JPH07192630A - Gas discharge display panel and its protective film forming method - Google Patents
Gas discharge display panel and its protective film forming methodInfo
- Publication number
- JPH07192630A JPH07192630A JP5331334A JP33133493A JPH07192630A JP H07192630 A JPH07192630 A JP H07192630A JP 5331334 A JP5331334 A JP 5331334A JP 33133493 A JP33133493 A JP 33133493A JP H07192630 A JPH07192630 A JP H07192630A
- Authority
- JP
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- Prior art keywords
- protective film
- particles
- gas discharge
- display panel
- discharge display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Landscapes
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- Gas-Filled Discharge Tubes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明はガス放電表示パネル特
に交流型のガス放電表示パネルとその保護膜の形成方法
とに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas discharge display panel, and more particularly to an AC type gas discharge display panel and a method for forming a protective film therefor.
【０００２】[0002]
【従来の技術】近年、パネル厚を薄くしかつ大面積な表
示画面を形成できるガス放電表示パネルが注目されてい
る。ガス放電表示パネルは、その駆動方法に応じて直流
型のものと交流型のものとに大別される。交流型のひと
つとして、例えば文献１：テレビジョン学会技術報告
ＩＤＹ９３−２（１９９３年１月）に開示されている面
放電型ガス放電表示パネルがある。2. Description of the Related Art In recent years, a gas discharge display panel which has a thin panel and is capable of forming a large-area display screen has received attention. The gas discharge display panel is roughly classified into a direct current type and an alternating current type according to its driving method. As one of the alternating current type, for example, Reference 1: Technical Report of Television Society
There is a surface discharge type gas discharge display panel disclosed in IDY93-2 (January 1993).
【０００３】文献１のガス放電表示パネルにあっては、
二本のサステイン電極を一対として複数対のサステイン
電極を一方の基板上に並列配置し、これらサステイン電
極上に順次に壁電荷蓄積用誘電体及び保護膜を設ける。
他方の基板上には、複数のアドレス電極を並列配置し、
各アドレス電極の間に隔壁を設けると共に各アドレス電
極上に蛍光体層を設ける。そして一方及び他方の基板の
電極形成面を向き合わせた状態で、これら基板を封着
し、封着した基板間に放電ガスを封入する。保護膜は、
壁電荷蓄積用誘電体をガス放電による損傷から守りこれ
によりパネル寿命を長くするためのものである。パネル
の長寿命化のみならず放電開始電圧の低減にも適してい
るＭｇＯ膜を保護膜として用いる。In the gas discharge display panel of Document 1,
A plurality of pairs of sustain electrodes are arranged in parallel on one substrate with two sustain electrodes as a pair, and a wall charge storage dielectric and a protective film are sequentially provided on these sustain electrodes.
A plurality of address electrodes are arranged in parallel on the other substrate,
A partition is provided between each address electrode and a phosphor layer is provided on each address electrode. Then, the substrates are sealed with the electrode formation surfaces of the one and the other substrates facing each other, and a discharge gas is sealed between the sealed substrates. The protective film is
The purpose is to protect the wall charge storage dielectric from damage due to gas discharge and thereby prolong the panel life. An MgO film, which is suitable not only for extending the life of the panel but also for reducing the discharge start voltage, is used as a protective film.
【０００４】この従来パネルでは、ＭｇＯ保護膜を薄膜
形成技術により形成しており、従って薄膜形成用の真空
容器を必要とする。薄膜形成技術によれば、結晶粒密度
が高くしかも膜厚方向に結晶性が均一なＭｇＯ保護膜を
形成できる。In this conventional panel, the MgO protective film is formed by the thin film forming technique, and therefore a vacuum container for forming the thin film is required. According to the thin film forming technique, a MgO protective film having a high crystal grain density and uniform crystallinity in the film thickness direction can be formed.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、ガス放
電表示パネルの表示画面を大きくする場合は、大面積の
基板が必要でありこの基板を収納できる大型の真空容器
が必要となる。このため、真空装置のコストが非常に割
高になる。However, when enlarging the display screen of the gas discharge display panel, a large area substrate is required and a large vacuum container capable of accommodating this substrate is required. For this reason, the cost of the vacuum device is extremely high.
【０００６】そこでＭｇＯ粉末と焼成によりＭｇＯ固相
バインダーとなる液相前駆体とを含むペーストを調製
し、このペーストを焼成してＭｇＯ燒結体保護膜を形成
する方法が考えられる。この保護膜は、その形成におい
て真空容器が不要でありまたガス放電表示パネルを量産
するのに適しているという利点を有する。保護膜をＭｇ
Ｏ燒結体とした場合、長寿命化や放電維持電圧の低減と
いったパネル特性を向上するためには、ＭｇＯ燒結体保
護膜の結晶粒密度を高めることが重要となる。Therefore, a method is conceivable in which a paste containing MgO powder and a liquid phase precursor which becomes a MgO solid phase binder is prepared, and this paste is baked to form a MgO sintered body protective film. This protective film has the advantage that it does not require a vacuum container in its formation and is suitable for mass production of gas discharge display panels. Protective film is Mg
In the case of an O sintered body, it is important to increase the crystal grain density of the MgO sintered body protective film in order to improve panel characteristics such as a longer life and a reduction in discharge sustaining voltage.
【０００７】ところでガス放電表示パネルの基板として
一般にはソーダライムガラスを使用しており、従って基
板の変形や変質を避けるためにはペーストの焼成温度を
５８０℃程度以下に抑えることが必要となる。しかしな
がら、現状においては、液相前駆体に適していると考え
られる物質を５８０℃以下で焼成すると、焼成温度が低
いために結晶粒密度の充分に高いＭｇＯバインダーを形
成することは難しい。これに対し結晶粒密度の高い粒子
特に単結晶の粒子を作成することは比較的容易である。By the way, soda lime glass is generally used as the substrate of the gas discharge display panel. Therefore, in order to avoid the deformation and deterioration of the substrate, it is necessary to suppress the firing temperature of the paste to about 580 ° C. or lower. However, under the present circumstances, when a substance considered to be suitable for a liquid phase precursor is fired at 580 ° C. or lower, it is difficult to form a MgO binder having a sufficiently high crystal grain density because the firing temperature is low. On the other hand, it is relatively easy to prepare particles having a high crystal grain density, especially single crystal particles.
【０００８】この発明はこのような点に鑑みて成された
ものであり、量産に適ししかもより良好なパネル特性の
得られるガス放電表示パネルとその保護膜の形成方法と
を提供することにある。The present invention has been made in view of the above circumstances, and an object thereof is to provide a gas discharge display panel suitable for mass production and capable of obtaining better panel characteristics, and a method for forming a protective film therefor. .
