JPH07193177A - Device for cutting lead frame for semiconductor device - Google Patents

Device for cutting lead frame for semiconductor device

Info

Publication number
JPH07193177A
JPH07193177A JP33033793A JP33033793A JPH07193177A JP H07193177 A JPH07193177 A JP H07193177A JP 33033793 A JP33033793 A JP 33033793A JP 33033793 A JP33033793 A JP 33033793A JP H07193177 A JPH07193177 A JP H07193177A
Authority
JP
Japan
Prior art keywords
lead frame
resin
suction pad
resin outer
die
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33033793A
Other languages
Japanese (ja)
Other versions
JP2674946B2 (en
Inventor
Atsushi Sasaki
淳 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Yamagata Ltd
Original Assignee
NEC Yamagata Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Yamagata Ltd filed Critical NEC Yamagata Ltd
Priority to JP33033793A priority Critical patent/JP2674946B2/en
Publication of JPH07193177A publication Critical patent/JPH07193177A/en
Application granted granted Critical
Publication of JP2674946B2 publication Critical patent/JP2674946B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Details Of Cutting Devices (AREA)
  • Feeding Of Workpieces (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To provide an apparatus for separating plastic molded devices from a lead frame and smoothly transferring them to the next stage even if dust appears from the punching die or devices have resin flashes. CONSTITUTION:An apparatus for removing plastic molded devices from the lead-frame comprises a punching die 1 having an opening 11 for receiving a suction pad 9 in its upper die, a head 8 for picking up a molded package 3 using the suction pad to transfer it a predetermined distance, a carrier 24 that supports sliding rails 16 to which molded packages are transferred by the head, and a constant feed mechanism 23 for positioning a retainer provided with recesses 18 that receive molded packages and enclose their lower halves.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、長尺のリードフレーム
に複数列に多数並べ搭載された半導体装置の樹脂外郭体
とリードフレームとの連結部を切断して個々の半導体装
置に分離し、次工程の製造装置のステージに分離された
半導体装置を供給する半導体装置におけるリードフレー
ム切離し装置(以下単にリードフレーム切離し装置と記
す。)に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention separates individual semiconductor devices by cutting a connecting portion between a resin outer shell of a semiconductor device mounted on a long lead frame in a plurality of rows and a lead frame. The present invention relates to a lead frame separating device (hereinafter simply referred to as a lead frame separating device) in a semiconductor device that supplies a semiconductor device separated to a stage of a manufacturing apparatus in a next step.

【0002】[0002]

【従来の技術】半導体基板に集積回路を形成済みの半導
体チップを樹脂封止して半導体装置に組立る自動化ライ
ン後の仕上げ工程には、リードフレームのタイバーおよ
び外部リードの切離し切断およびリードフレーム切離し
切断および樹脂ばり除去金型などを含む自動化設備が配
置されていた。また、これら自動化設備を有機的に接続
する搬送装置もそれぞれに配置されている。さらに、こ
れら自動化設備には隣接する自動化設備あるいは搬送装
置にワークを供給および排出を行なう一種の搬送装置で
ある受渡し装置が付設されていた。
2. Description of the Related Art In a finishing process after an automated line in which a semiconductor chip having an integrated circuit formed on a semiconductor substrate is resin-sealed and assembled into a semiconductor device, a lead frame tie bar and an external lead are cut off and a lead frame is cut off. Automated equipment including cutting and resin burr removal dies was located. In addition, a transport device that organically connects these automated facilities is also arranged in each. Further, a delivery device, which is a kind of transfer device for supplying and discharging a work to an adjacent automation device or a transfer device, is attached to these automation devices.

【0003】図2は半導体装置の樹脂外郭体を搭載した
リードフレームを示す図、図3は従来のリードフレーム
切離し装置の一例を説明するための装置の構成を示す図
である。従来、この種のリードフレーム切離し装置は、
例えば、図3に示すように、図2の半導体装置の樹脂外
郭体3とリードフレーム2を分離するために吊りリード
2aを切断する切断金型と、分離された半導体装置の樹
脂外郭体3を一方向に送る排出機構である供給部7とを
備えていた。
FIG. 2 is a diagram showing a lead frame in which a resin outer shell of a semiconductor device is mounted, and FIG. 3 is a diagram showing a configuration of the device for explaining an example of a conventional lead frame separating device. Conventionally, this type of lead frame separating device is
For example, as shown in FIG. 3, a cutting die for cutting the suspension leads 2a to separate the resin outer shell 3 and the lead frame 2 of the semiconductor device of FIG. 2 and the resin outer shell 3 of the separated semiconductor device are provided. It was provided with the supply part 7 which is a discharging mechanism for sending in one direction.

