JPH068316Y2 - 竪形ターボ分子ポンプ - Google Patents

竪形ターボ分子ポンプ

Info

Publication number
JPH068316Y2
JPH068316Y2 JP14392887U JP14392887U JPH068316Y2 JP H068316 Y2 JPH068316 Y2 JP H068316Y2 JP 14392887 U JP14392887 U JP 14392887U JP 14392887 U JP14392887 U JP 14392887U JP H068316 Y2 JPH068316 Y2 JP H068316Y2
Authority
JP
Japan
Prior art keywords
rotor
damping device
bearing
protrusion
concave groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14392887U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6449695U (US20030204162A1-20031030-M00001.png
Inventor
昭民 金子
潔 美濃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP14392887U priority Critical patent/JPH068316Y2/ja
Publication of JPS6449695U publication Critical patent/JPS6449695U/ja
Application granted granted Critical
Publication of JPH068316Y2 publication Critical patent/JPH068316Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP14392887U 1987-09-22 1987-09-22 竪形ターボ分子ポンプ Expired - Lifetime JPH068316Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14392887U JPH068316Y2 (ja) 1987-09-22 1987-09-22 竪形ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14392887U JPH068316Y2 (ja) 1987-09-22 1987-09-22 竪形ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6449695U JPS6449695U (US20030204162A1-20031030-M00001.png) 1989-03-28
JPH068316Y2 true JPH068316Y2 (ja) 1994-03-02

Family

ID=31411188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14392887U Expired - Lifetime JPH068316Y2 (ja) 1987-09-22 1987-09-22 竪形ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH068316Y2 (US20030204162A1-20031030-M00001.png)

Also Published As

Publication number Publication date
JPS6449695U (US20030204162A1-20031030-M00001.png) 1989-03-28

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