JPH0664346B2 - Exposure machine - Google Patents

Description

The present invention relates to an exposure device for printing a pattern of an electronic circuit or the like on a printed wiring board.

[Conventional technology]

As an exposure device for printing a pattern of an electronic circuit or the like on a printed wiring board, a pallet on which a desired number of works and masks are positioned and stacked and a top and bottom symmetrically arranged so as to expose the top and bottom surfaces of the work A double-sided exposure device having a lamp as a light source, a reflecting mirror, a baking frame, and a transparent plate, and holding the pallet at the carry-in position and holding the work and / or mask housed in the pallet at a constant height position Loading device, a transport device that reciprocates between the loading position and the exposure position along a rail extending from the loading position to the unloading position through the exposure position, and reciprocating between the exposure position and the unloading position. It has a separate transport device and a large number of suction pads for suction-holding the work and / or mask on the lower surface. And a suction device which is mounted for exposure machine has been proposed (e.g., JP 60-168148
issue).

[Problems to be solved by the invention]

In the conventional exposure apparatus as described above, since positioning of the work and mask with respect to the pallet and positioning of the pallet with respect to the carry-in device are performed by another positioning means provided on the pallet, the positioning accuracy is poor and the positioning accuracy is low. In order to increase the height, it is necessary to increase the dimensional accuracy of the pallet, which causes a problem that the manufacturing cost increases.

The present invention is for solving the above-mentioned problems, and it is possible to increase the positioning accuracy of the work and the mask with respect to the carry-in device by using the positioning pin in which the positioning portions for the work and / or the mask are integrated. It is an object of the present invention to obtain an exposure device that can reduce the manufacturing cost without requiring the dimensional accuracy of the pallet itself to be increased.

[Means for solving problems]

The exposure apparatus of the present invention has a carry-in device for positioning a pallet on which a work and / or mask is loaded and raising it to a predetermined height, and a light source at the bottom and aligning the work and the mask to expose the lower surface of the work. A lower surface exposure apparatus for performing, an upper surface exposure apparatus for exposing the upper surface of the work by aligning the work and the mask with a light source on the upper side, a carry-out apparatus for carrying out the exposed work out of the machine, and the work or the mask. A transfer device that sucks and moves between the above-mentioned devices and transfers the work, and a work / position that is provided on the pallet and positions the work and / or the mask with respect to the pallet
A mask positioning part and a positioning pin integrally having a pallet positioning part for positioning the pallet with respect to the carry-in device are provided.

[Work]

In the exposure apparatus of the present invention, the workpiece / mask positioning portion of the positioning pin provided on the pallet is inserted into the positioning hole of the workpiece and / or the mask, and
The mask is loaded on the pallet, and the pallet is positioned by engaging the pallet with the positioning guide of the carry-in device.

Then, the pallet is raised to a predetermined height by the carry-in device, and is conveyed to the lower surface exposure device and the upper surface exposure device for the work and the mask by the conveyance device, and the work and the mask are aligned and brought into close contact with each other for exposure. . The exposed work is carried by the carrying device to the carry-out device and carried out of the carry-out device.

When loading workpieces and / or masks on a pallet, the workpieces and / or masks can be placed accurately on the pallet if the workpiece / mask positioning portion of the positioning pin is inserted into the positioning holes provided on the workpieces and / or masks. Be positioned at. Since the work pin / mask positioning part and the pallet positioning part are integrally formed in the positioning pin, the positional relationship between the two is always constant. Therefore, the work / mask positioning part and Alternatively, the mask is accurately positioned at the carry-in position by the pallet positioning unit, and accurate positioning is performed regardless of variations in the pallet dimensions. In this case, since the position of the work and / or the mask is determined by the positional relationship between the work / mask positioning portion of the positioning pin and the pallet positioning portion, the dimensional accuracy of the positioning pin may be increased, and the dimensional accuracy of the pallet may be low. Since the positioning pins are integrally formed, it is easy to increase the dimensional accuracy, and the pallet is reduced in cost.

〔Example〕

An embodiment of the present invention will be specifically described below with reference to the drawings.