【０００９】[0009]
【課題を解決するための手段】この目的を達成するた
め、この発明のガス放電表示パネルは、表示用ガス放電
を形成するための第一及び第二電極と、第一及び第二電
極を覆う壁電荷蓄積用誘電体と、壁電荷蓄積用誘電体上
に設けた保護膜とを備えて成る交流型ガス放電表示パネ
ルにおいて、保護膜は粒径の大きな粒子と粒径の小さな
粒子とこれら粒子を互いに結合するためのバインダーと
を含んで成る燒結体であることを特徴とする。In order to achieve this object, a gas discharge display panel of the present invention covers first and second electrodes for forming a display gas discharge, and the first and second electrodes. In an AC gas discharge display panel comprising a wall charge storage dielectric and a protective film provided on the wall charge storage dielectric, the protective film includes particles having a large particle size, particles having a small particle size, and these particles. It is characterized by being a sintered body comprising a binder for binding the above to each other.
【００１０】この発明のガス放電表示パネルの保護膜形
成方法は、交流型ガス放電表示パネルの電極を覆う壁電
荷蓄積用誘電体上に保護膜を形成するに当り、粒径の大
きな粒子と粒径の小さな粒子と焼成により固相バインダ
ーとなる液相前駆体とを含んで成るペーストを調製し、
ペーストを壁電荷蓄積用誘電体上に積層した後に焼成し
て保護膜を形成することを特徴とする。According to the method of forming a protective film for a gas discharge display panel of the present invention, when forming a protective film on a wall charge storage dielectric covering electrodes of an AC type gas discharge display panel, particles having a large particle size A paste containing small-sized particles and a liquid-phase precursor to be a solid-phase binder by firing is prepared,
It is characterized in that the protective film is formed by stacking the paste on the wall charge storage dielectric and then firing it.
【００１１】[0011]
【作用】この発明のガス放電表示パネルによれば、保護
膜は粒径の大きな粒子と粒径の小さな粒子とを含む燒結
体であるので、当該保護膜における粒子の分布密度を高
めることができる。従ってこれら粒子の間を埋め込むバ
インダーの結晶粒密度を高めることが難しい場合であっ
ても、粒子の分布密度を高めることによって、保護膜全
体にわたって結晶粒密度を高めることができる。According to the gas discharge display panel of the present invention, since the protective film is a sintered body containing particles having a large particle size and particles having a small particle size, the distribution density of particles in the protective film can be increased. . Therefore, even when it is difficult to increase the crystal grain density of the binder embedded between these particles, the crystal grain density can be increased over the entire protective film by increasing the distribution density of the particles.
【００１２】またこのガス放電表示パネルの保護膜形成
方法によれば、前駆体は液相であるので、この前駆体と
粒子とを混合することにより、粒子を、保護膜形成用の
ペースト中において凝集しないようにほぼ均一に分散さ
せることができる。従ってこのペーストを焼成して保護
膜を形成することにより、保護膜全体にわたって粒子が
均一に分散した保護膜を形成できる。しかもペーストは
粒径の大きな粒子と粒径の小さな粒子とを含むので、保
護膜における粒子の分布密度を高めることができる。従
って前駆体を焼成して形成した固相バインダーの結晶粒
密度を高めることが難しい場合であっても、保護膜全体
にわたって結晶粒密度を高くすることができる。According to the method for forming a protective film for a gas discharge display panel, since the precursor is in a liquid phase, the particles are mixed in the paste for forming the protective film by mixing the precursor and the particles. It can be dispersed almost uniformly so as not to aggregate. Therefore, by baking this paste to form a protective film, it is possible to form a protective film in which particles are uniformly dispersed over the entire protective film. Moreover, since the paste contains particles having a large particle size and particles having a small particle size, the distribution density of particles in the protective film can be increased. Therefore, even when it is difficult to increase the crystal grain density of the solid phase binder formed by firing the precursor, the crystal grain density can be increased over the entire protective film.
【００１３】[0013]
【実施例】以下、図面を参照し、発明の実施例につき説
明する。尚、図面は発明が理解できる程度に概略的に示
してあるにすぎず、従って発明を図示例に限定するもの
ではない。Embodiments of the present invention will be described below with reference to the drawings. It should be noted that the drawings are merely schematic representations so that the invention can be understood, and therefore the invention is not limited to the illustrated examples.
【００１４】図１はガス放電表示パネルの実施例の要部
構成を概略的に示す斜視図であって、この図において
は、一方及び他方の基板を封着しないでこれらの電極形
成面を対向させた状態を示す。また図２はこの実施例の
要部構成を拡大して概略的に示す断面図である。FIG. 1 is a perspective view schematically showing the structure of a main part of an embodiment of a gas discharge display panel. In this figure, one electrode and the other substrate are not sealed and their electrode forming surfaces are opposed to each other. The state where it was made to show is shown. FIG. 2 is an enlarged schematic cross-sectional view of the structure of the main part of this embodiment.
【００１５】この実施例のガス放電表示パネルは、図１
にも示すように、表示用ガス放電を形成するための第一
電極１０及び第二電極１２と、これら電極１０及び１２
を覆う壁電荷蓄積用誘電体１４と、この誘電体１４上に
設けた保護膜１６とを備えて成る。保護膜１６は、図２
にも示すように、粒径の大きな粒子１６ａと粒径の小さ
な粒子１６ｂとこれら粒子１６ａ、１６ｂとを互いに結
合するためのバインダー１６ｃとを含んで成る燒結体で
ある。The gas discharge display panel of this embodiment is shown in FIG.
As also shown in FIG. 1, a first electrode 10 and a second electrode 12 for forming a display gas discharge, and these electrodes 10 and 12
And a protective film 16 provided on the dielectric 14. The protective film 16 is shown in FIG.
As is also shown, the sintered body includes particles 16a having a large particle diameter, particles 16b having a small particle diameter, and a binder 16c for bonding these particles 16a, 16b to each other.
【００１６】この実施例では、交流型のうち面放電型の
ガス放電表示パネルを構成するものであって、第一電極
１０及び第二電極１２を並列させて一方の基板１８例え
ば背面板上に設け、これら電極１０及び１２をそれぞれ
第一の方向Ｐに延在させる。第一電極１０と第二電極１
２とを隣接配置して一対の電極対Ｔと成し、複数対の電
極対Ｔを並列させて設ける。これら電極対Ｔ上に順次
に、壁電荷蓄積用誘電体１４及び保護膜１６を設ける。
第一及び第二電極１０及び１２を例えばストライプ状の
電極とする。In this embodiment, a surface discharge type gas discharge display panel of the AC type is constructed, and the first electrode 10 and the second electrode 12 are arranged side by side on one substrate 18, for example, a back plate. The electrodes 10 and 12 are provided to extend in the first direction P, respectively. First electrode 10 and second electrode 1
2 are arranged adjacent to each other to form a pair of electrode pairs T, and a plurality of pairs of electrodes T are provided in parallel. The wall charge storage dielectric 14 and the protective film 16 are sequentially provided on the electrode pairs T.
The first and second electrodes 10 and 12 are, for example, stripe electrodes.
