JPH067444B2 - Composition for forming transparent conductive film containing organoindium sol - Google Patents
Composition for forming transparent conductive film containing organoindium solInfo
- Publication number
- JPH067444B2 JPH067444B2 JP61019940A JP1994086A JPH067444B2 JP H067444 B2 JPH067444 B2 JP H067444B2 JP 61019940 A JP61019940 A JP 61019940A JP 1994086 A JP1994086 A JP 1994086A JP H067444 B2 JPH067444 B2 JP H067444B2
- Authority
- JP
- Japan
- Prior art keywords
- indium
- sol
- composition
- transparent conductive
- conductive film
- Prior art date
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- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Chemically Coating (AREA)
- Conductive Materials (AREA)
- Non-Insulated Conductors (AREA)
- Liquid Crystal (AREA)
- Colloid Chemistry (AREA)
- Paints Or Removers (AREA)
Description
【発明の詳細な説明】 本発明は安定なオルガノインジウムゾルを含む透明導電
膜形成用組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a composition for forming a transparent conductive film containing a stable organoindium sol.
透明導電膜は、液晶表示素子、エレクトロルミネッセン
ス表示素子や光電池、撮像管等の感光素子類の電極や面
発熱体電極等の透明電極として使用されている。The transparent conductive film is used as a transparent electrode such as an electrode of a liquid crystal display element, an electroluminescence display element, a photocell, a photosensitive element such as an image pickup tube, or a surface heating element electrode.
この様な透明電極材料としては一般的に酸化インジウム
−酸化スズ又は酸化スズ−酸化アンチモン等をはじめと
して多くの材料が知られており、ガラス、セラミック基
板に塗布焼成として透明導電膜が得られ、工業的に利用
されている。この中で酸化インジウム−酸化スズ系の酸
化膜はITO(Indium Tin Oxide)膜として特に広く使用
されている。As such a transparent electrode material, many materials such as indium oxide-tin oxide or tin oxide-antimony oxide are generally known, and a transparent conductive film is obtained by coating and baking on a glass or ceramic substrate, It is used industrially. Among them, an indium oxide-tin oxide based oxide film is particularly widely used as an ITO (Indium Tin Oxide) film.
ITO膜の形成は真空蒸着法、スパッタリング、CVD法等に
よって行なわれているが、処理技術が難しく、処理面積
も限定される上、膜の硬度等の物性も満足すべきもので
なく、製膜法として有利とされる塗布法で施工出来るIT
O膜用組成物が望まれていた。The ITO film is formed by vacuum deposition, sputtering, CVD, etc., but the processing technology is difficult, the processing area is limited, and the physical properties such as the hardness of the film are not satisfactory. IT that can be applied by the coating method, which is advantageous as
A composition for O film has been desired.
塗布加工出来るITO膜用組成物としてInCl3,In(NO3)3
等の無機塩やインジウム石けん、インジウムキレート、
インジウムアルコキシド等の有機化合物を用いた組成物
が提案されているが、造膜性に問題があり、均一な膜が
形成し難いとか、形成された膜が透明性に欠け、白濁す
るという欠点があり、膜強度、密着性も十分ではない。
更に焼成時のITO膜用材料の蒸発揮散の問題もあり満足
すべきものでなかった。造膜性があり、焼成時に蒸発揮
散する事のないITO膜形成用組成物として無機インジウ
ムゾルを用いる方法(特開昭59−219810)が提案されて
いる。InCl 3 , In (NO 3 ) 3 as ITO film composition that can be applied
Inorganic salt such as indium soap, indium chelate,
Although a composition using an organic compound such as indium alkoxide has been proposed, it has a problem in film-forming properties, and it is difficult to form a uniform film, or the formed film lacks transparency and becomes cloudy. However, the film strength and adhesiveness are not sufficient.
Furthermore, there was a problem of evaporation of the ITO film material during firing, which was not satisfactory. A method has been proposed in which an inorganic indium sol is used as a composition for forming an ITO film, which has film-forming properties and does not evaporate during firing (JP-A-59-219810).
