JPS5913119A - Static pressure fluid bearing - Google Patents
Static pressure fluid bearingInfo
- Publication number
- JPS5913119A JPS5913119A JP12007382A JP12007382A JPS5913119A JP S5913119 A JPS5913119 A JP S5913119A JP 12007382 A JP12007382 A JP 12007382A JP 12007382 A JP12007382 A JP 12007382A JP S5913119 A JPS5913119 A JP S5913119A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- guide
- sliding
- guide surface
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、精密工作機械や精密測定機械等に利用され、
相対的に運動する二表面間の潤滑に空気等の流体を用い
て拘束型スライド装置等を構成する静圧流体軸受に関す
るものである。[Detailed Description of the Invention] Industrial Application Field The present invention is used in precision machine tools, precision measuring machines, etc.
The present invention relates to a hydrostatic fluid bearing that uses a fluid such as air for lubrication between two relatively moving surfaces and constitutes a restraint type slide device or the like.
従来例の構成とその問題点
第1図は動作流体に気体を用いた静圧流体軸受である拘
束型スライド装置の基本構成を示す斜視図であシ、(1
)は子軸形状をなし外周の角に排気# (1>が設けら
れたガイド、(2)は前記ガイド(1)表面を囲みかつ
このガイド(1)表面を案内面と(2)
して摺動するスライダーである。■はスライダー(2)
の摺動方向を示す。Structure of the conventional example and its problems FIG.
) is a guide having a child shaft shape and having an exhaust # (1>) at the corner of the outer periphery, (2) surrounds the surface of the guide (1) and uses the surface of the guide (1) as a guide surface (2) It is a sliding slider. ■ is slider (2)
Indicates the sliding direction.
以下、上記構成を基本とする従来の拘束型スライド装置
を第2図乃至第4図を用いて説明する。スライダー(2
)の各摺動面(4)には摺動方向(ト)と平行に深い溝
(以下エアーポケットと称す)(5)が設けられ、この
エアーポケット(5)からT字状の浅い絞シ溝(6)が
摺動方向■と直角な方向に複数本設けられている。また
、ガイド(1)の内部には給気路(8)が設けられ、外
部から供給される気体は前配給気路(8)を通シ、各案
内面の給気孔(7)を経て前記各案内面に対向する前記
スライダー(2)のエアーポケット(5)に至る。そし
て、前記エアーポケット(5)に供給された気体は、第
4図に矢印で示すようにガイド(1)の案内面とスライ
ダー(2)の摺動面(4)との間隙を通って排気される
。Hereinafter, a conventional restraint-type slide device based on the above structure will be explained with reference to FIGS. 2 to 4. Slider (2
) are provided with deep grooves (hereinafter referred to as air pockets) (5) in parallel to the sliding direction (G), and from this air pocket (5) a T-shaped shallow constriction hole is formed. A plurality of grooves (6) are provided in a direction perpendicular to the sliding direction (2). Further, an air supply path (8) is provided inside the guide (1), and gas supplied from the outside passes through the front distribution air path (8) and passes through the air supply holes (7) on each guide surface. This leads to an air pocket (5) of the slider (2) facing each guide surface. The gas supplied to the air pocket (5) is exhausted through the gap between the guide surface of the guide (1) and the sliding surface (4) of the slider (2) as shown by the arrow in FIG. be done.
上記従来の拘束型スライド装置において、スライダー(
2)に負荷が加わるとガイド(1)は撓み。In the above-mentioned conventional restraint type slide device, the slider (
When a load is applied to 2), the guide (1) bends.
