JPH0720499Y2 - クリ−ンル−ム構造 - Google Patents

クリ−ンル−ム構造

Info

Publication number
JPH0720499Y2
JPH0720499Y2 JP1988108376U JP10837688U JPH0720499Y2 JP H0720499 Y2 JPH0720499 Y2 JP H0720499Y2 JP 1988108376 U JP1988108376 U JP 1988108376U JP 10837688 U JP10837688 U JP 10837688U JP H0720499 Y2 JPH0720499 Y2 JP H0720499Y2
Authority
JP
Japan
Prior art keywords
clean
performance filter
clean room
high performance
clean unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988108376U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230836U (enEXAMPLES
Inventor
要吉 藤田
裕 ▲榊▼間
利男 佐藤
建悦 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1988108376U priority Critical patent/JPH0720499Y2/ja
Publication of JPH0230836U publication Critical patent/JPH0230836U/ja
Application granted granted Critical
Publication of JPH0720499Y2 publication Critical patent/JPH0720499Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1988108376U 1988-08-18 1988-08-18 クリ−ンル−ム構造 Expired - Lifetime JPH0720499Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988108376U JPH0720499Y2 (ja) 1988-08-18 1988-08-18 クリ−ンル−ム構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988108376U JPH0720499Y2 (ja) 1988-08-18 1988-08-18 クリ−ンル−ム構造

Publications (2)

Publication Number Publication Date
JPH0230836U JPH0230836U (enEXAMPLES) 1990-02-27
JPH0720499Y2 true JPH0720499Y2 (ja) 1995-05-15

Family

ID=31343644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988108376U Expired - Lifetime JPH0720499Y2 (ja) 1988-08-18 1988-08-18 クリ−ンル−ム構造

Country Status (1)

Country Link
JP (1) JPH0720499Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004114378A1 (ja) * 2003-06-19 2004-12-29 Hokkaido Technology Licensing Office Co., Ltd. クリーンユニット、クリーンユニットシステム、機能ユニット、機能ユニットシステム、材料処理方法、素子製造方法、細胞系育成方法および植物体育成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155455A (ja) * 1985-12-27 1987-07-10 Hitachi Plant Eng & Constr Co Ltd クリ−ンル−ム

Also Published As

Publication number Publication date
JPH0230836U (enEXAMPLES) 1990-02-27

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