【００１７】さらに第三電極２０とバリアリブ２２と
を、他方の基板２４例えば前面板上に設ける。第三電極
２０を、平面的に見て第一の方向Ｐと交差する第二の方
向Ｑ、ここでは第一の方向Ｐと直交する第二の方向Ｑに
延在させる。そして複数個の第三電極２０を並列配置
し、隣接する第三電極２０の間にバリアリブ２２を配置
する。第三電極２０を例えばストライプ状の電極、また
バリアリブ２２を例えばストライプ状のリブとする。さ
らに蛍光体２６を各第三電極２０毎に分離して第三電極
２０上に設ける。赤、緑及び青色の蛍光を発する３種類
の蛍光体２６を所定の配置関係で配置する。Further, the third electrode 20 and the barrier rib 22 are provided on the other substrate 24, for example, the front plate. The third electrode 20 is extended in a second direction Q intersecting the first direction P when seen in a plan view, here, a second direction Q orthogonal to the first direction P. Then, a plurality of third electrodes 20 are arranged in parallel, and barrier ribs 22 are arranged between the adjacent third electrodes 20. The third electrode 20 is, for example, a striped electrode, and the barrier rib 22 is, for example, a striped rib. Further, the phosphor 26 is separated for each third electrode 20 and provided on the third electrode 20. Three types of phosphors 26 that emit red, green and blue fluorescence are arranged in a predetermined arrangement relationship.
【００１８】一方の基板１８と他方の基板２２とを、図
１に示すように電極形成面を向き合わせ、これら基板１
８、２２の周辺部分を図示しない封止材で封着する。封
着した基板１８、２２間の放電空間に放電ガスを封入す
る。The substrate 18 on one side and the substrate 22 on the other side are opposed to each other with their electrode forming surfaces facing each other as shown in FIG.
The peripheral portions of 8 and 22 are sealed with a sealing material (not shown). A discharge gas is sealed in the discharge space between the sealed substrates 18 and 22.
【００１９】第一電極１０及び第二電極１２はサステイ
ン電極である。これら電極１０及び１２を介して放電ガ
スに交流を流して表示発光のためのプラズマ放電を発生
させ或は維持する。対を成す電極１０及び１２の間に電
位差を与えると、壁電荷蓄積用誘電体１４の作用により
保護膜１６上に壁電荷が生じ、この壁電荷が交流となっ
て放電ガスを流れる。プラズマ放電で生じた紫外線によ
り蛍光体２６を励起発光させる。第三電極２０はアドレ
ス電極であって、この電極２０を利用することにより表
示発光用のプラズマ放電を画素毎に選択的に形成する。
バリアリブ２２は各画素毎に放電空間を分離して誤放電
を防止するためのものである。The first electrode 10 and the second electrode 12 are sustain electrodes. An alternating current is passed through the discharge gas through these electrodes 10 and 12 to generate or maintain a plasma discharge for display light emission. When a potential difference is applied between the pair of electrodes 10 and 12, wall charges are generated on the protective film 16 by the action of the wall charge storage dielectric 14, and the wall charges become an alternating current to flow the discharge gas. The phosphor 26 is excited to emit light by the ultraviolet rays generated by the plasma discharge. The third electrode 20 is an address electrode, and by using this electrode 20, a plasma discharge for display light emission is selectively formed for each pixel.
The barrier rib 22 is for separating the discharge space for each pixel to prevent erroneous discharge.
【００２０】保護膜１６は壁電荷蓄積用誘電体１４のス
パッタを防止するためのものである。ここでは、保護膜
１６の粒子１６ａ、１６ｂをＭｇＯ粒子とする。これ
は、ＭｇＯが耐スパッタ性に優れるのみならず放電開始
電圧をも低減でき、現状では、ＭｇＯが最適であると考
えられるからである。耐スパッタ性のある保護膜１６を
構成できるのであれば保護膜１６の粒子１６ａ、１６ｂ
の構成元素とバインダ−１６ｃの構成元素とは種類が異
なっても良いが、ここでは、バインダー１６ｃの構成元
素を粒子の構成元素と同じ種類とし従ってバインダー１
６ｃをＭｇＯバインダーとする。尚、粒子１６ａ、１６
ｂ及びバインダー１６ｃをＭｇＯ以外のものとしても良
い。The protective film 16 is for preventing the wall charge storage dielectric 14 from being sputtered. Here, the particles 16a and 16b of the protective film 16 are MgO particles. This is because MgO not only excels in sputtering resistance but also can reduce the discharge start voltage, and at present, MgO is considered to be optimal. Particles 16a and 16b of the protective film 16 can be formed if the protective film 16 having spatter resistance can be formed.
The constituent elements of the binder 16c and the constituent elements of the binder 16c may be different from each other, but here, the constituent elements of the binder 16c are the same kind as the constituent elements of the particles, and therefore the binder 1
6c is the MgO binder. The particles 16a, 16
b and the binder 16c may be other than MgO.
【００２１】焼成によりＭｇＯバインダー１６ｃを生成
するＭｇＯ前駆体としては、例えば、マグネシウムジエ
トキシド、ナフテン酸マグネシウム、オクチル酸マグネ
シウム、マグネシウムジメトキシド、マグネシウムジｎ
−プロポキシド、マグネシウムジｉ−プロポキシド、或
はマグネシウムジｎ−ブトキシドを含む前駆体が考えら
れる。このほか市販のＭｇＯ前駆体もある。これら現状
において考えられるＭｇＯ前駆体は、５８０℃以下の焼
成温度で焼成した場合、結晶粒密度の高いＭｇＯバイン
ダー１６ｃを生成することが難しい。しかし基板１８、
２４として一般に用いられるソーダライムガラスの変質
等を考慮すると焼成温度は５８０℃以下とすることが望
まれる。Examples of the MgO precursor for forming the MgO binder 16c by firing include magnesium diethoxide, magnesium naphthenate, magnesium octylate, magnesium dimethoxide, and magnesium di-n.
Precursors containing -propoxide, magnesium di i-propoxide, or magnesium di n-butoxide are contemplated. There are also commercially available MgO precursors. It is difficult to generate the MgO binder 16c having a high crystal grain density when the MgO precursor considered in these circumstances is fired at a firing temperature of 580 ° C. or less. But substrate 18,
Considering the alteration of soda lime glass generally used as No. 24, the firing temperature is desired to be 580 ° C. or lower.
