JPH0673016B2 - Automatic exposure equipment for printed wiring boards - Google Patents
Automatic exposure equipment for printed wiring boardsInfo
- Publication number
- JPH0673016B2 JPH0673016B2 JP60145263A JP14526385A JPH0673016B2 JP H0673016 B2 JPH0673016 B2 JP H0673016B2 JP 60145263 A JP60145263 A JP 60145263A JP 14526385 A JP14526385 A JP 14526385A JP H0673016 B2 JPH0673016 B2 JP H0673016B2
- Authority
- JP
- Japan
- Prior art keywords
- machine
- printed wiring
- wiring board
- exposure
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Description
【発明の詳細な説明】 〔産業上の利用分野〕 この発明は，印刷配線基板の外側に設けられた銅箔に，
必要な回路パターンを露光する自動露光機に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a copper foil provided on the outside of a printed wiring board,
The present invention relates to an automatic exposure device that exposes a necessary circuit pattern.
印刷配線基板は，外側に銅箔を一体に成形後，必要な回
路パターンを露光し，不要部を剥離後，残つた部分にメ
ツキ等の表面処理を行ない完成する。第５図は従来の例
による印刷配線基板に必要な回路パターンを露光する自
動露光機を示す断面図である。図において（１）は印刷
配線基板（２）を乗せ順に搬送機（３）に送る投入機
で，投入機駆動部（４）により常に一定の位置に基板
（２）を保持している。また（５）は基板（２）を１枚
ずつ吸上げ搬送する搬送用吸盤（６）を備えたキヤリヤ
で，矢印Ａの左右方向にガイド（７）に沿つて移動部
（８）により移動する。（９）は搬送機（３）により運
ばれ、露光部ガラス板（10）の上に置かれた基板（２）
を押える基板押えで，矢印Ｂの方向に上下し，真空吸盤
部（11）にて基板（２）を固定する。（12）は固定後の
基板（２）に露光部ガラス（10）を経由して露光する光
源である。（13）は露光後，搬送機（３）にて運ばれた
基板（２）を受取る受取り機である。A printed wiring board is completed by integrally molding a copper foil on the outside, exposing a necessary circuit pattern, peeling off unnecessary portions, and performing surface treatment such as plating on the remaining portions. FIG. 5 is a sectional view showing an automatic exposure device for exposing a circuit pattern required for a printed wiring board according to a conventional example. In the figure, (1) is a loading machine that feeds the printed wiring board (2) in order to the transporting machine (3), and the loading machine drive unit (4) always holds the board (2) at a fixed position. Further, (5) is a carrier provided with a suction cup (6) for sucking up and transporting the substrates (2) one by one, which is moved by a moving part (8) along the guide (7) in the left and right direction of arrow A. . The substrate (2) is carried by the carrier (3) and placed on the glass plate (10) of the exposure section.
By pressing the substrate, the substrate is moved up and down in the direction of arrow B, and the substrate (2) is fixed by the vacuum suction part (11). Reference numeral (12) is a light source for exposing the fixed substrate (2) via the exposure glass (10). (13) is a receiver that receives the substrate (2) carried by the carrier (3) after exposure.
従来の例による印刷配線基板の自動露光装置は以上の様
に構成され，次の様に露光される。The automatic exposure apparatus for the printed wiring board according to the conventional example is configured as described above, and is exposed as follows.
露光前の基板（２）は投入機（１）により順に一定の位
置に保持され，搬送機（３）にある搬送用吸盤（６）に
て吸い上げられ，キヤリヤ（５）に固定される。次にキ
ヤリヤ（５）はガイド（７）に沿つて矢印Ａの方向に露
光部ガラス板（10）の上に移動し，搬送用吸盤（６）に
よる吸上げは解除されて基板（２）は露光部ガラス板
（10）の上に乗せられ，キヤリヤ（５）は投入機（１）
の上に戻る。その後，基板押え（９）が矢印Ｂの方向に
移動し，基板（２）を所定の位置に置き，真空吸盤部
（11）にて基板（２）を露光部ガラス部（10）に密着固
定後，光源（12）よりの光により基板（２）の銅箔部に
所定の回路パターンを露光する。露光完了後，基板押え
（９）は矢印Ｂの上方に移動し，投入機（１）の上に戻
つていたキヤリヤ（５）が露光完了した基板（２）の上
に移動し，搬送用吸盤（６）にて基板（２）を吸上げ受
取り機（13）に移動し，受取り機（13）に基板（２）は
置かれ，次の工程に備える。The substrate (2) before exposure is sequentially held at a fixed position by the loading machine (1), sucked up by the transfer suction cup (6) in the transfer machine (3), and fixed to the carrier (5). Next, the carrier (5) moves along the guide (7) in the direction of arrow A onto the glass plate (10) of the exposure section, and the suction by the suction cup (6) for transport is released, and the substrate (2) is removed. The carrier (5) is placed on the exposure section glass plate (10), and the carrier (5) is inserted into the loading machine (1).
