JPH071790Y2 - 拡散装置用自動キャップ - Google Patents

拡散装置用自動キャップ

Info

Publication number
JPH071790Y2
JPH071790Y2 JP1987093892U JP9389287U JPH071790Y2 JP H071790 Y2 JPH071790 Y2 JP H071790Y2 JP 1987093892 U JP1987093892 U JP 1987093892U JP 9389287 U JP9389287 U JP 9389287U JP H071790 Y2 JPH071790 Y2 JP H071790Y2
Authority
JP
Japan
Prior art keywords
cap
reaction tube
ring
open end
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987093892U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63201325U (US20020095090A1-20020718-M00002.png
Inventor
利一 狩野
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1987093892U priority Critical patent/JPH071790Y2/ja
Publication of JPS63201325U publication Critical patent/JPS63201325U/ja
Application granted granted Critical
Publication of JPH071790Y2 publication Critical patent/JPH071790Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987093892U 1987-06-17 1987-06-17 拡散装置用自動キャップ Expired - Lifetime JPH071790Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987093892U JPH071790Y2 (ja) 1987-06-17 1987-06-17 拡散装置用自動キャップ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987093892U JPH071790Y2 (ja) 1987-06-17 1987-06-17 拡散装置用自動キャップ

Publications (2)

Publication Number Publication Date
JPS63201325U JPS63201325U (US20020095090A1-20020718-M00002.png) 1988-12-26
JPH071790Y2 true JPH071790Y2 (ja) 1995-01-18

Family

ID=30956862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987093892U Expired - Lifetime JPH071790Y2 (ja) 1987-06-17 1987-06-17 拡散装置用自動キャップ

Country Status (1)

Country Link
JP (1) JPH071790Y2 (US20020095090A1-20020718-M00002.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6263407B2 (ja) * 2014-02-10 2018-01-17 光洋サーモシステム株式会社 熱処理装置
JP6426816B2 (ja) * 2017-11-20 2018-11-21 光洋サーモシステム株式会社 熱処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444542Y2 (US20020095090A1-20020718-M00002.png) * 1975-06-23 1979-12-21
JPS58111315A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd 蓋開閉装置
JPS59215722A (ja) * 1983-05-23 1984-12-05 Toshiba Corp 半導体製造装置
JPS6042733U (ja) * 1983-08-26 1985-03-26 東芝セラミツクス株式会社 炉芯管
JPH0220826Y2 (US20020095090A1-20020718-M00002.png) * 1985-02-15 1990-06-06

Also Published As

Publication number Publication date
JPS63201325U (US20020095090A1-20020718-M00002.png) 1988-12-26

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