JP2001248643A - Static pressure slide table device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a static pressure slide table device preventing the inclination of a slide table for a support base even if a load eccentric forward is applied. SOLUTION: This static pressure slide table device has the support base 1 having a pair of upper and lower guide faces 11, 12 and the slide table 2 having a pair of slide faces 21, 22 opposing to the guide faces 11, 12 across a predetermined interval, respectively. A relay port 5 which is a groove for receiving lubricant supplied from a supply hole 3 of the support base 1 and having a predetermined pressure is provided on the downward slide face 21 of the slide table 2. The relay port 5 supplies the lubricant supplied from the supply hole 3 to a distribution hole 6, and the lubricant is supplied to each slide face 21, 22 from the distribution hole 6. Since the relay port 5 is formed to be eccentric forward from the slide table 2, hydrostatic distribution applied on the slide face 21 is also eccentric forward, thereby offsetting the action of a weight W of a loaded object L eccentric forward and preventing forward inclination of the slide table 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention belongs to the technical field of a static pressure slide table device in which a slide table is slidably supported on a support base by static pressure of lubricating oil.

[0002]

2. Description of the Related Art A conventional static pressure slide table device is disclosed in, for example, Japanese Patent Publication No. 6-66666. In such a static pressure slide table device,
An oil supply groove, a distribution groove, and a static pressure pocket are formed on the sliding surface of the slide table, so that the static pressure is applied substantially uniformly to almost the entire sliding surface. Since the orifice is inserted in the middle of the oil passage through which the lubricating oil is supplied to at least some of the static pressure pockets, the sliding surface of the slide table and the guide surface of the support table supporting the slide table are provided. Is kept substantially constant. As a result, in a state where no uneven load is applied, the slide table floats with a predetermined gap while being horizontal with respect to the support table, and can slide lightly with a very small frictional force of the lubricating oil.

[0003]

However, in the above-mentioned prior art, the sliding surface and the sliding surface are so formed that a slight gap is formed between the sliding surface of the slide table and the guide surface of the support table facing each other. The static pressure of the lubricating oil is applied almost uniformly to the entire guide surface. That is, an oil supply groove, a distribution groove, and a static pressure pocket are formed on almost the entire sliding surface of the slide table so that the lubricating oil can be distributed substantially uniformly.

In other words, in the conventional static pressure slide table apparatus, a static pressure pocket or the like is provided over the entire sliding surface so that substantially uniform static pressure of lubricating oil is applied over the entire sliding surface of the slide table. It had to be evenly arranged. Therefore, the degree of freedom in designing oil supply grooves, static pressure pockets, and the like formed on the slide table is small.

[0005] When the degree of freedom in designing the static pressure pocket and the like is small, the following inconveniences are caused. That is, as shown in FIG. 6, when the weight W of the load L is biased in the vertical direction (sliding direction) with respect to the slide table, a certain amount of static pressure compensation is given by the orifice. Such passive compensation is not enough. As a result, the slide table on which the load L is placed is inclined with respect to the support table, and the inconvenience that the vertical position accuracy and the angular accuracy of the load L are reduced is caused.

Such inconvenience is caused when the load L is a spindle device of a machine tool which requires high precision.
Since it leads to a decrease in machining accuracy as it is, there are many cases where it cannot be overlooked. In addition, when the inclination of the slide table is extremely large, the slide surface of the slide table may come into contact with the guide surface of the support table without the intervention of the lubricating oil. Then, the frictional resistance of the slide table increases and the sliding performance decreases,
The sliding surface and the guide surface are damaged, and the life of the hydrostatic slide table device is shortened.

Therefore, the present invention is to solve the problem of providing a static pressure slide table apparatus having a high degree of freedom in designing the static pressure distribution of lubricating oil so that an appropriate design can be made according to the requirements of the load. And

[0008]

In order to solve the above problems, the inventors have invented the following means.

(First Means) A first means of the present invention is a static pressure slide table device according to the first aspect. That is,
The supply hole of the support base has an open end that opens from the lower one of the guide surfaces of the slide table to the lower surface of the two slide surfaces. On the other hand, the slide table has a relay port which is a concave portion formed on the lower surface of the sliding surface and communicates with the distribution hole. The relay port is formed at a position different from the static pressure pocket on the lower surface of the slide table, and covers the opening end of the supply hole at least in the movable range of the slide table, so that lubricating oil supplied from the supply hole is provided. Has the function of relaying to the distribution hole.

Here, the support base and the slide table are often arranged horizontally with reference to the direction of gravity, but this is not an essential requirement. Similarly, the guide surface of the support table and the slide surface of the slide table need not be horizontal or need to be planes parallel to each other. For example, the guide surface and the sliding surface may be a pair of left and right planes that form a diamond when viewed from the front in the sliding direction.
In some cases, it need not even be planar.

