JPH07132259A - Paste applying machine - Google Patents

Abstract

PURPOSE:To improve the accuracy of applying and plotting by measuring the position of the paste discharge port of a nozzle by a first means, detecting the positional deviation from before exchange of the nozzle by a second means and adjusting the position of a camera for positioning a substrate by a third means. CONSTITUTION:The tentative substrate 7 is attracted and held on an attraction base 13 and the substrate 1 existing at the visual field center of the image recognizing camera 11a is moved by a prescribed distance to move the applying point to right below the nozzle 1 when the nozzle exchange is executed. The nozzle 1 is then lowered and the paste is discharged onto the tentative substrate 7, by which a dotty paste film is formed. Next, the tentative substrate is moved backward by a prescribed distance and the dotty paste film is photographed by the image recognizing camera 11a. The image thus obtd. is sent to a controller 14 which in turn determines the centroid of the paste film by executing image processing. The positional deviation from the exchange of the nozzle 1 is then detected. Tables 18, 19 for moving the camera are moved by servo motors 15a to 15f in accordance with such positional deviation, by which the position of the image recognizing camera 11a is adjusted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a paste applicator for applying and drawing a paste pattern having a desired shape on a substrate placed on a table, and more particularly to a paste applicator in which nozzles can be replaced.

[0002]

2. Description of the Related Art A substrate mounted on a table is made to face a nozzle fixed to the tip of a paste storage cylinder in which paste is stored, and at least one of the nozzle and the table is discharged from the paste discharge port of the nozzle. An example of a paste applicator using a discharge drawing technique for applying a paste on a substrate with a desired pattern by moving one of them to change the relative positional relationship between them is disclosed in, for example, Japanese Patent Application Laid-Open No. No. 52742. In such a paste applicator, an insulating substrate is used as a substrate, and a resistance paste pattern is formed on the insulating substrate by discharging a resistance paste from the paste discharge port at the tip of the nozzle. It is a thing.

[0003]

By the way, in the case of the above-mentioned paste applicator, the paste stored in the paste storage cylinder is exhausted and the paste is cut off during the drawing on the next substrate. There are cases. In order to prevent this, it is conceivable to fill the paste storage cylinder with paste before starting drawing on the next substrate.
Since such filling has a structural problem as a precision machine, it is usually possible to replace it with a new paste container filled with paste. In this case, the nozzle is integrated with the paste container, so that the nozzle is also replaced at the same time. Hereinafter, such replacement is referred to as replacement of the nozzle.

However, if there is a slight variation in the processing accuracy and mounting accuracy of the paste storage cylinder, nozzle, etc.,
When the nozzle is replaced, the position of the paste discharge port at the tip of the nozzle is displaced before and after the replacement of the nozzle, and it is often impossible to draw a paste pattern having a desired shape at a predetermined correct position on the substrate.

That is, when drawing the same paste pattern on a plurality of substrates, the drawing positions of the paste patterns on these substrates must be the same, but as described above, the nozzle ejection port at the nozzle tip is replaced by replacing the nozzle. When the position is changed, the paste pattern formation position on the substrate is deviated before and after the nozzle is replaced, and the value as a product is lost. For example, in a liquid crystal encapsulation substrate of a liquid crystal display device, if the patterns of the sealant are misaligned, when these substrates are overlaid, some of the display pixels are located outside the pattern and the display cannot be performed correctly. It may become a device.

Further, when the nozzle is replaced during the drawing operation of the paste pattern and the position of the nozzle discharge port at the tip of the nozzle is changed by the replacement of the nozzle, the end of the paste pattern formed before the replacement of the nozzle is changed. There is a gap between the position and the tip position of the paste pattern formed after the replacement. This deviation becomes a serious problem as the drawn paste pattern becomes thinner.

Taking a resistance pattern as an example, it seems that the paste pattern formed before the nozzle replacement and the paste pattern formed after the nozzle replacement are partially overlapped or bent in the width direction. In this case, the resistance value per unit length in this part of the resistance pattern is different from that in other parts, and in particular, the paste pattern and nozzle formed before nozzle replacement If a gap is formed at the joint with the paste pattern formed after the replacement, the resistance pattern will be disconnected. When the seal material of the liquid crystal display device is applied by drawing, the seal pattern may be interrupted. In such a case, the liquid crystal cannot be sealed.

