JPH0715485B2 - 圧電型力学量センサ - Google Patents

圧電型力学量センサ

Info

Publication number
JPH0715485B2
JPH0715485B2 JP12240087A JP12240087A JPH0715485B2 JP H0715485 B2 JPH0715485 B2 JP H0715485B2 JP 12240087 A JP12240087 A JP 12240087A JP 12240087 A JP12240087 A JP 12240087A JP H0715485 B2 JPH0715485 B2 JP H0715485B2
Authority
JP
Japan
Prior art keywords
piezoelectric
piezoelectric element
mechanical quantity
piezoelectric elements
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12240087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63289460A (ja
Inventor
昭 浅岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP12240087A priority Critical patent/JPH0715485B2/ja
Priority to DE19883817354 priority patent/DE3817354A1/de
Publication of JPS63289460A publication Critical patent/JPS63289460A/ja
Publication of JPH0715485B2 publication Critical patent/JPH0715485B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Gyroscopes (AREA)
JP12240087A 1987-05-21 1987-05-21 圧電型力学量センサ Expired - Lifetime JPH0715485B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12240087A JPH0715485B2 (ja) 1987-05-21 1987-05-21 圧電型力学量センサ
DE19883817354 DE3817354A1 (de) 1987-05-21 1988-05-20 Sensor zur erfassung kinetischer energie, insbesondere piezoelektrischer sensor zur erfassung dynamischer oder kinetischer energie

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12240087A JPH0715485B2 (ja) 1987-05-21 1987-05-21 圧電型力学量センサ

Publications (2)

Publication Number Publication Date
JPS63289460A JPS63289460A (ja) 1988-11-25
JPH0715485B2 true JPH0715485B2 (ja) 1995-02-22

Family

ID=14834854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12240087A Expired - Lifetime JPH0715485B2 (ja) 1987-05-21 1987-05-21 圧電型力学量センサ

Country Status (2)

Country Link
JP (1) JPH0715485B2 (de)
DE (1) DE3817354A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5130600A (en) * 1989-06-02 1992-07-14 Mitsubishi Petrochemical Co., Ltd. Acceleration sensor
JP2700929B2 (ja) * 1989-08-28 1998-01-21 株式会社ゼクセル 加速度センサ
DE4011910A1 (de) * 1990-04-12 1991-10-17 Busch Dieter & Co Prueftech Vorrichtung und verfahren zur beschleunigungsmessung durch piezo-elektrische umformer
KR930009516B1 (ko) * 1990-04-27 1993-10-06 미쓰비시덴키 가부시키가이샤 진동검출기 및 그의 고유진동주파수 조정방법
JPH049721A (ja) * 1990-04-27 1992-01-14 Mitsubishi Electric Corp 振動検出器
DE4135369A1 (de) * 1991-10-26 1993-05-13 Bosch Gmbh Robert Testbarer piezoelektrischer beschleunigungssensor
JP3151927B2 (ja) * 1992-04-10 2001-04-03 株式会社村田製作所 加速度センサ
SG52374A1 (en) * 1993-03-19 1998-09-28 Murata Manufacturing Co Acceleration sensor
CN1143918A (zh) * 1994-03-15 1997-02-26 肖氏工业有限公司 压电曲片式水声器晶体装置
US6050144A (en) * 1997-06-04 2000-04-18 Matsushita Electric Industrial Co., Ltd. Acceleration sensor
DE102004015474A1 (de) * 2004-03-26 2004-12-23 Conti Temic Microelectronic Gmbh Aufnehmersystem/Auslösesensor, geeignet für Diagnose-/Sicherheitsvorrichtung, insbesondere für Unfallschutzeinrichtungen in einem Fahrzeug
US7856880B2 (en) 2004-03-26 2010-12-28 Conti Temic Microelectronics Gmbh Vehicle sensor for detecting impact sound
JP4756309B2 (ja) * 2004-08-20 2011-08-24 独立行政法人産業技術総合研究所 高感度圧電素子
KR20130077393A (ko) * 2011-12-29 2013-07-09 삼성전기주식회사 관성센서 및 그 제조방법
CN104596675B (zh) 2013-10-31 2019-05-14 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置
CN104061122B (zh) * 2014-06-30 2017-01-04 北京天源科创风电技术有限责任公司 一种皮带张力自动监测系统和监测方法及风电机变桨系统

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2605809C2 (de) * 1976-02-12 1986-11-13 Minnesota Mining And Manufacturing Co., Saint Paul, Minn. Sensoreinrichtung zur Erfassung einer Temperaturänderung oder einer Biegespannungsänderung
DK139085B (da) * 1977-04-19 1978-12-11 Brueel & Kjaer As Accelerometer.

Also Published As

Publication number Publication date
JPS63289460A (ja) 1988-11-25
DE3817354A1 (de) 1988-12-01

Similar Documents

Publication Publication Date Title
JPH0715485B2 (ja) 圧電型力学量センサ
US6615465B2 (en) Method for producing an acceleration sensor
US11898918B2 (en) Temperature coefficient of offset compensation for force sensor and strain gauge
US7082834B2 (en) Flexible thin film pressure sensor
JPS61501233A (ja) 超小型感力スイツチ
WO2005012922A1 (ja) 加速度センサ
GB2251693A (en) Miniature silicon accelerometer and method
US9291512B2 (en) Sensor for measuring pressure and/or force
JPS6071927A (ja) 圧力トランスデユ−サ及びその製造法
US3948089A (en) Strain gauge apparatus
JPH05215766A (ja) 検査可能な加速度センサ
JP6184006B2 (ja) 圧力センサ
JPS6073425A (ja) 力測定器
US7178403B2 (en) Transducer responsive to pressure, vibration/acceleration and temperature and methods of fabricating the same
JP3339425B2 (ja) 加速度センサ及び加速度検出装置
JPH05149773A (ja) ひずみゲ−ジの使用方法
JPH0862242A (ja) 加速度センサ
JP3019549B2 (ja) 半導体加速度センサ
JPH10123166A (ja) 半導体加速度センサ
KR101794764B1 (ko) Mems 압력센서 및 그 제조 방법
JPH0534182A (ja) 歪・温度複合センサ
JPS59217374A (ja) 半導体ひずみ変換器
JPH0786619A (ja) 歪みゲージとその製造方法
JPH02236431A (ja) 圧電型圧力センサ
JPH0921715A (ja) センサ用温度補償回路