酸化インジウムゾルを主成分としたゾル組成物は周期律
表同族のアルミニウムの同形ゾル組成物の挙動からも明
白な如く安定性に欠け、凝集分離し易く塗膜が不均一に
なり易く、保存性に欠け連続作業に適用し難い欠点もあ
り満足すべきものでなかった。The sol composition containing indium oxide sol as the main component lacks stability, as is clear from the behavior of the isomorphic sol composition of aluminum of the periodic table, and easily separates due to aggregation and separation, resulting in nonuniform coating and storage stability. However, it was not satisfactory because there was a defect that it was difficult to apply it to continuous work.
しかし、造膜性を維持しつつ、安定な分散性を有するイ
ンジウムゾルが出来ると実用的に好ましいITO膜形成用
組成物が得られると期待されるので、この様な特性を持
つゾル組成物を求めて鋭意研究した結果キレートインジ
ウムヒドロキシドゾルが好ましい物性を有している事を
見出し、そのゾルを含むITO膜組成物を開発し本発明に
至った。However, it is expected that a practically preferable ITO film-forming composition can be obtained when an indium sol having stable dispersibility can be obtained while maintaining the film forming property. Therefore, a sol composition having such characteristics is required. As a result of intensive investigations, they found that the chelated indium hydroxide sol had preferable physical properties, and developed an ITO film composition containing the sol to arrive at the present invention.
かくて本発明は一般式InX3(Xはハロゲン又は硝酸基を
示す)で表わされるインジウム化合物の水溶性低級アル
コール溶液に、β−ジケトン,β−ケトエステルから選
ばれたキレート化剤を加え、これを塩基性イオン交換樹
脂で処理することにより得られたキレートインジウムヒ
ドロキシド型オルガノインジウムゾルにSn/In比が
0.5〜30重量%で錫化合物を加えて得られる透明導電
膜形成用組成物を提供するものである。Thus, according to the present invention, a chelating agent selected from β-diketone and β-ketoester is added to a water-soluble lower alcohol solution of an indium compound represented by the general formula InX 3 (X represents a halogen or a nitric acid group). A transparent conductive film-forming composition obtained by adding a tin compound at a Sn / In ratio of 0.5 to 30% by weight to a chelate indium hydroxide type organoindium sol obtained by treating Is provided.
本発明は更に、キレートイジウムヒドロキシド型オルガ
ノインジウムゾルに2価錫キレート化合物を加えてえら
れる透明導電膜形成用組成物を基板に塗布し、焼成して
えられる透明導電膜を提供するものである。The present invention further provides a transparent conductive film obtained by coating a substrate with a composition for forming a transparent conductive film obtained by adding a divalent tin chelate compound to a chelated indium hydroxide type organoindium sol and baking the composition. Is.
更に詳述すると、塗布法で形成された塗膜が室温又は焼
成に至らない低い温度で、加温乾燥された時点で、スズ
を所定の割合で含有した実質的に酸化インジウムよりな
る膜を形成するインジウムゾルとしては水酸基を2個又
は3個有するインジウムゾルが好ましい。しかし、In(O
H)3又はその縮合物で代表されるイジウムゾルは有機酸
等の安定化剤を用いても尚、保存性が悪く、又ゾル製造
工程中での不溶化の為、インジウムゾル収率が悪く実用
的に適用し難いものであった。More specifically, when the coating film formed by the coating method is heated and dried at room temperature or at a low temperature that does not reach firing, a film substantially made of indium oxide containing tin in a predetermined ratio is formed. The indium sol used is preferably an indium sol having 2 or 3 hydroxyl groups. However, In (O
H) 3 or its condensate, the indium sol represented by 3 or its condensate, has poor storage stability even when a stabilizer such as an organic acid is used, and the indium sol yield is poor due to insolubilization during the sol production process. It was difficult to apply to.
無機インジウム塩からインジウムゾルを合成する時キレ
ート化剤を共存させて陰イオン交換樹脂で処理し、モノ
キレートインジウムジヒドロキシドを主成分としたオル
ガノゾルにすると得られたゾルは安定性が良く、室温又
は低温加熱乾燥時の一次膜形成性も良くITO膜形成用組
成物材料として優れていた。When an indium sol is synthesized from an inorganic indium salt, it is treated with an anion exchange resin in the coexistence of a chelating agent, and an organosol containing monochelate indium dihydroxide as a main component is obtained. The primary film-forming property at the time of low temperature heating and drying was good, and it was excellent as a composition material for forming an ITO film.
