JPH0661666B2 - Static pressure support device for sliding body - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a static pressure support device for a sliding body suitable for use in a static pressure slide table or the like.

[Prior art]

In this type of static pressure supporting device, a sliding body is slidably engaged with a guide surface of a guide member on the fixed side, and a static pressure pocket is formed on the sliding surface on the sliding body side. A pressurized lubricating oil is introduced to support the sliding body under static pressure. Therefore, the introduction of the lubricating oil into the static pressure pocket is disclosed, for example, in JP-A-61-61
As disclosed in JP-A-209834, a flexible oil supply hose connected to a sliding body is used, and an oil passage formed in the sliding body is provided with a gap between the guide surface and the sliding surface. A fixed orifice is provided to increase the static pressure in the static pressure pocket as the pressure decreases.

[Problems to be solved by the invention]

In such a conventional technique, the sliding body receives a complicated external force due to the deformation of the oil supply hose, and this force changes due to movement or the like, so that there is a problem that the guiding accuracy of the sliding body deteriorates. Further, when the gap between the guide surface and the sliding surface becomes less than a predetermined value, the static pressure in the static pressure pocket becomes too high, which locally deforms the guide member or the sliding body, which also reduces the guiding accuracy. There is a problem.

The present invention intends to solve each of these problems at the same time, greatly improve the guide accuracy of the static pressure support device for the sliding body, improve the rigidity of the bearing, and simplify the structure to reduce the manufacturing cost. Is.

[Means for solving problems]

For this reason, in the hydrostatic support device for a sliding body according to the first aspect of the present invention, the sliding surface 21 of the sliding body 20 is slidably engaged with the guide surface 11 of the guide member 10 as illustrated in the accompanying drawings. A static pressure support device for a sliding body, which slidably supports a sliding body 20 by generating a static pressure of a lubricating oil under pressure between the guide surface 11 and the sliding surface 21. Forming a first oil supply passage 33 in the guide member 10,
An elongated oil supply groove 31 is formed on the sliding surface 21 along the moving direction of the sliding body 20 at a position communicating with the first oil supply passage 33, and has a groove depth for generating static pressure on the sliding surface 21. A plurality of static pressure pockets 22A are provided independently in the moving direction of the sliding body 20, and two rows are provided on both sides of the oil supply groove 31.
A second oil supply passage 32A for independently supplying the pressurized lubricating oil from the oil supply groove 31 to each of the static pressure pockets 22A and generating a surface throttle is provided on the sliding surface 21 from the oil supply groove 31 and the static pressure pocket 22A. Is characterized in that it is formed in a shallow groove shape.

The static pressure supporting device for a sliding body according to the invention of claim 2 is
As illustrated in FIGS. 6 to 8, a plurality of sliding surfaces 21 of the sliding body 20 are slidably fitted to the plurality of guiding surfaces 11 of the guide member 10 and slidable with the respective guiding surfaces 11. A static pressure support device for a sliding body that slidably supports a sliding body 20 by generating a static pressure of pressurized lubricating oil between the surfaces 21, and opens in one of the plurality of guide surfaces 11. First
The oil supply passage 33 is formed in the guide member 10, and
A groove for forming an elongated oil supply groove 31 on the sliding surface 21 along the moving direction of the sliding body 20 at a position corresponding to the oil supply passage 33 and for generating a static pressure on the sliding surface 21 on which the oil supply groove 31 is formed. The first static pressure pocket 22A having a depth is attached to the sliding body 20.
A plurality of them are provided independently in the moving direction of the
Two rows are provided on both sides of No. 1, and the second oil supply passage 32A for independently supplying the pressurized lubricating oil from the oil supply groove 31 to each first static pressure pocket 22A and generating the surface throttle is formed with the oil supply groove 31. The sliding surface 21 is formed in a groove shape having a depth smaller than that of the oil supply groove 31 and the static pressure pocket 22A.
A plurality of second static pressure pockets 22 having groove depths for generating static pressure are provided independently on the other slide surface 21 different from the slide surface 21 in which the slide surface 21 is formed in the moving direction of the slide body 20, and each second static pressure pocket is provided. A third oil supply passage 32, one end of which is opened to the pressure pocket 22 through a fixed throttle and the other end of which is opened to the oil supply groove 31, is formed in the sliding body 20.