Return to top. After that, the substrate retainer (9) moves in the direction of arrow B, the substrate (2) is placed at a predetermined position, and the substrate (2) is closely fixed to the glass part (10) of the exposure part by the vacuum suction cup part (11). After that, a predetermined circuit pattern is exposed on the copper foil portion of the substrate (2) by the light from the light source (12). After the exposure is completed, the substrate retainer (9) moves above the arrow B, and the carrier (5) returning to the loading machine (1) moves onto the exposed substrate (2) for transport. The substrate (2) is sucked up by the suction cup (6) and moved to the receiver (13), and the substrate (2) is placed on the receiver (13) to prepare for the next step.
従来の例による印刷配線基板の自動露光装置は以上のよ
うに基板はまず搬送機により露光部ガラス板の上まで搬
送され，基板が露光部ガラス板に乗せられた後，次に基
板押えが上から降りて基板を所定の位置に固定し，真空
吸盤部により露光部ガラス板に密着，固定される装置と
なつている。従つて搬送機と基板押えの２つの装置によ
り，基板が搬送される構造であるため，ほこり等が基板
及び露光部ガラス板へ乗りやすく，異常な回路パターン
が露光されてしまうという問題があつた。As described above, the automatic exposure apparatus for the printed wiring board according to the conventional example transfers the board to the glass plate of the exposure section by the transfer machine, puts the board on the glass plate of the exposure section, and then presses the board up. The device is such that the substrate is fixed at a predetermined position after getting off from it, and the vacuum sucker unit is in close contact with and fixed to the glass plate of the exposure unit. Therefore, since the substrate is transferred by the two devices, that is, the carrier and the substrate retainer, there is a problem that dust or the like easily gets on the substrate and the glass plate of the exposure unit and an abnormal circuit pattern is exposed. .
また，搬送機と基板押えの２つの機構により基板を搬送
し，固定しているため，設備が大型になりやすく，占有
面積，コスト等が大きくなるという問題点があつた。Further, since the substrate is transported and fixed by the two mechanisms of the carrier and the substrate retainer, there is a problem that the facility tends to be large, and the occupying area and the cost are large.
この発明による印刷配線基板の自動露光装置は上記の問
題点を解消するためになされたもので，搬送機で基板を
露光機上に搬送し設置後そのまま加圧固定し、露光する
ことにより、搬送と基板押えを１つの機構で行なわせ、
小型で効率の良い装置を得ることを目的とする。The automatic exposure apparatus for a printed wiring board according to the present invention has been made to solve the above-mentioned problems, and the substrate is transferred onto the exposure machine by the transfer machine, and after being installed, the substrate is pressurized and fixed as it is, and then transferred. And press the substrate with one mechanism,
The purpose is to obtain a small and efficient device.
この発明による印刷配線基板の自動露光装置は，印刷配
線基板を自動的に投入する投入機と，この投入機により
投入された上記印刷配線基板を露光する露光機と，この
露光機により露光された上記印刷配線基板を受け取る受
取機と，これら投入機，露光機及び受取機間において上
記印刷配線基板を搬送する搬送機とを備え，上記搬送機
は，上記印刷配線基板を上記露光機の所定の位置に加圧
固定する軟質板からなるバックアップシート，及び上記
投入機と上記露光機と上記受取機との間において上記バ
ックアップシート上に突出して上記印刷配線基板を吸着
するとともに，上記露光機における露光時，上記バック
アップシート内に収納される搬送用吸盤を有するもので
ある。An automatic exposure apparatus for a printed wiring board according to the present invention includes a loading machine for automatically loading a printed wiring board, an exposure machine for exposing the printed wiring board loaded by the loading machine, and an exposure machine for exposing the printed wiring board. It comprises a receiver for receiving the printed wiring board, and a transfer machine for transferring the printed wiring board between the loading machine, the exposure machine and the receiving machine. A backup sheet made of a soft plate that is fixed in pressure at a position, and the printed wiring board is adsorbed by protruding onto the backup sheet between the loading machine, the exposure machine, and the receiving machine, and exposing the exposure machine. At this time, it has a transport suction cup housed in the backup sheet.