FIG. 1 (a) is a front view showing the entire exposure apparatus of this embodiment, and FIG. 1 (b) is a plan view thereof, both showing a state in which the front surface is notched (hereinafter the same). This exposure machine is intended for printing patterns such as electronic circuits on printed circuit boards, and stores a large number of workpieces and masks to be exposed in a stocker, automatically withdraws them, exposes them, and carries them out to a conveyor etc. outside the device. That is, the so-called automatic driving is configured. The stocker (1), the carry-in device (2), the lower surface exposure device (3), the upper surface exposure device (4), and the carry-out device (5) are arranged adjacent to each other from one end, and a work and a mask are placed between the respective devices. Transfer devices (6), (7), and (8) for transferring are provided so as to be movable.

The stocker (1) stores a large number of pallets on which works and / or masks are loaded, discharges the pallets to the carry-in device (2), and further empties pallets or pallets loaded with used masks. It is the one that is pulled inside and the next pallet is dispensed. The carry-in device (2) smoothly moves the pallet discharged from the stocker (1), sets it at a predetermined position, and then raises it to a predetermined height. The lower surface exposure device (3) has a light source in the lower part, and irradiates light from the lower surface of the work to perform exposure, and the upper surface exposure device (4) irradiates from the upper surface by a light source installed in the upper part. The carry-out device (5) carries out the exposed work out of the machine by means of a roller conveyor.

2 (a) is a rear view of the whole, (b) is a plan view thereof,
(C) is a side view showing two rails (9) extending horizontally from the carry-in device (2) to the carry-out device (5) through the lower surface exposure device (3) and the upper surface exposure device (4). ),
A carrier device (6) that reciprocates between the carry-in device (2) and the lower surface exposure device (3), a carrier device (7) that reciprocates between the lower surface exposure device (3) and the upper surface exposure device (4), and an upper surface exposure. A transfer device (8) that reciprocates between the device (4) and the unloading device (5) is set, and the cylinders (9a) and (9) are respectively set.
It is designed to be driven horizontally by b) and (9c).

FIG. 3A is a plan view of the pallet, FIG. 3B is a front view thereof, FIG. 3C is a side view, and FIG.
(E) is a plan view of a pallet loaded with works, and (f) is a plan view of a pallet loaded with masks. The pallet (10) is for loading the work (13) and / or the mask (14), and two positioning pins (11) are attached near one side thereof. The positioning pin (11) is used for positioning the work (13) and / or the mask (14), the work / mask positioning section (11a), and the pallet (1).
The pallet positioning part (11b) for positioning (0) is provided coaxially with the work / mask positioning part (11b).
a) projects to the top of the pallet (10) so that it can be inserted into the positioning hole (13a) of the work (13) or the positioning hole (14b) of the mask (14), and the pallet positioning part (11b) has the pallet positioning part (11b). ) Is protruding to the bottom. The work (13) can be exposed on both upper and lower surfaces, and the mask (14) is made of a film having a pattern corresponding to each, and is lined with a base (14a) made of a transparent acrylic resin plate having a larger area than the film. (13b), (14
c) is an alignment hole, and (14d) is a through hole.

FIG. 4 (a) is a front view of the stocker (1), and FIG. 4 (b) is a plan view thereof. The stocker (1) is arranged at one end of the exposure machine, and the pallets (10) in which the work (13) and / or the mask (14) are positioned by the positioning pins (11) are stored in a multi-stage manner and stored in the order of processes. Pallets (10)
Is discharged by the transfer mechanism (1a) so as to be pushed out to the carry-in device (2), and the pallet (10) that is emptied or the pallet (10) on which the used mask (14) is loaded is returned to the next pallet. Although (10) is to be paid out, the details are not shown.

FIG. 5 (a) is a front view of the carry-in device (2), (b) is a side view thereof, and (c) is a plan view of the table top plate. The carry-in device (2) is a work (13) and / or a mask (1) delivered from a predetermined position under the stocker (1).
The pallet (10) loaded with 4) is moved smoothly, positioned and held at a specified position, and then raised to a specified height, and the pallet (10) that has become empty or the mask (14) that has been used up It is configured so that the pallet (10) loaded with can be lowered to the original position and returned to the stocker (1). That is, the table frame body (2d) and the table top plate (2e) set on the upper surface of the table frame body (2d) via the rack (2c) that meshes with the linear motor (2b) attached to the center of the rigidly assembled frame body (2a). The table consisting of is supported by the frame body (2a), and can be slowly moved up and down with respect to the frame body (2a) with the shaft (2f) as a guide.

