JPH0714111A - Production of magnetic head and magnetic heat - Google Patents

Abstract

PURPOSE:To make a drawing for a magnetic head easy. CONSTITUTION:In the process to form a groove where a film for a magnetic head is to be formed, a v-shape groove 2 is preliminarily formed parallel to the drawing clearance 5 for drawing a track width and then nonmagnetic nonconductive thin films 4 and soft magnetic thin films 3 are alternately formed by vapor deposition on the vertical surface of the v-shape groove. Then, drawing and grinding of the track width dimension is performed. By this method, dimensional defect of the track width due to processing allowance of polishing of the head and gap is prevented and the magnetic characteristics are improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a magnetic head and a magnetic head, and more particularly to a magnetic head having a high saturation magnetic flux density necessary for high density recording / reproducing such as a video tape recorder. The present invention relates to a manufacturing method and a magnetic head.

[0002]

2. Description of the Related Art In recent years, along with the increase in magnetic recording density, there has been a demand for a magnetic recording medium such as a magnetic tape having a high coercive force and a magnetic head having a narrow track and a material having a high saturation magnetic flux density. 5 and 6 are configuration diagrams of a conventional magnetic head, FIG. 5 is a perspective view of the magnetic head, and FIG. 6 is a diagram of the magnetic head shown in FIG. 5 viewed from a sliding surface. In the figure, 11 is a substrate, 12 is sendust (soft magnetic thin film), 13 is low melting glass, and 14 is a window for winding. A magnetic head chip is used in which a soft magnetic thin film 12 made of sendust or the like and having a high saturation magnetic flux density is provided on a wall surface of a groove formed in a substrate 11 and is adhesively bonded with a low melting point glass 13.

FIG. 7 is another configuration diagram of a conventional magnetic head. In the figure, reference numeral 15 is a winding, and other parts having the same functions as those in FIG. With the narrowing of tracks for the purpose of further improving the recording density, the head gap portion is narrowed down to have a predetermined track width. A winding 15 is wound through the winding window 14. FIG. 8 is a view of the magnetic head shown in FIG. 7 viewed from the sliding surface. A non-conductive thin film 16 is provided along the soft magnetic thin film 12. The above-mentioned narrowing down is one measure for keeping the thickness of the soft magnetic thin film 12 constant so as to reduce the track width in order to increase the density of magnetic recording without lowering the electromagnetic conversion efficiency of the head chip itself. is there.

FIG. 9 and FIG. 10 are still another structural views of a conventional magnetic head, showing a case in which the narrowing allowance (margin) and the soft magnetic thin film have a certain angle. In the drawings, 17 is the narrowing. Processing allowance (white), 18 is the track width, other,
The parts having the same functions as those in FIG.
When performing the narrowing-down grinding process, the narrowing-down allowance (margin)
There is an angle θ between 17 and the soft magnetic thin film 12.
Since the dimension (Tw) of the track width 18 changes in the depth direction to be ground, the amount d of grinding and the dimension Tw of the track width in the subsequent polishing process of the head / gap junction surface have the relationship shown in FIG.

[0005]

As described above, in the conventional magnetic head, the dimension of the track width changes in the depth direction to be ground when performing the narrowing-down grinding processing, and high processing accuracy is required. There is a problem that it becomes a factor of reducing the yield.

The present invention has been made in view of the above circumstances, and a drawing process is facilitated by forming a groove in a non-magnetic substrate and forming a film on a vertical surface of the groove. It is an object of the present invention to provide a magnetic head manufacturing method and a magnetic head.

