JPS62180740A - Organoindium sol and composite for forming transparent electrically conductive membrane - Google Patents

Organoindium sol and composite for forming transparent electrically conductive membrane

Info

Publication number
JPS62180740A
JPS62180740A JP1994086A JP1994086A JPS62180740A JP S62180740 A JPS62180740 A JP S62180740A JP 1994086 A JP1994086 A JP 1994086A JP 1994086 A JP1994086 A JP 1994086A JP S62180740 A JPS62180740 A JP S62180740A
Authority
JP
Japan
Prior art keywords
indium
sol
organoindium
composition
chelate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1994086A
Other languages
Japanese (ja)
Other versions
JPH067444B2 (en
Inventor
Hiroshi Suzuki
博 鈴木
Iwakichi Sugiyama
杉山 岩吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsumoto Seiyaku Kogyo KK
Original Assignee
Matsumoto Seiyaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsumoto Seiyaku Kogyo KK filed Critical Matsumoto Seiyaku Kogyo KK
Priority to JP61019940A priority Critical patent/JPH067444B2/en
Publication of JPS62180740A publication Critical patent/JPS62180740A/en
Publication of JPH067444B2 publication Critical patent/JPH067444B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/13439Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Non-Insulated Conductors (AREA)
  • Liquid Crystal (AREA)
  • Colloid Chemistry (AREA)
  • Paints Or Removers (AREA)
  • Chemically Coating (AREA)
  • Conductive Materials (AREA)

Abstract

PURPOSE:To maintain membrane forming property and to improve dispersion stability by adding a specified chelating agent to the soln. of a specified indium compd. in a lower alcohol, and treating the soln. with a basic ion-exchange resin. CONSTITUTION:The chelating agent selected from beta-diketone and beta-keto ester is added to the soln. of the indium compd. expressed by the general formula InX3 (X shows a halogen or a nitrate group) in a water-soluble lower alcohol. The soln. is then treated with a basic ion-exchange resin to produce a chelated indium hydroxide-type organoindium sol. A tin compd. is added to the chelated indium hydroxide-type organoindium sol in 0.005-0.30 weight ratio of Sn/In to prepare the composition for forming a transparent electrically conductive membrane.

Description

【発明の詳細な説明】 本発明は安定なオルガノインジウムゾルの製造法とこれ
を用いた透明導電膜形成上に係るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a stable organoindium sol and a method for forming a transparent conductive film using the same.

透明導電膜は、液晶表示素子、エレクトロルミネッセン
ス表示素子や光電池、撮像管等の感光素子類の電極や面
発熱体電極等の透明電極として使用されている。
Transparent conductive films are used as transparent electrodes of liquid crystal display elements, electroluminescent display elements, photovoltaic cells, photosensitive elements such as image pickup tubes, surface heating element electrodes, and the like.

この様な透明電極材料としては一般的に酸化インジウム
−酸化スズ又は酸化スズ−酸化アンチモン等をはじめと
して多くの材料が知られており、ガラス、セラミック基
板に塗布焼成して透明導電膜が得られ、工業的に利用さ
れている。この中で酸化インジウム−酸化スズ系の酸化
膜はITO(Indium Tin 0xide)膜と
して特に広く使用されている。
Many materials are generally known as such transparent electrode materials, including indium oxide-tin oxide or tin oxide-antimony oxide, and transparent conductive films can be obtained by coating and baking them on glass or ceramic substrates. , is used industrially. Among these, indium oxide-tin oxide based oxide films are particularly widely used as ITO (Indium Tin Oxide) films.