このオルガノインジウムゾルの製造にあたっては、一般
式InX3で表わされる無機インジウム化合物が用いられ
る。ここにXは塩素、臭素等のハロゲン又は硝酸基であ
り、塩化インジウム、硝酸インジウムが好んで用いられ
る。この化合物を水溶性低級アルコールに溶かしてその
溶液をつくる。かかるアルコールとしてはメタノール、
エタノール、プロパノール、イソプロパノール、ブタノ
ール、第二ブタノール、第三ブタノール等の単独又は2
種以上混合したものが用いられる。In producing this organoindium sol, an inorganic indium compound represented by the general formula InX 3 is used. Here, X is a halogen such as chlorine or bromine or a nitric acid group, and indium chloride and indium nitrate are preferably used. This compound is dissolved in a water-soluble lower alcohol to form a solution. Such alcohol is methanol,
Ethanol, propanol, isopropanol, butanol, secondary butanol, tertiary butanol, etc. alone or 2
A mixture of two or more species is used.
このようにしてえられた上記一般式InX3で表わされる無
機インジウム化合物の水溶性低級アルコール溶液にβ−
ジケトン、β−ケトエステルから選ばれたキレート化剤
を加える。β−ジケトンキレート化剤としては、アセチ
ルアセトン、アセチルメチルエチルケトン、トリフルオ
ルアセチルアセトン、ヘキサフルオルアセチルアセト
ン、ベンゾイルアセトン、ジベンゾイルメタン、ベンゾ
イルフルオルアセトン等が挙げられ、又β−ケトエステ
ルキレート化剤としては例えばアセト酢酸メチル、アセ
ト酢酸エチル、アセト酢酸イソプロピル、アセト酢酸ブ
チル等があげられる。このキレート化剤は上記無機イン
ジウム化合物に対して同モル又はそれ以上加えられる。The water-soluble lower alcohol solution of the inorganic indium compound represented by the above general formula InX 3 thus obtained was β-
A chelating agent selected from diketone, β-ketoester is added. Examples of β-diketone chelating agents include acetylacetone, acetylmethylethylketone, trifluoroacetylacetone, hexafluoroacetylacetone, benzoylacetone, dibenzoylmethane, benzoylfluoroacetone, and the like, and examples of β-ketoester chelating agents include acetoacetate. Examples thereof include methyl acetate, ethyl acetoacetate, isopropyl acetoacetate and butyl acetoacetate. This chelating agent is added in the same molar amount or more with respect to the above-mentioned inorganic indium compound.
このようにインジウム化合物のアルコール溶液にキレー
ト化剤を加えた後塩基性イオン交換樹脂で処理する。好
ましくは交換基として三級アミン又は四級アミンのいず
れかを有する中塩基性又は弱塩基性のイオン交換樹脂が
用いられる。As described above, the chelating agent is added to the alcohol solution of the indium compound and then treated with the basic ion exchange resin. A moderately basic or weakly basic ion exchange resin having either a tertiary amine or a quaternary amine as an exchange group is preferably used.
このようにキレート化剤を加え、更にイオン交換樹脂で
処理すると、キレート化反応とヒドロキシド反応が起っ
てキレートインジウムヒドロキシドを主成分としたオル
ガノインジウムゾルがえられる。When a chelating agent is added and treated with an ion exchange resin in this way, a chelation reaction and a hydroxide reaction occur to obtain an organoindium sol containing chelated indium hydroxide as a main component.
得られたキレートインジウムヒドロキシドは、それ単独
でも酸化インジウム形成用材料として表面物性改質用と
して使用出来る。The obtained chelated indium hydroxide can be used by itself as a material for forming indium oxide for modifying surface properties.
しかし、ITO膜形成用組成物としては、前記オルガノゾ
ルと安定に共存出来、塗布乾燥時にインジウムヒドロキ
シドと複合酸化物を形成するスズ化合物を用いる必要が
ある。スズ化合物として、金属石けんや一般式SnX4・nH2
O(X:ハロゲン)で表わされる無機錫化合物を使用す
ると、本発明の目的とする良好なITO膜を形成すること
ができない。However, as a composition for forming an ITO film, it is necessary to use a tin compound that can stably coexist with the above-mentioned organosol and forms a complex oxide with indium hydroxide during coating and drying. As tin compounds, metallic soap and general formula SnX 4 · nH 2
If an inorganic tin compound represented by O (X: halogen) is used, a good ITO film intended by the present invention cannot be formed.