このガイド(1)の撓み量はスライダー(2)の位置に
よって変化する。また、装置の軽量化を図るため、ガイ
ド(1)を細くしたり、中空にしたり、また材質にアル
ミニウム合金を使用したりすれば、負荷荷重によるガイ
ド(1)の撓みおよびスライダー(2)の位置による撓
み量の変化は無視出来ない程大きくなる。このガイド(
1)の撓みおよび撓み量の変化はそのまま拘束型スライ
ド装置の真直性に影響を及ばずことになる。一般に、前
記ガイド(1)の撓みおよび撓み量の変化によるスライ
ダー(2)の負荷方向の変位量は、スライダー(2)が
ガイド(1)の中央部に位置する時に最も大きく、両端
部に向かうに従って漸減する。The amount of deflection of this guide (1) changes depending on the position of the slider (2). In addition, in order to reduce the weight of the device, if the guide (1) is made thinner or hollow, or if aluminum alloy is used for the material, the guide (1) will be deflected by the load and the slider (2) will be The change in the amount of deflection depending on the position becomes so large that it cannot be ignored. This guide (
The deflection in 1) and the change in the amount of deflection do not directly affect the straightness of the restraint type slide device. Generally, the amount of displacement of the slider (2) in the load direction due to the deflection of the guide (1) and changes in the amount of deflection is greatest when the slider (2) is located at the center of the guide (1), and toward both ends. gradually decrease according to
発明の目的
本発明は上記従来の欠点を解消するもので、静圧流体軸
受である拘束隙スライド装置等の、ガイドの撓みおよび
撓み量の変化による真直性の低下を防止することを目的
とする。Purpose of the Invention The present invention solves the above-mentioned conventional drawbacks, and aims to prevent deterioration in straightness due to deflection of the guide and changes in the amount of deflection in a restraint gap slide device, etc., which is a hydrostatic fluid bearing. .
発明の構成
上記目的を達成するため、本発明は、子軸形状のガイド
と、前記ガイド表向を囲みかつこのガイド表面を案内面
とするスライダーとを有し。Structure of the Invention In order to achieve the above object, the present invention includes a guide in the shape of a child shaft, and a slider that surrounds the surface of the guide and uses the guide surface as a guide surface.
前記スライダーの摺動面に摺動方向に平行な深い溝と、
この深い溝から延びる複数の浅い絞如溝を設けた静圧流
体軸受の、前記ガイドの案内面に、前記深い溝に動作流
体を供給する少なくとも一個の供給孔を設け、この供給
孔と前記深い溝との接合部で形成される供給流路面積が
、前記スライダーの摺動方向両端部に向かって漸減もし
くは漸増するように前記供給孔および前記深い溝を構成
したものである。a deep groove parallel to the sliding direction on the sliding surface of the slider;
At least one supply hole for supplying working fluid to the deep groove is provided on the guiding surface of the guide of a hydrostatic fluid bearing provided with a plurality of shallow restrictive grooves extending from the deep groove, and the supply hole and the deep The supply hole and the deep groove are configured such that the area of the supply flow path formed at the joint with the groove gradually decreases or increases toward both ends of the slider in the sliding direction.
実施例の説明
以下1本発明の一実施例について、図面に基づいて説明
する。なお、以下の説明において、動作流体に気体を用
いた静圧流体軸受である拘束型スライド装置の基本構成
は第1図と同じである。したがって第1図と共に説明す
る。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. In the following description, the basic configuration of the restraint type slide device, which is a hydrostatic fluid bearing using gas as the working fluid, is the same as that in FIG. 1. Therefore, it will be explained in conjunction with FIG.