ITO膜の形成は真空蒸着法、スパッタリング、CVD
法等によって行なわれているが、処理技術が難しく、処
理面積も限定される上、膜の硬度等の物性も満足すべき
ものでなく、製膜法として有利とされる塗布法で施工出
来るITO膜用組成物が望まれていた。
The ITO film is formed by vacuum evaporation, sputtering, or CVD.
However, the processing technology is difficult, the processing area is limited, and the physical properties such as film hardness are not satisfactory. There is a need for a composition for

塗布加工出来るITO膜用組成物としてInC15゜I
n(No3)3等の無機塩やインジクム石げん、インジ
ウムキレート、インジウムアルコキシド等の有機化合物
を用いた組成物が提案されているが、造膜性に問題があ
り、均一な膜が形成し難いとか、形成された膜が透明性
に欠け、白濁するという欠点があり、膜強度、密着性も
十分ではない。更に焼成時のITO膜用材料の蒸発揮散
の問題もあり満足すべきものでなかった。造膜性があり
、焼成時に蒸発揮散する事のないITO膜形成用組成物
として無機インジウムゾルを用いる方法(特開昭jq−
コtygto )が提案されている。
InC15゜I as a composition for ITO film that can be coated
Compositions using inorganic salts such as n(No3)3 and organic compounds such as indicum stone, indium chelate, and indium alkoxide have been proposed, but they have problems with film-forming properties and are difficult to form a uniform film. However, the formed film lacks transparency and becomes cloudy, and the film strength and adhesion are also insufficient. Furthermore, there was a problem of evaporation and transpiration of the ITO film material during firing, and the results were not satisfactory. A method using an inorganic indium sol as a composition for forming an ITO film that has film-forming properties and does not evaporate or dissipate during firing (Japanese Patent Application Laid-Open No.
Cotygto) has been proposed.

酸化インジウムゾルを主成分としたゾル組成物は周期律
表同族のアルミニウムの同形ゾル組成物の挙動からも明
白な如く安定性に欠け、凝集分離し易く塗膜が不均一に
なり易く、保存性に欠は連続作業に適用し難い欠点もあ
り満足すべきものでなかった。
Sol compositions containing indium oxide sol as a main component lack stability, as is clear from the behavior of isomorphic sol compositions of aluminum, which is in the same group of the periodic table, and tend to aggregate and separate, resulting in uneven coatings and poor storage stability. The disadvantage was that it was difficult to apply to continuous work, so it was not satisfactory.

しかし、造膜性を維持しつつ、安定な分散性を有するイ
ンジウムゾルが出来ると実用的に好ましいITO膜形成
用組成物が得られろと期待されるので、この様な特性を
持つゾル組成物を求めて鋭意研究した結果キレートイン
ジウムヒドロキシドゾルが好ましい物性を有している事
を見出し、そのゾル組成物の製法やITO膜組成物も見
出し本発明に至った。
However, if an indium sol with stable dispersibility while maintaining film-forming properties is produced, it is expected that a practically preferable ITO film-forming composition will be obtained. As a result of extensive research in search of this, it was discovered that chelate indium hydroxide sol had favorable physical properties, and a method for producing the sol composition and an ITO film composition were also discovered, leading to the present invention.

かくて本発明は一般式In X5 (Xはハロゲン又は
硝酸基を示す)で表わされるインジウム化合物の水溶性
低級アルコール溶液に、β−ジケトン。
Thus, the present invention uses β-diketone in a water-soluble lower alcohol solution of an indium compound represented by the general formula In X5 (X represents a halogen or nitric acid group).

β−ケトエステルから選ばれたキレート化剤を加え、こ
れを塩基性イオン交換樹脂で処理することかちな・る、
キレートインジウムヒドロキシド型オルガノインジウム
ゾルの製造法を提供するものであゐ。
Adding a chelating agent selected from β-ketoesters and treating this with a basic ion exchange resin,
The present invention provides a method for producing a chelate indium hydroxide type organoindium sol.

本発明は亦このキレートインジウムヒドロキシド型オル
ガノインジウムゾルにSn/工。比が0.2〜JO重量
%で錫化合物を加えて得られる透明導電膜形成用組成物
を提供するものである。
The present invention also provides this chelate indium hydroxide type organoindium sol with Sn/coating. A composition for forming a transparent conductive film obtained by adding a tin compound at a ratio of 0.2 to JO weight % is provided.