A cylinder (2j) is connected to the frame body (2a) between the frame (12) of the exposure machine and it can be moved up and down at high speed by using a bearing (2g) and a rail (2h) as a guide. .

A ball transfer tool (2k) is installed on the upper surface of the table upper plate (2e) so that the pallet (10) can move smoothly. From the stocker (1) side, by the transfer mechanism (1a),
When the retracted pallet (10) slides on this surface and hits the stopper (2l), the transfer mechanism (1a) returns to the inside of the stocker (1) and the pallet (10) is temporarily placed. It has become.

The table top plate (2e) is provided with a pressing mechanism (2m) on one side adjacent to the side with the stopper (2l) to connect to the cylinder (2n), and a positioning guide on the opposite side. (2o) is incorporated, V-shaped notch (2p) and trapezoidal notch (2q) are formed in the positioning guide (2o), and the pallet (10) temporarily placed at the position of the stopper (2l). ) Pressing mechanism (2m) interlocking with the cylinder (2n)
The pallet positioning part (11b) of the positioning pin (11) protruding to the bottom of the pallet (10) with the notch (2p) to position it in the direction perpendicular to the pressing direction. The pallet positioning part (11
Positioning in the pressing direction is performed by b) and the notch (2q). An extrusion mechanism (2r) that releases the pallet (10) from the guide (2o) at the lowered position of the table top plate (2e).
Is provided, and a transfer device (6) is provided at the highest position of the table top plate (2e).

FIG. 6 (a) is a front view of the transfer device (6), (b) is a side view, (c) is a plan view, and (d) is a front view of a suction pad and a pressing pad. The carrying device (6) is a carrying-in device (2)
From the workpiece (13) or mask (1) in the pallet (10)
4) is sucked and conveyed to the lower surface exposure device (3) for setting, and conversely, the used mask (14) is transferred from the lower surface exposure device (3) to the pallet (10) of the carry-in device (2) and stored. Is configured to. The vertical moving frame (6a) is the horizontal moving plate (6
It is suspended by a cylinder (6c) in b) so that it can move up and down with a bearing (6d) attached to the side of the vertical movement frame (6a) and a shaft (6f) attached to a bracket (6e) as a guide. It has become. The horizontal moving plate (6b) is the second
A cylinder (9a) shown in the figure reciprocates on the rail (9) from the loading device (2) to the lower surface exposure device (3).

Rubber suction pad (6g) on the bottom of the vertical movement frame (6a)
Is attached to the positions A and B in FIG. 6 (c), and the pressing pad (6h) is attached to the position C. Adsorption pad (6g)
The one in position A is piped to the vacuum generator (6i),
The B arrangement is connected to the vacuum generator (6j),
The suction pad (6g) of device A inside is dedicated to workpiece suction,
The suction pad (6g) at the B position on the outside is provided exclusively for mask suction, and the suction pad (6g) at the B position is used for the mask (1g).
4) does not directly adsorb, but adsorbs the outer peripheral part of the acrylic resin plate of the base (14a) to which the mask (14) is attached, which is off the mask (14), which causes misalignment and dirt of the mask (14). It is designed to prevent The suction pad (6g) is attached to the vertical moving frame (6a) via the spring (6k), and has a great deal of flexibility in the vertical direction, but the pressing pad (6h) is made of rubber only on the lower surface, It has flexibility, and the mutual positional relationship is usually located slightly above the bottom surface of the suction pad (6g) as shown in Fig. 6 (d). However, by lowering the frame (6a) to the required position in the lower surface exposure device (3), a pressing force is applied to the periphery of the alignment pin (3d) of the work (13) or the mask (14), and the work (13 ) Or the mask (14) is mounted at a position corresponding to the alignment pin (3d) so as to follow the displacement at the time of alignment.