An object of the present invention is to solve such a problem and to enable a paste pattern of a desired shape to be accurately applied and drawn even if the positional relationship of the nozzle discharge port with respect to the substrate changes due to nozzle replacement or the like. Another object of the present invention is to provide such a paste coating machine.

[0009]

In order to achieve the above object, the present invention provides a first means for measuring the position of a paste discharge port of the nozzle when the nozzle is replaced, and the first means. Second means for calculating the amount of positional deviation of the nozzle discharge port of the nozzle from the measurement result of No. 3, and third means for adjusting the position of the substrate positioning camera according to the amount of positional deviation obtained by the second means. And means are provided.

Further, according to the present invention, storage means for storing information indicating that the nozzle has been replaced is provided, and the first, second and third means are operated based on this information.

[0011]

When the nozzle is replaced, the position of the paste discharge port of the nozzle is measured by the first means, and the position deviation amount from before the replacement of the nozzle is detected by the second means based on the measurement result. To be done. The position of the board positioning camera is adjusted by the third means based on the detected amount. This eliminates the displacement of the nozzles before and after replacement.

When the nozzle is replaced, information indicating this is stored in the storage means. When drawing paste patterns of the same shape on a plurality of substrates, even if the nozzle is replaced during the process, it is possible to know that the nozzle has been replaced by the information stored in the storage means. When this is read from this storage means, the above-mentioned nozzle positional deviation is automatically measured and the position of the substrate positioning camera is adjusted and moved. As a result, the paste pattern can be drawn from the same position on each substrate.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view showing an embodiment of a paste applicator according to the present invention, in which 1 is a nozzle, 2 is a paste storage cylinder (or syringe), 3 is an optical range finder, and 4a is Z. Axis table, 4b camera support, 5 X-axis table, 6
Is a Y-axis table, 7 is a substrate, 8 is a θ-axis table, 9 is a mount, 10 is a Z-axis table support, 11a is an image recognition camera, 11b is a lens barrel of the image recognition camera, 12 is a nozzle support, 13 Is an adsorption table, 14 is a control device, and 15a to 15
c, 15e and 15f are servo motors, 16 is a monitor, 1
7 is a keyboard, 18 is an X-axis table for moving the camera, 1
Reference numeral 9 is a Y-axis table for moving the camera.

In FIG. 1, an X-axis table 5 is fixed on a mount 9, and a Y-axis table 6 is mounted on the X-axis table 5 so as to be movable in the X-axis direction. A θ-axis table 8 is mounted on the Y-axis table 6 so as to be movable in the Y-axis direction, and a suction table 13 is fixed on the θ-axis table 8. The substrate 7 is sucked and fixed onto the suction table 13 so that, for example, each side thereof is parallel to the X and Y axis directions.

The substrate 7 mounted on the suction table 13 can be moved in the X and Y axis directions by the control drive of the controller 14. That is, the servomotor 15b is controlled by the control device 14
When driven by, the X-axis table 5 moves in the X-axis direction, the substrate 7 moves in the X-axis direction, and the servo motor 15c
When is driven, the Y-axis table 6 moves in the Y-axis direction and the substrate 7 moves in the Y-axis direction. Therefore, when the controller 14 moves the X-axis table 5 and the Y-axis table 6 respectively by arbitrary distances, the substrate 7 moves by an arbitrary distance in an arbitrary direction within a plane parallel to the pedestal portion 9. Become. In addition, the θ-axis table 8 is a servo motor 15d shown in FIG.
Thus, it is possible to rotate in the θ-axis direction around the center position.

A Z-axis table support portion 10 is installed on the pedestal portion 9, and the Z-axis table support portion 10 is installed in the Z-axis direction (vertical direction).
A Z-axis table 4a is attached so as to be movable.
The nozzle 1, the paste storage cylinder 2, and the optical distance meter 3 are mounted on the Z-axis table 4a. The control device 14 also controls and drives the Z-axis table 4a in the Z-axis direction (vertical direction). That is, the servo motor 15a
Is driven by the controller 14, the Z-axis table 4
a moves in the Z-axis direction, and accordingly, the nozzle 1, the paste container 2, and the optical distance meter 3 move in the Z-axis direction. The nozzle 1 is provided at the tip of the paste storage cylinder 2,
The nozzle 1 and the lower end of the paste storage cylinder 2 are slightly separated by a nozzle support 12 having a connecting portion.