第5図乃至第7図において、(■)はガイド(1)の内
部に設けられた給気路、(12a)(12bM前記給気
路(Illと連通し、ガイド(1)の案内面に開口した
給気孔、(taa)(tab)Uスライダー(2)の摺
動面(4)に摺動方向と平行に設けられた深い#I#(
以下エアーポケットと称す) 、 (14a)(14
b獄前記給気口(12g)(12b)とエアーポケット
(13a)(13b)との接合部で1図中斜線で示す、
また、矢印■はスライダー(2)の摺動方向、矢印(ト
)は負荷の加わる方向、矢印のはスライダーの移動に伴
う前記ガイド(1)の給気孔(12a)(12b)の相
対的な移動を示す、そして、第5図および第6図で示す
ように、前記スライダー(2)を介して負荷を受ける前
記ガイド(1)面に対応する側のエアーポケット(13
a)の形状は、その溝幅および溝深さがスライダー(2
)の摺動方向■両端部に向かって漸減するように形成さ
れている。即ち、両端部に向かって前記接合部(14a
)で形成される給気流路面積および接合部(14a)と
エアーポケツ) (13a)底面間の間隙を袖減させて
いる。また、第5図および第7図で示すように、負荷を
受けるガイド(1)面と反対備のガイド(1)面に対応
する側のエアーポケツ) (13b)の形状は、その溝
幅および溝深さがスライダー(2)の摺動方向■両端部
に向かって漸増するように形成されている。即ち、両端
部に向かって前記接合部(14b)で形成される給気流
路面積および接合部(14b)とエアーポケット(13
b)底面間の間隙を漸増させている。In FIGS. 5 to 7, (■) indicates an air supply path provided inside the guide (1), (12a) (12bM communicates with the air supply path (Ill), and is connected to the guide surface of the guide (1). An open air supply hole, (taa) (tab) A deep #I# (
(hereinafter referred to as air pocket), (14a) (14
b) The junction between the air supply ports (12g) (12b) and the air pockets (13a) (13b), indicated by diagonal lines in Figure 1.
Also, the arrow ■ indicates the sliding direction of the slider (2), the arrow (g) indicates the direction of load application, and the arrow indicates the relative direction of the air supply holes (12a) (12b) of the guide (1) as the slider moves. The air pocket (13
In the shape of a), the groove width and groove depth are similar to that of the slider (2).
) The sliding direction ■ is formed so that it gradually decreases toward both ends. That is, the joint portion (14a
) and the gap between the joint (14a) and the air pocket (13a) are reduced. In addition, as shown in Figures 5 and 7, the shape of the air pocket (13b) on the side corresponding to the guide (1) surface that receives the load and the opposite guide (1) surface is determined by its groove width and groove. The depth is formed so as to gradually increase toward both ends in the sliding direction of the slider (2). That is, the air supply flow path area formed by the joint (14b) toward both ends and the joint (14b) and the air pocket (13
b) The gap between the bottom surfaces is gradually increased.
以下上記構成における作用について説明する。The operation of the above configuration will be explained below.
外部から供給された気体はガイド(1)の給気路(11
)から接合部(14a)(14b)を通ってスライダー
(2)のエアーポケット(13a)(13b)内に至る
。そして、負荷を受けるガイド(1)面に対応する側の
接合部(X4a)を通過する気体の圧力損失は、スライ
ダー(2)の摺動方向ω両端部に向かって漸増し、エア
ーポケツ) (13a)内での圧力は、スライダー(2
)がガイド(1)の中央部に位置する時に最も大きく、
ガイド(1)の両端部に向かうほど漸減する。The gas supplied from the outside is passed through the air supply path (11) of the guide (1).
) to the air pockets (13a) (13b) of the slider (2) through the joints (14a) (14b). Then, the pressure loss of the gas passing through the joint (X4a) on the side corresponding to the surface of the guide (1) that receives the load gradually increases toward both ends of the slider (2) in the sliding direction ω, and air pockets) (13a ) is adjusted using the slider (2).
) is largest when located in the center of guide (1),
It gradually decreases toward both ends of the guide (1).
これに対し、負荷を受けるガイド(1)面と反対側のガ
イド(1)面に対応する側の接合部(t4b)を通過す
る気体の圧力損失は、スライダー(2)の摺動方向■両
端部に向かって順減し、エアーポケツ) (13b)内
での圧力は、スライダー(2)がガイド(1)の中央部
に位置する時に最も小さく、ガイド(1)の両端部に向
かうほど漸増する。そして、明(7)
らかにエアーポケット内の圧力は、スライダー(2)摺
動面(4)での動作流体の圧力およびその圧力分布に影
響を与える。したがって、前述のように、負荷を受ける
ガイド(1)面に対応する側のエアーポケット(13m
)内の圧力と、前記ガイド(1)面と反対側のガイド(
1)面に対応する側のエアーポケツ) (13b)内の
圧力に差を設けることによって、前記各エアーボケツ)
(13a)(13b)D摺動面における動作流体平均
圧に差が生じる。この平均圧の差をa (kgfA1/
l)とし、摺動面面積をbct−d)とすれば% aX
b(kgf)の力が負荷方向の反対に働くことになる。On the other hand, the pressure loss of the gas passing through the joint (t4b) on the side corresponding to the guide (1) surface opposite to the guide (1) surface that receives the load is as follows: The pressure in the air pocket (13b) is lowest when the slider (2) is located in the center of the guide (1), and gradually increases toward both ends of the guide (1). . And clearly (7) the pressure in the air pocket obviously affects the pressure of the working fluid and its pressure distribution on the sliding surface (4) of the slider (2). Therefore, as mentioned above, the air pocket (13 m
) and the pressure in the guide (1) opposite to the guide (1) surface.