The static pressure supporting device for a sliding body according to the invention of claim 3 is
As illustrated in FIGS. 3 to 5, the sliding surface 21 of the sliding body 20 is slidably engaged with the guide surface 11 of the guide member 10, and pressure lubrication is applied between the guide surface 11 and the sliding surface 21. A static pressure support device for a sliding body, which slidably supports a sliding body 20 by generating a static pressure of oil, wherein a first oil supply passage 33 opening to the guide surface 11 is formed in the guide member 10. Then
An elongated oil supply groove 31 is formed on the sliding surface 21 along the moving direction of the sliding body 20 at a position communicating with the first oil supply passage 33, and has a groove depth for generating static pressure on the sliding surface 21. A plurality of first static pressure pockets 22A are independently provided in the moving direction of the sliding body 20, and two rows are provided on both sides of the oil supply groove 31, and each first static pressure pocket 22A is independently provided with pressurized lubricating oil from the oil supply groove 31. The second oil supply passage 32A which is supplied to the sliding surface 21 and has a shallower depth than the oil supply groove 31 and the first static pressure pocket 22A is formed in the sliding surface 21. 21 is the sliding body 20 with respect to the oil supply groove 31.
Having a groove depth that generates static pressure before and after the moving direction of the second
A static pressure pocket 22 is formed, and one end of each of the second static pressure pockets 22 is opened via a fixed throttle, and a third oil supply passage 32 is formed in the sliding body 20 with the other end opening to the oil supply groove 31. It is characterized by having done.

[Action]

The external pressurized lubricating oil supplied to the first oil supply passage 33 is
Regardless of the movement of the sliding body 20, the sliding body 20 is introduced into the oil supply groove 31 and then into the respective static pressure pockets 22A through the second oil supply passage 32A, so that the sliding body 20 is supported by the guide member 10 so as to be slidably supported by the static pressure. To do. Since the second oil supply passage 32A formed in the sliding surface 21 in a groove shape having a depth smaller than that of the static pressure pocket 22A causes surface throttling, the static pressure in the static pressure pocket 22A is equal to the static pressure in the oil supply groove 31. It gets smaller. If the gap between the guide surface 11 and the sliding surface 21 decreases, the amount of lubricating oil discharged from the static pressure pocket 22A to the outside decreases, and the static pressure in the static pressure pocket 22A tends to increase, but at the same time, sliding The second oil supply passage 32A, which is formed in a groove shape on the surface 21 and causes a surface restriction, also has a substantially reduced height and an increased resistance.
The amount of lubricating oil flowing into the second oil supply passage 32A from 1 also decreases,
Therefore, the rate of increase in static pressure in the static pressure pocket 22A becomes gentler than in the case of the fixed throttle. In the static pressure support device for a sliding body according to the second aspect of the present invention, the pressurized lubricating oil in the oil supply groove 31 is introduced into each of the first static pressure pockets 22A as described above, and the oil supply groove 31 is The second static pressure pockets 22 provided on the other sliding surface 21 different from the formed sliding surface 21 are also introduced via the third oil supply passage 32 and the fixed throttle, and at the other sliding surface 21 described above. Also supports the sliding body 20 against the guide member 10 by static pressure.

In the hydrostatic support device for a sliding body according to the third aspect of the present invention, the pressurized lubricating oil in the oil supply groove 31 is introduced into each of the first static pressure pockets 22A as described above, and the oil supply groove 31 is The sliding surface 21 is also introduced into each of the second static pressure pockets 22 formed on the front and rear sides of the sliding surface 21 through the third oil supply passage 32 and the fixed throttle, and the sliding member 2 is also provided on the front and rear portions of the sliding surface 21.
0 is statically supported on the guide member 10.