The optical rangefinder 3 has a tip (lower end) of the nozzle 1.
The distance between the paste discharge port and the upper surface of the substrate 7 is
Non-contact and triangulation measurements.

That is, as shown in FIG. 2, the optical rangefinder 3
The lower end of is cut in a triangular shape, and two inclined surfaces facing each other are formed in the cut. A light emitting element is provided on one of these slopes, and a light receiving element is provided on the other. The nozzle support 12 is attached to the tip of the paste storage cylinder 2 and extends below the cut portion of the optical distance meter 3, and the nozzle 1 is attached to the lower surface of the tip.

The light emitting element provided in the cut portion of the optical range finder 3 has a substrate 7 (FIG. 1) as indicated by a chain line.
The lower position of the upper nozzle 1 is irradiated, and the reflected light from the lower position is received by the light receiving element. When the distance between the paste discharge port at the tip of the nozzle 1 and the upper surface of the substrate 7 is the correct distance, the nozzle 1 and the optical element are arranged so that the light from the light emitting element irradiates the surface of the substrate 7 directly below the nozzle 1. The positional relationship with the optical rangefinder 3 and the arrangement of the light emitting element and the light receiving element in the optical rangefinder 3 are set. Therefore, when the distance between the paste discharge port of the nozzle 1 and the substrate 7 changes, the irradiation position of the light from the light emitting element deviates from the position directly below the nozzle 1 on the substrate 7, and as a result, the light receiving element receives light. The state changes. Thereby, the distance between the paste discharge port of the nozzle 1 and the substrate 7 can be measured.

As will be described later, when the substrate 7 moves in the X- and Y-axis directions to form a paste pattern, the irradiation point of light from the light emitting element on the substrate 7 (hereinafter referred to as measurement point). ) Crosses the already formed paste pattern, an error due to the thickness of the paste pattern occurs in the measurement value of the distance between the paste discharge port of the nozzle 1 and the surface of the substrate 7 by the optical distance meter 3. Therefore, in order to prevent the measurement point from traversing the paste pattern as much as possible, a position that is displaced obliquely with respect to the X and Y axes from the paste dropping point (hereinafter referred to as the application point) from the nozzle 1 onto the substrate 7 is measured. It should be a point.

When the paste in the paste accommodating cylinder 2 is used up, the nozzles are replaced as described above so that the application point coincides with a certain set position on the substrate 7 where the paste is to be applied. Although the nozzle 1 is attached, the position of the nozzle 1 may change before and after replacement of the nozzle due to variations in the attachment accuracy of the paste storage cylinder 2, the nozzle support 12, and the nozzle 1. However, as shown in FIG. 2, when the application point is within an allowable range (ΔX, ΔY) of a preset size centered on the set position, the nozzle 1
Shall be properly installed. However, ΔX is the width in the X-axis direction of the allowable range, and ΔY is the width in the Y-axis direction.

Returning to FIG. 1, a camera moving X-axis table 18 is fixed to the Z-axis table supporting portion 10, and the camera moving Y-axis is movably mounted on the camera moving X-axis table 18 in the X-axis direction. A table 19 is mounted. Then, on the Y-axis table 19 for moving the camera, the camera support 4b is attached so as to be movable in the Y-axis direction, and the image recognition camera 11a having the lens barrel 11b attached thereto is placed on the camera support 4b.

The image recognition camera 11a can be moved in the X and Y axis directions by the control drive of the control device 14. That is, when the servo motor 15e is driven by the control device 14, the camera moving X-axis table 18 moves in the X-axis direction, the image recognition camera 11a moves in the X-axis direction, and the servo motor 15f is driven. The camera moving Y-axis table 19 moves in the Y-axis direction, and the image recognition camera 11a moves in the Y-axis direction. Therefore, the controller 14 controls the camera moving X-axis table 18 and the camera moving Y-axis table.
When the axis table 19 and the axis table 19 are moved by arbitrary distances,
The image recognition camera 11a moves in a direction parallel to the substrate 7 in a desired direction and by a desired distance.