【００２２】これに対し、保護膜１６は粒径の大きな粒
子１６ａと粒径の小さな粒子１６ｂとを含むので、保護
膜１６における粒子１６ａ、１６ｂの分布密度を高める
ことができる（例えば文献：「粉体 理論と応用」久保
喜一郎他編 改訂二版 丸善株式会社 ｐ３３８〜３４
０ 参照）。従って結晶粒密度の高い粒子、特に単結晶
粒子を保護膜１６の粒子１６ａ、１６ｂとして用いるこ
とにより、バインダー１６ｃの結晶粒密度を高めること
が難しくても、保護膜１６の結晶粒密度を高めることが
できる。On the other hand, since the protective film 16 includes the particles 16a having a large particle diameter and the particles 16b having a small particle diameter, the distribution density of the particles 16a and 16b in the protective film 16 can be increased (for example, in the literature: " Powder Theory and Application ”Kiichiro Kubo et al. Revised Second Edition Maruzen Co., Ltd. p338-34
0). Therefore, by using particles having a high crystal grain density, particularly single crystal particles as the particles 16a and 16b of the protective film 16, it is possible to increase the crystal grain density of the protective film 16 even if it is difficult to increase the crystal grain density of the binder 16c. You can
【００２３】そして単結晶粒子のＭｇＯ粒子１６ａ、１
６ｂを手に入れることは比較的に容易である。例えば、
マグネシウム（Ｍｇ）蒸気と酸素（Ｏ2 ）との気相酸化
反応により、それぞれ独立した単結晶のＭｇＯ粒子を生
成できる。この方法は気相法と称され、気相法によれ
ば、粒子径を１００〜２５００オングストローム（以
下、オングストロームを符号Ａ°で表す）の範囲で任意
好適に調製できる。ここでは例えば粒径１０００Ａ°の
ＭｇＯ粒子１６ａと粒径５００Ａ°のＭｇＯ粒子１６ｂ
とを用い従って粒径の異なる２種類の粒子１６ａ、１６
ｂを用いるが、保護膜１６を構成する粒子として、互い
に粒径の異なる３種類以上の粒子を用いるようにしても
良い。従って互いに粒径の異なる３種類以上の粒子を用
いる場合に、これら粒子のなかから選んだ２種の粒子に
おいて一方の粒径が大きく他方の粒径が小さければ良
い。And MgO particles 16a of single crystal particles, 1
It is relatively easy to get 6b. For example,
Vapor-phase oxidation reaction between magnesium (Mg) vapor and oxygen (O 2 ) can generate independent single-crystal MgO particles. This method is referred to as a vapor phase method, and according to the vapor phase method, the particle diameter can be arbitrarily and suitably adjusted within a range of 100 to 2500 angstrom (hereinafter, angstrom is represented by a symbol A °). Here, for example, MgO particles 16a having a particle size of 1000 A ° and MgO particles 16b having a particle size of 500 A ° are used.
Therefore, two types of particles 16a, 16 having different particle sizes are used.
Although b is used, three or more kinds of particles having different particle sizes may be used as the particles forming the protective film 16. Therefore, when using three or more kinds of particles having different particle sizes from each other, it is preferable that one of the two kinds of particles selected from these particles has a larger particle size and the other has a smaller particle size.
【００２４】図３はガス放電表示パネルの保護膜形成方
法の実施例の説明に供する工程図である。この実施例で
は、図１のガス放電表示パネルが備える保護膜１６を作
成する例につき説明する。FIG. 3 is a process chart for explaining an embodiment of a method for forming a protective film for a gas discharge display panel. In this example, an example of forming the protective film 16 included in the gas discharge display panel of FIG. 1 will be described.
【００２５】まず、交流型ガス放電表示パネルの一方の
基板１８上に表示発光用のガス放電を形成するための電
極１０、１２を形成し、然る後、これら電極１０、１２
を被覆する壁電荷蓄積用誘電体１４を形成する。First, electrodes 10 and 12 for forming a gas discharge for display light emission are formed on one substrate 18 of an AC type gas discharge display panel, and thereafter, these electrodes 10 and 12 are formed.
A wall charge storage dielectric 14 is formed to cover the.
【００２６】この実施例では、基板１８としてソーダラ
イムガラスを用意する。そして基板１８上にＡｇ−Ｐｄ
合金の粒子と鉛ガラスバインダーとを含んで成る厚膜ペ
ースト（Ａｇ−Ｐｄ合金厚膜ペースト）を積層し、然る
後、このペーストを焼成して電極１０、１２を形成す
る。ペーストの積層は、例えばスクリーン印刷技術或は
コーターを用いた積層技術を用いて行なう。次いで、電
極１０、１２上にガラス厚膜ペースト（日本電気硝子社
製ＡＰ５２７０）を積層し、然る後、このペーストを焼
成して壁電荷蓄積用誘電体１４を形成する（図３
（Ａ））。In this embodiment, soda lime glass is prepared as the substrate 18. Then, Ag-Pd is formed on the substrate 18.
A thick film paste (Ag-Pd alloy thick film paste) containing alloy particles and a lead glass binder is laminated, and then the paste is fired to form electrodes 10 and 12. The paste is laminated by using, for example, a screen printing technique or a laminating technique using a coater. Then, a glass thick film paste (AP5270 manufactured by Nippon Electric Glass Co., Ltd.) is laminated on the electrodes 10 and 12, and then the paste is fired to form the wall charge storage dielectric 14 (FIG. 3).
(A)).
【００２７】次に、粒径の大きな粒子１６ａと粒径の小
さな粒子１６ｂと焼成により固相バインダー１６ｃとな
る液相前駆体２８とを含んで成るペースト３０を調製す
る。Next, a paste 30 is prepared which contains particles 16a having a large particle diameter, particles 16b having a small particle diameter, and a liquid phase precursor 28 which becomes a solid phase binder 16c by firing.
【００２８】この実施例では、粒子１６ａ、１６ｂを気
相法により形成した単結晶のＭｇＯ粒子（宇部興産製、
純度９９．９８％のＭｇＯ粒子）とする。また固相バイ
ンダー１６ｃの構成元素と粒子１６ａ、１６ｂの構成元
素とを同じ種類とする。従ってペースト３０は、焼成に
よりＭｇＯ固相バインダー１６ｃとなる液相前駆体２８
を含む。このような液相前駆体２８としては、マグネシ
ウムジエトキシド、ナフテン酸マグネシウム、オクチル
酸マグネシウム、マグネシウムジメトキシド、マグネシ
ウムジｎ−プロポキシド、マグネシウムジｉ−プロポキ
シド及びマグネシウムジｎ−ブトキシドのなかから選択
した１又は複数の物質を含んで成る前駆体を挙げること
ができる。これら例示したマグネシウムジエトキシド等
の物質それ自体を液相の前駆体２８として用い、或はこ
れら例示した物質を溶媒と混合して液相の前駆体２８と
して用いても良い。In this example, single-crystal MgO particles (made by Ube Industries, Ltd., in which particles 16a, 16b were formed by a vapor phase method)
(MgO particles having a purity of 99.98%). Further, the constituent elements of the solid phase binder 16c and the constituent elements of the particles 16a and 16b are of the same type. Therefore, the paste 30 is the liquid phase precursor 28 that becomes the MgO solid phase binder 16c by firing.
including. Examples of the liquid phase precursor 28 include magnesium diethoxide, magnesium naphthenate, magnesium octylate, magnesium dimethoxide, magnesium di n-propoxide, magnesium di i-propoxide and magnesium di n-butoxide. Mention may be made of precursors comprising the selected substance or substances. These exemplified substances such as magnesium diethoxide itself may be used as the liquid-phase precursor 28, or these exemplified substances may be mixed with a solvent and used as the liquid-phase precursor 28.