本発明は更に、キレートインジウムヒドロキシド型オル
ガノインジウムゾルにコ価錫キレート化合物を加えてえ
られる透明導電膜形成用組成物を基板に塗布し、焼成し
てえられる透明導電膜を提供するものである。
The present invention further provides a transparent conductive film obtained by applying a composition for forming a transparent conductive film obtained by adding a covalent tin chelate compound to a chelate indium hydroxide type organoindium sol onto a substrate and baking the composition. be.

東に詳述すると、塗布法で形成された塗膜が室温又は、
焼成は至らない低い温度で、加温乾燥された時点で、ス
ズを所定の割合で含有した実質的に酸化インジウムより
なる膜を形成するインジウムゾルとしては水酸基を2個
又は3・個有するインジウムゾルが好ましい。しかし、
x、ri(OH)s又はそめ縮合物で代表されるインジ
ウムゾルは有機酸等の安定化剤を用いても尚、保存性が
悪く、又ゾル製造工程中での不溶化の為、インジウムゾ
ル収率が悪く実用的に適用し難いものであった。
To explain in detail, the coating film formed by the coating method is kept at room temperature or
An indium sol that forms a film substantially made of indium oxide containing a predetermined proportion of tin when heated and dried at a low temperature that cannot be fired is an indium sol having 2 or 3 hydroxyl groups. is preferred. but,
Indium sol represented by The efficiency was poor and it was difficult to apply it practically.

無機インジウム塩からインジウムゾルを合成する時キレ
ート化剤を共存させて陰イオン交換樹脂で処理し、モノ
キレートインジウムジヒドロキシドを主成分としたオル
ガノゾルにすると得られたゾルは安定性が良く、室温又
は低温加熱乾燥時の一次膜形成性も良(ITO膜形成用
組成物材料として優れていた。・ このオルガノインジウムゾルの製造にあたっては、一般
式InX3で表わされる無機インジウム化合物が用いら
れ・る。ここにXは塩素、臭素等の)・ロゲン又は硝酸
基であり、塩化インジウム、硝酸インジウムが好んで用
いられる。この化合物を水溶性低級アルコールに溶かし
てその溶液をつくる。
When an indium sol is synthesized from an inorganic indium salt, it is treated with an anion exchange resin in the presence of a chelating agent to form an organosol containing monochelate indium dihydroxide as the main component.The resulting sol has good stability and can be heated at room temperature or at room temperature. The primary film forming property when drying by heating at low temperature was also good (excellent as a composition material for ITO film formation). In the production of this organoindium sol, an inorganic indium compound represented by the general formula InX3 is used. X is chlorine, bromine, etc.) or a nitric acid group, and indium chloride and indium nitrate are preferably used. A solution is prepared by dissolving this compound in a water-soluble lower alcohol.

かかるアルコールとしてはメタノール、エタノール、グ
ロパノール、イソプロパツール1.ブタ、ノール、第二
ブタノール、第三ブタノール等の単独又は2種以上混合
したものが用いられる。
Such alcohols include methanol, ethanol, glopanol, and isopropanol.1. Buta, nol, sec-butanol, tertiary-butanol, etc. may be used alone or in combination of two or more thereof.