The control device 14 is supplied with data from the optical rangefinder 3 and the image recognition camera 11a, and in response to this, the servomotors 15a, 15b, 15c, 15e, 15f and the servomotor 15d for the θ-axis table 8 ( (Illustrated in Figure 3)
To drive. In addition, the encoders provided in these servo motors feed back data on the drive status of each motor to the control device 14.

In this structure, the substrate 7 having a rectangular shape
Is placed on the suction table 13, the suction table 13 holds the substrate 7 by vacuum suction. Then, by rotating the θ-axis table 8, each side of the substrate 7 is set to be parallel to each of the X and Y axes. After that, optical rangefinder 3
The Z-axis table 4a is moved downward by the drive control of the servomotor 15a based on the measurement result of the above, and the nozzle 1 is moved from above the substrate 7 to the paste discharge port of the nozzle 1 and the surface of the substrate 7. Lower until the distance between them reaches the specified distance.

After that, the paste supplied from the paste container 2 through the nozzle support 12 is discharged from the paste discharge port of the nozzle 1, and together with this, the servomotor 1
The X-axis table 5 and the Y-axis table 6 are appropriately moved by the drive control of 5b and 15c, whereby the paste is applied on the substrate 7 in a pattern of a desired shape. The paste pattern to be formed can be converted by the distance in the X and Y axis directions. Therefore, when data for forming a pattern of a desired shape is input from the keyboard 17, the control device 14 converts this data into the number of pulses given to the servomotors 15b and 15c, outputs a command, and draws automatically. Done.

FIG. 3 is a block diagram showing a specific example of the control device 14 in FIG. 1, in which 14a is a microcomputer, 14b is a motor controller, 14ca is a Z-axis driver, 14cb is an X-axis driver, and 14cc is a Y-axis. A driver, 14 cd is a θ-axis driver, 14 ce is a camera moving X-axis driver, 14 cf is a camera moving Y-axis driver, 14 d is an image processing device, 14 e is an external interface, and 15 d is a servo motor for the θ-axis table 8 in FIG. 1. , E are encoders, and the parts corresponding to those in FIG.

In the figure, the control device 14 has a ROM storing a processing program and an R storing various data.
AM, a microcomputer 14a having a built-in CPU for calculating various data, and servo motors 15a
˜15f motor controller 14b, servo motors 15a to 15f drivers 14ca to 14cf, an image processing device 14d that processes an image read by the image recognition camera 11a, a keyboard 17 and an image processing device 14d.
Is connected to the external interface 14e.

A pattern drawing pattern from the keyboard 17
Various data indicating exchange of nozzles and nozzles, various data generated by the processing of the microcomputer 14a, and the like are stored in the RAM incorporated in the microcomputer 14a.

Next, the processing operation of the control device 14 at the time of paste application drawing and nozzle replacement will be described.

In FIG. 4, when the power is turned on (step 100), the paste applicator is initialized (step 200). In this initial setting, as shown in FIG. 5, the Z-axis table 4a, the X-axis table 5 and the Y-axis table 6 are positioned at a predetermined origin position (step 2).
01), paste pattern data and substrate 7 position data
Data is set (step 202) and paste ejection end position data is set (step 203).
Data input for these settings is performed from the keyboard 17. Such input data is stored in the RAM incorporated in the microcomputer 14a as described above.

When the above initialization processing is completed, it is determined in FIG. 4 whether or not the nozzle has been replaced (step 300). The replacement of the nozzle will be described later in detail in the paste film forming processing step (step 700) in FIG. If the nozzle has been replaced, the nozzle position deviation amount measurement and camera position comparison adjustment processing movement processing (step 400) is performed, but if the nozzle has not been replaced, the process proceeds to step 500.

This step 4 will be described below with reference to FIGS. 1 and 6.
00 will be described in detail.

