JPH0720912Y2 - 半導体基板の回転サセプタ - Google Patents

半導体基板の回転サセプタ

Info

Publication number
JPH0720912Y2
JPH0720912Y2 JP1988062443U JP6244388U JPH0720912Y2 JP H0720912 Y2 JPH0720912 Y2 JP H0720912Y2 JP 1988062443 U JP1988062443 U JP 1988062443U JP 6244388 U JP6244388 U JP 6244388U JP H0720912 Y2 JPH0720912 Y2 JP H0720912Y2
Authority
JP
Japan
Prior art keywords
base
substrate
rotary
susceptor
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988062443U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01165622U (enrdf_load_stackoverflow
Inventor
弘巳 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1988062443U priority Critical patent/JPH0720912Y2/ja
Publication of JPH01165622U publication Critical patent/JPH01165622U/ja
Application granted granted Critical
Publication of JPH0720912Y2 publication Critical patent/JPH0720912Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988062443U 1988-05-12 1988-05-12 半導体基板の回転サセプタ Expired - Lifetime JPH0720912Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988062443U JPH0720912Y2 (ja) 1988-05-12 1988-05-12 半導体基板の回転サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988062443U JPH0720912Y2 (ja) 1988-05-12 1988-05-12 半導体基板の回転サセプタ

Publications (2)

Publication Number Publication Date
JPH01165622U JPH01165622U (enrdf_load_stackoverflow) 1989-11-20
JPH0720912Y2 true JPH0720912Y2 (ja) 1995-05-15

Family

ID=31288052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988062443U Expired - Lifetime JPH0720912Y2 (ja) 1988-05-12 1988-05-12 半導体基板の回転サセプタ

Country Status (1)

Country Link
JP (1) JPH0720912Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021190547A (ja) * 2020-05-29 2021-12-13 昭和電工株式会社 サセプタ、化学気相成長装置及びエピタキシャルウェハの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754803B2 (ja) * 1986-05-15 1995-06-07 富士通株式会社 気相成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021190547A (ja) * 2020-05-29 2021-12-13 昭和電工株式会社 サセプタ、化学気相成長装置及びエピタキシャルウェハの製造方法

Also Published As

Publication number Publication date
JPH01165622U (enrdf_load_stackoverflow) 1989-11-20

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