【００２９】ここでは粒子１６ａ、１６ｂとしてＭｇＯ
粉末を２５ｗｔ％、液相前駆体２８としてマグネシウム
ジエトキシドを２５ｗｔ％、有機樹脂としてエチルセル
ロースを５ｗｔ％、及び、溶媒としてカルビトールアセ
テートを４５ｗｔ％混合してペースト３０を調製する。
ＭｇＯ粉末としては、粒径１０００Ａ°の粒子１６ａ及
び粒径５００Ａ°の粒子１６ｂを３０ｗｔ％及び７０ｗ
ｔ％の割合で混合したものを用いる。尚、有機樹脂及び
溶媒はペースト３０の粘度を調製するためのものであ
る。Here, MgO is used as the particles 16a and 16b.
A paste 30 is prepared by mixing 25 wt% of powder, 25 wt% of magnesium diethoxide as the liquid-phase precursor 28, 5 wt% of ethyl cellulose as an organic resin, and 45 wt% of carbitol acetate as a solvent.
As MgO powder, particles 16a having a particle size of 1000 A ° and particles 16b having a particle size of 500 A ° are 30 wt% and 70 w.
A mixture of t% is used. The organic resin and the solvent are for adjusting the viscosity of the paste 30.
【００３０】次に、ペースト３０を壁電荷蓄積用誘電体
１４上に積層した後に焼成して保護膜１６を形成する。Next, the paste 30 is laminated on the wall charge storage dielectric 14 and then fired to form the protective film 16.
【００３１】この実施例では、スクリーン印刷法そのほ
かの積層技術によりペースト３０を積層し（図３
（Ｂ））、然る後、ペースト３０を焼成してＭｇＯ保護
膜１６を形成する（図２）。前駆体２８は液相であるの
で、粒子１６ａ、１６ｂが凝集せずにペースト３０全体
にわたってほぼ均一に分散した状態の、ペースト３０を
形成できる。従ってこのペースト３０を積層し焼成する
ことにより、粒子１６ａ、１６ｂが保護膜３０全体にほ
ぼ均一に分散した状態の保護膜３０を形成できる。しか
も粒子１６ａの粒径は大きく、粒子１６ｂの粒径は小さ
いので、これら粒子１６ａ、１６ｂの分布密度を高める
ことができる。一方、液相前駆体２８の焼成温度を、基
板１８の変質を生じないような温度例えば５８０℃以下
の温度とした場合は、結晶粒密度の充分に高いバインダ
ー１６ｃを形成するのは難しい。しかし粒子１６ａ、１
６ｂの分布密度が高くしかもこれら粒子を単結晶粒子と
しているので、保護膜１６の結晶粒密度を高めることが
できる。In this embodiment, the paste 30 is laminated by the screen printing method or other lamination technique (see FIG. 3).
(B)) After that, the paste 30 is fired to form the MgO protective film 16 (FIG. 2). Since the precursor 28 is in the liquid phase, it is possible to form the paste 30 in a state where the particles 16a and 16b are not aggregated and are dispersed almost uniformly over the entire paste 30. Therefore, by laminating and firing the paste 30, the protective film 30 in which the particles 16a and 16b are dispersed almost uniformly over the entire protective film 30 can be formed. Moreover, since the particle size of the particles 16a is large and the particle size of the particles 16b is small, the distribution density of these particles 16a, 16b can be increased. On the other hand, if the firing temperature of the liquid phase precursor 28 is set to a temperature at which the substrate 18 is not deteriorated, for example, a temperature of 580 ° C. or less, it is difficult to form the binder 16c having a sufficiently high crystal grain density. But particles 16a, 1
Since 6b has a high distribution density and these particles are single crystal particles, the crystal grain density of the protective film 16 can be increased.
【００３２】次に、保護膜１６を構成する粒子の粒径を
１種類及び２種類とした場合の交流型ガス放電表示パネ
ルに関して、パネル特性を調べた実験につき説明する。Next, an experiment for examining the panel characteristics of the AC type gas discharge display panel in which the particle size of the particles forming the protective film 16 is one and two will be described.
【００３３】図４は実験に供した交流型ガス放電表示パ
ネルの要部構成を概略的に示す斜視図である。同図に示
す実験パネルにおいては、他方の基板２４をソーダライ
ムガラスとし、ガラス厚膜ペースト（デュポン社製 ９
７４１）を用いてバリアリブ２２を形成し、緑色蛍光体
粒子（化成オプトニクス社製 Ｐ１−Ｇ１）及びスクリ
ーンオイルを混合したペーストを用いて緑色の蛍光体２
６を形成した。蛍光体２６は緑色の１種のみである。第
三電極２０は設けない。セルピッチを１ｍｍとして３２
×３２セル形成し、放電ガスとしてＨｅ−５％Ｘｅガス
を封入圧力が５００Ｔｏｒｒとなるように封入した。そ
して保護膜１６を構成する粒子の粒径及び膜厚を種々に
変化させた実験パネルを用意し、個々の実験パネルにつ
きパネル特性を調べる。そのほかの構成は図１の実施例
と同様である。FIG. 4 is a perspective view schematically showing the main structure of the AC type gas discharge display panel used in the experiment. In the experimental panel shown in the figure, the other substrate 24 was soda lime glass, and a glass thick film paste (DuPont 9
741) is used to form the barrier rib 22, and a green phosphor 2 is formed by using a paste in which green phosphor particles (P1-G1 manufactured by Kasei Optonix Co., Ltd.) and screen oil are mixed.
6 was formed. There is only one type of green phosphor 26. The third electrode 20 is not provided. 32 with a cell pitch of 1 mm
32 cells were formed, and He-5% Xe gas was filled as a discharge gas so that the filling pressure was 500 Torr. Then, an experimental panel in which the particle size and the film thickness of the particles forming the protective film 16 are variously prepared is prepared, and the panel characteristics of each experimental panel are examined. Other configurations are similar to those of the embodiment shown in FIG.
【００３４】実験パネルの保護膜１６を構成する粒子の
諸特性を、後掲の表１に示す。粒子は気相法で形成した
純度９９．９８％のＭｇＯ粒子（宇部興産製）であっ
て、商品カタログ上の粒径を粒径Ｃで表す。粒径Ｃを１
００、５００、１０００及び２０００Ａ°の４種類と
し、各粒径ＣのＭｇＯ粒子につき、ＢＥＴ値（ｍ2 ／
ｇ）、ＢＥＴ値から算出した粒径（μｍ）、電子顕微鏡
により計測した粒径（μｍ）、かさ密度（ｇ／ｃｍ2 ）
及びタップ密度（ｇ／ｃｍ2 ）を示した。Various properties of particles constituting the protective film 16 of the experimental panel are shown in Table 1 below. The particles are MgO particles having a purity of 99.98% (manufactured by Ube Industries, Ltd.) formed by a gas phase method, and the particle size on the product catalog is represented by the particle size C. Particle size C is 1
BET value (m 2 / m 2 / MgO particles of each particle size C)
g), particle size (μm) calculated from BET value, particle size (μm) measured by electron microscope, bulk density (g / cm 2 ).