First, a temporary substrate is mounted on the suction table 13 (step 401) and held by suction (step 402).
The temporary substrate at the center of the visual field of the image recognition camera 11a is moved to directly below the nozzle 1 (step 403). And
The Z-axis table 4a is lowered to lower the nozzle 1 (step 404), and the paste filled in the paste storage cylinder 2 is discharged from the paste discharge port of the nozzle 1 to form dots on the temporary substrate. Forming a paste film (step 40)
5). Then, the nozzle 1 is raised (step 40
6) The temporary substrate is moved below the center of the visual field of the image recognition camera 11a (step 407). The image recognition camera 11a photographs the dot-shaped paste film, and the output thereof is subjected to known image processing by the image processing device 14d (FIG. 3) to determine the center of gravity of the dot-shaped paste film. The center position) is obtained (step 408).

The above operation will be described with reference to FIG. Now, when the application point when the nozzle 1 on the temporary substrate is not displaced is P1 and the visual field of the image recognition camera 11a is G1, the center of the application point P1 (the center position of the dot-like paste film) is This means the correct position of the nozzle 1 (more accurately, the correct position of the paste ejection port of the nozzle 1). The distance between the correct position of the nozzle 1 which is the center of the application point P1 and the center of the visual field G1 of the image recognition camera 11a is X1.
And

Then, the provisional substrate is moved by the distance X1 by the servo motor 15b, the paste is dropped from the nozzle 1 to the coating point P1 shown on the provisional substrate, and then the provisional substrate is separated by the distance X1. Send back only. This allows
When the nozzle 1 is not displaced, that is, when the nozzle 1 is in the correct position, the center of the application point P1 coincides with the center of the visual field G1 of the image recognition camera 11a. However, when the nozzle 1 is displaced from its correct position, the center of the visual field G1 of the image recognition camera 11a and the center of the application point do not match because the nozzle 1 is not located at the center of the application point P1 shown in the figure. The application point at this time is P2.

The above is a series of operations of steps 401 to 408 in FIG. 6. Next, after such operation, the microcomputer 14a causes the image recognition camera 1 in FIG.
Deviations ΔX1 and ΔY1 shown in FIG. 7 between the center of the visual field G1 of 1a and the center of the coating point P2 are obtained (step 409), and these are stored in the RAM as the positional deviation amount of the nozzle 1. Then, whether the nozzle positional deviation amounts ΔX1 and ΔY1 are within a range of a value (ΔX / 2, ΔY / 2) that is 1/2 or less of the positional deviation allowable range of the nozzle 1 described in FIG. It is determined whether or not (step 410), this range (ΔX / 2 ≧ ΔX1, Δ
If it is within Y / 2 ≧ ΔY1), it is determined that the nozzle 1 is not displaced and the suction of the temporary substrate is released (step 41).
4).

When the nozzle position deviation amounts ΔX1 and ΔY1 are out of the above range (ΔX / 2 <ΔX1, ΔY / 2 <ΔY1), the previously obtained position deviation amounts ΔX1 and ΔY1 are set. X-axis table 18 for camera movement, Y-axis table for camera movement
The movement amount of the bull 19 is calculated (step 411), and the operation amount is set in the motor controller 14b (FIG. 3) based on the obtained movement amount (step 412). The motor controller 14b is a camera moving X-axis driver 14c.
The servo motors 15e and 15f are driven via the driver e and the camera moving Y-axis driver 14cf, respectively, and the camera moving X-axis table 1 is rotated by rotating the servo motors 15e and 15f respectively.
8 and the camera movement Y-axis table 19 are moved. As a result, the image recognition camera 11a moves so that the center of the visual field G1 faces the center of the application point P2 (step 413).

In the course of this movement, the process returns to step 408 again, the center of the application point P2 is obtained (step 408), and the deviations ΔX1 and ΔY1 between the center of the visual field G1 of the image recognition camera 11a and the center of the application point P2 are calculated. Newly requested (Step 40)
9) The above operation is performed. Then, the positional deviation amounts ΔX1 and ΔY1 of the nozzle 1 are the above values (ΔX / 2, ΔY / 2).
The series of operations in steps 408 to 413 is repeated until the value falls within the range.

The above is the operation of step 400 in FIG.

Next, in FIG. 4, when there is no replacement of the paste storage cylinder 2 or when the processing of step 400 is completed, a substrate for applying and drawing a paste pattern of a desired shape is mounted on the suction table 13 (FIG. 1). And hold it by suction (step 500), and perform preliminary substrate positioning processing (step 6).
00). Hereinafter, this process will be described with reference to FIG.