このようにしてえられた上記一般式InX3で表わされ
る無機インジウム化合物の水溶性低級アルコール溶液に
β−ジケトン、β−ケトエステルから選ばれたキレート
化剤を加える。β−ジケトンキレート化剤としては、ア
セチルアセトン、アセチルメチルエチルケトン、トリフ
ルオルアセチルアセトン、ヘキサフルオルアセチルアセ
トン、ベンゾイルアセトン、ジベンゾイルメタン、ベン
ゾイルフルオルアセトン等が挙げられ、又β−ケトエス
テルキレート化剤としては例えばアセト酢酸メチル、ア
セト酢酸エチル、アセト酢酸イソプロピル、アセト酢酸
ブチル等があげられる。このキレート化剤は上記無機イ
ンジウム化合物に対して同モル又はそれ以上加えられる
A chelating agent selected from β-diketones and β-ketoesters is added to the water-soluble lower alcohol solution of the inorganic indium compound represented by the general formula InX3 thus obtained. Examples of the β-diketone chelating agent include acetylacetone, acetyl methyl ethyl ketone, trifluoroacetylacetone, hexafluoroacetylacetone, benzoylacetone, dibenzoylmethane, benzoylfluoroacetone, and the like. Examples include methyl acetate, ethyl acetoacetate, isopropyl acetoacetate, butyl acetoacetate, and the like. This chelating agent is added in the same molar amount or more to the inorganic indium compound.

このようにインジウム化合物のアルコール溶液にキレー
ト化剤を加えた後塩基性イオン交換樹脂で処理する。好
ましくは交換基として三級アミン又は四級アミンのいず
れかを有する中塩基性又は弱塩基性のイオン交換樹脂が
用いられる。
After the chelating agent is added to the alcohol solution of the indium compound in this way, it is treated with a basic ion exchange resin. Preferably, a medium or weakly basic ion exchange resin having either a tertiary amine or a quaternary amine as an exchange group is used.

このよ5にキレート化剤を加え、更にイオン交換樹脂で
処理すると、キレート化反応とヒドロキシド反応が起っ
てキレートインジウムヒドロキシドを主成分としたオル
ガノインジウムゾルかえられる。
When a chelating agent is added to this 5 and further treated with an ion exchange resin, a chelate reaction and a hydroxide reaction occur, resulting in an organoindium sol containing chelated indium hydroxide as a main component.

得られたキレートインジウムヒドロキシドは、それ単独
でも酸化インジウム形成用材料として表面物性改質用と
して使用出来る。
The obtained chelate indium hydroxide can be used alone as a material for forming indium oxide and for modifying surface properties.

又、ITO膜形成用組成物としては、前記オルガノゾル
と安定に共存出来、塗布乾燥時にインジウムヒドロキシ
ドと複合酸化物を形成するスズ化合物を用いる必要があ
る。スズ化合物として、金属石けんや一般式S n X
4 ・n H2O(X : ハロゲン)で表わされる無
機錫化合物を使用すると、本発明の目的とする良好なI
TO膜を形成することができない。
Further, as the composition for forming an ITO film, it is necessary to use a tin compound that can coexist stably with the organosol and forms a composite oxide with indium hydroxide during coating and drying. As tin compounds, metal soaps and general formula S n
When an inorganic tin compound represented by 4 ・n H2O (X: halogen) is used, a good I
A TO film cannot be formed.

かくて本発明では本発明者が先に研究開発して特許出願
した加水分解性のコ価錫キレート化合物を用いるのが好
ましい。この錫キレート化合物は一般式S n Y 2
で表わされる化合物である。ここKYはβ−ジケトン、
β−ケトエステル又はNアルキル基置換アミノアルコー
ルを示す。
Thus, in the present invention, it is preferable to use a hydrolyzable covalent tin chelate compound which the present inventor has previously researched and developed and applied for a patent. This tin chelate compound has the general formula S n Y 2
It is a compound represented by Here KY is β-diketone,
Indicates a β-keto ester or an amino alcohol substituted with an N alkyl group.