【0004】この切断金型による吊りリード2aの切断
は、上型5のクランプ5aと下型6で送られてくるリー
ドフレーム2の樹脂外郭体3を押え保持し、上型5を下
降させそれに伴ないクランプ5aの切刃をもつ凹みにポ
ンチ6aを挿入させ吊りリード2aを切断していた。ま
た、切断分離された樹脂外郭体3は、図4(b)に示す
ように、下型6の供給部7の台にある排出口21aの一
方向からプッシャー4によって押されチュータ21に挿
入される。
The cutting of the suspension lead 2a by the cutting die holds the resin outer shell 3 of the lead frame 2 sent by the clamp 5a of the upper die 5 and the lower die 6 and lowers the upper die 5 to Accordingly, the punch 6a was inserted into the recess having the cutting edge of the clamp 5a to cut the suspension lead 2a. As shown in FIG. 4B, the resin shell 3 that has been cut and separated is pushed by the pusher 4 from one direction of the discharge port 21a on the base of the supply unit 7 of the lower mold 6 and inserted into the tutor 21. It

【0005】そして、このような動作を連続的に行なわ
れチュータ21に樹脂外郭体3が次々に送られ、樹脂外
郭体3自身が押しあいながらチュータ21の出口から押
し出れ次の設備のステージに供給されていた。
Then, such an operation is continuously carried out, the resin outer shell 3 is sent to the tutor 21 one after another, and the resin outer shell 3 itself pushes out from the outlet of the tutor 21 to the stage of the next equipment. Was being supplied.

【0006】[0006]

【発明が解決しようとする課題】上述した従来のリード
フレーム切離し装置では、切断金型からの切断屑がチュ
ータの排出口に入り込み樹脂外郭体の送りに著しく阻害
する問題がある。この対策としてチュータの排出口を拡
げても、樹脂外郭体に付着する樹脂ばりが互いに押し合
うときに衝突し樹脂外郭体自身を傾けさせ、排出口壁に
樹脂外郭体の樹脂ばりが引掛かり排出口が詰ってしまう
問題がしばしば起きていた。また、樹脂外郭体が押され
チュータ内を円滑に移動していても、チュータから排出
された樹脂外郭体の停止位置が一定せず、次の設備への
供給が円滑に行かないという問題も含んでいた。
In the above-mentioned conventional lead frame separating device, there is a problem that cutting wastes from the cutting die enter the discharge port of the tutor and significantly hinder the feeding of the resin outer shell. As a measure against this, even if the outlet of the tutor is widened, the resin burrs attached to the resin shell collide when they push against each other and tilt the resin shell itself, causing the resin burrs of the resin shell to be caught on the outlet wall and discharged. There was often a problem of clogging the exit. Also, even if the resin outer shell is pushed and smoothly moving inside the tutor, the stop position of the resin outer shell discharged from the tutor is not constant, and the problem that the supply to the next equipment does not occur smoothly is also included. I was out.

【0007】従って、本発明の目的は、切断金型から切
屑が発生してもあるいは樹脂外郭体に樹脂ばりが残って
いても半導体装置の樹脂外郭体をリードフレームより分
離し円滑に次工程の設備に供給することのできるリード
フレーム切離し装置を提供することである。
Therefore, an object of the present invention is to separate the resin outer shell of the semiconductor device from the lead frame and smoothly carry out the next process even if chips are generated from the cutting die or the resin burrs remain in the resin outer shell. An object of the present invention is to provide a lead frame separating device that can be supplied to equipment.