In FIG. 8, first, a positioning marker attached beforehand to the substrate 7 (FIG. 1) mounted on the suction table 13.
The image is taken by the image recognition camera 11a (step 60
1), the center of gravity position of the positioning mark in the visual field G1 (FIG. 7) of the image recognition camera 11a is obtained by image processing (step 602). Then, the shift amount between the center of the visual field G1 and the position of the center of gravity of the positioning mark is calculated (step 60).
3), X-axis table 5, Y-axis table 6 and θ in FIG. 1 for moving the substrate 7 to a desired position by using this shift amount.
The amount of movement of the axis table 8 is calculated (step 604).
Then, the calculated movement amounts are set to the servo motor 15b.
~ 15d (Fig. 1, Fig. 3) converted to manipulated variable (step 6
05), the servomotors 15b-1b depending on the operation amount
Drive 5d. As a result, the respective tables 5, 7, 8 move and the substrate 7 moves toward the desired position (step 6).
06).

Along with this movement, the positioning mark on the substrate 7 is again photographed by the image recognition camera 11a, and the positioning mark center (center of gravity) within the visual field G1 is measured (step 607). Deviations ΔX2 and ΔY2 between the center of G1 and the center of the mark are obtained and stored in the RAM of the microcomputer 14a as the amount of positional deviation of the substrate 7 (step 608). Then, the positional deviation amounts ΔX2 and ΔY2 are values (ΔX / 2, ΔY /
It is confirmed whether it is within the range of 2) (step 60).
9). If it is within this range, it means that the processing of step 600 is completed. If it is out of this range, the process returns to step 604 to repeat the above series of processing, and repeat until the positional deviation amounts ΔX2 and ΔY2 fall within the above range.

As a result, the positional deviation amount between the paste discharge port of the nozzle 1 and the desired coating point on the substrate 7 caused by the replacement of the nozzle 1 is ΔX ≧ ΔX1 + ΔX2, Δ
Y ≧ ΔY1 + ΔY2, and the substrate 7 is positioned so that the desired coating point on the substrate 7 from which the coating is to be started is within the allowable range (ΔX, ΔY) from directly below the ejection port of the nozzle 1. It was done.

Returning to FIG. 4 again, when the processing of step 600 is completed, the process proceeds to the paste film forming step (processing) of step 700. This will be described below with reference to FIG.

In FIG. 9, first, the substrate 7 is moved to the coating start position (step 701), and then the height of the nozzle 1 is set (step 702). That is, the distance from the discharge port of the nozzle 1 to the surface of the substrate 7 is made equal to the thickness of the paste film formed. Since the substrate 7 is positioned at the desired position in the substrate preliminary positioning process (step 600 in FIG. 4) described above, the substrate 7 can be moved to the coating start position with high accuracy, and the process proceeds to step 703 to perform this coating. The nozzle 1 starts discharging the paste from the start position.

Then, the measured data of the distance from the paste discharge port of the nozzle 1 to the substrate 7 by the optical distance meter 3 is input to measure the undulation of the surface of the substrate 7 (step 70).
4) Also, with this measured data of the optical distance meter 3,
It is determined whether or not the measurement position of the optical rangefinder 3 is on the paste film (step 705). For example, it is determined that the measurement position has crossed the paste film due to an extreme change in the measured data of the optical distance meter 3 or an undulation exceeding an allowable value.

When the measurement position of the optical range finder 3 is not on the paste film, the correction data for moving the Z-axis table 4a is calculated based on the measured data (step 70).
6). Then, the height of the nozzle 1 is corrected using the Z-axis table 4a, and the position of the nozzle 1 in the Z-axis direction is maintained at the set value (step 707). On the other hand, when it is determined that the measurement position is passing over the paste film, the height of the nozzle 1 is maintained at the height before this determination, and the ejection of the paste is continued (step 705). . When the measurement position is passing over a paste film having a small width, the waviness of the substrate 7 hardly changes in most cases. Therefore, if the height of the nozzle 1 is not changed, the paste is discharged. There is no change in the shape, which allows a paste pattern of a desired thickness to be drawn.

