JPH068316Y2 - 竪形ターボ分子ポンプ - Google Patents
竪形ターボ分子ポンプInfo
- Publication number
- JPH068316Y2 JPH068316Y2 JP14392887U JP14392887U JPH068316Y2 JP H068316 Y2 JPH068316 Y2 JP H068316Y2 JP 14392887 U JP14392887 U JP 14392887U JP 14392887 U JP14392887 U JP 14392887U JP H068316 Y2 JPH068316 Y2 JP H068316Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- damping device
- bearing
- protrusion
- concave groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14392887U JPH068316Y2 (ja) | 1987-09-22 | 1987-09-22 | 竪形ターボ分子ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14392887U JPH068316Y2 (ja) | 1987-09-22 | 1987-09-22 | 竪形ターボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6449695U JPS6449695U (US20030204162A1-20031030-M00001.png) | 1989-03-28 |
JPH068316Y2 true JPH068316Y2 (ja) | 1994-03-02 |
Family
ID=31411188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14392887U Expired - Lifetime JPH068316Y2 (ja) | 1987-09-22 | 1987-09-22 | 竪形ターボ分子ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH068316Y2 (US20030204162A1-20031030-M00001.png) |
-
1987
- 1987-09-22 JP JP14392887U patent/JPH068316Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6449695U (US20030204162A1-20031030-M00001.png) | 1989-03-28 |
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