FIG. 7 (a) is a front view of the lower surface exposure apparatus (3), (b) is a side view thereof, (c) is a plan view, (d) is a plan view of the exposure table, and (e) is a part thereof. A sectional view, FIG. 8A is a plan view of the alignment pin, FIG. 8B is a front view thereof, FIG. 8C is a side view, and FIG. 9 is a front view of the work release pin. The lower surface exposure device (3) aligns the work (13) conveyed from the carry-in device (2) by the conveying device (6) and the mask (14) and makes them in close contact with each other, and irradiates ultraviolet rays or visible light from below. Thus, the one surface of the mask (14) is baked. An exposure table (3a) is provided below the lower surface exposure device (3), and a light source (3b) including a reflecting mirror is provided below the exposure table (3a).
Is installed. The work (1
3) and a transparent glass plate (3c) for loading the mask (14)
Is provided, and there are 3 pin groups, each of which includes an alignment pin (3d), a work release pin (3e), and a mask release pin (3f), which are provided side by side on different sides.
The suction holes (3g) for adsorbing the mask (14) are provided on the outer periphery thereof, and the suction holes (3h) for adhering the work (13) and the mask (14) are provided on the outer periphery thereof.

The pin (3d) has the link mechanism shown in FIG. 8, and the three pins (3d) are mechanically connected by the shaft (3i), and the three are synchronized by driving one cylinder (3j). Up and down, work (13) and / or mask (14)
It is inserted into the alignment holes (13b) and (14c) provided at the same position, so that the positional deviation due to the difference in the appearance of each pin (3d) is prevented. In order to facilitate the insertion at this time, the tip of the pin (3d) is tapered. The pin (3d) is located in the middle of the work release pin (3e) and the mask release pin (3f), but is omitted in FIGS. 7 (a) to 7 (c) for the sake of space.

In order to improve the alignment accuracy, the alignment holes (13b), (14) of the workpiece (13) or mask (14) with respect to the pin (3d)
The tolerance of the diameter of c) is quite small, and the pin (3d)
Since a certain amount of pressure is required to insert the mask, the transfer device (6) has a pressing pad (6) for pressing around the work (13) or the pin (3d) of the mask (14) as described above.
h) is attached, and the pin (3d) penetrates the pressing pad (6h).

The work release pin (3e) and the mask release pin (3f) are for removing the work (13) or the mask (14) from the pin (3d), and FIG. 9 shows the work release pin (3e). 3e) moves up and down via a guide (3l) by a cylinder (3k), and pushes up a work (13) through a through hole (14d) of a mask (14). Although the mask release pin (3f) is also omitted in the drawing, it has substantially the same structure and directly pushes up the mask (14). Vacuum suction nozzles (3m) and (3n) are opened in the intake holes (3g) and (3h). (3o) is a packing provided on the outer periphery of the exposure table (3a), and (3p) is a ventilation fan.

FIG. 10 (a) is a side view of the transfer device (7), (b),
(C) is a sectional view of a part thereof. The transfer device (7) transfers the work (13) or the mask (14) of the lower surface exposure device (3) to the upper surface exposure device (4), and at the same time, the work (13) and the mask (14) of the lower surface exposure device (3). Are configured to be in close contact with each other. (7a) is a vertical moving frame, (7b) is a horizontal moving plate, (7c) is a cylinder, (7d)
Is a bearing, (7e) is a bracket, (7f) is a shaft, (7g) is a suction pad, and (7k) is a spring, forming the same horizontal movement mechanism and vertical movement mechanism as the transfer device (6). .
(7l) is a suction part, which is suspended from the vertical moving frame (7a) by the shaft (7m) and the spring (7n), and the shaft (7m) slides in the shaft (7o), whereby the suction part (7l) Is flexible. The suction part (7l) has a hole (7l) by a suction pad (7g) built in between the rubber sheets (7p).
The work (13) or mask (14) is adsorbed by the vacuum action via q), and the
As shown in FIG. 6 (e), the work (13) and the mask (14) set on the lower exposed surface are covered and serve as a pad for holding a vacuum.

FIG. 11 (a) is a front view of the top exposure apparatus (4), (b) is a side view thereof, (c) is a plan view, (d) is a plan view of the exposure table, and (e) is its ee. Sectional drawing, (f) is an ff sectional view. The upper surface exposure device (4) is a device for baking the other surface of the work (13) printed by the lower surface exposure device (3) from above by a light source installed above the work (13) and a mask ( 14) is raised and pressed to set, and is composed of an upper and lower table and an exposure unit that also cover the work (13) and the mask (14) and also serve as a vacuum pad for adhering them together. .

The exposure unit consists of an exposure table (4a), a light source (4b), and a transparent glass plate (4
c), alignment pin (4d), work release pin (4e), mask release pin (4f), ... axis (4i), ... ventilation fan (4
Since p) and the like are provided upside down with respect to the lower surface exposure device (3) and have substantially the same structure, description thereof will be omitted.

