JPH0720395Y2 - 真空排気装置 - Google Patents
真空排気装置Info
- Publication number
- JPH0720395Y2 JPH0720395Y2 JP1988013916U JP1391688U JPH0720395Y2 JP H0720395 Y2 JPH0720395 Y2 JP H0720395Y2 JP 1988013916 U JP1988013916 U JP 1988013916U JP 1391688 U JP1391688 U JP 1391688U JP H0720395 Y2 JPH0720395 Y2 JP H0720395Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- pump
- purge gas
- magnetic bearing
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988013916U JPH0720395Y2 (ja) | 1988-02-03 | 1988-02-03 | 真空排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988013916U JPH0720395Y2 (ja) | 1988-02-03 | 1988-02-03 | 真空排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01118190U JPH01118190U (pt) | 1989-08-09 |
| JPH0720395Y2 true JPH0720395Y2 (ja) | 1995-05-15 |
Family
ID=31224637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988013916U Expired - Lifetime JPH0720395Y2 (ja) | 1988-02-03 | 1988-02-03 | 真空排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0720395Y2 (pt) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2584881B (en) * | 2019-06-19 | 2022-01-05 | Edwards Vacuum Llc | Multiple vacuum chamber exhaust system and method of evacuating multiple chambers |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60110685U (ja) * | 1983-12-28 | 1985-07-26 | 日本電子株式会社 | タ−ボ分子ポンプを用いた排気系 |
| JPS60163663U (ja) * | 1984-04-09 | 1985-10-30 | 株式会社日立製作所 | 電子顕微鏡等の真空排気装置 |
| JPS61277896A (ja) * | 1985-05-31 | 1986-12-08 | Shimadzu Corp | タ−ボ分子ポンプの磁気軸受装置 |
| JPS62168992A (ja) * | 1985-11-27 | 1987-07-25 | Shimadzu Corp | タ−ボ分子ポンプの腐食性ガス排気方法 |
-
1988
- 1988-02-03 JP JP1988013916U patent/JPH0720395Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01118190U (pt) | 1989-08-09 |
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