この発明による印刷配線基板の自動露光装置は上記のよ
うに構成され，搬送機により投入機から露光機を経由し
て受取り機まで一貫して基板を処理し，露光時の独立し
た基板押え機構を不要にする。The automatic exposure apparatus for the printed wiring board according to the present invention is configured as described above, and the substrate is consistently processed by the carrier from the loading machine to the receiver via the exposure machine, and an independent substrate holding mechanism at the time of exposure is provided. Make it unnecessary.
第１図〜第４図はこの発明の一実施例による印刷配線基
板の自動露光装置を示し，第１図はこの装置を示す正面
図，第２図は第１図の矢印Ｃの方向から見た側面図であ
る。第３図，第４図は第２図のＤ〜Ｄ断面図で，第３図
は基板を露光機に搬送した状態を示し，第４図は基板を
押して固定した状態を示す図である。図において
（１），（２），（４）〜（８），（10），（12），
（13）は従来の例と同一または相当品である。（30）は
ゴム板等の軟質板によるバツクアツプシート（40）をキ
ヤリヤ（５）の下部に設けた搬送機で，従来の例と同様
に移動部（８）によりガイド（７）に沿つて矢印Ｅの方
向に移動し，同じく搬送機（30）に設けられた出没自在
の搬送用吸盤（６）により基板（２）を吸い上げて左右
に移動させる。（50）は露光部において露光部ガラス板
（10）が乗せられた透過板（60）に設けられ，搬送機
（30）のキヤリヤ（５）を支持するゴムパツキン、（7
0）は透過板（60）に設けられた吸引孔である。1 to 4 show an automatic exposure apparatus for a printed wiring board according to an embodiment of the present invention, FIG. 1 is a front view showing this apparatus, and FIG. 2 is a view from the direction of arrow C in FIG. FIG. 3 and 4 are cross-sectional views taken along lines D-D in FIG. 2, FIG. 3 shows a state in which the substrate is conveyed to the exposure machine, and FIG. 4 shows a state in which the substrate is pushed and fixed. In the figure, (1), (2), (4) to (8), (10), (12),
(13) is the same as or equivalent to the conventional example. (30) is a conveyor provided with a back-up sheet (40) made of a soft plate such as a rubber plate in the lower part of the carrier (5), and along the guide (7) by the moving part (8) as in the conventional example. The substrate (2) is moved in the direction of arrow E and is sucked up and down by the transfer suction cup (6) also provided in the transfer machine (30) so as to be moved left and right. (50) is a rubber packing which is provided in a transmissive plate (60) on which an exposure section glass plate (10) is placed in the exposure section, and which supports a carrier (5) of a conveyor (30), (7).
Reference numeral 0) is a suction hole provided in the transmission plate (60).
一実施例による印刷配線基板の自動露光装置は以上のよ
うに構成され，基板（２）を投入機（１）に設置後、次
の様に自動的に露光されてゆく。まず，投入機（１）に
より所定の高さに維持されている基板（２）の上に搬送
機（30）のキヤリヤ（５）が移動し，搬送用吸盤（６）
にて基板（２）を持ち上げ，矢印Ｅの方向に右へ移動
し，露光部ガラス板（10）の上に到る。次に第３図に示
すようにキヤリヤ（５）は露光部ガラス板（10）に向か
つて降下し，基板（３）を露光部ガラス板（10）上の所
定の位置に置く。この時，搬送用吸盤（６）はバツクア
ツプシート（40）内に収納され，バツクアツプシート
（40）の面が基板（２）に密着し，基板（２）を所定の
位置に加圧固定する。次に光源（12）により露光部ガラ
ス板（10）に書かれた回路パターンで露光された後，キ
ヤリヤ（５）を上方に移動し基板（２）を持ち上げ，さ
らに矢印Ｅの方向へ右に移動させ，受取り機（13）の上
に到る。次にキヤリヤ（５）が降下し，基板（２）が受
取り機（13）の上に置かれたとき，搬送用吸盤（６）の
吸上げを解除して基板（２）は受取り機（13）に置か
れ，次の作業工程に備えられる。The automatic exposure apparatus for a printed wiring board according to one embodiment is configured as described above, and after the board (2) is installed in the loading machine (1), it is automatically exposed as follows. First, the carrier (5) of the carrier (30) moves onto the substrate (2) maintained at a predetermined height by the throwing machine (1), and the carrier suction cup (6).
