挟んで交互に対向するよ
うに順次積層し、所望の積層数まで積層を繰り返してセ
ラミック積層体を得る工程と、所望の大きさのチップ形
状の一部にそれぞれ少なくとも1つの孔を有するように
前記セラミック積層体の積層方向に孔を設ける工程と、
前記積層セラミック積層体を気密性のある袋中に保持し
て真空密封し、静水加圧して圧縮成形する工程と、圧縮
成形後、この成形されたセラミック積層体を各チップ状
に分割し、焼成する工程とを有する積層セラミックコン
デンサの製造方法。
2. A step of obtaining a ceramic laminate by sequentially laminating green sheets on which internal electrodes are formed so that the internal electrode layers alternately face each other with the ceramic dielectric layer interposed therebetween, and repeating the lamination to a desired number of laminations. Providing holes in the stacking direction of the ceramic laminate so as to have at least one hole in each part of a chip shape having a desired size;
A step of holding the multilayer ceramic laminate in an airtight bag, vacuum-sealing, compressing by hydrostatic pressing, and after compression molding, dividing the molded ceramic laminate into chips and firing. And manufacturing the multilayer ceramic capacitor.
JP16816491A 1991-07-09 1991-07-09 Manufacturing method of multilayer ceramic capacitor Expired - Fee Related JP2946844B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16816491A JP2946844B2 (en) 1991-07-09 1991-07-09 Manufacturing method of multilayer ceramic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16816491A JP2946844B2 (en) 1991-07-09 1991-07-09 Manufacturing method of multilayer ceramic capacitor

Publications (2)

Publication Number Publication Date
JPH0521268A JPH0521268A (en) 1993-01-29
JP2946844B2 true JP2946844B2 (en) 1999-09-06

Family

ID=15862995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16816491A Expired - Fee Related JP2946844B2 (en) 1991-07-09 1991-07-09 Manufacturing method of multilayer ceramic capacitor

Country Status (1)

Country Link
JP (1) JP2946844B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008192696A (en) * 2007-02-01 2008-08-21 Tdk Corp Manufacturing method of multilayer electronic component
JP5373451B2 (en) * 2008-03-31 2013-12-18 日本碍子株式会社 Ceramic chip parts

Also Published As

Publication number Publication date
JPH0521268A (en) 1993-01-29

Similar Documents

Publication Publication Date Title
JP2946844B2 (en) Manufacturing method of multilayer ceramic capacitor
JP2000243650A (en) Multilayer ceramic capacitor and its manufacture
JPH10270283A (en) Manufacture of multilayer ceramic electronic component
JP3042464B2 (en) Manufacturing method of ceramic electronic components
JP2000315618A (en) Manufacture of laminated ceramic electronic parts
JP2756745B2 (en) Manufacturing method of multilayer ceramic capacitor
JPH08181031A (en) Laminated ceramic capacitor
JPH0396207A (en) Manufacture of laminated ceramic electronic part
JP2001217140A (en) Laminated electronic component and manufacturing method thereof
JP3521774B2 (en) Manufacturing method of multilayer ceramic capacitor
JPH05304042A (en) Layered ceramic capacitor and manufacture thereof
JPH09129482A (en) Manufacture of laminated ceramic capacitor
JP3042463B2 (en) Manufacturing method of ceramic electronic components
JP2876811B2 (en) Manufacturing method of multilayer ceramic capacitor
JP2615477B2 (en) Manufacturing method of multilayer ceramic capacitor
JP2615771B2 (en) Green sheets for laminated ceramic capacitors
JPH05315184A (en) Manufacture of laminated ceramic electronic component
JPH08181032A (en) Laminated ceramic capacitor
JPH07297074A (en) Multilayered ceramic electronic component
JPH1126279A (en) Manufacture of laminated ceramic electronic parts
JPS63188926A (en) Manufacture of laminated porcelain capacitor
JP3094769B2 (en) Manufacturing method of multilayer ceramic capacitor
JP2000058361A (en) Manufacture of laminated inductance element
JPS62204513A (en) Manufacture of wound ceramic capacitor
JP2002343676A (en) Manufacturing method for laminated ceramic electronic component

Legal Events

Date Code Title Description
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20070702

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080702

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090702

Year of fee payment: 10

LAPS Cancellation because of no payment of annual fees