1) Air pockets on the side corresponding to the surface) (13b) By creating a difference in the pressure within each air pocket)
(13a) (13b) D A difference occurs in the average pressure of the working fluid on the sliding surface. This average pressure difference is a (kgfA1/
l) and the sliding surface area is bct-d), then %aX
A force of b (kgf) acts in the opposite direction of the load.
前記aの値は設計によってコンマ数kgfAII のオ
ーダーの大きさに設定することができ、スライダー(2
)の位置に応じて変動させることも可能である。まだ、
スライド装置のガイド部の弾性を含まない場合の剛性(
即ち、ガイド(1)とスライダー(2)間の間隙の変化
に対する負荷の割合)をc(kgf/μm)とすれば、
前記圧力差によるスライダー(2)の変位はaXb/c
(μ−)となシ、この変位の方向は、ガイド(1)の撓
みおよび撓み(8)
量の変化によるスライダー(2)の変位の方向に対して
逆となる。そして、前記ガイド(1)の撓みおよび撓み
量の変化による前記スライダー(2)の変位は大きくと
もコンマ数μ賜のオーダーであシ、仮に、a=01 (
1wf/1r1)、 b−a o (cm)、C=10
Cktzf/pg )とすれば、前記圧力差によるス
ライダー(2)の変位量は。The value of a can be set to a magnitude on the order of a comma number kgfAII by design, and the value of a can be set to a magnitude on the order of a comma number kgfAII, and the value of
) can also be varied depending on the position. still,
Rigidity (not including the elasticity of the guide part of the slide device)
That is, if the ratio of the load to the change in the gap between the guide (1) and the slider (2) is c (kgf/μm), then
The displacement of the slider (2) due to the pressure difference is aXb/c
(μ-), the direction of this displacement is opposite to the direction of displacement of the slider (2) due to the change in the amount of deflection and deflection (8) of the guide (1). The displacement of the slider (2) due to the deflection of the guide (1) and the change in the amount of deflection is at most on the order of a few tenths of μ, and if a=01 (
1wf/1r1), ba o (cm), C=10
Cktzf/pg ), then the amount of displacement of the slider (2) due to the pressure difference is.
aXb/C(/7@)=:(LIX50/10=α5μ
嵩となってオーダー的に充分な値であシ、シたがって拘
束型スライド装置の真直性を向上させることができる。aXb/C(/7@)=:(LIX50/10=α5μ
It is bulky and has a sufficient value in terms of order, so that the straightness of the restraint type slide device can be improved.
第8図および第9図は本発明の他の実施例を示し、溝幅
および溝深さがスライダー(2)の摺動方向■両端部に
向かって漸減するように形成されたエアーポケットQm
に対して二個の給気孔−(lηを対向させたものである
。このように二個の給気孔(I・Qηとすると、前記エ
アーポケット(1−と前記各給気孔Qfl(lηとの接
合部1181 (11で形成される給気流路面積は、給
電孔が一個の場合に比べ、スライダー(2)の摺動方向
Q両端部に向かって漸減の度合を大きくすることが可能
となシ、エアーボケッ)(lυ内の圧力も効率的に変動
させることができる。このことは、給電流路面積をスラ
イダー(2)の摺動方向(ト)両端部に向かって漸増さ
せる場合も同様のことがいえる。また、−個のエアーポ
ケットに対向する給気孔は二個に限るものではなく、二
個以上としてもよい。8 and 9 show another embodiment of the present invention, in which an air pocket Qm is formed such that the groove width and the groove depth gradually decrease toward both ends in the sliding direction of the slider (2).
