JPH0662786U - Synchronous linear motor - Google Patents

Abstract

(57) [Summary] [Object] The present invention relates to a cooling structure of a synchronous linear motor having a smooth armature winding and a permanent magnet field, and prevents heat from being transferred to a field part and a winding holder to prevent thermal deformation. It is an object of the present invention to provide a synchronous linear motor that does not cause A stator 20 composed of a flat plate-shaped smoothing armature winding 1 and a winding holder 3 having a groove 31 provided in a traveling direction of a mover 10 is provided with a plurality of gaps between the smoothing armature winding 1 and a gap. In a synchronous linear motor in which a mover 10 having field magnetic poles 5 made of permanent magnets is opposed to each other, the rectangular tubular jackets 2a and 2b in which a refrigerant passes through a tube that also serves as a strength member are made of an elastic body.
The bridge 2 of thin plate is connected, and the side surface of the smooth armature winding 1 is sandwiched between the jackets 2a and 2b.
The bottom portions 21 of a and 2b are fitted into the groove 31 provided in the winding holder 3 in the traveling direction with elasticity.

Description

[Detailed description of the device]

[001]

[Industrial applications]

 The present invention relates to a cooling structure for a synchronous linear motor having a smooth armature winding and a permanent magnet field, and is particularly suitable for ultra-precision and high-thrust applications such as stepper driving in semiconductor manufacturing.

[002]

[Prior art]

 Conventionally, smooth armature windings (for example, Japanese Utility Model Laid-Open No. 1-157579) are attached to both sides of a flat plate-shaped winding fixing frame made of a non-magnetic material, and the bottom of the winding fixing frame is inserted through a winding holder. There is a synchronous linear motor in which a stator fixed to a stator base and a mover having a field magnetic pole composed of a plurality of permanent magnets are opposed to each other via a gap between a smoothing armature winding (for example, an actual flat motor 4- 128085, FIG. 3).

[003]

[Problems to be solved by the device]

 The synchronous linear motor described above has no cogging and no magnetic attraction between the armature and the magnet, and is therefore a suitable linear motor for ultra-precision positioning applications. By fixing this stator to the base and attaching a slider to this mover, a movable table for a semiconductor manufacturing stepper can be constructed. However, the conventional technique has the following problems. 1) Since the surface of the armature winding, which is a heating element, and the surface of the field permanent magnet face each other with a slight air gap, the heat is transferred and radiated from the air gap to heat the magnet, which in turn causes the field. It is transmitted to the slider through the magnetic part and is deformed due to thermal expansion of the slider, which is not suitable for applications requiring ultra-precision positioning. 2) The heat of the armature winding, which is a heating element, is transmitted to the winding holder via the winding frame fixing frame, and raises the temperature of the base. This causes distortion due to thermal expansion on the stator side. 3) If a smooth armature winding is used for a stator without a fixed frame, the rigidity is low, and the straightness in the traveling direction cannot be obtained. Therefore, an object of the present invention is to provide a stator having high rigidity while cooling the armature winding and preventing heat from being transmitted to the field part or the winding holder.

[004]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, a flat armature winding (1) and a stator comprising a winding holder (3) having a groove (31) provided in the moving direction of a mover (10) are attached to a smoothing electric machine. In a synchronous linear motor in which a mover (10) having a field magnetic pole (5) composed of a plurality of permanent magnets is opposed to each other through a child winding (1) and a gap, a thin plate of a non-magnetic / elastic body is provided at the top. The smooth armature winding (1) is sandwiched from both sides by the rectangular tubular jackets (2a, 2b) in which the refrigerant passes through the pipes that also function as strength members and are connected by the bridges (23) of the jackets (2a, 2b). The bottom portion (21) of the coil is fitted into the groove (31) provided in the winding holder (3) in the traveling direction with elasticity.