従って本発明では前記キレートインジウムヒドロキシド
型オルガノインジウムゾルに、アセチルアセトン、ヘキ
サフルオルアセチルアセトン、トリフルオルアセチルア
セトン、ペンタフルオルベンゾイルアセトン等で代表さ
れるβ−ジケトン、アセト酢酸メチル、アセト酢酸エチ
ル、アセト酢酸イソプロピル、アセト酢酸ブチル等で代
表されるβ−ケトエステル、N、N−ジメチルアミンア
ルコール、N−メチルN−エチルアミノエタノール、N
、N−シ()リフロロメチル)アミノエタノール等で代
表されるN−アルキル基置換アミノアルコールをキレー
トとした一価錫キレート化合物をスズ成分として用いる
と造膜性が良く安定性も優れた透明導電膜形成用組成物
を得ることができる。
Therefore, in the present invention, the chelate indium hydroxide type organoindium sol includes β-diketones represented by acetylacetone, hexafluoroacetylacetone, trifluoroacetylacetone, pentafluorobenzoylacetone, etc., methyl acetoacetate, ethyl acetoacetate, and acetoacetic acid. β-keto esters represented by isopropyl, butyl acetoacetate, etc., N,N-dimethylamine alcohol, N-methyl N-ethylaminoethanol, N
When a monovalent tin chelate compound chelated with an N-alkyl group-substituted amino alcohol such as N-cy()lyfluoromethyl)aminoethanol is used as the tin component, a transparent conductive film with good film-forming properties and excellent stability can be obtained. A forming composition can be obtained.

尚In−8nの比率は物性により決定出来るが、透明環
it膜形成用としてはSn/工。比はO0S〜30重量
%が好ましく、組成物調製時には希望により安定剤とし
てギ酸、酢酸、プロピオン酸、酪酸、イソ酪酸、グリコ
ール酸、乳酸、リンゴ酸、酒石酸、クエン酸、コハク酸
、マレイン酸、アセチルアセトン、ベンゾイルアセトン
、ベンゾイルメタン、アセト酢酸メチル、アセト酢酸エ
チル、アセト酢酸イソプロピル、アセト酢酸ブチル、乳
酸メチル、乳酸エチル、乳酸ブチル等を用いる事も出来
る。
Incidentally, the ratio of In-8n can be determined depending on the physical properties, but for forming a transparent ring IT film, it is Sn/N. The ratio is preferably O0S to 30% by weight, and when preparing the composition, if desired, stabilizers such as formic acid, acetic acid, propionic acid, butyric acid, isobutyric acid, glycolic acid, lactic acid, malic acid, tartaric acid, citric acid, succinic acid, maleic acid, Acetylacetone, benzoylacetone, benzoylmethane, methyl acetoacetate, ethyl acetoacetate, isopropyl acetoacetate, butyl acetoacetate, methyl lactate, ethyl lactate, butyl lactate, etc. can also be used.

また、場合により粘度調整剤としてメチルセルロース、
エチルセルロース等を添加する事もできる。
In some cases, methylcellulose may also be used as a viscosity modifier.
Ethyl cellulose etc. can also be added.

ITO膜の形成はスプレー法、ディッピング法、バーコ
ード法、ロールコート法、流延法やスピンナー法等の一
般的方法で基板に塗膜形成出来る。
The ITO film can be formed on a substrate by a general method such as a spray method, a dipping method, a bar code method, a roll coating method, a casting method, or a spinner method.

塗布形成された基板は室温又は焼成温度以下の低温で加
熱乾燥して酸化インジウム−酸化スズ−次皮膜を形成す
る。これを空気中又は不活性ガス雰囲気下でeoo −
zoo℃で3θ分〜7時間焼成すると透明導電性ITO
膜が・得る事が出来る。
The coated substrate is heated and dried at room temperature or at a low temperature below the firing temperature to form an indium oxide-tin oxide secondary film. This is eoo - in air or under an inert gas atmosphere.
Transparent conductive ITO is formed when baked at zoo℃ for 3θ minutes to 7 hours.
A membrane can be obtained.

形成された透明導電性ITO膜の物性は、膜硬度が鉛筆
硬度4(H−?Hで可視部透過率qo%以上、KΩ シート抵抗コ /1であり工業的に有用である。
The physical properties of the formed transparent conductive ITO film are industrially useful, as the film hardness is a pencil hardness of 4 (H-?H, visible part transmittance is qo% or more, and KΩ sheet resistance is /1).