The substrate (2) is lifted at and is moved to the right in the direction of arrow E, and reaches the glass plate (10) of the exposure section. Next, as shown in FIG. 3, the carrier (5) descends toward the exposure glass plate (10), and the substrate (3) is placed at a predetermined position on the exposure glass plate (10). At this time, the transfer suction cup (6) is housed in the back-up sheet (40), the surface of the back-up sheet (40) is in close contact with the substrate (2), and the substrate (2) is pressed and fixed at a predetermined position. To do. Next, after exposure with the circuit pattern written on the exposure section glass plate (10) by the light source (12), the carrier (5) is moved upward to lift the substrate (2), and further to the right in the direction of arrow E. Move to reach the receiver (13). Next, when the carrier (5) descends and the substrate (2) is placed on the receiver (13), the suction of the transfer suction cup (6) is released and the substrate (2) is transferred to the receiver (13). ) And prepare for the next work process.
なお上記実施例において，露光部の透過板（60）に吸引
孔（70）を設け，第４図の矢印Ｆの方向に真空に引くこ
とによつてゴムパツキン（50）とバツクアツプシート
（40）で囲まれた部分が真空になりバツクアツプシート
（40）が基板（２）を押えつけるため，より確実に基板
（２）を露光部ガラス板（10）に密着でき，さらに精度
を高めて回路パターンを露光できる装置が得られる。In the above embodiment, the transmission plate (60) of the exposure section is provided with a suction hole (70), and a vacuum is drawn in the direction of arrow F in FIG. 4 so that the rubber packing (50) and the back-up sheet (40) are pulled. The part surrounded by is a vacuum and the backup sheet (40) presses the substrate (2), so that the substrate (2) can be more closely attached to the glass plate (10) of the exposure part, and the circuit is further improved in accuracy. An apparatus is obtained that can expose the pattern.
以上の様に、この発明による印刷配線基板の自動露光装
置は，露光時に，印刷配線基板を別途固定する押え機構
を不要にして，小型，効率的な装置にすることができ，
また，印刷配線基板の移動，固定のために，従来のよう
に押え機構と搬送機両方を必要とすることなく一貫して
搬送機により移動するので，印刷配線基板及び露光部ガ
ラス材への塵埃の介入する頻度が少なくなり，結果的に
異常な回路パターンを露光することを防止できる，さら
に，バックアップシートが軟質板からなり，また搬送用
吸盤が露光時にはバックアップシート内に収納されるた
め，印刷配線基板を露光機に，より密着させることがで
きる，といった顕著な効果を奏するものである。As described above, the automatic exposure apparatus for a printed wiring board according to the present invention does not require a holding mechanism for separately fixing the printed wiring board at the time of exposure, and can be a small and efficient apparatus.
In addition, since the printed wiring board is moved and fixed, it can be moved by the transport machine consistently without the need for both the pressing mechanism and the transport machine as in the conventional case, so that dust on the printed wiring board and the glass material of the exposure area can be prevented. It is possible to prevent the exposure of an abnormal circuit pattern as a result, the backup sheet is made of a soft plate, and the transfer suction cup is stored in the backup sheet at the time of exposure. This has a remarkable effect that the wiring board can be more closely attached to the exposure device.
第１図はこの発明の一実施例による印刷配線基板の自動
露光装置を示す正面図，第２図は第１図の側面図，第３
図，第４図は第２図のＤ〜Ｄ断面図である。第５図は従
来の例による印刷配線基板の自動露光装置を示す正面図
である。図において（１）は投入機，（２）は印刷配線
基板，（６）は搬送用吸盤，（10）は露光部ガラス板，
（13）は受取り機，（30）は搬送機，（40）はバツクア
ツプシートである。 各図中同一符号は同一または相当品を示す。1 is a front view showing an automatic exposure apparatus for a printed wiring board according to an embodiment of the present invention, FIG. 2 is a side view of FIG. 1, and FIG.
