JPH068428Y2 - 移送装置付クリーンベンチ - Google Patents
移送装置付クリーンベンチInfo
- Publication number
- JPH068428Y2 JPH068428Y2 JP1987111062U JP11106287U JPH068428Y2 JP H068428 Y2 JPH068428 Y2 JP H068428Y2 JP 1987111062 U JP1987111062 U JP 1987111062U JP 11106287 U JP11106287 U JP 11106287U JP H068428 Y2 JPH068428 Y2 JP H068428Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean
- clean bench
- transfer device
- dust
- dustproof cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 21
- 230000003749 cleanliness Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111062U JPH068428Y2 (ja) | 1987-07-20 | 1987-07-20 | 移送装置付クリーンベンチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111062U JPH068428Y2 (ja) | 1987-07-20 | 1987-07-20 | 移送装置付クリーンベンチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6416540U JPS6416540U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-01-27 |
| JPH068428Y2 true JPH068428Y2 (ja) | 1994-03-02 |
Family
ID=31348788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987111062U Expired - Lifetime JPH068428Y2 (ja) | 1987-07-20 | 1987-07-20 | 移送装置付クリーンベンチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068428Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61123351U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-01-16 | 1986-08-04 | ||
| JPS61150094U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1985-03-08 | 1986-09-17 |
-
1987
- 1987-07-20 JP JP1987111062U patent/JPH068428Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6416540U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-01-27 |