And the tap density (g / cm 2 ) are shown.
【００３５】表１から理解できるように、電子顕微鏡に
より計測した粒径はいくらかばらつきはあるものの、こ
の計測した粒径とカタログ上の粒径Ｃとはおおむね一致
している。またＭｇＯのバルク密度はほぼ３．６５ｇ／
ｃｍ2 でありこれと比較すると各粒径Ｃのかさ密度及び
タップ密度は非常に小さいことがわかる。粒径Ｃが大き
くなるにしたがって、かさ密度及びタップ密度はともに
大きくなるが、かさ密度の増加量よりもタップ密度の増
加量のほうが大きい。タップが粒子の分布密度を高める
ための手段として有効であることがわかる。As can be seen from Table 1, although the particle diameters measured by the electron microscope have some variations, the measured particle diameters and the particle diameter C in the catalog are almost the same. The bulk density of MgO is approximately 3.65 g /
It is cm 2 , and it can be seen that the bulk density and tap density of each particle size C are very small in comparison with this. Both the bulk density and the tap density increase as the particle size C increases, but the increase amount of the tap density is larger than the increase amount of the bulk density. It can be seen that taps are effective as a means for increasing the distribution density of particles.
【００３６】保護膜１６の形成においてタップに代わる
手段は液相の前駆体２８である。ところが、粒径Ｃの大
きな粒子はその比表面積が小さいので（ＢＥＴ値参照）
吸油量が小さくなり、その結果、焼成時の焼き縮みによ
り保護膜１６にクラックを生じ易い。クラックの発生は
パネル寿命を非常に短くするものであり、従って粒径Ｃ
を大きくした場合にこのクラックの発生を防止するため
には、ペースト３０における前駆体２８の混合量を少な
くする必要がある。しかし前駆体２８の混合量を少なく
するとバインダー１６ｃの不在領域を生じて粒子をバイ
ンダー１６ｃで結合することができなくなる。この出願
の発明者の実験によればクラックの発生及びバインダー
１６ｃの不在領域の発生を防止するためには、粒径Ｃを
２０００〜２５００Ａ°以下とした方が良いことを確認
した。また粒径Ｃが小さくなりすぎるとペースト３０の
粘度が低くなって非常に流動しやすくなりペースト３０
の積層が難しくなる。この出願の発明者の実験によれ
ば、ペースト３０の積層をし易くするためには、粒径Ｃ
を５００Ａ°以上とした方が良いことを確認した。An alternative to the tap in forming the protective film 16 is the liquid-phase precursor 28. However, particles having a large particle size C have a small specific surface area (see BET value).
The amount of oil absorption becomes small, and as a result, cracks are likely to occur in the protective film 16 due to shrinkage during baking. The generation of cracks shortens the panel life very much, so the grain size C
In order to prevent the occurrence of this crack when the value is increased, it is necessary to reduce the mixing amount of the precursor 28 in the paste 30. However, if the mixing amount of the precursor 28 is reduced, a region where the binder 16c is absent is generated, and the particles cannot be bonded by the binder 16c. According to the experiments conducted by the inventor of this application, it was confirmed that the particle size C should be 2000 to 2500 A ° or less in order to prevent the occurrence of cracks and the absence of the binder 16c. Further, if the particle size C becomes too small, the viscosity of the paste 30 becomes low and it becomes very easy to flow and the paste 30
Is difficult to stack. According to the experiment by the inventor of this application, in order to facilitate the stacking of the paste 30, the particle size C
It was confirmed that it was better to set the value to 500 A ° or more.
【００３７】後掲の表２には、実験パネルのガス放電に
関わる特性を示す。実験においては、対を成す第一電極
１０及び第二電極１２の一方の電極に周波数２０ＫＨｚ
の矩形パルスを印加すると共に他方の電極にこの印加タ
イミングから半波長ずらした（２５μｓずらした）タイ
ミングで周波数２０ＫＨｚの矩形パルスを印加して表示
発光のためのプラズマ放電を形成する。そしてこのとき
の最大放電維持電圧ＶSmax（Ｖ）と、電極１０、１２間
を流れるセル電流（表示セル１セル当りに流れるセル電
流）（μＡ／ｃｅｌｌ）と、発光効率（ｌm ／Ｗ）とを
各実験パネル毎に調べた。表２には、これらの特性を各
実験パネル毎に示すと共に各実験パネルの保護膜１６を
構成する粒子の粒径と保護膜１６の厚さ（μｍ）とを示
す。試料番号７５２、７５５、１１００及び１１０１の
各実験パネルにおいては、保護膜１６を構成する粒子の
粒径を１種類としてそれぞれの粒径を表２に示す。また
試料番号１３０３、１３０４、１３０５及び１３０６の
実験パネルにおいては保護膜１６を構成する粒子の粒径
（Ａ°）をＥ及びＦの２種類とし、これら粒径Ｅ及びＦ
の粒子の混合比ｅ／ｆをそれぞれＥ／Ｆ＝ｅ／ｆの形で
表２に示す。ｅ及びｆは粒径Ｅ及びＦの粒子の混合量
（ｗｔ％）である。Table 2 below shows the characteristics relating to the gas discharge of the experimental panel. In the experiment, a frequency of 20 KHz was applied to one of the first electrode 10 and the second electrode 12 forming a pair.
And a rectangular pulse having a frequency of 20 KHz is applied to the other electrode at a timing shifted by half a wavelength (shifted by 25 μs) from the application timing to form plasma discharge for display light emission. The maximum discharge sustain voltage V Smax (V) at this time, the electrode 10 and 12 while the cell current flowing through the (cell current flowing per display cell 1 cell) (μA / cell), luminous efficiency (l m / W) And were examined for each experimental panel. Table 2 shows these characteristics for each experimental panel, and also shows the particle diameter of the particles forming the protective film 16 of each experimental panel and the thickness (μm) of the protective film 16. In each of the experimental panels of sample numbers 752, 755, 1100, and 1101, the particle size of the particles forming the protective film 16 is defined as one type, and the respective particle sizes are shown in Table 2. In the experimental panels of sample numbers 1303, 1304, 1305, and 1306, the particle diameter (A °) of the particles forming the protective film 16 is E and F.
The mixing ratios e / f of the particles are shown in Table 2 in the form of E / F = e / f. e and f are mixed amounts (wt%) of particles having particle sizes E and F.
【００３８】表２からも理解できるように、粒子の粒径
を１種類としている場合には、保護膜１６の厚さを厚く
することによりセル電流を小さくしまた発光効率を高め
ることができるが、最高放電維持電圧ＶSmaxは高くな
る。この場合に、セル電流を１０μＡ／ｃｅｌｌ程度に
制限するためには保護膜１６の膜厚を４〜５μｍ程度と
する必要があり、膜厚を厚くした分だけ最高放電維持電
圧ＶSmaxは２８８〜３１２Ｖ程度の高い電圧になってし
まう。As can be understood from Table 2, when the particle size is one kind, the cell current can be reduced and the luminous efficiency can be improved by increasing the thickness of the protective film 16. , The maximum discharge sustaining voltage V Smax becomes high. In this case, in order to limit the cell current to about 10 μA / cell, it is necessary to set the film thickness of the protective film 16 to about 4 to 5 μm, and the maximum discharge sustaining voltage V Smax is set to 288 to about as much as the film thickness is increased. It becomes a high voltage of about 312V.