The upper and lower tables are a frame body (4q) that is firmly assembled, a table (4r) provided above it, a frame body (4t) that supports them via a cylinder (4s), and a frame body (4q). Bearings (4u) mounted on the side of the, and the entire frame of the lightning machine (12)
And a rail (4v) attached to the rail (4v) and a bearing (4u) and a rail (4v) are used as guides to drive the cylinder (4s) to move up and down to the exposure surface.

The table (4r) above the frame (4q) is assembled by the shaft (41a), spring (41b) and bearing (41c) so that it can move flexibly, and the rubber sheet (41d) is on the top surface. It is stretched and fixed by the joints (41e) and (41f). A pressing plate (41g) is attached to the center of the table (4r) via a shaft (41h), a bearing (41i) and a spring (41j) so that the rubber sheet (41d) is pressed upward. ing.

The transfer device (8) sucks the work (13) placed on the upper and lower tables after being exposed by the upper surface exposure device (4),
Since it is configured to be conveyed onto the conveyor of the carry-out section and has the same structure as that of the conveying device (6) excluding the pressing pad (6h), detailed illustration thereof is omitted.

FIG. 12 (a) is a front view of the carry-out device (5), (b) is a side view thereof, (c) is a plan view of the carry-out portion, (d) is a front view thereof, and (e) is a side view thereof. is there. The carry-out device (5) is a device for carrying out the work (13) carried by the carrying device (8) from the upper surface exposure device (4) to a conveyor or the like outside the device, and a shaft having a roller (5a) fitted therein. (5b) is the bearing (5
supported by the framework (5b) via c), belt (5e)
The work (13) is carried out by the rubber belt (5g) stretched around the outer periphery of the roller (5a) by being connected to the electric motor (5f) through the frame (5d) and the entire frame (12) of the exposure machine. Installed on. (5h) is a tension adjusting device for the rubber belt (5g).

In the exposure machine configured as described above, the work (1
3) and / or mask (14 is loaded onto the pallet (10) shown in Fig. 3 and carried in. When the work (13) and / or mask (14) is loaded onto the pallet (10), the work (13) And / or when the work / mask positioning portion (11a) of the positioning pin (11) is inserted into the positioning holes (13a) and (14b) provided in the mask (14) and loaded, the work (13) and / or the mask (14) is the pallet (1
It is accurately positioned with respect to 0).

The pallet (10) thus loaded with the work (13) and / or the mask (14) is stored in the stocker (1), and a specific pallet (10) is stored in the stocker (see FIG. 4 and FIG. 5). The transfer mechanism (1a) from 1) delivers the transfer device (2) onto the table top plate (2e). Then, when the pallet (10) slides on the ball transfer tool (2k) and hits the stopper (2l), the transfer mechanism (1a) returns to the inside of the stocker (1), and the pallet (10) is temporarily placed. To be done. From this state, the pallet (10) is pressed toward the guide (2o) by the pressing mechanism (2m) linked to the cylinder (2n), and one of the pallet positioning parts of the positioning pin (11) protruding to the bottom of the pallet (10). (11b) and notch (2
Positioning in the direction perpendicular to the pressing direction is performed by the engagement of q), and positioning in the pressing direction is performed by the other pallet positioning portion (11b) and notch (2p).

The positioning pin (11) is the work / mask positioning part (11
Since a) and the pallet positioning part (11b) are integrally formed, the positional relationship between them is always constant. Therefore, the work / mask positioning part (11a) allows the pallet (10) to be positioned.
The work (13) and / or the mask (14) positioned with respect to the pallet (10) is accurately positioned at the carry-in position by the pallet (10) being positioned by the pallet positioning part (11b), and the size of the pallet (10) is determined. Accurate positioning is performed regardless of variations in In this case, since the positions of the work (13) and / or the mask (14) are determined by the positional relationship between the work / mask positioning portion (11a) and the pallet positioning portion (11b) of the positioning pin (11), the positioning pin (11) The dimensional accuracy may be increased, and the dimensional accuracy of the pallet (10) may be low. Since the positioning pin (11) is integrally formed, it is easy to increase the dimensional accuracy and the cost of the pallet (10) is reduced.