[0007]

In order to achieve the above-mentioned object, the present invention (1) forms a groove in a substrate and alternately stacks a soft magnetic thin film and a non-magnetic non-conductive thin film along the groove. A method of manufacturing a magnetic head, comprising: forming a film-forming portion by vapor deposition; further narrowing down the film-forming portion to a predetermined track width dimension by processing; facing the narrowed portion; and adhering with a low melting point glass; A groove is formed in the groove, a soft magnetic thin film is formed on the vertical surface of the groove, and then a part of the soft magnetic thin film is ground, or (2) a groove provided on the substrate. A V-shaped groove, a film forming section in which a non-magnetic non-conductive thin film and a soft magnetic thin film are alternately formed on a vertical surface of the C-shaped groove, and a narrowing section in which a part of the film forming section is ground. Of one of the substrate blocks and the other substrate block having the same configuration as the one of the substrate blocks. As the magnetic thin film is positioned on the same straight line, it is obtained and wherein the filled with low melting point glass in the gap portion joined to the rotational symmetry.

[0008]

In the substrate, a groove is formed, and a non-magnetic non-conductor thin film and a soft magnetic thin film are alternately formed on the vertical surface of the groove to form a film forming portion. A part is nitrified and a narrowing portion is provided. When manufacturing a magnetic head, when grinding the bonding surface of the head gap part, when grinding the track width, the grinding allowance and the soft magnetic thin film are horizontal. Due to the processing tolerance, the dimension of the track width does not become defective. Therefore, the yield is improved. Further, the main magnetic path portion of the soft magnetic thin film is not cut off even when the sliding surface is subsequently narrowed down, which leads to improvement of magnetic sustainability.

[0009]

Embodiments will be described below with reference to the drawings. FIG. 1 is an explanatory diagram for explaining an embodiment of a method of manufacturing a magnetic head according to the present invention, in which 1 is a substrate and 2 is a substrate.
L-shaped groove, 3 soft magnetic thin film, 4 non-magnetic non-conductive thin film,
Reference numeral 5 denotes a narrowing processing portion margin. On the surface of a substantially rectangular parallelepiped substrate 1 made of a non-magnetic material such as crystallized glass or ceramics, a plurality of substantially rectangular-shaped cross-sections having predetermined dimensions and depth so as to be horizontal to the processing margin for performing the narrowing processing in advance. Groove 2 is formed, and subsequently, a non-magnetic non-conductive thin film 4 made of, for example, SiO ₂ shown in FIG. 2 and sendust, etc. are formed on the vertical surface of the L-shaped groove 2 by vacuum deposition or sputtering. The soft magnetic thin films 3 are formed alternately with a predetermined film thickness. At this time, the substrate for film formation is tilted depending on the shape and angle of the V-shaped groove, and the film formation incident angle, which is a problem particularly in vapor deposition, is about ± 20 °, which does not cause a problem in characteristics. .

3 and 4 are structural views of a magnetic head according to the present invention. FIG. 3 is a perspective view and FIG. 4 is a view seen from the sliding surface of FIG. In the figure, 6 is a low-melting glass, 7 is a window for winding,
Reference numeral 8 is a winding wire, and other parts having the same functions as those in FIG. Narrowing is performed by grinding so that the head gap portion has a predetermined track width. Further, the low melting point glass 6 is filled so as to fill each of the L-shaped grooves 2.
And then the surface of the low melting point glass 6 is polished into a flat surface until the apex position of the L-shaped groove 2 is reached, and then the coil winding window 7 is formed.

Then, the head gap gap is polished, and a non-magnetic gap material such as SiO ₂ is film-coated on the polished surface by vacuum vapor deposition or sputtering, and the film-coated surfaces face each other. The two blocks are joined with the respective soft magnetic thin films 3 positioned in the same straight line,
After that, the sliding surface is narrowed down, but even in this case, the soft magnetic thin film 3 is not cut out unlike the conventional magnetic head shown in FIG. 6, so that the magnetic characteristics are improved.

Then, the magnetic head having a sliding surface as shown in FIG. 4 is prepared by cutting the magnetic head to a predetermined size. According to the method for manufacturing the magnetic head, since the grinding allowance and the soft magnetic thin film when performing the track width narrowing process are vertical,
Due to the processing tolerance in the subsequent polishing of the head / gap joint, the dimension of the track width does not become defective.
Further, the soft magnetic thin film is not cut off even when the sliding surface is subsequently narrowed down, which leads to improvement of magnetic characteristics.