【００３９】これに対し粒子の粒径を２種類としている
場合には、保護膜１６の厚さを薄くしても、セル電流を
小さくしまた発光効率を高めることができる。しかも保
護膜１６の厚さを薄くすることにより最高放電維持電圧
ＶSmaxを低く抑えることができる。粒子の粒径を２種類
とした場合は保護膜１６の結晶粒密度を高めることがで
きるので、保護膜１６の厚さを薄くしてもセル電流を制
限することができ、その結果、最高放電維持電圧ＶSmax
を低く抑えることができると考えられる。この場合に
は、保護膜１６の膜厚は２．５〜３．０μｍ程度に薄く
してもセル電流を１０μＡ／ｃｅｌｌ程度に制限でき、
しかも膜厚を薄くした分だけ最高放電維持電圧ＶSmaxを
２４９〜２５４Ｖ程度にまで低減できる。On the other hand, when the particle size is two, the cell current can be reduced and the luminous efficiency can be increased even if the thickness of the protective film 16 is reduced. Moreover, the maximum discharge sustaining voltage V Smax can be suppressed to a low level by reducing the thickness of the protective film 16. When the particle size of the particles is two, the crystal grain density of the protective film 16 can be increased, so that the cell current can be limited even if the thickness of the protective film 16 is reduced, and as a result, the maximum discharge can be achieved. Sustain voltage V Smax
Is thought to be kept low. In this case, the cell current can be limited to about 10 μA / cell even if the thickness of the protective film 16 is reduced to about 2.5 to 3.0 μm.
Moreover, the maximum discharge sustaining voltage V Smax can be reduced to about 249 to 254 V by the amount of the thinned film.
【００４０】この出願の発明者の実験によれば、粒子の
粒径を２種類としている場合に保護膜１６の結晶粒密度
を高めるためには、粒子の粒径Ｅ及びＦを２倍以上異な
らせると共に、ｅ＋ｆ＝１００ｗｔ％としてｅ＝２５〜
７５ｗｔ％とするのが好ましいことを確認した。According to an experiment conducted by the inventor of this application, in order to increase the crystal grain density of the protective film 16 when the particle diameters of the particles are two, if the particle diameters E and F of the particles are different from each other by a factor of two or more. In addition to e = f = 100 wt%, e = 25-
It was confirmed that it is preferable to set it to 75 wt%.
【００４１】図５はガス放電表示パネルの他の実施例の
要部構成を概略的に示す斜視図である。この実施例で
は、一方の基板１８上に順次に、第三電極２０及び多層
配線用の誘電体３２を設ける。そして多層配線用誘電体
３２上に、第一及び第二電極１０及び１２を設ける。そ
のほかは上述した実施例と同様である。FIG. 5 is a perspective view schematically showing the structure of the main part of another embodiment of the gas discharge display panel. In this embodiment, the third electrode 20 and the dielectric 32 for multilayer wiring are sequentially provided on one substrate 18. Then, the first and second electrodes 10 and 12 are provided on the multilayer wiring dielectric 32. Others are the same as the above-mentioned embodiment.
【００４２】この場合も、複数の第三電極２０を並列配
置しており、平面的に見て、バリアリブ２２を隣接する
第三電極２０の間に配置する。また蛍光体２６を、各第
三電極２０毎に分離して隣接するバリアリブ２２の間に
配置する。Also in this case, the plurality of third electrodes 20 are arranged in parallel, and the barrier ribs 22 are arranged between the adjacent third electrodes 20 in plan view. Further, the phosphor 26 is separated for each third electrode 20 and is arranged between the adjacent barrier ribs 22.
【００４３】発明は上述した実施例にのみ限定されるも
のではなく、従って各構成成分の形状、配設位置、形成
材料、数値的条件及びそのほかを任意好適に変更でき
る。The present invention is not limited to the above-mentioned embodiments, and therefore, the shapes of respective constituents, the arrangement positions, the forming materials, the numerical conditions and others can be arbitrarily changed.
【００４４】例えば、上述した実施例では面放電型のガ
ス放電表示パネルにつき説明したが、第三電極を設けず
に第一電極を一方の基板上に及び第二電極を他方の基板
上に設け、これら第一及び第二電極を平面的に見て交差
させて単純Ｘ−Ｙマトリクス型のガス放電表示パネルを
構成しても良い。この場合、一方の基板の第一電極上順
次に壁電荷蓄積用誘電体及び保護膜を設け、他方の基板
の第二電極上に順次に覆う壁電荷蓄積用誘電体及び保護
膜を設ける。For example, although the surface discharge type gas discharge display panel has been described in the above embodiments, the first electrode is provided on one substrate and the second electrode is provided on the other substrate without providing the third electrode. A simple XY matrix type gas discharge display panel may be constructed by intersecting these first and second electrodes in a plan view. In this case, a wall charge storage dielectric and a protective film are sequentially provided on the first electrode of one substrate, and a wall charge storage dielectric and a protective film are sequentially provided on the second electrode of the other substrate.
【００４５】[0045]
【表１】 [Table 1]
【００４６】[0046]
【表２】 [Table 2]
【００４７】[0047]
【発明の効果】上述した説明からも明らかなように、こ
の発明のガス放電表示パネルによれば、保護膜は燒結体
であるので量産に適す。しかも保護膜を構成する粒子の
間を埋め込むバインダーの結晶粒密度を高めることが難
しい場合であっても、粒子の分布密度を高めることによ
って、保護膜全体にわたって結晶粒密度を高めることが
できる。これがため、ガス放電表示パネルのパネル特性
を向上させることのできる保護膜を形成できる。As is clear from the above description, the gas discharge display panel of the present invention is suitable for mass production because the protective film is a sintered body. Moreover, even when it is difficult to increase the crystal grain density of the binder that fills the space between the particles forming the protective film, the crystal grain density can be increased over the entire protective film by increasing the distribution density of the particles. Therefore, it is possible to form a protective film capable of improving the panel characteristics of the gas discharge display panel.
【００４８】またこのガス放電表示パネルの保護膜形成
方法によれば、保護膜を形成するための粒子を、保護膜
形成用のペースト中において凝集しないようにほぼ均一
に分散させることができ、従ってこのペーストを焼成し
て保護膜を形成することにより、保護膜全体にわたって
粒子が均一に分散した保護膜を形成できる。しかも保護
膜における粒子の分布密度を高めることができるので、
バインダーの結晶粒密度を高めることが難しい場合であ
っても、保護膜全体にわたって結晶粒密度を高くするこ
とができる。これがため、ガス放電表示パネルのパネル
特性を向上させることのできる保護膜を形成できる。According to this method for forming a protective film for a gas discharge display panel, the particles for forming the protective film can be dispersed almost uniformly so as not to aggregate in the paste for forming the protective film, and therefore, By firing this paste to form a protective film, it is possible to form a protective film in which particles are uniformly dispersed over the entire protective film. Moreover, since the distribution density of particles in the protective film can be increased,
Even if it is difficult to increase the crystal grain density of the binder, the crystal grain density can be increased over the entire protective film. Therefore, it is possible to form a protective film capable of improving the panel characteristics of the gas discharge display panel.