〔実施例−7〕 塩化インジウム700重量部を/θチ含水エタノールt
20重量部に溶解し、アセチルアセトンSO重量部と乳
酸30Mfk部を加えて均一に溶解する。この溶液を中
塩基性イオン交換樹脂(商品名 アンバーライトrRA
−4Ir) /100容量部を充填したカラムに流速S
Vλ0Hで処理し淡黄色透明の流出液を得た。流出液中
の残留塩素は硝酸銀法では認められなかった。流出液の
一部を採り真空乾燥して白色無定形固体を得た。この固
体の工n203分析値はjt5、クチであり、I n 
(晶) (OH)2 (In2O3: 5 j 0g%
)に一致し、又、赤外線分析からもIn(AA)(OH
)2である事が判った。この赤外線スペクトルを図面に
示す。上記式中AAはアセチルアセトンを表わす。この
得られたアルコール溶液をガラス板にロールコート法で
塗布し、室温で乾燥したところ均一透明な一次酸化膜が
形成された。
[Example-7] 700 parts by weight of indium chloride / θ t aqueous ethanol
Dissolve in 20 parts by weight, add parts by weight of acetylacetone SO and 30 Mfk parts of lactic acid, and dissolve uniformly. This solution is mixed with a medium basic ion exchange resin (product name: Amberlite rRA).
-4Ir) /100 parts by volume at a flow rate of S
Treatment with Vλ0H gave a pale yellow transparent effluent. No residual chlorine was detected in the effluent using the silver nitrate method. A portion of the effluent was taken and dried under vacuum to obtain a white amorphous solid. The engineering n203 analysis value of this solid is jt5, Kuchi, I n
(Crystal) (OH)2 (In2O3: 5 j 0g%
), and also from infrared analysis, In(AA)(OH
) It turned out to be 2. This infrared spectrum is shown in the drawing. In the above formula, AA represents acetylacetone. The resulting alcohol solution was applied to a glass plate by roll coating and dried at room temperature, forming a uniform transparent primary oxide film.

〔実施例−一〕[Example-1]

硝酸インジウム100重量部をイオン交換水io。 100 parts by weight of indium nitrate was added to ion-exchanged water.

重量部、メタノール1Ioo重量部、イソブロピルアル
ー−ルグθO重量部の混合溶剤に溶解し、アセト酢酸エ
チルSO重量部と酢酸30重量部を加えて均一に溶解す
る。この溶液を弱塩基性イオン交換樹脂(商品名 アン
バーライトIRA−グよ)lざ00容量部を充填したカ
ラムに流速5v20H−で処理し、淡黄色透明の流出液
を得た。流出液中の残留Nolはイオンメーターで分析
したところ認められなかった。
The mixture is dissolved in a mixed solvent of 110 parts by weight of methanol, 110 parts by weight of isopropyl alcohol, and 30 parts by weight of ethyl acetoacetate SO and 30 parts by weight of acetic acid are added thereto and uniformly dissolved. This solution was applied to a column filled with 00 parts by volume of a weakly basic ion exchange resin (trade name: Amberlite IRA-Guyo) at a flow rate of 5v20H to obtain a pale yellow transparent effluent. No residual Nol was found in the effluent when analyzed using an ion meter.

実施例−lと同様に真空乾燥してIn2O5%を分析す
ると!?、r %であり、In(EA)(Of()2(
EA :アセト酢酸エチルIn2O3: eヲ、9%)
に一致しIR分析の結果と併せてI n (EA ) 
(OH)2である事が分った。
When vacuum-dried and analyzed for In2O5% in the same manner as in Example-1! ? , r % and In(EA)(Of()2(
EA: Ethyl acetoacetate In2O3: ewo, 9%)
In agreement with the results of IR analysis, I n (EA )
It turned out to be (OH)2.