【0008】[0008]

【課題を解決するための手段】本発明の特徴は、複数の
半導体装置の樹脂外郭体を並べ搭載する長尺のリードフ
レームを一方向から送り込み前記樹脂外郭体と該リード
フレームとの連結部材を切断する切断金型と、この切断
金型の上型の開口に露呈する該リードフレームより切離
された前記樹脂外郭体の平坦な面を吸着する吸着パッド
と、この吸着パットを上下に移動し前記開口に挿入し前
記樹脂外郭体を拾い該金型より離間した所定位置に移動
する搬送ヘッドと、この所定位置に移動した該搬送ヘッ
ドの該吸着パッドから離脱され該樹脂外郭体が移載され
る摺動レールの複数本を一方向に並べる搬送台と、該摺
動レールに乗せられた該樹脂外郭体の下半分を包み保持
する保持具を具備し前記摺動レール上を滑らせ一定距離
だけ移動させる定寸送り機構とを備える半導体装置にお
けるリードフレーム切離し装置である。
A feature of the present invention is that a long lead frame on which resin outer shells of a plurality of semiconductor devices are mounted side by side is fed from one direction, and a connecting member for connecting the resin outer shells and the lead frames is provided. A cutting die for cutting, an adsorption pad for adsorbing a flat surface of the resin outer shell separated from the lead frame exposed at the opening of the upper die of the cutting die, and an adsorption pad for moving the adsorption pad up and down. A transfer head that is inserted into the opening and picks up the resin shell and moves to a predetermined position separated from the mold; and a transfer head that is separated from the suction pad of the transfer head that has moved to the predetermined position and transfers the resin shell. And a holder for wrapping and holding a lower half of the resin outer casing mounted on the sliding rail, and a carrier for arranging a plurality of sliding rails arranged in one direction. Just move A lead frame disconnect device in the semiconductor device and a feed mechanism.

【0009】[0009]

【実施例】次に、本発明について図面を参照して説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings.

【0010】図1は本発明の一実施例を示すリードフレ
ーム切離し装置の部分破断側面図である。このリードフ
レーム切離し装置は、図1に示すように、複数の半導体
装置の樹脂外郭体3を並べ搭載する図2の長尺のリード
フレーム2を一方向から送り込み樹脂外郭体3とリード
フレーム2との連結部である吊りリード2aを切断する
切断金型1と、この切断金型1の上型5bの開口11に
露呈するリードフレーム2より切離された樹脂外郭体3
の平坦な面を吸着する吸着パッド9と、この吸着パット
9を上下に移動し開口11に挿入し樹脂外郭体3を拾い
切断金型1より離間した所定位置に移動する搬送ヘッド
8と、この所定位置に移動した搬送ヘッド8の吸着パッ
ド9から離脱され樹脂外郭体3が移載される摺動レール
16の複数本を一方向に並べる搬送台24と、摺動レー
ル16に乗せられた樹脂外郭体3の下半分を包み保持す
る保持具17を具備し摺動レール16上を滑らせ一定距
離だけ移動させる定寸送り機構23とを備えている。
FIG. 1 is a partially cutaway side view of a lead frame separating device according to an embodiment of the present invention. As shown in FIG. 1, this lead frame separating device feeds the long lead frame 2 of FIG. 2 in which the resin outer shells 3 of a plurality of semiconductor devices are mounted side by side from one direction, and the resin outer shell 3 and the lead frame 2 are connected to each other. Cutting die 1 for cutting the suspension lead 2a which is a connecting portion of the resin, and the resin outer shell 3 separated from the lead frame 2 exposed in the opening 11 of the upper die 5b of the cutting die 1.
, A suction pad 9 for sucking the flat surface of the suction pad 9, a transport head 8 for moving the suction pad 9 up and down, inserting it into the opening 11, picking up the resin outer shell 3 and moving it to a predetermined position apart from the cutting die 1. A carrier 24 for arranging a plurality of sliding rails 16 that are separated from the suction pad 9 of the carrying head 8 that has been moved to a predetermined position and on which the resin outer shell 3 is transferred in one direction, and a resin placed on the sliding rails 16. A holding tool 17 for wrapping and holding the lower half of the outer shell 3 is provided, and a fixed-size feed mechanism 23 for sliding on the slide rail 16 and moving a fixed distance is provided.