Next, it is judged whether or not the set pattern operation is completed (step 708). If it is completed, the paste ejection is ended (step 709), and if it is not completed, the paste ejection is continued. This processing is a processing operation depending on whether or not the end point of the paste pattern which has been continuously drawn has been reached. This end point is not necessarily the end point of the pattern of the entire desired shape drawn on the substrate 7. The pattern of the entire desired shape may be composed of a plurality of partial patterns that are separated from each other, and it is determined in step 710 whether the end point of each pattern including these patterns has been reached. If this is one end point of the partial pattern. Again, the substrate surface waviness measurement process (step 70
Return to 4) and repeat the above series of steps.

When the measurement position has finished passing over the paste film, the process returns to the original nozzle height correction step (steps 706 and 707).

In this way, when the paste film is formed over the entire pattern of the desired shape (step 710), the Z-axis table 4a is driven to raise the nozzle 1 (step 711), and the paste is formed. -End the strike film forming step (step 700).

Returning to FIG. 4 again, when the processing of step 700 is completed, it means that the application drawing of the paste pattern on the substrate 7 held on the adsorption table 13 is completed, and then this substrate 7 is adsorbed. Discharge from the base 13 (step 80
0), it is determined whether or not all the above steps are stopped (step 900). That is, when a paste film is formed on a plurality of substrates 7 with the same pattern, a syringe replacement determination step (step 300) is performed every time drawing of one substrate 7 is completed.
Then, the series of processing of the above steps 300 to 900 is performed for each substrate 7.

In the stop determination process (step 900), for example, the operator can confirm whether or not the remaining amount of paste in the paste storage cylinder 2 is sufficient, or the amount of paste discharge after replacement. If it is judged from the accumulation by the microcomputer 14a and the remaining amount is very small, the nozzle 1
And the paste container 2 is replaced. Then, the information is input from the information key board 17 indicating the fact of this exchange, stored as a flag in the RAM of the microcomputer 14a, and the RAM is returned every time the syringe exchange determination step (step 300) in FIG. 4 is returned. By checking the presence / absence of this flag in step 4, the next nozzle position deviation amount measuring step (step 40
In 0), the positional deviation of the nozzle 1 is corrected.

The presence / absence of a data table flag relating to the paste accommodating cylinder exchange in the RAM of the microcomputer 14a is confirmed, and the next step of measuring the positional deviation amount of the nozzle 1 and the camera position comparison adjustment moving step (step 400). When the center of the visual field G1 of the image recognition camera 11a is automatically moved for comparison and adjustment, the data regarding the replacement of the paste storage cylinder of the RAM is displayed.
The flag of the table is erased, and the nozzle position deviation amount measurement and camera position comparison adjustment movement process (step 4
00) is not re-executed.

Even if the paste accommodating cylinder 2 is replaced at this point during the paste film forming step (step 700) described with reference to FIG. Substrate discharging process (step 800)
In the case of the substrate 7 in which the coating and drawing can be continued as it is without moving to or changing to, the syringe replacement determination step (step 300), the nozzle position deviation amount measurement, and the camera position comparison adjustment movement step in FIG. 4 are performed. (Step 40
0) may be performed before restarting the paste film forming step (step 700).

In the above embodiment, when the paste pattern is formed by drawing and applying the paste, the substrate 7 is moved in the X and Y axis directions with respect to the paste storage cylinder 2, but the substrate 7 is fixed. Then, the paste container 2 and hence the nozzle 1 may be moved in the X and Y axis directions.

Further, in the above embodiment, the image recognition camera 1
I made the positioning reference point of 1a coincide with the center of the visual field,
Within the field of view, the positioning reference point can be any point other than the center of the field of view.

Further, in the above embodiment, the nozzle position deviation amount measurement and camera position comparison adjustment movement process (step 40).
0), the allowable values of the deviations ΔX1 and ΔY1 between the positioning reference point of the image recognition camera 11a and the application point P2 of the nozzle, and the positioning reference point of the image recognition camera 11a generated in the substrate preliminary positioning step (step 600). The deviations from the position of the center of gravity of the positioning marks are made equal to the allowable values of ΔX2 and ΔY2. ΔX1 = ΔX2 = ΔX / 2, ΔY1 = ΔY
2 = ΔY / 2, but this value is X for board positioning.
Control accuracy of the axis table 5 and the Y-axis table 6, and a camera movement X-axis table 1 for positioning the image recognition camera 11a.
8. Considering the control accuracy of the camera movement Y-axis table 19, etc., it may be set to any value such that ΔX ≧ ΔX1 + ΔX2, ΔY ≧ ΔY1 + ΔY2.

