JPH0641381U - Canned / Synchronous linear motor - Google Patents

Abstract

(57) [Abstract] [Purpose] Stator coil of magnetic flux penetrating gap winding type synchronous linear motor, suitable for high precision, high frequency and fine feed drive, which is used for transporting equipment in clean room such as semiconductor manufacturing equipment or in vacuum. It is an object of the present invention to provide a canned / synchronous linear motor that can cool an engine without generating dust or gas. [Structure] A stator 12 in which smooth strip-shaped coils 5 and 5 are attached to both surfaces of a winding fixing frame 4 made of a good heat conducting / non-magnetic material,
In a synchronous linear motor including a mover 16 having magnetic poles 13 made of permanent magnets provided on both sides of the stator 12 so as to face each other with a gap therebetween, a gap is formed between both side surfaces of the strip coils 5, 5 of the stator 12. A can 3 having a thin wall and a rectangular shape, in which the upper and lower parts of the winding fixing frame 4 are fitted and fixed, a refrigerant passage 6 formed between the can 3 and the strip coils 5 and 5, and both ends of the can 3 in the longitudinal direction. A canned / synchronous linear motor is configured by the end plates 8 and 8 provided in the section, and the coolant supply port 9A and the coolant discharge port 9B provided in the end plates 8 and 8.

Description

[Detailed description of the device]

[001]

[Industrial applications]

 The present invention relates to a gap winding type synchronous linear motor, and is particularly suitable for high precision, high frequency and fine feed drive used in a clean room such as a semiconductor manufacturing device or a transfer device in a vacuum.

[002]

[Prior art]

 As a gap winding type linear motor, a magnetic flux penetrating synchronous linear motor in which a moving magnet is placed on both sides of a stator with a smooth strip coil attached to both sides of a non-magnetic stator frame. (For example, Japanese Patent Application Laid-Open No. 3-70570). In addition, there is one in which the coil end of an induction electric motor type linear motor is enveloped by a non-magnetic duct, and a cooling medium is circulated in the duct (for example, Japanese Utility Model Publication No. 3-11380, FIG. 7).

[003]

[Problems to be solved by the device]

 However, the former has a low cooling capacity because the stator windings are cooled by natural convection, and the stator windings are in direct contact with the outside air, so when used in a clean room or in a vacuum, dust and gas are generated. There is a possibility of The latter is a normal induction electric motor type linear motor, which is not suitable for high-precision, high-frequency, fine feed drive, and can cool the coil end, but may not be able to cool the inside of the core sufficiently. high. Therefore, an object of the present invention is to provide a canned / synchronous linear motor that can cool a stator coil of a flux winding type gap winding type synchronous linear motor without generating dust or gas.

[004]

[Means for Solving the Problems]

 A stator 12 in which smooth strip-shaped coils 5 and 5 are attached to both sides of a winding fixing frame 4 made of a non-magnetic material, and a magnetic pole made of a permanent magnet provided on both sides of the stator 12 so as to face each other with a gap. A synchronous linear motor including a moving element 16 having a thin-walled, rectangular can having a gap with both side surfaces of the strip-shaped coils 5 and 5 of the stator 12 and having upper and lower portions of the winding fixing frame 4 fitted and fixed. 3, the can 3 and the strip-shaped coils 5, 5, a refrigerant passage 6 formed between the cans 3, the end plates 8 1 and 8 provided at both ends of the can 3 in the longitudinal direction, and the refrigerant supply ports 9A provided on the end plates 8 and 8. The coolant discharge port 9B constitutes a canned / synchronous linear motor. The refrigerant 19 is supplied from the refrigerant supply port 9A of the canned / synchronous linear motor, the refrigerant passage 6 is caused to flow, and the side surfaces of the strip coils 5, 5 are directly cooled.

[0095]

[Action]

 By the above means, the coil is cooled by the circulation of the cooling medium. The can prevents dust and gas from the coil.

