JPH0711468Y2 - トレー搬送装置 - Google Patents

トレー搬送装置

Info

Publication number
JPH0711468Y2
JPH0711468Y2 JP15123688U JP15123688U JPH0711468Y2 JP H0711468 Y2 JPH0711468 Y2 JP H0711468Y2 JP 15123688 U JP15123688 U JP 15123688U JP 15123688 U JP15123688 U JP 15123688U JP H0711468 Y2 JPH0711468 Y2 JP H0711468Y2
Authority
JP
Japan
Prior art keywords
tray
chamber
trays
supported
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15123688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0272540U (enExample
Inventor
正彦 長谷川
Original Assignee
株式会社芝浦製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社芝浦製作所 filed Critical 株式会社芝浦製作所
Priority to JP15123688U priority Critical patent/JPH0711468Y2/ja
Publication of JPH0272540U publication Critical patent/JPH0272540U/ja
Application granted granted Critical
Publication of JPH0711468Y2 publication Critical patent/JPH0711468Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15123688U 1988-11-22 1988-11-22 トレー搬送装置 Expired - Lifetime JPH0711468Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15123688U JPH0711468Y2 (ja) 1988-11-22 1988-11-22 トレー搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15123688U JPH0711468Y2 (ja) 1988-11-22 1988-11-22 トレー搬送装置

Publications (2)

Publication Number Publication Date
JPH0272540U JPH0272540U (enExample) 1990-06-01
JPH0711468Y2 true JPH0711468Y2 (ja) 1995-03-15

Family

ID=31425100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15123688U Expired - Lifetime JPH0711468Y2 (ja) 1988-11-22 1988-11-22 トレー搬送装置

Country Status (1)

Country Link
JP (1) JPH0711468Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4711770B2 (ja) * 2005-08-01 2011-06-29 株式会社アルバック 搬送装置、真空処理装置および搬送方法
KR101226473B1 (ko) * 2010-05-25 2013-01-28 (주)이루자 캐리어 이송 방법 및 이를 이용한 진공 처리 장치

Also Published As

Publication number Publication date
JPH0272540U (enExample) 1990-06-01

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