このオルガノゾル溶液は、ガラス板に塗布乾燥した時透
明な酸化インジウム膜を形成した。
This organosol solution formed a transparent indium oxide film when applied to a glass plate and dried.

〔実施例−3〕 実施例−7で合成したキレートインジウムヒドロキシド
ゾル溶液100重量部に錫アセチルアセトンキレート化
合物(an (AA)2 ) −10重量部とマレイン
酸1oxL量部アセト酢酸メチル〃重量部を加えて均一
に溶解した組成物は淡黄色透明であり、ソーダガラスに
ロールコート法で塗布した塗膜は室温で容易に乾燥して
均一な酸化膜が得られた。これを1Iro℃でq分焼成
すると虹彩もなく、シート抵抗、2に/D、可視部透過
率’io%以上、膜硬度鉛筆硬度?Hの良好なITO膜
が得られた。
[Example 3] To 100 parts by weight of the chelate indium hydroxide sol solution synthesized in Example 7, 10 parts by weight of tin acetylacetone chelate compound (an (AA)2) -10 parts by weight of maleic acid and 1 part by weight of methyl acetoacetate The composition obtained by adding and uniformly dissolving the solution was pale yellow and transparent, and the coating film applied to soda glass by the roll coating method was easily dried at room temperature to obtain a uniform oxide film. When this is fired for q minutes at 1Iro℃, there is no iris, the sheet resistance is 2/D, the visible part transmittance is over 'io%, and the film hardness is pencil hardness? An ITO film with good H content was obtained.

〔実施例−ダ〕[Example-da]

実施例−一で合成したキレートインジウムヒドロキシ、
トシル溶液100重量部に錫アセト酢酸メチルキレート
化合物(s n (c s H703)2 )コ重量部
とプ日ピオン酸lO重景部アセチルアセトン〃重量部を
加えて均一に溶解した組成物は淡黄色透明であり、・ソ
ーダガラスにディッピング法で−AI)CrlL 7m
 inの引上速度で塗布した塗膜は、室温で容易に乾燥
して均一な酸化膜が得られた。これ1(ttso℃で3
θ分焼成すると虹彩もなく、シート抵抗、3に少′口、
可視部透過率90チ以上、膜硬度&Hの良好なI’rO
膜が、得られた。
Chelated indium hydroxy synthesized in Example-1,
To 100 parts by weight of the Tosyl solution, parts by weight of a tin acetoacetate methyl chelate compound (s n (cs H703)2) and parts by weight of acetylacetone were added to 100 parts by weight of the tosyl solution. Transparent, ・By dipping method on soda glass-AI) CrlL 7m
The coating film applied at a pulling speed of 1.5 in. was easily dried at room temperature and a uniform oxide film was obtained. This 1 (3 at ttso℃
After firing for θ minutes, there is no iris, sheet resistance, small mouth at 3,
I'rO with visible part transmittance of 90 cm or more and good film hardness & H
A membrane was obtained.

【図面の簡単な説明】[Brief explanation of drawings]

図面は実施例/でえられたオルガノインジウムゾルの赤
外線スペクトルである。
The figure is an infrared spectrum of the organoindium sol obtained in Example/.

Claims (1)