[0096]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings. 1 (a) and 1 (b) are a sectional view and a partial side sectional view showing an embodiment of the present invention. A longitudinal groove 2 is provided in the center of the fixed base 1. In the groove 2, the lower end of a square pipe-shaped airtight thin can 3 made of a non-magnetic material is embedded and fixed. Inside the can 3, the upper and lower ends of the H-shaped winding fixing frame 4 made of a non-magnetic material having good thermal conductivity such as aluminum, stainless steel or copper are fixed. Symmetrical smooth strip-shaped coils 5 and 5 are attached to both sides of the winding fixing frame 4 with each phase and each pole aligned. If the upper and lower ends of the strip-shaped coils 5 and 5 are fixed to the winding fixing frame 4 with the resin 20, the fixation becomes stronger. A space is provided between the inner wall of the can 3 and the strip coils 5 and 5, and a refrigerant passage 6 is formed. At both ends of the can 3 in the longitudinal direction, end plates 8 having a coolant supply port 9A and a coolant discharge port 9B for connecting a coolant supply / discharge pipe (not shown) are liquid-tightly provided. A terminal plate 10 is liquid-tightly fixed to the bottom of one end of the can 3 in the longitudinal direction. A terminal 11 is provided on the terminal plate 10 and a multi-phase AC is applied to the strip-shaped coils 5 and 5 via lead wires 12. Power. The fixed base 1, the can 3, the winding fixing frame 4, the strip-shaped coils 5, 5, the refrigerant passage 6, the end plates 8 and 8 and the terminal plate 10 form a stator 12. A plurality of magnetic poles 13 made of permanent magnets are opposed to both sides of the can 3 with a gap therebetween. The magnetic poles 13 are fixed at a predetermined pitch in the longitudinal direction of the vertical yokes 14, 14 made of a ferromagnetic material. The top portions of the vertical yokes 14 and 14 are bridged by a horizontal yoke 15 made of a ferromagnetic material that serves as a table for carrying the work. The magnetic pole 13, the vertical yokes 14 and 14, and the horizontal yoke 15 constitute the moving element 16 2. FIG. 2 shows a sectional view of a second embodiment of the stator 12. The winding fixing frame 4 of the embodiment is made of a material having good thermal conductivity, and the upper and lower lip portions thereof are heat sinks 17 having a rectangular or rectangular shape. A square or rectangular bulge portion 18 is formed in the upper and lower portions of the can 3, and the outside thereof is movably housed in a space formed by the magnetic pole 13, the vertical yokes 14 and 14 of the moving element 16 and the horizontal yoke 15 with a gap. A heat sink 17 is fitted inside the bulge portion 18, and the heat sink 17 and the bulge portion 18 form refrigerant passages 6 and 6 above and below the can 3. The refrigerant is supplied from the refrigerant supply port (not shown) provided in the end plates (not shown) provided at the longitudinal ends of the upper and lower refrigerant passages 6 as in the case of the embodiment, and is discharged through the refrigerant supply. It is performed from a refrigerant discharge port (not shown) provided on the side opposite to the port. In this case, most of the heat of the strip coil 5 is cooled from the heat sink 17 through the winding fixing frame 4. Furthermore, both side surfaces of the can 3 are brought into close contact with the side surfaces of the strip coils 5, 5. By doing so, the gap can be made smaller than in the embodiment, the magnetic resistance of the gap is reduced, and the efficiency is improved. FIG. 3 shows a sectional view of the third embodiment. The winding fixing frame 4 of the embodiment is formed by bending a thin plate of non-magnetic material having good thermal conductivity such as aluminum, stainless steel or copper into an inverted V shape. Band-shaped coils 5 and 5 are attached to the outer and opposite side surfaces of the winding fixing frame 4 with an adhesive or the like, and the upper and lower ends of the band-shaped coils 5 and 5 are fixed with a resin 20. . The bottom 41 and the top 42 of the winding fixing frame 4 are elastically and tightly fitted to the inner wall of the can 3. FIG. 4 shows a sectional view of the fourth embodiment. In this example, band-shaped coils 5 and 5 are also attached to the V-shaped inside and both side surfaces of the winding fixing frame 4 of the third embodiment. In this case, the refrigerant passage 6 is in the gap formed by the strip coils 5 and 5 and the can 3 and in the V groove. FIG. 5 shows a sectional view of the fifth embodiment. The winding fixing frame 4 of the embodiment is formed of a thin plate made of aluminum, stainless steel, copper or the like having good heat conductivity and non-magnetic material into an X shape, and the top portion 42 is tightly fitted to the inner wall of the can 3. I am doing it. The strip-shaped coils 5 and 5 are bent in a shallow V shape, and are attached to the X-shaped outer side and both side surfaces of the winding fixing frame 4 and attached with an adhesive or the like. The upper and lower ends of the strip coils 5, 5 are fixed to the winding fixing frame 4 with resin 20. In this case, the coolant passage 6 becomes a gap formed by the strip-shaped coils 5 and 5 and the can 3 and a triangular space inside the X-shape. In the third to fifth embodiments, the side surfaces of the strip-shaped coils 5 and 5 and the side surface of the magnetic pole 7 face each other with an inclination and the gap becomes non-uniform, but the interlinkage magnetic flux is uniform in the longitudinal direction. Therefore, even if the magnitude of the magnetic flux is non-uniform in the height direction, it does not affect the thrust characteristics. Further, since it is coreless, the magnetic attraction force is not imbalanced due to the non-uniform gap.