【0011】切断金型は上型5bと下型6aと構成さ
れ、ガイドポストの案内で油圧あるいは空圧により型締
め型開きが行なわれる。上型5bには吸着パッド9が挿
入される開口11が設けられており、この開口11より
露呈した分離された樹脂外郭体3を拾えるようになって
いる。また、上型5bにはダイ12が、下型6aにはポ
ンチ14がそれぞれ取付けられ、型締め動作によりスプ
リングの反発力によりガイド15と溝13とで案内され
たポンチ14はダイ12とはめ合うことによりリードフ
レーム2の吊りリードは切断される。なお、ポンチ14
の外側にはピンが埋め込まれており、このピンはリード
フレーム2の1こまの位置決めを行なうものである。
The cutting die is composed of an upper die 5b and a lower die 6a, and the die is opened by hydraulic pressure or air pressure by the guide of the guide post. The upper mold 5b is provided with an opening 11 into which the suction pad 9 is inserted, and the separated resin outer shell 3 exposed from the opening 11 can be picked up. Further, the die 12 is attached to the upper die 5b, and the punch 14 is attached to the lower die 6a. The punch 14 guided by the guide 15 and the groove 13 by the repulsive force of the spring by the die clamping operation is fitted to the die 12. As a result, the suspension lead of the lead frame 2 is cut. In addition, punch 14
A pin is embedded in the outer side of the pin, and this pin positions one frame of the lead frame 2.

【0012】吸着パッド9を具備する搬送ヘッド8は走
行レールに摺動して移動できる構造であり、さらに吸着
パッド9を上下動させる昇降機構を備えている。また、
吸着パッド9の先端には樹脂外郭体3の平坦面を真空吸
着する穴が設けられている。ここで、吸着パッド9の先
端は平坦な面より望ましくは浅い窪みをもたせることで
ある。この浅い窪みをもたせることは、樹脂外郭体3を
吸着するときに樹脂外郭体3がこの窪みに案内され位置
および向きを規制するからである。また、窪みを浅くす
ることは、樹脂外郭体3の側面より突出する外部リード
に吸着パッドが接触しないように図ることである。さら
に、この二つの吸着パッド9の間隔は、リードフレーム
2に搭載された樹脂外郭体3の間隔に応じて調節できる
機構を設けることが望ましい。
The transport head 8 having the suction pad 9 has a structure which can be slidably moved on a traveling rail, and further has an elevating mechanism for moving the suction pad 9 up and down. Also,
A hole for vacuum-sucking the flat surface of the resin shell 3 is provided at the tip of the suction pad 9. Here, the tip of the suction pad 9 has a recess that is preferably shallower than a flat surface. The reason why the shallow recess is provided is that the resin outer shell 3 is guided by the recess when the resin outer shell 3 is sucked, and the position and the direction of the resin outer shell 3 are regulated. Further, making the depression shallow means that the suction pad does not come into contact with the external lead protruding from the side surface of the resin outer shell 3. Further, it is desirable to provide a mechanism capable of adjusting the distance between the two suction pads 9 according to the distance between the resin outer shells 3 mounted on the lead frame 2.

【0013】搬送台24には複数本の摺動レール16が
並べ配置されてある。そして、これら摺動レール16は
樹脂外郭体3の幅と同じ程度、例えば、両側のリードの
折れ曲った位置での間隔で配置されこのリードを支えて
摺動するようにする。従って、リードフレーム2に搭載
されている樹脂外郭体が二列であれば、4本の摺動レー
ル16が必要になる。
A plurality of slide rails 16 are arranged side by side on the carriage 24. The sliding rails 16 are arranged at the same extent as the width of the resin outer shell 3, for example, at intervals at the bent positions of the leads on both sides to support and slide the leads. Therefore, if the resin shell mounted on the lead frame 2 has two rows, four sliding rails 16 are required.

【0014】一方、定寸送り機構23は、レール22を
摺動する移動台20と、この移動台20に取付けられた
エアシリンダ23aと、このエアシリンダ23aのピス
トンロッドエンドに取付けられた保持具17とで構成さ
れている。そして、この保持具17は摺動レール16の
間にあって、吸着パッド9から摺動レール16に移載さ
れた樹脂外郭体3の下半分を包み保持する窪み18をも
っている。また、この保持具17は、吸着パッド9の降
下のときの押え力を受けて樹脂外郭体3の位置ずれ起さ
ないように窪み18に樹脂外郭体3を確実に入り込むよ
うにしてある。
On the other hand, the constant-size feed mechanism 23 includes a movable table 20 that slides on the rail 22, an air cylinder 23a attached to the movable table 20, and a holder attached to the piston rod end of the air cylinder 23a. It is composed of 17 and. The holder 17 is provided between the slide rails 16 and has a recess 18 that encloses and holds the lower half of the resin outer shell 3 transferred from the suction pad 9 to the slide rail 16. Further, the holder 17 is configured to surely insert the resin outer shell 3 into the recess 18 so that the resin outer shell 3 is not displaced due to the pressing force when the suction pad 9 is lowered.