かくて本発明では本発明者が先に研究開発して特許出願
した加水分解性の2価錫キレート化合物を用いるのが必
要である。この錫キレート化合物は一般式SnY2で表わ
される化合物である。ここにYはβ−ジケトン,β−ケ
トエステル又はNアルキル基置換アミノアルコールを示
す。Therefore, in the present invention, it is necessary to use the hydrolyzable divalent tin chelate compound which the present inventor previously researched and developed and applied for a patent. This tin chelate compound is a compound represented by the general formula SnY 2 . Here, Y represents β-diketone, β-ketoester or N-alkyl group-substituted amino alcohol.
従って本発明では前記キレートインジウムヒドロキシド
型オルガノインジウムゾルに、アセチルアセトン、ヘキ
サフルオルアセチルアセトン、トリフルオルアセチルア
セトン、ペンタフルオルベンゾイルアセトン等で代表さ
れるβ−ジケトン、アセト酢酸メチル、アセト酢酸エチ
ル、アセト酢酸イソプロピル、アセト酢酸ブチル等で代
表されるβ−ケトエステル、N,N−ジメチルアミノア
ルコール、N−メチルN−エチルアミノエタノール、
N,N−ジ(トリフロロメチル)アミノエタノール等で
代表されるN−アルキル基置換アミノアルコールをキレ
ートとした2価錫キレート化合物をスズ成分として用い
ると造膜性が良く安定性も優れた透明導電膜形成用組成
物を得ることができる。Therefore, in the present invention, the chelate indium hydroxide type organoindium sol is added to β-diketone, methyl acetoacetate, ethyl acetoacetate, acetoacetic acid represented by acetylacetone, hexafluoroacetylacetone, trifluoroacetylacetone, pentafluorobenzoylacetone, etc. Β-ketoesters represented by isopropyl and butyl acetoacetate, N, N-dimethylaminoalcohol, N-methylN-ethylaminoethanol,
When a divalent tin chelate compound having an N-alkyl group-substituted aminoalcohol typified by N, N-di (trifluoromethyl) aminoethanol as a chelate is used as a tin component, the film forming property is excellent and the transparency is excellent. A conductive film forming composition can be obtained.
尚In-Snの比率は物性により決定出来るが、透明導電膜
形成用としてはSn/In比は0.5〜30重量%が好ましく、組
成物調製時には希望により安定剤としてギ酸、酢酸、プ
ロピオン酸、酪酸、イソ酪酸、グリコール酸、乳酸、リ
ンゴ酸、酒石酸、クエン酸、コハク酸、マレイン酸、ア
セチルアセトン、ベンゾイルアセトン、ベンゾイルメタ
ン、アセト酢酸メチル、アセト酢酸エチル、アセト酢酸
イソプロピル、アセト酢酸ブチル、乳酸メチル、乳酸エ
チル、乳酸ブチル等を用いる事も出来る。また、場合に
より粘度調整剤としてメチルセルロース、エチルセルロ
ース等を添加する事もできる。Although the ratio of In-Sn can be determined by physical properties, the Sn / In ratio is preferably 0.5 to 30% by weight for forming a transparent conductive film, and formic acid, acetic acid, propionic acid, butyric acid as a stabilizer is optionally used when preparing a composition. , Isobutyric acid, glycolic acid, lactic acid, malic acid, tartaric acid, citric acid, succinic acid, maleic acid, acetylacetone, benzoylacetone, benzoylmethane, methyl acetoacetate, ethyl acetoacetate, isopropyl acetoacetate, butyl acetoacetate, methyl lactate, It is also possible to use ethyl lactate, butyl lactate and the like. In addition, methyl cellulose, ethyl cellulose or the like can be added as a viscosity modifier depending on the case.