, the two air supply holes -(lη) are opposed to each other.If the two air supply holes (I・Qη) are in this way, the air pocket (1-) and each air supply hole Qfl(lη The area of the air supply flow path formed by the joint 1181 (11) can be gradually reduced toward both ends of the slider (2) in the sliding direction Q compared to the case where there is only one power supply hole. , air bubble) (the pressure inside lυ can also be varied efficiently. This also applies when the supply current path area is gradually increased toward both ends of the slider (2) in the sliding direction (g). Moreover, the number of air supply holes facing the - number of air pockets is not limited to two, and may be two or more.
なお、以上の実施例において、動作流体に気体を用いて
説明したが、気体に限らず油、水等の液体であっても本
発明は実施できるものである。Although the above embodiments have been described using gas as the working fluid, the present invention is applicable not only to gas but also to liquids such as oil and water.
発明の効果
以上のように本発明によれば、静圧流体軸受である拘束
型スライド装置等の、ガイドの撓みおよび撓み童の変化
による真直性の低下を防止することができ、よ如高精度
の静圧流体軸受を提供できる。Effects of the Invention As described above, according to the present invention, it is possible to prevent deterioration of straightness due to deflection of the guide and change in deflection of a constrained type slide device, etc., which is a hydrostatic fluid bearing, and to achieve higher precision. hydrostatic fluid bearings.
第1図は静圧流体軸受である拘束型スライド装置の基本
構成を示す斜視図、第2図は従来のスライダーの一部を
示す斜視図、第3図は同ガイドの斜視図、第4図は従来
の摺動面における気体の流れを示す説明図、第5図は本
発明の一実施例を示す模式図、第6図は第5図における
A矢視図、第7図は第5図におけるB矢視図、第8図は
他の実施例を示す模式図、第9図は第8図におけるC矢
視図である。
(1)・・・ガイド%(2)・・・スライダー、(3)
・・・排気溝、(4)・・・摺動面、[+1) =・・
給気路、 (12a)(12b)061(lη・・・給
気孔、(13a)(13b)f16)−エアーポケット
、(14a)(14bM81(l!・・・接合部、■・
・・スライダーの摺動方向、的・・・負荷の加わる方向
、の・・・給気孔の移動方向代理人 森 本 義 弘
第1図
第2図
第3図
第4図
第5図
第5図
第7図
第1図
c
第q図Fig. 1 is a perspective view showing the basic structure of a restraint-type slide device that is a hydrostatic fluid bearing, Fig. 2 is a perspective view showing a part of a conventional slider, Fig. 3 is a perspective view of the same guide, and Fig. 4 is an explanatory diagram showing the flow of gas on a conventional sliding surface, FIG. 5 is a schematic diagram showing an embodiment of the present invention, FIG. 6 is a view taken from arrow A in FIG. 5, and FIG. 8 is a schematic view showing another embodiment, and FIG. 9 is a view taken along arrow C in FIG. 8. (1)...Guide% (2)...Slider, (3)
...Exhaust groove, (4)...Sliding surface, [+1) =...