【0015】また、吸着パッドで樹脂外郭体を拾い搬送
途中で、切屑などは落下し、搬送での問題は起さないも
のの、必要に応じて切断金型1の上型の開口11の周縁
に沿って空気吹出し口を配置するノズル25を備えてお
くことが望ましい。このノズル25を設けることにより
樹脂外郭体3に向けて空気を吹き付け切屑を飛散させ、
樹脂外郭体3への切屑の付着や金型あるいはリード部へ
の付着を完全に防止することができる。
Further, while the resin outer shell is picked up by the suction pad and chips and the like fall during the transportation, no problems occur in the transportation, but if necessary, the chips may be attached to the periphery of the opening 11 of the upper die of the cutting die 1. It is desirable to have a nozzle 25 along which the air outlet is arranged. By providing this nozzle 25, air is blown toward the resin outer shell 3 to scatter chips,
It is possible to completely prevent the attachment of chips to the resin outer shell 3 and the die or the lead portion.

【0016】次に、このリードフレーム切離し装置の動
作を説明する。まず、図2のリードフレーム2を切断金
型1のガイドを通じ送り込む、金型開きによってリード
フレーム2の一こまが送られピンによって2つの樹脂外
郭体3がポンチ14の上に位置決めされる。次に、型締
めにより吊りリード2aが切断され樹脂外郭体3は分離
される。
Next, the operation of this lead frame separating device will be described. First, the lead frame 2 shown in FIG. 2 is fed through the guide of the cutting die 1. When the die is opened, one frame of the lead frame 2 is fed and the two resin outer shells 3 are positioned on the punch 14 by the pins. Next, the suspension lead 2a is cut by mold clamping, and the resin outer shell 3 is separated.

【0017】次に、型開きの後、搬送ヘッド8を下降さ
せ開口11にヘッド本体19より突出する吸着パッド9
を挿入し樹脂外郭体3を吸着する。そして、搬送ヘッド
8を上昇させ吸着パッド9で樹脂外郭体3を拾い上げ
る。次に、搬送ヘッド8は走行レール10を摺動し搬送
台24の所定の位置に位置決めされる。そして、搬送ヘ
ッド8が下降し吸着パッド9から摺動レール16に樹脂
外郭体3を移載すると同時にエアシリンダ23aの作動
により保持具17が上昇し、その窪み18に樹脂外郭体
3を入れ込む。
Next, after the mold is opened, the transport head 8 is lowered and the suction pad 9 protruding from the head main body 19 into the opening 11.
And the resin outer shell 3 is adsorbed. Then, the transport head 8 is raised and the resin outer shell 3 is picked up by the suction pad 9. Next, the transport head 8 slides on the traveling rail 10 and is positioned at a predetermined position on the transport base 24. Then, the transport head 8 descends to transfer the resin shell 3 from the suction pad 9 to the slide rail 16, and at the same time, the holder 17 rises due to the operation of the air cylinder 23a, and the resin shell 3 is inserted into the recess 18. .

【0018】保持具17の樹脂外郭体3の保持が確実な
ものと確認したら、搬送ヘッド8は上昇し走行レール1
0を摺動し元位置に戻る。この間、移動台20はレール
22上を走行し次工程の設備が指定する位置で止まり保
持具17の樹脂外郭体3を位置決めし動作を完了する。
このような一連の動作を繰返して行ない、複数列の樹脂
外郭体3を互いに引き離した状態で所定の位置に順次送
り次工程設備の指定ステージに供給する。
When it is confirmed that the resin shell 3 of the holder 17 is securely held, the carrying head 8 is raised and the traveling rail 1 is moved.
Slide 0 to return to the original position. During this time, the movable table 20 travels on the rails 22 and stops at the position designated by the equipment for the next step to position the resin outer shell 3 of the holder 17 and complete the operation.
By repeating such a series of operations, the resin outer shells 3 in a plurality of columns are sequentially sent to a predetermined position in a state of being separated from each other and supplied to the designated stage of the next process equipment.

