JPH069285Y2 - レ−ザ測長装置 - Google Patents
レ−ザ測長装置Info
- Publication number
- JPH069285Y2 JPH069285Y2 JP12634287U JP12634287U JPH069285Y2 JP H069285 Y2 JPH069285 Y2 JP H069285Y2 JP 12634287 U JP12634287 U JP 12634287U JP 12634287 U JP12634287 U JP 12634287U JP H069285 Y2 JPH069285 Y2 JP H069285Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- reflected light
- dut
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 23
- 238000012545 processing Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 description 7
- 230000002452 interceptive effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000013208 measuring procedure Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12634287U JPH069285Y2 (ja) | 1987-08-21 | 1987-08-21 | レ−ザ測長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12634287U JPH069285Y2 (ja) | 1987-08-21 | 1987-08-21 | レ−ザ測長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6433012U JPS6433012U (en, 2012) | 1989-03-01 |
| JPH069285Y2 true JPH069285Y2 (ja) | 1994-03-09 |
Family
ID=31377781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12634287U Expired - Lifetime JPH069285Y2 (ja) | 1987-08-21 | 1987-08-21 | レ−ザ測長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069285Y2 (en, 2012) |
-
1987
- 1987-08-21 JP JP12634287U patent/JPH069285Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6433012U (en, 2012) | 1989-03-01 |
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