After the pallet (10) is positioned, the frame (2a) is moved up to a predetermined position at high speed by the cylinder (2j), and then the table frame (2b) and the table top plate (2e) are moved by the motor (2b). Slowly rise to the desired position,
Fine adjustments are made. The pallet (10) in which the work (13) and / or the mask (14) has been conveyed and emptied, or the pallet (10) in which the returned mask (14) after use is stored is the cylinder (2j). At a high speed, and slowly by the motor (2b) to a predetermined position, released from the guide (2o) by the pushing mechanism (2r), and stored in the stocker (1) by the transfer mechanism (1a). By moving the cylinder (2j) and the motor (2b) up and down in two steps, the pallet (10) can be moved up and down to a predetermined position at high speed and with high accuracy.

When the table top plate (2e) on which the pallet (10) is positioned rises to a predetermined position, the transfer device (6) is moved into the loading device (2).
First, the mask (14) for exposing the upper surface, in which the suction pad (6g) at the position B is loaded in the pallet (10), descending from the upper part of the
Is adsorbed by the vacuum action. Then, after being raised by the cylinder (6c), it is moved to the lower surface exposure device (3) by the cylinder (9a), and further, the cylinder (6c).
And the mask (14) is set on the transparent glass plate (3c) of the exposure table (3a) of the lower surface exposure device (3). At this time, the suction pad (6g) at the B position is the mask (14)
Only the outer peripheral portion of the base acrylic resin plate lining the substrate is adsorbed, and the mask (film) located inside thereof is conveyed without adsorption. Then, when setting on the lower surface exposure device (3), the cylinder (3j) simultaneously pushes up the three alignment pins (3d) to align the alignment pins (3d) with the alignment holes (14c) of the mask (14). The mask (14) is prevented from rising due to the pressing force of the pressing pad (6h).

After setting the mask (14) for the upper surface exposure, the transfer device (6)
Moves up to the carry-in device (2), moves down and sucks the mask (14) for lower surface exposure from the pallet (10), and performs the same operation to the exposure table (3a) of the lower surface exposure device (3). set. Meanwhile, the upper surface exposure mask (14) is transferred from the lower surface exposure device (3) to the upper surface exposure device (4) by the transfer device (7). After the mask (14) is set, the corresponding works (13) are sequentially conveyed and set by the same operation. At this time, the suction pad (6
g) sucks and conveys the work (13), inserts the alignment pin (3d) into the alignment hole (13b) of the work (13), and lifts up the work (13) with the pressing pad (6h). And prevent tilting. When all the corresponding works (13) have been transported, the lower surface exposure mask (14) and the upper surface exposure mask (14) returned to the lower surface exposure device (3) are transferred by the transfer device (6) to the loading device ( It will be returned to the empty pallet (10) in 2).

The mask (14) set on the exposure table (3a) of the lower surface exposure apparatus (3) is evacuated by an evacuation nozzle (3m) through an air intake hole (3g), thereby exposing the exposure table (3).
It is held in close contact with the glass plate (3c) of a). Then, after the work (13) is set on the upper part of the mask (14), the transfer device (6) rises and moves to the carry-in device (2) side,
Instead, the transport device (7) moves from the upper surface exposure device (4) side and descends, and when the mask (14) and the work (13) are covered by the rubber sheet (7p) under the exposure device, the exposure table is exposed. From the air intake hole (3h) on the outer periphery of (3a), draw the vacuum nozzle (3
The vacuum is drawn by n) and the exposure is performed.

When the exposure is completed, the vacuum suction of the vacuum nozzle (3n) is released, and the work release pin (3e) is pulled through the through hole (14) of the mask (14).
Push up the work (13) through d) and align the alignment pin (3
The work (13) is released from d) and then the transfer device (7)
The work piece (13) is sucked by the suction pad (7g) and is conveyed to the upper surface exposure device (4), and the next work (13) is conveyed to the lower surface exposure device (3) by the conveyance device (6) during this time. After setting, the exposure is repeated in the same manner as described above. The mask (14), which has been used up after a predetermined number of exposures, is pushed by the mask release pin (3f) to be released from the alignment pin (3d), and the carrier device (6) performs the reverse operation. It is returned to the carry-in device (2). Even when the upper surface exposure mask (14) is conveyed from the lower surface exposure device (3) to the upper surface exposure device (4), it is released by the mask release pin (3f).