〔The invention's effect〕

As described above, according to the invention of claim 1, the sliding body can be statically supported on the guide member without connecting the member for introducing the pressurized lubricating oil to the static pressure pocket to the sliding body. The external force that hinders smooth movement is not applied to the sliding body, and the static pressure increase in the static pressure pocket due to the decrease in the gap between the guide surface and the sliding surface is slow. Since there is no local deformation of the guide member or the sliding body due to the excessive rise of the static pressure, the guiding accuracy of the static pressure supporting device for the sliding body can be greatly improved. Moreover, the oil supply groove and the second oil supply path, which are the oil passage means formed in the sliding body, can be formed in a groove shape on the sliding surface, and since complicated drilling is not required, the structure is simplified and the manufacturing cost is reduced. Can be lowered. Since two rows of static pressure pockets are provided in parallel along the moving direction of the sliding body and a plurality of static pressure pockets are provided in the moving direction of the sliding body, the rigidity of the bearing in the direction orthogonal to the sliding surface and in the swinging direction of the sliding body is improved. To be enhanced.

According to the invention of claim 2, in addition to the above effects, the sliding body can be slidably supported by the guide member slidably on another sliding surface different from the sliding surface on which the oil supply groove is formed. it can.

According to the invention of claim 3, in addition to the effects of claim 1, the rigidity of the bearing on the sliding surface on which the oil supply groove is formed, particularly the rigidity of the bearing in the swinging direction of the sliding body, can be further increased. .

〔Example〕

The present invention will be described below with reference to the embodiments shown in the accompanying drawings.

In the first embodiment shown in FIGS. 1 and 2, the guide member 10 on the fixed side has a flat guide surface 11, and the slide surface 21 of the sliding body 20 on the movable side slides on the guide surface 11. It is movably engaged. A plurality of guide surfaces 11 and sliding surfaces 21 are combined, for example, as in a slide support device (described later) shown in FIGS. 6 to 8, so that the sliding body 20 can move in one direction (in FIGS. 1 and 2). It is guided and supported by the guide member 10 so as to be movable only in the left-right direction.

As shown mainly in FIG. 1, an oil supply groove 31 is arranged along the center of the sliding surface 21, and each of the six static pressure pockets 22 is provided.
A is arranged along both sides of the oil supply groove 31, and a second oil supply passage 32A is formed in the sliding surface 21 so as to communicate each static pressure pocket 22A with the oil supply groove 31 and generate a surface restriction. The second oil supply passage 32A is formed in a groove shape having a depth smaller than that of the static pressure pocket 22A, and has a relatively small cross-sectional area so as to also have a throttle function. A first oil supply passage 33 is formed in the guide member 10, and one end of the first oil supply passage 33 is open at a position where it always communicates with the oil supply groove 31 regardless of the movement of the sliding body 20. The static pressure pocket 2 is formed by the first oil supply passage 33, the oil supply groove 31, and the second oil supply passage 32A.
An oil passage means 30 for introducing pressurized lubricating oil into 2A is configured.

Lubricating oil supplied from a not-illustrated lubricating oil pump or the like to the first oil supply passage 33 is introduced into the oil supply groove 31 regardless of the position of the sliding body 20 in the movement stroke, and then the second oil supply passage 32A.
Is introduced into each static pressure pocket 22A through the slide body 20
Is slidably supported on the guide member 10 and discharged through the gap between the sliding surface 21 and the guide surface 11 around each static pressure pocket 22A.

The second oil supply passage 32A is formed in a groove shape having a shallower depth than the static pressure pocket 22A, and is formed in a relatively small cross-sectional area so as to also have a throttling function. It becomes smaller than the static pressure in the oil supply groove 31. Guide surface 11
If the gap between the sliding surface 21 and the sliding surface 21 decreases, the static pressure pocket 22
The amount of lubricating oil discharged from A decreases to the static pressure pocket 2
The static pressure in 2A tends to increase, but at the same time the sliding surface 21
The second oil supply passage 32A formed in a groove shape also has a substantially reduced height and an increased resistance, so that the amount of lubricating oil flowing from the oil supply groove 31 into the static pressure pocket 22A also decreases. Therefore, the rate of increase in the static pressure in the static pressure pocket 22A with respect to the decrease in the gap between the guide surface 11 and the sliding surface 21 becomes slower than when the fixed throttle is provided in the second oil supply passage. Hydrostatic pocket 22
Since a plurality of A are provided in the moving direction of the sliding body 20,
The rigidity of the bearing around the axis orthogonal to the moving direction of the sliding body 20 and parallel to the sliding surface 21 is enhanced. Further, since two rows of the static pressure pockets 22A are provided in parallel along the moving direction of the sliding body 20, the rigidity of the bearing around the axis parallel to the moving direction of the sliding body 20 is enhanced.