[0095]

[Action]

 By the above means, the heat of the smooth armature winding is heat-exchanged by the refrigerant passing through the jacket, the smooth armature winding is directly cooled, and at the same time, the heat transfer / radiation to the field poles can be reduced, and the mover And the temperature rise of the stator can be reduced. Further, the smooth armature winding having low rigidity is straightened by the jacket having relatively high rigidity.

[0096]

【Example】

 An embodiment of the present invention will be described below with reference to FIGS. The two sides of the strip-shaped smooth armature winding 1 (see FIG. 2) formed by bending the element coils (U, V, W) for three phases electrically by 120 ° in phase and bending them with a predetermined pitch. , A relatively thin rectangular tubular jacket 2a, 2b made of a non-magnetic material and having a refrigerant passage 22 inside. Here, the installation interval of the jackets 2a and 2b is made slightly narrower than the thickness of the smooth armature winding 1. As a result, the straightness of the smooth armature winding 1 having low rigidity is corrected. As shown in FIG. 3, the tops of the rectangular tubular jackets 2a and 2b are connected by welding or the like with a bridge 23 made of a thin plate of non-magnetic / elastic material, and the bottoms of the rectangular tubular jackets 2a and 2b are smooth. The armature winding 1 is slightly opened with the smoothing armature winding 1 sandwiched between the jackets 2a and 2b. At the center of the winding holder 3 made of a material having a low thermal conductivity, a width slightly narrower than the dimension when the smooth armature winding 1 is sandwiched between the jackets 2a and 2b in the traveling direction of the mover 10. The groove 31 is provided in the moving direction of the mover 10. In the groove 31 provided in the central portion of the winding holder 3, the bottom portions of the rectangular tubular jackets 2a and 2b sandwiching the smooth armature winding 1 are elastically fitted. As shown in FIG. 4, one end surface of the jackets 2a, 2b in the traveling direction of the mover 10 is liquid-tightly sealed with end plates 4 and 4, and a U-shaped connecting pipe 41 is attached to the end plates 4 and 4. A refrigerant supply pipe 42a is provided at the center of the communication pipe 41. End plates 4 and 4 and a connecting pipe 41 are also provided on the other end face, and a discharge pipe 42b is provided. The smoothing armature winding 1, the jackets 2a and 2b, the bridge 23, the winding holder 3, the mirror plate 4, the connecting pipe 41, the supply pipe 42a and the discharge pipe 42b constitute the stator 20. A plurality of permanent magnets 5a, 5b, ... Are faced to each other through gaps on both sides of the jackets 2a, 2b so that the polarities of adjacent magnetic poles in the moving direction of the mover 10 are alternately switched. The magnetic field poles 5 and 5 are arranged so as to have opposite polarities. The field poles 5 and 5 are fixed to the field yokes 6 and 6 made of a ferromagnetic material as in the conventional case. The tops of the field yokes 6, 6 are connected by a plate 61 made of a non-magnetic and lightweight material. The field pole 5, the field yoke 6 and the plate 61 constitute the mover 10. In the embodiment, the moving magnet type in which the field poles 5 and 5 are provided in the mover 10 is used, but it may be a moving coil type in which the configurations of the mover 10 and the stator 20 in the embodiment are reversed. In this case, a flexible pipe may be connected to supply / discharge the refrigerant to / from the refrigerant supply pipe 42a and the discharge pipe 42b. FIG. 5 shows a second embodiment. In this example, the jackets 2a and 2b of the embodiment are separately configured, the smoothing armature winding 1 is sandwiched between them, and there is a gap between the side surface of the smoothing armature winding 1 and the top of the mating surface of the jackets 2a and 2b. After the smoothing armature winding 1 and the jackets 2a and 2b are fitted in the groove 31 provided in the central portion of the winding holder 3, the smoothing armature is pressed with the side surfaces of the jackets 2a and 2b pressed. A clip 24 having a width across flats which is slightly narrower than the width of the winding 1 and the jackets 2a and 2b is used to hold the side surface of the smooth armature winding 1 and the tops of the mating surfaces of the jackets 2a and 2b with pressure from the outside. FIG. 6 shows a third embodiment. In this example, the stator 20 is provided in two rows in parallel, the width of the winding holder 3 is about double the width of the embodiment, and the grooves 31 are provided in two rows. In addition, the plate 61 of the embodiment is replaced with an E-shaped plate 62 having a lower central leg which is about 1.5 times as wide as the put 61, and the permanent magnets 5a, 5a of the field pole 5 are attached to the central leg. Field magnetic poles 51 similar to 5b, ... Are inserted. FIG. 7 shows a fourth embodiment. In this example, the field pole 51 provided in the central portion of the third embodiment is replaced with a back yoke 52 made of a ferromagnetic material. By configuring as in the third and fourth embodiments, a compact, high-thrust synchronous linear motor can be realized at low cost.