Air supply path, (12a) (12b) 061 (lη... air supply hole, (13a) (13b) f16) - air pocket, (14a) (14b M81 (l!... joint, ■)
...The sliding direction of the slider, the target...the direction in which the load is applied, the moving direction of the air supply hole Agent Yoshihiro MorimotoFigure 1Figure 2Figure 3Figure 4Figure 5Figure 5 Figure 7 Figure 1 c Figure q
Claims (1)
のガイド表面を案内面とするスライダーとを有し、前記
スライダーの摺動面に摺動方向に平行な深い溝と、この
深い溝から延びる複数の浅い絞シ溝を設けた静圧流体軸
受であって、前記ガイドの案内面に、前記深い婢に動作
流体を供給する少なくとも一個の供給孔を設け、この供
給孔と前記深い溝との接合部で形成される供給流路面積
が、前記スライダーの摺動方向両端部に向かって漸減も
しくは漸増するように前記供給孔および前記深い溝を構
成した静圧流体軸受。 2 深い溝はその深さを、スライダーの摺動方向両端部
に向かって漸減もしくは漸増する構成とした特許請求の
範囲第1項記載の静圧流体軸受。 (1) a 供給流路面積あるいは深い溝の深さは、スライダー
を介して負荷を受けるガイド面に対応する側においては
前記スライダーの摺動方向両端部に向かって漸減すると
共に、前記負荷を受けるガイド面と反対側のガイド面に
対応する(111においては前記スライダーの摺動方向
両端部に向かって漸増する構成とした特許請求の範囲第
1項または第2項記載の静圧流体軸受。[Claims] L has a guide in the shape of a child shaft, and a slider surrounding the guide surface and using the guide surface as a guide surface, and a deep groove parallel to the sliding direction on the sliding surface of the slider. , a hydrostatic fluid bearing having a plurality of shallow constriction grooves extending from the deep groove, wherein the guide surface of the guide is provided with at least one supply hole for supplying working fluid to the deep groove; The supply hole and the deep groove are configured such that the supply flow path area formed at the junction between the supply hole and the deep groove gradually decreases or increases toward both ends in the sliding direction of the slider. 2. The hydrostatic fluid bearing according to claim 1, wherein the depth of the deep groove gradually decreases or increases toward both ends of the slider in the sliding direction. (1) a The supply flow path area or the depth of the deep groove gradually decreases toward both ends in the sliding direction of the slider on the side corresponding to the guide surface that receives the load via the slider, and 3. The hydrostatic fluid bearing according to claim 1, wherein the guide surface (111) corresponding to the guide surface on the opposite side of the guide surface gradually increases toward both ends in the sliding direction of the slider.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12007382A JPS5913119A (en) | 1982-07-09 | 1982-07-09 | Static pressure fluid bearing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12007382A JPS5913119A (en) | 1982-07-09 | 1982-07-09 | Static pressure fluid bearing |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5913119A true JPS5913119A (en) | 1984-01-23 |
Family
ID=14777226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12007382A Pending JPS5913119A (en) | 1982-07-09 | 1982-07-09 | Static pressure fluid bearing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5913119A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160018U (en) * | 1987-10-14 | 1989-04-17 | ||
JPH02193561A (en) * | 1989-01-23 | 1990-07-31 | Hitachi Metals Ltd | Linear motor |
JPH02202348A (en) * | 1989-01-27 | 1990-08-10 | Hitachi Metals Ltd | Voice coil motor |
US4974970A (en) * | 1989-02-04 | 1990-12-04 | Toyoda Koki Kabushiki Kaisha | Hydrostatically supporting device for slide |
US6990737B2 (en) * | 1998-02-13 | 2006-01-31 | Marek Zywno | Fluid bearings and vacuum chucks and methods for producing same |
CN102632398A (en) * | 2012-04-25 | 2012-08-15 | 北京工业大学 | High-precision and high-rigidity closed type aerostatic guideway |
-
1982
- 1982-07-09 JP JP12007382A patent/JPS5913119A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0160018U (en) * | 1987-10-14 | 1989-04-17 | ||
JPH02193561A (en) * | 1989-01-23 | 1990-07-31 | Hitachi Metals Ltd | Linear motor |
JPH02202348A (en) * | 1989-01-27 | 1990-08-10 | Hitachi Metals Ltd | Voice coil motor |
US4974970A (en) * | 1989-02-04 | 1990-12-04 | Toyoda Koki Kabushiki Kaisha | Hydrostatically supporting device for slide |
US6990737B2 (en) * | 1998-02-13 | 2006-01-31 | Marek Zywno | Fluid bearings and vacuum chucks and methods for producing same |
CN102632398A (en) * | 2012-04-25 | 2012-08-15 | 北京工业大学 | High-precision and high-rigidity closed type aerostatic guideway |
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