JPH0711780Y2 - 清浄送風装置 - Google Patents

清浄送風装置

Info

Publication number
JPH0711780Y2
JPH0711780Y2 JP1636790U JP1636790U JPH0711780Y2 JP H0711780 Y2 JPH0711780 Y2 JP H0711780Y2 JP 1636790 U JP1636790 U JP 1636790U JP 1636790 U JP1636790 U JP 1636790U JP H0711780 Y2 JPH0711780 Y2 JP H0711780Y2
Authority
JP
Japan
Prior art keywords
air
filter
housing
clean
fan device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1636790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03109619U (enrdf_load_stackoverflow
Inventor
英生 平間
栄季 佐々木
Original Assignee
セイコー電子部品株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー電子部品株式会社 filed Critical セイコー電子部品株式会社
Priority to JP1636790U priority Critical patent/JPH0711780Y2/ja
Publication of JPH03109619U publication Critical patent/JPH03109619U/ja
Application granted granted Critical
Publication of JPH0711780Y2 publication Critical patent/JPH0711780Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1636790U 1990-02-21 1990-02-21 清浄送風装置 Expired - Lifetime JPH0711780Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1636790U JPH0711780Y2 (ja) 1990-02-21 1990-02-21 清浄送風装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1636790U JPH0711780Y2 (ja) 1990-02-21 1990-02-21 清浄送風装置

Publications (2)

Publication Number Publication Date
JPH03109619U JPH03109619U (enrdf_load_stackoverflow) 1991-11-11
JPH0711780Y2 true JPH0711780Y2 (ja) 1995-03-22

Family

ID=31519636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1636790U Expired - Lifetime JPH0711780Y2 (ja) 1990-02-21 1990-02-21 清浄送風装置

Country Status (1)

Country Link
JP (1) JPH0711780Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990027844A (ko) * 1997-09-30 1999-04-15 윤종용 반도체장비의 공기유입장치 및 이를 이용한 화학물 오염 제거방법

Also Published As

Publication number Publication date
JPH03109619U (enrdf_load_stackoverflow) 1991-11-11

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