Furthermore, in order to shorten the time required for the initial setting process (step 200) of the coating machine shown in FIG. 5, the external interface 14e (FIG. 3) is provided with an IC card or a floppy disk or a hard disk. A storage / readout device for external storage means such as a hard disk is connected, while various data settings for the applicator initialization process (step 200) of FIG. 5 are executed in advance by a personal computer or the like. At the time of initializing processing of the applicator (step 200), each data is transferred from the external storage means to the RAM of the microcomputer 14a in FIG. 3 through the memory reading device connected to the external interface 14e. You may move it.

[0060]

As described above, according to the present invention,
Even if the positional relationship between the nozzle and the paste ejection port changes due to the replacement of the paste container, the positional relationship between the nozzle and the substrate can be set as desired and with high accuracy, and a highly accurate paste pattern can be drawn. can do.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an embodiment of a paste applicator according to the present invention.

FIG. 2 is a perspective view showing a positional relationship between the nozzle of FIG. 1 and an optical distance meter.

FIG. 3 is a block diagram showing a specific example of a control device in FIG.

FIG. 4 is a flowchart showing the overall operation of the embodiment shown in FIG.

5 is a flowchart showing an initial setting process of the paste applicator in FIG.

FIG. 6 is a flowchart showing a nozzle position deviation amount measurement and camera position comparison adjustment movement process in FIG.

FIG. 7 is an operation explanatory diagram of the flowchart shown in FIG. 6;

8 is a flowchart showing a substrate preliminary positioning step in FIG.

9 is a flowchart showing a paste film forming process in FIG.

[Explanation of symbols]

 1 Nozzle 2 Paste Storage Cylinder 3 Optical Distance Meter 4a Z-axis Table 4b Camera Support 5 X-axis Table 6 Y-axis Table 7 Substrate 8 θ-axis Table 9 Stand 10 Z-axis Table -Bull support 11a Image recognition camera 12 Nozzle support 13 Suction table 14 Controller 15a to 15f Servo motor 16 Monitor 17 Keyboard 18 X-axis table for camera movement 19 Y-axis table for camera movement

Front page continuation (72) Inventor Fukuo Yoneda 5-2 Koyodai, Ryugasaki, Ibaraki Hitachi Techno Engineering Co., Ltd. Development Laboratory (72) Satoshi Yawata 5-2 Koyodai, Ryugasaki, Ibaraki Hitachi Techno Engineering Development Laboratory Co., Ltd. (72) Inventor Kiyoshi Imaizumi 5-2 Koyodai, Ryugasaki, Ibaraki Hitachi Techno Engineering Co., Ltd. Development Lab (72) Inventor Yukihiro Kawasumi 5-2 Koyodai, Ryugasaki, Ibaraki Hitachi Techno Engineering Co., Ltd.

Claims (2)

[Claims] 1. A substrate is placed on a table so as to face a paste ejection port of a nozzle, and the nozzle and the table are ejected while ejecting the paste filled in a paste container from the paste ejection port onto the substrate. A first means for measuring the position of the paste discharge port of the nozzle in a paste applicator in which the nozzle can be replaced by changing the relative positional relationship of the nozzles to form a paste pattern of a desired shape on the substrate. A second means for calculating the amount of positional deviation of the paste ejection port of the nozzle from the measurement result of the first means; and a substrate positioning camera according to the amount of positional deviation obtained by the second means. And a third means for adjusting the position of the paste ejection port of the nozzle and the substrate positioning camera in a predetermined positional relationship. A paste applicator characterized by being capable of correcting misalignment. 2. The fourth structure according to claim 1, wherein information indicating that the nozzle has been replaced is stored.
Means for reading the information from the storage means prior to drawing a paste pattern on the substrate, and the first, second, and third means based on the information read from the storage means. And a sixth means for operating the above means.