JPH066444Y2 - 試料ステージ - Google Patents

試料ステージ

Info

Publication number
JPH066444Y2
JPH066444Y2 JP13954187U JP13954187U JPH066444Y2 JP H066444 Y2 JPH066444 Y2 JP H066444Y2 JP 13954187 U JP13954187 U JP 13954187U JP 13954187 U JP13954187 U JP 13954187U JP H066444 Y2 JPH066444 Y2 JP H066444Y2
Authority
JP
Japan
Prior art keywords
sample
case
vacuum chamber
moving
moving mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13954187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6444556U (enExample
Inventor
和夫 小柳
晃 寺本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP13954187U priority Critical patent/JPH066444Y2/ja
Publication of JPS6444556U publication Critical patent/JPS6444556U/ja
Application granted granted Critical
Publication of JPH066444Y2 publication Critical patent/JPH066444Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP13954187U 1987-09-11 1987-09-11 試料ステージ Expired - Lifetime JPH066444Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13954187U JPH066444Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13954187U JPH066444Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Publications (2)

Publication Number Publication Date
JPS6444556U JPS6444556U (enExample) 1989-03-16
JPH066444Y2 true JPH066444Y2 (ja) 1994-02-16

Family

ID=31402894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13954187U Expired - Lifetime JPH066444Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Country Status (1)

Country Link
JP (1) JPH066444Y2 (enExample)

Also Published As

Publication number Publication date
JPS6444556U (enExample) 1989-03-16

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