FIG. 4 and FIG. 4 are cross-sectional views taken along line D-D of FIG. FIG. 5 is a front view showing an automatic exposure apparatus for a printed wiring board according to a conventional example. In the figure, (1) is a throwing machine, (2) is a printed wiring board, (6) is a suction cup for transportation, (10) is a glass plate for an exposure section,
(13) is a receiver, (30) is a carrier, and (40) is a back-up sheet. In the drawings, the same reference numerals indicate the same or equivalent products.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 近藤 公一 神奈川県相模原市宮下１丁目１番57号 三 菱電機株式会社相模製作所内 (72)発明者 服部 修 神奈川県相模原市宮下１丁目１番57号 三 菱電機株式会社相模製作所内 (56)参考文献 実開 昭58−96536（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Koichi Kondo 1-157 Miyashita, Sagamihara-shi, Kanagawa Sanryo Electric Co., Ltd. Sagami Works (72) Inventor Osamu Hattori 1-1-1, Miyashita, Sagamihara-shi, Kanagawa No. 57 Sanryo Electric Co., Ltd. Sagami Manufacturing Co., Ltd. (56) Bibliographic references Sho 58-96536 (JP, U)
Claims (1)
と、 この投入機により投入された上記印刷配線基板を露光す
る露光機と、 この露光機により露光された上記印刷配線基板を受け取
る受取機と、 これら投入機、露光機及び受取機間において上記印刷配
線基板を搬送する搬送機とを備え、 上記搬送機は、上記印刷配線基板を上記露光機の所定の
位置に加圧固定する軟質板からなるバックアップシー
ト、及び上記投入機と上記露光機と上記受取機との間に
おいて上記バックアップシート上に突出して上記印刷配
線基板を吸着するとともに、上記露光機における露光
時、上記バックアップシート内に収納される搬送用吸盤
を有する ことを特徴とする印刷配線基板の自動露光装置。1. A loading machine for automatically loading a printed wiring board, an exposure machine for exposing the printed wiring board loaded by the loading machine, and a receiving machine for receiving the printed wiring board exposed by the exposure machine. Machine and a conveyor for conveying the printed wiring board between the throwing machine, the exposing machine and the receiving machine, and the conveying machine is a flexible device for press-fixing the printed wiring board at a predetermined position of the exposing machine. A backup sheet composed of a plate, and while adsorbing the printed wiring board by projecting onto the backup sheet between the throwing machine, the exposing machine, and the receiving machine, during exposure in the exposing machine, the backup sheet is placed in the backup sheet. An automatic exposure device for a printed wiring board, which has a sucker for transportation to be stored.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60145263A JPH0673016B2 (en) | 1985-07-02 | 1985-07-02 | Automatic exposure equipment for printed wiring boards |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60145263A JPH0673016B2 (en) | 1985-07-02 | 1985-07-02 | Automatic exposure equipment for printed wiring boards |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS626260A JPS626260A (en) | 1987-01-13 |
| JPH0673016B2 true JPH0673016B2 (en) | 1994-09-14 |
Family
ID=15381083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60145263A Expired - Lifetime JPH0673016B2 (en) | 1985-07-02 | 1985-07-02 | Automatic exposure equipment for printed wiring boards |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0673016B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE460659B (en) * | 1987-08-27 | 1989-11-06 | Svecia Silkscreen Maskiner Ab | DEVICE FOR AUTOMATICALLY AND TURNING AND ORDER TO MANUFACTURE ANY NUMBER OF PRESSURE FORMS |
| WO2001058233A1 (en) * | 2000-01-31 | 2001-08-09 | Shibaura Mechatronics Corporation | Method and apparatus for mounting electronic device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5896536U (en) * | 1981-12-22 | 1983-06-30 | 富士写真フイルム株式会社 | Recording material loading device |
-
1985
- 1985-07-02 JP JP60145263A patent/JPH0673016B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS626260A (en) | 1987-01-13 |
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