JPH067883Y2 - 研磨装置 - Google Patents

研磨装置

Info

Publication number
JPH067883Y2
JPH067883Y2 JP1986138904U JP13890486U JPH067883Y2 JP H067883 Y2 JPH067883 Y2 JP H067883Y2 JP 1986138904 U JP1986138904 U JP 1986138904U JP 13890486 U JP13890486 U JP 13890486U JP H067883 Y2 JPH067883 Y2 JP H067883Y2
Authority
JP
Japan
Prior art keywords
pressure
pressure roller
air cylinder
shaft
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986138904U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6344753U (enrdf_load_stackoverflow
Inventor
英一 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1986138904U priority Critical patent/JPH067883Y2/ja
Publication of JPS6344753U publication Critical patent/JPS6344753U/ja
Application granted granted Critical
Publication of JPH067883Y2 publication Critical patent/JPH067883Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986138904U 1986-09-09 1986-09-09 研磨装置 Expired - Lifetime JPH067883Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986138904U JPH067883Y2 (ja) 1986-09-09 1986-09-09 研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986138904U JPH067883Y2 (ja) 1986-09-09 1986-09-09 研磨装置

Publications (2)

Publication Number Publication Date
JPS6344753U JPS6344753U (enrdf_load_stackoverflow) 1988-03-25
JPH067883Y2 true JPH067883Y2 (ja) 1994-03-02

Family

ID=31044308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986138904U Expired - Lifetime JPH067883Y2 (ja) 1986-09-09 1986-09-09 研磨装置

Country Status (1)

Country Link
JP (1) JPH067883Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1015802A (ja) * 1996-07-10 1998-01-20 Sony Corp 研磨装置および研磨方法
JP2011224680A (ja) * 2010-04-16 2011-11-10 Ebara Corp 研磨方法及び研磨装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622211A (en) * 1979-07-30 1981-03-02 Hitachi Ltd Finishing method and its device for magnetic head
JPS6076954A (ja) * 1983-09-30 1985-05-01 Victor Co Of Japan Ltd 磁気デイスク研摩装置

Also Published As

Publication number Publication date
JPS6344753U (enrdf_load_stackoverflow) 1988-03-25

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