ITO膜の形成はスプレー法、ディッピング法、バーコー
ト法、ロールコート法、流延法やスピンナー法等の一般
的方法で基板に塗膜形成出来る。塗布形成された基板は
室温又は焼成温度以下の低温で加熱乾燥して酸化インジ
ウム−酸化スズ一次皮膜を形成する。これを空気中又は
不活性ガス雰囲気下で400〜500℃で30分〜1時間焼成す
ると透明導電性ITO膜が得る事が出来る。The ITO film can be formed on the substrate by a general method such as a spray method, a dipping method, a bar coating method, a roll coating method, a casting method and a spinner method. The substrate formed by coating is heated and dried at room temperature or a low temperature equal to or lower than the firing temperature to form an indium oxide-tin oxide primary coating. A transparent conductive ITO film can be obtained by firing this in air or in an inert gas atmosphere at 400 to 500 ° C. for 30 minutes to 1 hour.
形成された透明導電性ITO膜の物性は、膜硬度が鉛筆硬
度4H〜9Hで可視部透過率90%以上、シート抵抗2K
Ω/□であり工業的に有用である。The physical properties of the formed transparent conductive ITO film are as follows: the film hardness is 4H to 9H, the visible part transmittance is 90% or more, and the sheet resistance is 2K.
Ω / □, which is industrially useful.
〔参考例−1〕 塩化インジウム100重量部を10%含水エタノール820重量
部に溶解し、アセチルアセトン50重量部と乳酸30重量部
を加えて均一に溶解する。この溶液に中塩基性イオン交
換樹脂(商品名 アンバーライトIRA-68)1800容量部を
充填したカラムに流速SV20H-1で処理し淡黄色透明の
流出液を得た。流出液中の残留塩素は硝酸銀法では認め
られなかった。流出液の一部を採り真空乾燥して白色無
定形固体を得た。この固体のIn2O3分析値は55.7%
であり、In(AA)(OH)2(In2O3:55.8%)に一致し、
又、赤外線分析からもIn(AA)(OH)2である事が判った。
この赤外線スペクトルを図面に示す。上記式中AAはア
セチルアセトンを表わす。この得られアルコール溶液を
ガラス板にロールコート法で塗布し、室温で乾燥したと
ころ均一透明な一次酸化膜が形成された。[Reference Example-1] 100 parts by weight of indium chloride is dissolved in 820 parts by weight of 10% water-containing ethanol, and 50 parts by weight of acetylacetone and 30 parts by weight of lactic acid are added and uniformly dissolved. A column filled with 1800 parts by volume of a medium basic ion exchange resin (trade name: Amberlite IRA-68) was treated with a flow rate SV20H -1 to obtain a pale yellow transparent effluent. Residual chlorine in the effluent was not found by the silver nitrate method. A part of the effluent was collected and vacuum dried to obtain a white amorphous solid. In 2 O 3 analysis value of this solid is 55.7%.
Which is consistent with In (AA) (OH) 2 (In 2 O 3 : 55.8%),
In addition, infrared analysis revealed that it was In (AA) (OH) 2 .
This infrared spectrum is shown in the drawing. In the above formula, AA represents acetylacetone. The obtained alcohol solution was applied onto a glass plate by a roll coating method and dried at room temperature to form a uniform transparent primary oxide film.
〔参考例−2〕 硫酸インジウム100重量部をイオン交換水100重量部、メ
タノール400重量部、イソプロピルアルコール400重量部
の混合溶剤に溶解し、アセト酢酸エチル50重量部と酢酸
30重量部を加えて均一に溶解する。この溶液を弱塩基性
イオン交換樹脂(商品名 アンバーライトIRA-45)1800
容量部を充填したカラムに流速SV20-1で処理し、淡黄色
透明の流出液を得た。流出液中の残留▲NO- 3▼はイオ
ンメーターで分析したところ認められなかった。[Reference Example-2] 100 parts by weight of indium sulfate was dissolved in a mixed solvent of 100 parts by weight of ion-exchanged water, 400 parts by weight of methanol and 400 parts by weight of isopropyl alcohol, and 50 parts by weight of ethyl acetoacetate and acetic acid were added.
Add 30 parts by weight and dissolve uniformly. Weakly basic ion exchange resin (trade name: Amberlite IRA-45) 1800
A column filled with a volume part was treated with a flow rate SV20 -1 to obtain a pale yellow transparent effluent. Remaining in the effluent ▲ NO - 3 ▼ was observed was analyzed by an ion meter.