The transfer of the mask (14) by the transfer device (7) is performed as follows. That is, the transfer device (7) descends from the upper part of the lower surface exposure device (3) by the same operation as the transfer device (6), and sucks the upper surface exposure mask (14) positioned and set on the exposure table (3a). Then, it moves to the upper surface exposure device (4) and descends. When the transfer device (7) descends until the suctioned mask comes into contact with the upper surfaces of the tables (4r) of the upper and lower tables in the upper surface exposure device (4), the transfer device (7) stops,
The suction pad (7g) solenoid valve is closed and the mask (1
4) is placed on the rubber sheet (41d) on the upper surface of the table (4r). After that, the transfer device (7) moves up, moves to the lower surface exposure device (3) side and then moves down, and as described above, the exposure table (3a).
The work (13) and the mask (14) positioned and set on are covered with the rubber sheet (7p) of the suction part (7l), and this state is maintained during exposure. When the exposure is completed, the work release pin (3
Only the work (13) released by e) is the mask (1
By the same operation as 4), it is transported to the upper and lower tables of the upper surface exposure device (4).

The upper surface exposure device (4) is a suction unit (7l) of the transfer device (7).
The work (14) that has been sucked and conveyed by is lowered, comes into contact with the rubber sheet (41d) on the table (4r), and then is released from the suction portion (7l) and placed on the rubber sheet (41d). After that, the frame (4q) is raised by the cylinder (4s), and the work (13) and the mask (14) are exposed to the exposure table (4
It is set on the positioning pin (4d) of a), and the pressing force at this time is supported by the pressing plate (41g) assembled in the center of the table (4r). At this time, the alignment pin (4
d) protrudes and is pressed by the rubber sheet (41d) to prevent the work (13) and the mask (14) from rising and tilting, and the alignment is performed. Alignment pin (4d)
Penetrates the rubber sheet (41d). The work (13) and the mask (14) set in this way are covered with the rubber sheet (41d) as they are, and the vacuum drawing nozzles (4m) and (4n) are provided as in the case of the lower surface exposure device (3).
It is vacuum-contacted by (not shown) and exposed by the light source (4b).

After that, the release pin (3
It is released from the exposure table (3a) by e) and (3f) and is placed again on the rubber sheet (41d) of the table (4r). When the upper and lower tables are lowered to a predetermined position in this state, the transfer device (8) sucks the work (13) on the rubber sheet (41d) by the same operation as the transfer devices (6) and (7), and carries out the transfer device. When conveyed to (5) and placed on the rubber belt (5g), the rubber belt (5g) is rotated by the roller (5a) rotated by the electric motor (5f), and the work (13) is carried out to a conveyor outside the device. To be done. A predetermined number of works (13) are exposed in the upper surface exposure device (4), and the used mask (14) is moved in the reverse operation to the lower surface exposure device ( It is returned to the pallet (10) of the carry-in device (2) via 3).

In the above exposure machine, when the work (13) and the mask (14) are aligned in the lower surface exposure device (3) and the upper surface exposure device (4), three alignment pins (3d), (4)
Since d) moves up and down synchronously with one cylinder,
Positional displacement due to the difference in the appearance of the pins (3d) and (4d) is prevented, and the tips of the pins (3d) and (4d) are tapered, so that the alignment holes (13b), ( 14c), and the pressing pad (6h) as a pressing member and the rubber sheet (41d) at this time prevent the work (13) and the mask (14) from rising and tilting. Other 3
One pin (3d), (4d) provided at each position is inserted into the alignment holes (13b), (14c) provided at the same position of the work (13) and the mask (14) and simultaneously aligned. Therefore, the alignment accuracy is improved.

In the lower surface exposure device (3) and the upper surface exposure device (4), the work (13) and the mask (14) are provided by the work release pins (3e) and (4e) and the mask release pins (3f) and (4f) which are separately provided. ) Can be released separately, the works (13) can be exchanged easily and at high speed when a plurality of works (13) are exposed using the same mask (14).

Furthermore, in the transfer devices (6) and (8), suction pads (6g),
(7g) is located at the inner A position and the outer B position and is connected to the independent vacuum generator (6j), which is dedicated to the work and the mask, respectively.
When transporting a mask (film) (1) that is fixed to the inside by holding the outer periphery of the acrylic resin plate of the base (14a)
4) It is possible to prevent misalignment and dirt.