【0019】ちなみに、この装置を用いて半導体装置の
樹脂外郭体を分離し次工程の設備へ供給したところ、従
来起きていたジャミングによる送り事故の発生回数が皆
無となり、さらに次工程の設備への供給での従来のトラ
ブルは完全に解消した。
By the way, when the resin shell of the semiconductor device was separated and supplied to the equipment of the next process by using this device, the number of occurrences of the feeding accident due to the jamming that had occurred in the past was eliminated, and the equipment of the next process was further removed. Conventional problems with supply have been completely resolved.

【0020】なお、この実施例で説明した切断型の機
構、搬送ヘッドの送り機構および定寸送り装置の細部の
駆動機構は図面に示した機構に限定するものではない。
The cutting-type mechanism, the feeding mechanism of the conveying head, and the detailed driving mechanism of the constant-size feeding device described in this embodiment are not limited to those shown in the drawings.

【0021】[0021]

【発明の効果】以上説明したように本発明は、半導体装
置の樹脂外郭体とリードフレームとを連結部材を切断し
分離する切断金型の上型に樹脂外郭体を露呈する開口を
設け、この開口に吸着パッドを挿入し樹脂外郭体を拾い
上げ切断金型から所定距離だけ離間する位置に送る搬送
ヘッドと、この搬送ヘッドから樹脂外郭体が移載される
搬送台と、この搬送台に置かれた樹脂外郭体の下半分を
包み保持して次工程設備の指定位置に位置決めする定寸
送り機構とを設けることによって、切屑が発生しても樹
脂外郭体に付着することなく落下させることができ、か
つ、2つの樹脂外郭体を互いに離間させた状態で切断金
型より取出し周囲に拘束する壁などが無い所定の位置に
搬送することができることから、従来起きていた切屑の
付着や樹脂体同志の押し合いによる搬送事故が皆無とな
り、切断分離された半導体装置の樹脂外郭体を極めて円
滑に次工程の指定位置に位置決めできるという効果があ
る。
As described above, according to the present invention, the opening for exposing the resin shell is provided in the upper die of the cutting die for cutting the connecting member by separating the resin shell of the semiconductor device and the lead frame. Insert a suction pad into the opening and pick up the resin shell and send it to a position that is separated from the cutting mold by a predetermined distance, a transfer stand to which the resin shell is transferred from this transfer head, and a transfer stand placed on this transfer stand. By wrapping and holding the lower half of the resin shell and positioning it at the designated position of the next process equipment, even if chips are generated, it can be dropped without adhering to the resin shell. In addition, since the two resin outer shells can be separated from each other and can be conveyed to a predetermined position where there is no wall or the like to be taken out from the cutting die and constrained to the surroundings, adhesion of chips and resin bodies that have occurred conventionally Transport accidents jostling becomes nil, the resin outer body of the cutting isolated semiconductor device very smoothly there is an effect that can be positioned at a specified position in the next step.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示すリードフレーム切離し
装置の部分破断側面図である。
FIG. 1 is a partially cutaway side view of a lead frame separating device according to an embodiment of the present invention.

【図2】半導体装置の樹脂外郭体を搭載したリードフレ
ームを示す図である。
FIG. 2 is a diagram showing a lead frame on which a resin outer shell of a semiconductor device is mounted.

【図3】従来のリードフレーム切離し装置の一例を説明
するための装置の構成を示す図である。
FIG. 3 is a diagram showing a configuration of a device for explaining an example of a conventional lead frame separating device.