The operation will be described below. When a multi-phase alternating current is supplied to the strip coils 5 and 5, the magnetic action between the strip coils 5 and 5 causes the slider 14 to move in the longitudinal direction. At this time, no loss occurs on the mover 14 side, but copper loss occurs on the strip coils 5 and 5 of the stator 11. Especially in the case of minute feeds where the start / stop frequency is high, it is necessary to perform cooling efficiently. Usually, in order to cool efficiently, it is preferable to bring the cooling medium into direct contact with the heat generating portion. When the refrigerant 19 such as water or Fluorinert is supplied under pressure from the refrigerant supply port 9A provided in the end plate 8, the refrigerant 19 flows through the refrigerant passage 6 from the refrigerant supply port 9A toward the refrigerant discharge port 9B. Heat is taken from the strip coils 5 and 5 directly and indirectly via the winding fixing frame 4. The refrigerant 19 is cooled by a radiator (not shown) provided on the way through a circulation pipe (not shown) and circulates in a closed state.

[0085]

[Effect of device]

 As described above, according to the present invention, the coil is housed in the airtight can and is directly cooled by the refrigerant, so that dust and gas from the coil do not leak into the room and can be cooled efficiently. In addition, the coil can be rigidly supported via the winding fixing frame. Particularly, in the third to fifth embodiments, the refrigerant passage can be formed in the winding fixing frame, and the rigidity can be further improved as compared with the embodiments.

[0109]

[Brief description of drawings]

FIG. 1 is a sectional view and a side sectional view showing an embodiment of the present invention.

FIG. 2 is a sectional view showing a second embodiment of the present invention.

FIG. 3 is a sectional view showing a third embodiment of the present invention.

FIG. 4 is a sectional view showing a fourth embodiment of the present invention.

FIG. 5 is a sectional view showing a fifth embodiment of the present invention.

[Explanation of symbols]

 1 Fixed Base 2 Groove 3 Can 4 Winding Fixed Frame 41 Bottom 42 Top 5 Band-shaped Coil 6 Refrigerant Passage 7 Magnetic Pole 8 End Plate 9A Refrigerant Supply Port 9B Refrigerant Discharge Port 10 Terminal Plate 11 Terminal 12 Stator 13 Magnetic Pole 14 Vertical Yoke 15 Horizontal Yoke 16 Moving Element 17 Heat Sink 18 Bulge Section 19 Refrigerant 20 Resin

Claims (6)

[Scope of utility model registration request] 1. A stator (12) in which smooth strip coils (5), (5) are attached to both sides of a winding fixing frame (4) made of a non-magnetic material, and both sides of this stator (12). In a synchronous linear motor comprising a moving element (16) having permanent magnet magnetic poles (13) provided facing each other through a gap, a gap is maintained between both side surfaces of the strip coils (5), (5),
A thin and rectangular can (3) in which the upper and lower parts of the winding fixing frame (4) are fitted and fixed, and a refrigerant passage (6) formed between the can (3) and the strip coils (5) and (5). And an end plate (8) provided at both ends of the can (3) in the longitudinal direction,
A canned / synchronous linear motor comprising (8) and a coolant supply port (9A) and a coolant discharge port (9B) provided in the end plates (8) and (8). 2. The winding fixing frame (4) is made of an H-shaped good heat conductive material, and the upper and lower lip portions are tightly fitted to the inner walls of the upper and lower portions of the can (3). Canned and synchronous linear motor. 3. The winding fixing frame (4) is made of a good heat conducting material, and heat sinks (17, 17) are formed on the top and bottom of the winding fixing frame (4), and bulge parts (18, 1) are formed on the top and bottom of the can (3).
8. The canned synchronous linear motor according to claim 1, further comprising: 8), wherein the bulge portion (18, 18) is fitted with the heat sink (17, 17) portion. 4. The canned / synchronous linear motor according to claim 3, wherein the side surface of the can (3) is brought into close contact with the side surfaces of the strip coils (5), (5). 5. The winding fixing frame (4) is a V-shaped thin plate made of a good heat conductive material, and the strip-shaped coils (5), (5) or V-shaped on the outer and side surfaces of the V-shaped structure. The strip-shaped coil (5) on the outer side and both side surfaces and the inner side and both side surfaces
The canned / synchronous linear motor according to claim 1, wherein (5), (5) and (5) are attached. 6. The winding fixing frame (4) is bent in an X shape to be a thin plate of a good heat conducting material, and the X shape is formed on the outer side and both side surfaces.
The canned / synchronous linear motor according to claim 1, wherein the strip-shaped coils (5) and (5) are bent and attached to the X-shaped side surface.