参考例−1と同様に真空乾燥してIn2O3%を分析すると
49.8%であり、In(EA)(OH)2(EA:アセト酢酸エチル
In2O3:49.9%)に一致しIR分析の結果と併せてIn(E
A)(OH)2である事が分った。It was 49.8% when vacuum-dried and analyzed for In 2 O 3 % in the same manner as in Reference Example-1, and In (EA) (OH) 2 (EA: ethyl acetoacetate
In 2 O 3 : 49.9%), and the In (E
It turned out to be A) (OH) 2 .
このオルガノゾル溶液は、ガラス板に塗布乾燥した時透
明な酸化インジウム膜を形成した。This organosol solution formed a transparent indium oxide film when applied to a glass plate and dried.
〔実施例−1〕 参考例−1で合成したキレートインジウムヒドロキシド
ゾル溶液100重量部に錫アセチルアセトンキレート化合
物(Sn(AA)2)20重量部とマレイン酸10重量部、アセト
酢酸メチル20重量部を加えて均一に溶解した組成物は淡
黄色透明であり、ソーダガラスにロールコート法で塗布
した塗膜は室温で容易に乾燥して均一な酸化膜が得られ
た。これを450℃で40分焼成すると紅彩もなく、シート
抵抗、2KΩ/□、可視部透過率90%以上、膜硬度鉛筆
硬度9Hの良好なITO膜が得られた。[Example-1] 20 parts by weight of a tin acetylacetone chelate compound (Sn (AA) 2 ), 10 parts by weight of maleic acid, and 20 parts by weight of methyl acetoacetate were added to 100 parts by weight of the chelate indium hydroxide sol solution synthesized in Reference Example-1. The composition which was added and dissolved uniformly was light yellow and transparent, and the coating film applied to the soda glass by the roll coating method was easily dried at room temperature to obtain a uniform oxide film. When this was baked at 450 ° C. for 40 minutes, an ITO film having no iris, a sheet resistance of 2 KΩ / □, a visible portion transmittance of 90% or more, and a film hardness and pencil hardness of 9H was obtained.
〔実施例−2〕 参考例−2で合成したキレートインジウムヒドロキシド
ゾル溶液100重量部に錫アセト酢酸メチルキレート化合
物(Sn(C5H7O3)2)25重量部とプロピオン酸10重量部ア
セチルアセトン20重量部を加えて均一に溶解した組成物
は淡黄色透明であり、ソーダガラスにデッピング法で20
cm/minの引上速度で塗布した塗膜は、室温で容易に乾
燥して均一な酸化膜が得られた。これを450℃で30分焼
成すると紅彩もなく、シート抵抗、3KΩ/□、可視部
透過率90%以上、膜硬度8Hの良好なITO膜が得られ
た。EXAMPLE -2] Example -2 chelate indium hydroxide sol solution 100 parts by weight of tin methyl acetoacetate chelate compound synthesized in (Sn (C 5 H 7 O 3) 2) 25 parts by weight 10 parts by weight of propionic acid A composition in which 20 parts by weight of acetylacetone was added and uniformly dissolved was transparent in a light yellow color, and was soaked in soda glass by a dipping method.
The coating film applied at a pulling rate of cm / min was easily dried at room temperature to obtain a uniform oxide film. When this was baked at 450 ° C. for 30 minutes, a good ITO film having no iris, a sheet resistance of 3 KΩ / □, a visible part transmittance of 90% or more, and a film hardness of 8H was obtained.
図面は参考例1でえられたオルガノインジウムゾルの赤
外線スペクトルである。The drawing is the infrared spectrum of the organoindium sol obtained in Reference Example 1.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 H01B 13/00 503 C 7244−5G ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H01B 13/00 503 C 7244-5G
Claims (2)
を示す)で表されるインジウム化合物の水溶性低級アル
コール溶液に、β−ジケトン、β−ケトエステルから選
ばれたキレート化剤を加え、これを塩基性イオン交換樹
脂で処理して得られるキレートインジウムヒドロキシド
型オルガノインジウムゾルにSn/In比が0.5〜3
0重量%で一般式SnY2(Yはβ−ジケトン、β−ケ
トエステル又はN−アルキル基置換アミノアルコールを
示す)で示される2価錫キレート化合物を加えて得られ
る透明導電膜形成用組成物。1. A chelating agent selected from β-diketone and β-ketoester is added to a water-soluble lower alcohol solution of an indium compound represented by the general formula InX 3 (X represents a halogen or a nitrate group), The chelate indium hydroxide type organoindium sol obtained by treating this with a basic ion exchange resin has a Sn / In ratio of 0.5 to 3
A composition for forming a transparent conductive film, which is obtained by adding a divalent tin chelate compound represented by the general formula SnY 2 (Y represents β-diketone, β-ketoester or N-alkyl group-substituted aminoalcohol) at 0% by weight.