Since the lower surface exposure device (3) and the upper surface exposure device (4) are different devices in the above-mentioned exposure machine, a larger transport space can be taken as compared with the conventional double-sided exposure device, which allows the work (13 ) And the mask (14) can be easily transported, and focusing can be easily performed by moving the work (13).

In the above description, the structures of the pallet (10) and the positioning pin (11) are not limited to those shown in the drawings, and can be changed.

[Effect of the Invention] According to the present invention, since the positioning pin having the work / mask positioning portion and the pallet positioning portion integrally is provided on the pallet, the positioning accuracy of the work and the mask can be increased and the pallet itself. Since it is not necessary to increase the dimensional accuracy of, the manufacturing cost can be reduced.

[Brief description of drawings]

FIG. 1 (a) is a front view showing the entire exposure apparatus of the embodiment,
(B) is a plan view thereof, FIG. 2 (a) is a rear view of the whole,
(B) is its plan view, (c) is a side view, FIG. 3 (a) is a plan view of the pallet, (b) is its front view, (c) is a side view, (d) is the front of the positioning pin. Figures (e) and (f) are plan views showing the usage state of the pallet, respectively. Figure 4 (a) is a front view of the stocker, (b) is its plan view, and Figure 5 (a) is a loading device. Front view, (b) side view,
6C is a plan view of the table top plate, FIG. 6A is a front view of the unloading device, FIG. 6B is a side view, and FIG. 6C is a plan view.
7D is a front view of the suction pad and the pressing pad, FIG. 7A is a front view of the lower surface exposure apparatus, and FIG. 7B is a side view thereof.
(C) is a plan view, (d) is a plan view of an exposure table, (e) is a partial sectional view thereof, FIG. 8 (a) is a plan view of alignment pins, (b) is a front view thereof, (C) is a side view, FIG. 9 is a front view of the work release pin, FIG. 10 (a) is a side view of the transfer device, (b) and (c) are partial cross-sectional views, respectively.
FIG. 1A is a front view of the top exposure apparatus, FIG. 2B is a side view thereof, FIG. 3C is a plan view, FIG. 3D is a plan view of an exposure table, and FIG.
Is an ee sectional view, (f) is an ff sectional view, FIG. 12 (a) is a front view of the unloading device, (b) is a side view thereof, (c) is a plan view of the unloading portion, and (d) is The front view and (e) are side views. In each drawing, the same reference numerals indicate the same parts, (1) is a stocker, (2) is a carry-in device, (2o) is a positioning guide,
(3) is a lower surface exposure device, (3a) and (4a) are exposure bases, (3
b) and (4b) are light sources, (3d) and (4d) are alignment pins,
(3e) and (4e) are work release pins, (3f) and (4f) are mask release pins, (4) is a top exposure device, (4r) is a table, (41d) is a rubber sheet, and (5) is unloading. apparatus,
(6), (7) and (8) are conveying devices, (6g) and (7g) are suction pads, (6h) is a pressing pad, (10) is a pallet,
(11) is a positioning pin, (11a) is a work / mask positioning part, (11b) is a pallet positioning part, (13) is a work, (14) is a mask, and (14a) is a base.

Claims (3)

[Claims] 1. A carrying-in device for positioning a pallet on which a work and / or a mask is loaded and raising it to a predetermined height, and a lower surface having a light source below and aligning the work and the mask to expose the lower surface of the work. An exposure device, an upper surface exposure device that has a light source on the top and aligns the work and the mask to expose the top surface of the work, a carry-out device that carries out the exposed work out of the machine, and a work or mask that is sucked. And a transfer device that moves between the above-mentioned devices to perform transfer,
A workpiece / mask positioning part provided on the pallet and for positioning a work and / or a mask with respect to the pallet; and a positioning pin integrally having a pallet positioning part for positioning the pallet with respect to the carry-in device. Exposure machine. 2. The work / mask positioning section is for positioning the work and / or the mask by inserting it into a positioning hole provided in the work and / or the mask. The exposure machine described. 3. The pallet positioning section is for positioning the pallet by engaging with a positioning guide provided on the carry-in device.
The exposure device according to item 2 or item 2.