【符号の説明】[Explanation of symbols]

1 切断金型 2 リードフレーム 2a 吊りリード 3 樹脂外郭体 4 プッシャー 5,5b 上型 5a クランプ 6,6a 下型 7 供給部 8 搬送ヘッド 9 吸着パッド 10 走行レール 11 開口 12 ダイ 13 溝 14 ポンチ 15 ガイド 16 摺動レール 17 保持具 18 窪み 19 ヘッド本体 20 移動台 21 チュータ 21a 排出口 22 レール 23 定寸送り機構 23a エアシリンダ 24 搬送台 25 ノズル 1 Cutting Die 2 Lead Frame 2a Suspended Lead 3 Resin Outer Body 4 Pusher 5,5b Upper Die 5a Clamp 6,6a Lower Die 7 Feeder 8 Conveying Head 9 Adsorption Pad 10 Traveling Rail 11 Opening 12 Die 13 Groove 14 Punch 15 Guide 16 Sliding Rail 17 Holding Tool 18 Dimple 19 Head Main Body 20 Moving Stand 21 Tutor 21a Discharge Port 22 Rail 23 Fixed Size Feeding Mechanism 23a Air Cylinder 24 Conveyor Stand 25 Nozzle

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 複数の半導体装置の樹脂外郭体を並べ搭
載する長尺のリードフレームを一方向から送り込み前記
樹脂外郭体と該リードフレームとの連結部材を切断する
切断金型と、この切断金型の上型の開口に露呈する該リ
ードフレームより切離された前記樹脂外郭体の平坦な面
を吸着する吸着パッドと、この吸着パットを上下に移動
し前記開口に挿入し前記樹脂外郭体を拾い該金型より離
間した所定位置に移動する搬送ヘッドと、この所定位置
に移動した該搬送ヘッドの該吸着パッドから離脱され該
樹脂外郭体が移載される摺動レールの複数本を一方向に
並べる搬送台と、該摺動レールに乗せられた該樹脂外郭
体の下半分を包み保持する保持具を具備し前記摺動レー
ル上を滑らせ一定距離だけ移動させる定寸送り機構とを
備えることを特徴とする半導体装置におけるリードフレ
ーム切離し装置。
1. A cutting die for feeding a long lead frame in which resin outer shells of a plurality of semiconductor devices are mounted side by side from one direction to cut a connecting member between the resin outer shell and the lead frame, and a cutting die. A suction pad for adsorbing the flat surface of the resin shell separated from the lead frame exposed to the opening of the upper die of the die, and a suction pad which is moved up and down to be inserted into the opening to form the resin shell. A transport head that moves to a predetermined position separated from the mold and a plurality of sliding rails that are detached from the suction pad of the transport head that has moved to the predetermined position and on which the resin shell is transferred And a fixed-length feed mechanism that slides on the slide rail and moves a fixed distance, including a holder for wrapping and holding the lower half of the resin outer casing placed on the slide rail. Characterized by Lead frame separating device for semiconductor device.
【請求項2】 前記切断金型の該開口の周縁に沿って空
気吹出し口を配置するノズルを備えることを特徴とする
請求項1記載の半導体装置におけるリードフレーム切離
し装置。
2. The lead frame separating device in a semiconductor device according to claim 1, further comprising a nozzle having an air outlet arranged along a peripheral edge of the opening of the cutting die.
JP33033793A 1993-12-27 1993-12-27 Lead frame separation device for semiconductor device Expired - Fee Related JP2674946B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33033793A JP2674946B2 (en) 1993-12-27 1993-12-27 Lead frame separation device for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33033793A JP2674946B2 (en) 1993-12-27 1993-12-27 Lead frame separation device for semiconductor device

Publications (2)

Publication Number Publication Date
JPH07193177A true JPH07193177A (en) 1995-07-28
JP2674946B2 JP2674946B2 (en) 1997-11-12

Family

ID=18231498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33033793A Expired - Fee Related JP2674946B2 (en) 1993-12-27 1993-12-27 Lead frame separation device for semiconductor device

Country Status (1)

Country Link
JP (1) JP2674946B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416568B1 (en) * 2000-12-15 2004-02-05 주식회사선양테크 punching machine
KR100439955B1 (en) * 2002-09-02 2004-07-14 한미반도체 주식회사 Guide apparatus of semiconductor package
JP2009136978A (en) * 2007-12-07 2009-06-25 Omori Mach Co Ltd Push cutter for sheet-like article

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416568B1 (en) * 2000-12-15 2004-02-05 주식회사선양테크 punching machine
KR100439955B1 (en) * 2002-09-02 2004-07-14 한미반도체 주식회사 Guide apparatus of semiconductor package
JP2009136978A (en) * 2007-12-07 2009-06-25 Omori Mach Co Ltd Push cutter for sheet-like article

Also Published As

Publication number Publication date
JP2674946B2 (en) 1997-11-12

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