FIG. 6 to FIG. 8 show a hydrostatic slide device which is implemented by combining the above-mentioned first embodiment with a hydrostatic support device of another type. Mainly as shown in FIG. 6, sliding surfaces 21 are formed on the upper and lower surfaces and outer surfaces on both sides of the sliding body 20, and the guide member 10 is slidably opposed to the sliding surfaces 21 with a slight clearance. Six guide surfaces 11 that guide and support the moving body 20 are arranged to face each other in a U shape. Then, the sliding body 20
An oil supply groove 31 is formed along the center of the sliding surfaces 21 on both sides, static pressure pockets 22A similar to those in the first embodiment are formed on both upper and lower sides thereof, and sliding surfaces 21 on both upper and lower sides are formed.
Also, the second static pressure pocket 22 is formed in the oil supply groove 31 so that the pressurized lubricating oil supplied to the first oil supply passage 33 from the external supply source is supplied to the oil supply groove 31.
To the static pressure pockets 22A on the upper and lower sides through the second oil supply passage 32A for static pressure support in the left and right directions, and a third oil supply provided inside the sliding body 20 and having a fixed orifice. It is introduced into the upper and lower static pressure pockets 22 through the passage 32 to perform static pressure support in the vertical direction. Then, when a load is applied in the left-right direction in FIG. 6, the gap between the both surfaces 11, 21 in the load direction is slightly reduced, and the static pressure in the static pressure pocket 22A at that portion is increased to increase the load in that direction. If they are supported and a load is applied in the vertical direction, the static pressure in the static pressure pocket 22 similarly rises to support the load in that direction.

In the second embodiment shown in FIGS. 3 to 5, a static pressure pocket 22A similar to that of the first embodiment is formed in the middle portion of the sliding surface 21 in the moving direction, and the central oil supply groove 31 to the second oil supply passage are formed. The first oil supply passage 32 is formed inside the sliding body 20 and has a fixed orifice 35 by introducing lubricating oil through 32A and forming second static pressure pockets 22 at both ends in the moving direction of the sliding surface 21. The lubricating oil is introduced through the. Since other configurations and operations are similar to those of the first embodiment, corresponding parts are designated by the same reference numerals and detailed description thereof will be omitted. According to the second embodiment, the rigidity of the bearing of the sliding body 20, in particular, the rigidity of the sliding body 20 in the swinging direction is increased by the provision of the second static pressure pocket 22.

According to each of the above-described embodiments, not only the sliding body 20 can be statically supported by the guide member 10, but also a member such as a flexible oil supply hose for introducing the pressurized lubricating oil into the static pressure pocket 22A. Since it is not necessary to connect the sliding member 20 to the sliding member 20, an external force that hinders smooth movement is not applied to the sliding member 20, and the static force is reduced due to the decrease in the gap between the guide surface 11 and the sliding surface 21. The rate of increase in static pressure in the pressure pocket 22A is gentle, and local deformation of the guide member 10 or the sliding body 20 due to excessive increase in this static pressure is eliminated, so that the guiding accuracy of the sliding body 20 can be improved. Moreover, the rigidity of the bearing in the direction orthogonal to the sliding surface 21 and the swinging direction of the sliding body 20 can be increased by the static pressure pocket 22A.

Further, the oil supply groove 31 and the second oil supply path 32A, which are the oil passage means 30 formed in the sliding body 20, can be formed in the sliding surface 21 in a groove shape, and a complicated hole is not required, so that the structure is simple. Therefore, the manufacturing cost can be reduced.