を示す)で表されるインジウム化合物の水溶性低級アル
コール溶液に、β−ジケトン、β−ケトエステルから選
ばれたキレート化剤を加え、これを塩基性イオン交換樹
脂で処理して得られるキレートインジウムヒドロキシド
型オルガノインジウムゾルにSn/In比が0.5〜3
0重量%で一般式SnY2(Yはβ−ジケトン、β−ケ
トエステル又はN−アルキル基置換アミノアルコールを
示す)で示される2価錫キレート化合物を加えて得られ
る透明導電膜形成用組成物を基板に塗布し、焼成して得
られる透明導電膜。2. A chelating agent selected from β-diketone and β-ketoester is added to a water-soluble lower alcohol solution of an indium compound represented by the general formula InX 3 (X represents a halogen or a nitric acid group), The chelate indium hydroxide type organoindium sol obtained by treating this with a basic ion exchange resin has a Sn / In ratio of 0.5 to 3
A composition for forming a transparent conductive film obtained by adding a divalent tin chelate compound represented by the general formula SnY 2 (Y represents β-diketone, β-ketoester or N-alkyl group-substituted aminoalcohol) at 0% by weight. A transparent conductive film obtained by coating on a substrate and baking.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61019940A JPH067444B2 (en) | 1986-01-31 | 1986-01-31 | Composition for forming transparent conductive film containing organoindium sol |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61019940A JPH067444B2 (en) | 1986-01-31 | 1986-01-31 | Composition for forming transparent conductive film containing organoindium sol |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62180740A JPS62180740A (en) | 1987-08-08 |
JPH067444B2 true JPH067444B2 (en) | 1994-01-26 |
Family
ID=12013203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61019940A Expired - Lifetime JPH067444B2 (en) | 1986-01-31 | 1986-01-31 | Composition for forming transparent conductive film containing organoindium sol |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH067444B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210333709A1 (en) * | 2018-08-06 | 2021-10-28 | Young Chang Chemical Co., Ltd | Organic-inorganic hybrid photoresist processing liquid composition |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2708120B2 (en) * | 1987-10-29 | 1998-02-04 | 触媒化成工業株式会社 | Method for producing coating liquid for transparent oxide thin film and substrate with transparent oxide thin film |
JP5082132B2 (en) * | 2005-01-19 | 2012-11-28 | 三菱マテリアル株式会社 | Indium tin oxide precursor, indium tin oxide film thereof, and manufacturing method thereof |
JP2009122474A (en) * | 2007-11-16 | 2009-06-04 | Mitsubishi Electric Corp | Liquid crystal display device and its manufacturing method |
EP2204250A1 (en) * | 2008-12-16 | 2010-07-07 | Akzo Nobel Coatings International B.V. | Aqueous dispersions of silver particles |
KR20130108027A (en) * | 2012-03-23 | 2013-10-02 | 주식회사 엘지화학 | Method for preparing substrate for organic electronic device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6287242A (en) * | 1985-05-29 | 1987-04-21 | Nippon Shokubai Kagaku Kogyo Co Ltd | Stable metal oxide sol composition |
-
1986
- 1986-01-31 JP JP61019940A patent/JPH067444B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210333709A1 (en) * | 2018-08-06 | 2021-10-28 | Young Chang Chemical Co., Ltd | Organic-inorganic hybrid photoresist processing liquid composition |
US12050403B2 (en) * | 2018-08-06 | 2024-07-30 | Young Chang Chemical Co., Ltd | Organic-inorganic hybrid photoresist processing liquid composition |
Also Published As
Publication number | Publication date |
---|---|
JPS62180740A (en) | 1987-08-08 |
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