【特許請求の範囲】 1、一般式InX_3(Xはハロゲン又は硝酸基を示す
)で表わされるインジウム化合物の水溶性低級アルコー
ル溶液に、β−ジケトン、β−ケトエステルから選ばれ
たキレート化剤を加え、これを塩基性イオン交換樹脂で
処理することからなる、キレートインジウムヒドロキシ
ド型オルガノインジウムゾルの製造法。 2、キレートインジウムヒドロキシド型のオルガノイン
ジウムゾルにSn/In比が0.5−30重量%で錫化
合物を加えて得られる透明導電膜形成用組成物。 3、錫化合物が一般式SnY_2(Yはβ−ジケトン、
β−ケトエステル又はN−アルキル基置換アミノアルコ
ールを示す)で示される2価錫キレート化合物である特
許請求の範囲第2項記載の透明導電膜形成用組成物。 4、キレートインジウムヒドロキシド型オルガノインジ
ウムゾルに2価錫キレート化合物を加えて得られる透明
導電膜形成用組成物を基板に塗布し、焼成してえられる
透明導電膜。
[Claims] 1. A chelating agent selected from β-diketones and β-ketoesters is added to a water-soluble lower alcohol solution of an indium compound represented by the general formula InX_3 (X represents a halogen or nitric acid group). , a method for producing a chelate indium hydroxide type organoindium sol, which comprises treating this with a basic ion exchange resin. 2. A composition for forming a transparent conductive film obtained by adding a tin compound to a chelate indium hydroxide type organoindium sol at a Sn/In ratio of 0.5 to 30% by weight. 3. The tin compound has the general formula SnY_2 (Y is β-diketone,
The composition for forming a transparent conductive film according to claim 2, which is a divalent tin chelate compound represented by β-ketoester or N-alkyl group-substituted amino alcohol. 4. A transparent conductive film obtained by applying a composition for forming a transparent conductive film obtained by adding a divalent tin chelate compound to a chelate indium hydroxide type organo-indium sol onto a substrate and baking the composition.
JP61019940A 1986-01-31 1986-01-31 Composition for forming transparent conductive film containing organoindium sol Expired - Lifetime JPH067444B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61019940A JPH067444B2 (en) 1986-01-31 1986-01-31 Composition for forming transparent conductive film containing organoindium sol

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61019940A JPH067444B2 (en) 1986-01-31 1986-01-31 Composition for forming transparent conductive film containing organoindium sol

Publications (2)

Publication Number Publication Date
JPS62180740A true JPS62180740A (en) 1987-08-08
JPH067444B2 JPH067444B2 (en) 1994-01-26

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ID=12013203

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Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01116082A (en) * 1987-10-29 1989-05-09 Catalysts & Chem Ind Co Ltd Coating solution for transparent thin oxide film
JP2006225256A (en) * 2005-01-19 2006-08-31 Mitsubishi Materials Corp Indium tin oxide precursor, indium tin oxide film, and method for production thereof
JP2009122474A (en) * 2007-11-16 2009-06-04 Mitsubishi Electric Corp Liquid crystal display device and its manufacturing method
JP2012512323A (en) * 2008-12-16 2012-05-31 アクゾ ノーベル コーティングス インターナショナル ビー ヴィ Aqueous dispersion of silver particles
JP2015517179A (en) * 2012-03-23 2015-06-18 エルジー・ケム・リミテッド Substrates for organic electronic devices

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101910157B1 (en) * 2018-08-06 2018-10-19 영창케미칼 주식회사 The process liquid composiition for treating organic/inorganic hybrid photoresist

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6287242A (en) * 1985-05-29 1987-04-21 Nippon Shokubai Kagaku Kogyo Co Ltd Stable metal oxide sol composition

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6287242A (en) * 1985-05-29 1987-04-21 Nippon Shokubai Kagaku Kogyo Co Ltd Stable metal oxide sol composition

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01116082A (en) * 1987-10-29 1989-05-09 Catalysts & Chem Ind Co Ltd Coating solution for transparent thin oxide film
JP2006225256A (en) * 2005-01-19 2006-08-31 Mitsubishi Materials Corp Indium tin oxide precursor, indium tin oxide film, and method for production thereof
JP2009122474A (en) * 2007-11-16 2009-06-04 Mitsubishi Electric Corp Liquid crystal display device and its manufacturing method
JP2012512323A (en) * 2008-12-16 2012-05-31 アクゾ ノーベル コーティングス インターナショナル ビー ヴィ Aqueous dispersion of silver particles
JP2015517179A (en) * 2012-03-23 2015-06-18 エルジー・ケム・リミテッド Substrates for organic electronic devices

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