【図１】ガス放電表示パネルの実施例の要部構成を概略
的に示す斜視図である。FIG. 1 is a perspective view schematically showing a main part configuration of an embodiment of a gas discharge display panel.
【図２】ガス放電表示パネルの実施例の要部構成を概略
的に示す断面図である。FIG. 2 is a cross-sectional view schematically showing a main part configuration of an embodiment of a gas discharge display panel.
【図３】（Ａ）〜（Ｂ）はガス放電表示パネルの保護膜
形成方法の実施例の説明に供する工程図である。3A to 3B are process diagrams for explaining an example of a method for forming a protective film of a gas discharge display panel.
【図４】実験に供したガス放電表示パネルの要部構成を
概略的に示す斜視図である。FIG. 4 is a perspective view schematically showing a main configuration of a gas discharge display panel used in an experiment.
【図５】ガス放電表示パネルの他の実施例の要部構成を
概略的に示す斜視図である。FIG. 5 is a perspective view schematically showing a main part configuration of another embodiment of the gas discharge display panel.
１０：第一電極 １２：第二電極 １４：壁電荷蓄積用誘電体 １６：保護膜 １６ａ：粒径の大きな粒子 １６ｂ：粒径の小さな粒子 １６ｃ：バインダー １８、２４：基板 ２８：液相前駆体 ３０：ペースト 10: First electrode 12: Second electrode 14: Wall charge storage dielectric 16: Protective film 16a: Large particle size particle 16b: Small particle size particle 16c: Binder 18, 24: Substrate 28: Liquid phase precursor 30: Paste
───────────────────────────────────────────────────── フロントページの続き (72)発明者 金原 隆雄 東京都港区虎ノ門１丁目７番12号 沖電気 工業株式会社内 (72)発明者 高崎 茂 東京都港区虎ノ門１丁目７番12号 沖電気 工業株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Takao Kanehara 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd. (72) Inventor Shigeru Takasaki 1-7-12 Toranomon, Minato-ku, Tokyo Oki Electric Industry Co., Ltd.
Claims (9)
び第二電極と、前記第一及び第二電極を覆う壁電荷蓄積
用誘電体と、該壁電荷蓄積用誘電体上に設けた保護膜と
を備えて成る交流型ガス放電表示パネルにおいて、 保護膜は粒径の大きな粒子と粒径の小さな粒子とこれら
粒子を互いに結合するためのバインダーとを含んで成る
燒結体であることを特徴とするガス放電表示パネル。1. A first and second electrode for forming a gas discharge for display, a wall charge storage dielectric covering the first and second electrodes, and a wall charge storage dielectric provided on the wall charge storage dielectric. In an AC type gas discharge display panel including a protective film, the protective film is a sintered body including particles having a large particle size, particles having a small particle size, and a binder for bonding these particles to each other. Characteristic gas discharge display panel.
いて、バインダーは粒子の構成元素と同じ種類の構成元
素から成ることを特徴とするガス放電表示パネル。2. The gas discharge display panel according to claim 1, wherein the binder is composed of the same kind of constituent element as the constituent elements of the particles.
いて、粒子は単結晶粒子であることを特徴とするガス放
電表示パネル。3. The gas discharge display panel according to claim 1, wherein the particles are single crystal particles.
いて、粒子をＭｇＯ粒子及びバインダーをＭｇＯバイン
ダーとしたことを特徴とするガス放電表示パネル。4. The gas discharge display panel according to claim 1, wherein the particles are MgO particles and the binder is MgO binder.
壁電荷蓄積用誘電体上に保護膜を形成するに当り、 粒径の大きな粒子と粒径の小さな粒子と焼成により固相
バインダーとなる液相前駆体とを含んで成るペーストを
調製し、 該ペーストを壁電荷蓄積用誘電体上に積層した後に焼成
して保護膜を形成することを特徴とするガス放電表示パ
ネルの保護膜形成方法。5. When forming a protective film on a wall charge storage dielectric covering an electrode of an AC type gas discharge display panel, a large particle size particle and a small particle size particle become a solid phase binder by firing. A method for forming a protective film for a gas discharge display panel, characterized in that a paste containing a liquid phase precursor is prepared, and the paste is laminated on a wall charge storage dielectric and then fired to form a protective film. .
護膜形成方法において、固相バインダーは粒子の構成元
素と同じ種類の構成元素から成ることを特徴とするガス
放電表示パネルの保護膜形成方法。6. The method for forming a protective film for a gas discharge display panel according to claim 5, wherein the solid phase binder is composed of the same kind of constituent element as the constituent elements of the particles. Method.
護膜形成方法において、粒子は単結晶粒子であることを
特徴とするガス放電表示パネルの保護膜形成方法。7. The method for forming a protective film for a gas discharge display panel according to claim 5, wherein the particles are single crystal particles.
護膜形成方法において、ペーストはＭｇＯ粒子と焼成に
よりＭｇＯ固相バインダーとなる液相前駆体とを含んで
成ることを特徴とするガス放電表示パネルの保護膜形成
方法。8. The method for forming a protective film of a gas discharge display panel according to claim 5, wherein the paste contains MgO particles and a liquid phase precursor which becomes a MgO solid phase binder by firing. Method for forming protective film of display panel.
護膜形成方法において、 液相前駆体は、マグネシウムジエトキシド、ナフテン酸
マグネシウム、オクチル酸マグネシウム、マグネシウム
ジメトキシド、マグネシウムジｎ−プロポキシド、マグ
ネシウムジｉ−プロポキシド及びマグネシウムジｎ−ブ
トキシドのなかから選択した１又は複数の物質を含んで
成ることを特徴とするガス放電表示パネルの保護膜形成
方法。9. The method for forming a protective film of a gas discharge display panel according to claim 8, wherein the liquid phase precursor is magnesium diethoxide, magnesium naphthenate, magnesium octylate, magnesium dimethoxide, magnesium di-n-propoxide. A method of forming a protective film for a gas discharge display panel, comprising one or more substances selected from magnesium di i-propoxide and magnesium di n-butoxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5331334A JPH07192630A (en) | 1993-12-27 | 1993-12-27 | Gas discharge display panel and its protective film forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5331334A JPH07192630A (en) | 1993-12-27 | 1993-12-27 | Gas discharge display panel and its protective film forming method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07192630A true JPH07192630A (en) | 1995-07-28 |
Family
ID=18242526
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5331334A Withdrawn JPH07192630A (en) | 1993-12-27 | 1993-12-27 | Gas discharge display panel and its protective film forming method |
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| Country | Link |
|---|---|
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