That is, the substrate 1 is provided with the V-shaped groove 2, and the non-magnetic non-conductive thin film 4 and the soft magnetic thin film 3 are alternately formed on the vertical surface of the L-shaped groove 2 to form the film forming portion. Further, a part of the film forming portion is ground to provide a narrowing margin 5 to form a substrate block. A substrate block having the same structure is rotationally symmetrically joined to the substrate block so that the soft magnetic thin film 3 is positioned on the same straight line, and the low melting point glass 6 is placed in the void formed by the joined substrate blocks. Fill. As a result, since the grinding allowance 5 and the soft magnetic thin film 3 when the track width of the head / gap portion is drawn are horizontal, the track width dimension defect due to the processing tolerance in polishing is eliminated.

[0014]

As is apparent from the above description, the present invention has the following effects. That is, in the groove processing for forming the film forming portion of the magnetic head, the groove is formed perpendicular to the processing margin for performing the narrowing processing in advance, and then the soft magnetic thin film is formed on the vertical surface, and the conventional track width dimension is set. Grinding is performed while narrowing down, and because of this, the grinding allowance when narrowing down the track width and the soft magnetic thin film are vertical, so the processing tolerance in subsequent polishing of the head gap junction is As a result, the dimension of the track width does not become defective. In addition, the soft magnetic thin film is not cut off during the subsequent sliding surface narrowing processing, and therefore the magnetic characteristics are improved.

[Brief description of drawings]

FIG. 1 is an explanatory diagram for explaining an embodiment of a method of manufacturing a magnetic head according to the present invention.

FIG. 2 is a view showing a plurality of grooves having a generally V-shaped cross section according to the present invention.

FIG. 3 is a perspective view of a magnetic head according to the present invention.

FIG. 4 is a view seen from a sliding surface of FIG.

FIG. 5 is a perspective view of a conventional magnetic head.

FIG. 6 is a view as seen from the sliding surface of FIG.

FIG. 7 is a perspective view of another conventional magnetic head.

FIG. 8 is a view seen from the sliding surface of FIG. 7.

FIG. 9 is a diagram showing a relationship between a narrowing margin and a soft magnetic thin film in a conventional magnetic head.

FIG. 10 is an enlarged view of FIG.

FIG. 11 is a diagram showing a relationship between a track width and a grinding amount in a conventional magnetic head.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... L-shaped groove, 3 ... Soft magnetic thin film, 4 ... Non-magnetic non-conductor thin film, 5 ... Narrowing processing margin (margin), 6 ... Low melting point glass, 7 ... Winding window, 8 ... Winding.

Claims (2)

[Claims] 1. A groove is formed on a substrate, a soft magnetic thin film and a non-magnetic non-conductor thin film are alternately laminated along the groove to form a film forming portion, and the film forming portion is formed into a predetermined film by processing. In a method of manufacturing a magnetic head, which is narrowed down to a track width dimension, and the narrowed portions are faced to each other and adhered with a low melting point glass, a L-shaped groove is formed on the substrate, and a soft surface is formed on a vertical surface of the L-shaped groove. A method of manufacturing a magnetic head, comprising forming a magnetic thin film and then grinding part of the soft magnetic thin film. 2. A L-shaped groove provided on a substrate, a film forming unit in which a non-magnetic non-conductor thin film and a soft magnetic thin film are alternately formed on a vertical surface of the L-shaped groove, and the film forming unit. Is rotationally symmetrical so that the soft magnetic thin film of one substrate block having a narrowed portion obtained by grinding a part of the other and the other substrate block having the same configuration as the one substrate block are located on the same straight line. A magnetic head having a low melting point glass filled in a void portion bonded to the magnetic head.