[0097]

[Effect of device]

 As described above, the present invention has the following effects. 1. Since the gap is cooled by the jacket, heat conduction / radiation to the field magnetic poles is eliminated and the mover is not deformed. 2. Since the armature winding is cooled almost directly by the side surface of the jacket, cooling can be effectively performed. 3. Since the structure is such that the cooling medium is passed through the jacket, the cooling medium need not be electrically insulating and an inexpensive cooling device can be realized. 4. Since the armature winding is straightened with a relatively rigid jacket, the straightness of the stator can be maintained. 5. Even in the case of overcooling, the jacket is elastically held in the groove of the winding holder, so that the smooth armature winding can be fixed securely.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is a plan view of an armature winding used in an embodiment of the present invention.

FIG. 3 is a sectional view of a jacket used in an embodiment of the present invention.

FIG. 4 is a perspective view of a stator used in an embodiment of the present invention.

FIG. 5 is a sectional view showing a second embodiment of the present invention.

FIG. 6 is a sectional view showing a third embodiment of the present invention.

FIG. 7 is a sectional view showing a fourth embodiment of the present invention.

[Explanation of symbols]

 1 Smoothing armature winding 2a, 2b Jacket 22 Refrigerant passage 23 Bridge 24 Clip 3, 32 Winding holder 31 Groove 4 End plate 41 Connecting pipe 42a Supply pipe 42b Discharge pipe 5, 51 Field magnetic pole 52 Back yoke 5a, 5b ... Permanent magnet 6 Field yoke 61, 62 Plate 10 Mover 20 Stator

Claims (4)

[Scope of utility model registration request] 1. A stator comprising a flat plate-shaped smoothing armature winding (1) and a winding holder having a groove provided in a traveling direction of a mover (10) is provided with the smoothing armature winding (1). A mover (10) having a field yoke (6, 6) connected by a plate (61) and a field magnetic pole (5) composed of a plurality of permanent magnets.
In a synchronous linear motor opposed to each other through a gap, in a rectangular tubular jacket (2a, 2b) sandwiching the side surfaces of the smoothing armature winding (1) from both sides, and this jacket (2
a winding holder (3) having an elastic body / thin plate bridge (23) for connecting the tops of a and 2b) and a groove (31) for elastically fitting the bottom (21) of the jacket (2a, 2b). ) Equipped with a synchronous linear motor. 2. The synchronous linear motor according to claim 1, wherein the elastic body / thin plate bridge (23) connecting the tops of the jackets (2a, 2b) is replaced with a clip (24). 3. The flat plate-shaped smoothing armature winding (1) according to claim 1 or 2, two jackets (2a, 2b) and a bridge (23) are arranged in parallel, and the flat armature winding (1) according to claim 1 or 2, Winding holder (3) with two parallel grooves (31)
2) and an E-shaped plate (62) and a plate (6) with a lower cross-section and central leg connecting the field yokes (6, 6)
A synchronous linear motor characterized in that a field magnetic pole (51) made of a permanent magnet is provided at the central leg of 2). 4. The synchronous linear motor according to claim 3, wherein the field magnetic pole (51) is replaced with a back yoke (52).