[Brief description of drawings]

1 and 2 show a first embodiment, FIG. 1 is a bottom view of a sliding body, FIG. 2 is a sectional view taken along line II-II of FIG. 1 including a guide member, and FIGS. Shows a second embodiment, FIG. 3 is a longitudinal sectional view taken along the oil supply groove, FIG. 4 is a bottom view of the sliding body, and FIG.
FIG. 6 is a sectional view taken along line VV in FIG. 3, and FIGS. 6 to 8 show an example in which the first embodiment is applied to a static pressure slide table in combination with a static pressure supporting device of another type, and FIG. FIG. 7 is a sectional view taken along the line VII-VII of FIG. 6, and FIG. 8 is a sectional view taken along the line VIII-VIII of FIG. Explanation of reference numeral 10 ... Guide member, 11 ... Guide surface, 20 ... Sliding body, 21 ... Sliding surface, 22 ... Second static pressure pocket, 22
A ... Static pressure pocket (first static pressure pocket), 30 ... Oil passage means, 31 ... Oil supply groove, 32 ... Third oil passage, 32A
...... Second oil supply passage, 33 ...... First oil supply passage.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-59-13119 (JP, A) Actually opened 62-85332 (JP, U) Actually opened 61-93623 (JP, U)

Claims (3)

[Claims] Claim: What is claimed is: 1. A sliding member is slidably engaged with a guide surface of a guide member, and a static pressure of pressurized lubricating oil is generated between the guide surface and the sliding surface to slide the sliding member. A static pressure support device for a sliding body movably supported, wherein a first oil supply passage opening to the guide surface is formed in the guide member, and the slide surface is provided at a position communicating with the first oil supply passage. An elongated oil supply groove is formed along the moving direction of the sliding body, and a plurality of static pressure pockets having a groove depth for generating a static pressure on the sliding surface are independently provided in the moving direction of the sliding body, and Two rows are provided on both sides, and a second oil supply passage for independently supplying the pressurized lubricating oil from the oil supply groove to each static pressure pocket and generating a surface restriction is provided on the sliding surface from the oil supply groove and the static pressure pocket. A hydrostatic support device for a sliding body, characterized in that it is also formed in a shallow groove shape. 2. A plurality of sliding surfaces of a sliding body are slidably fitted to a plurality of guide surfaces of a guide member to generate a static pressure of pressurized lubricating oil between the respective guide surfaces and the sliding surfaces. A static pressure support device for a sliding body that slidably supports the sliding body by making the first opening open in one of the plurality of guide surfaces.
An oil supply passage is formed in the guide member, and a slender oil supply groove is formed in the sliding surface along the moving direction of the sliding body at a position corresponding to the first oil supply passage, and the slide having the oil supply groove is formed. A plurality of first static pressure pockets having a groove depth for generating static pressure on the surface are provided independently in the moving direction of the sliding body, and two rows are provided on both sides of the oil supply groove. The second oil supply passage for independently supplying the pressurized lubricating oil and generating the surface throttle is formed in the sliding surface having the oil supply groove formed in a groove shape having a depth shallower than the oil supply groove and the static pressure pocket. A plurality of second static pressure pockets having a groove depth for generating static pressure are formed independently on the other sliding surface different from the sliding surface on which the oil supply groove is formed, in the moving direction of the sliding body. One end opens to the static pressure pocket through the fixed throttle, and the other end opens to the oil supply groove. Static pressure support device slide the third oil supply passage, characterized in that formed in the sliding body that. 3. A sliding member is slidably engaged with a guide surface of a guide member so as to slidably engage the sliding surface of the sliding member, and a static pressure of pressurized lubricating oil is generated between the guide surface and the sliding surface. A static pressure support device for a sliding body movably supported, wherein a first oil supply passage opening to the guide surface is formed in the guide member, and the slide surface is provided at a position communicating with the first oil supply passage. An elongated oil supply groove is formed along the moving direction of the sliding body, and a plurality of first static pressure pockets having a groove depth for generating a static pressure on the sliding surface are independently provided in the moving direction of the sliding body, and the oil supply is performed. Two rows are provided on both sides of the groove, and a second oil supply passage for independently supplying the pressurized lubricating oil from the oil supply groove to each first static pressure pocket and generating a surface restriction is provided on the sliding surface with the oil supply groove and the above-mentioned oil supply groove. It is formed in a groove shape having a depth smaller than that of the first static pressure pocket, and the sliding surface of the sliding member is formed on the sliding surface. A second static pressure pocket having a groove depth for generating static pressure is formed in the front and rear of the moving direction, one end of each of the second static pressure pockets is opened via a fixed throttle, and the other end is opened to the oil supply groove. A hydrostatic support device for a sliding body, wherein a third supply path is formed in the sliding body.