The static pressure pocket may be a pocket or a groove as long as it is a recess formed in the sliding surface of the slide table and is supplied with lubricating oil having a static pressure. . Further, the static pressure pocket may be supplied with lubricating oil directly from a distribution hole formed inside the slide table, or may be provided with an oil supply groove or a distribution groove formed on the slide surface of the slide table from the distribution hole. It may be supplied via the Internet.

The mounted components such as the spindle device and the driving devices such as the feed motor and the ball screw may be retrofitted.
It is not included in the essential components of this means.

According to this means, the lubricating oil supplied to the supply hole of the support base at a predetermined pressure is formed on the sliding surface of the slide table facing from the opening end of the supply hole opening on the guide surface of the support base. Is supplied to the inside of the relay port. Then, the lubricating oil is distributed from the relay port to the static pressure pocket, which is a concave portion formed on at least a guide surface formed at the top and bottom of the slide table, through a distribution hole formed inside the slide table. .

That is, lubricating oil pressurized from the relay port through the distribution hole is distributed to the static pressure pocket, and the static pressure of the lubricating oil generated in the static pressure pocket and its vicinity causes the slide table to move through the lubricating oil. It is slidably supported on the support table by static pressure. Then, the guide surface of the support table and the slide surface of the slide table do not contact each other with a gap therebetween, so that only a slight Newtonian frictional force caused by the viscosity of the lubricating oil occurs, and the Coulomb friction in which the solid surfaces rub against each other is generated. The force stops working. As a result, the slide table smoothly slides on the support table with a small force.

At this time, since the relay port is formed at a position different from the static pressure pocket on the lower surface of the slide table, unlike the static pressure pocket, the lubricating oil spreads over the entire sliding surface. It does not need to be arranged in consideration of. That is, since the relay port may be disposed at a deviated position on the sliding surface, the relay port can be designed to be disposed deviated along the sliding direction of the sliding surface, for example. Since the lubricating oil is supplied to the relay port with a predetermined static pressure, the static pressure distribution on the sliding surface differs depending on the range where the relay port is formed.

Therefore, according to the static pressure slide table apparatus of the present means, since the degree of freedom in designing the shape and arrangement of the relay ports is increased, the degree of freedom in designing the static pressure distribution of the lubricating oil is increased. is there. As a result, there is an effect that it is possible to design a more appropriate static pressure distribution according to the requirements of the load and the like.

In this means, the distribution holes and the static pressure pockets are made ready-made so that the lubricating oil spreads over the entire sliding surface, and only the relay port is made custom-made according to the load and the driving device. can do. In this way, it is possible to meet the requirements of individual orders while achieving mass production effects, so, like the easy order, a static pressure slide table device with characteristics suitable for individual orders at a low price similar to mass-produced products Can be provided. Therefore, according to this means, there is also an effect that a great merit can be obtained in terms of cost reduction while satisfying performance.

(Second Means) A second means of the present invention is a static pressure slide table device according to the second aspect. That is,
The relay port is formed so that the center of the area of the opening in the guide surface is deviated so as to offset the moment of tilting the slide table caused by the weight of the load that is deviated from the slide table.

Here, the moment is to be canceled, but it is not always necessary to completely cancel the moment to zero, and it is sufficient that the moment is canceled. In other words, the total moment of tilting the slide table only needs to be reduced, and even if the moment acts in the opposite direction due to excessive reduction, the absolute value of the moment is reduced as compared with the case where there is no relay port. Shall be good.

In this means, the static pressure acting on the biased relay port and its vicinity cancels out the moment caused by the weight of the load to tilt the slide table. Therefore, even if the load is eccentrically mounted on the slide table, the inclination of the slide table can be reduced. As a result, deviation of the vertical position of the mounted object and deviation of the posture of the mounted object due to the inclination of the slide table are suppressed to be small, and the positional accuracy and the posture accuracy of the mounted object are improved.

Therefore, according to this means, in addition to the effect of the first means described above, the inclination of the slide table can be suppressed to be small, so that there is an effect that the positional accuracy and the posture accuracy of the mounted object are improved.

(Third Means) A third means of the present invention is a static pressure slide table device according to the third aspect. That is,
The opening area of the relay port is set so as to offset the weight of the slide table and the load.

Here, it is assumed that the weight is offset, but it is sufficient if the absolute value of the load due to the weight is reduced by the levitation force that acts more on the slide table due to the presence of the relay port.

In this means, the action of lowering the slide table caused by the weight of the load is offset by the static pressure acting on the relay port formed on the lower surface of the slide surface of the slide table and the vicinity thereof. . Therefore, even if a load having a predetermined weight is placed on the slide table, the slide table is less likely to sink with respect to the support table. As a result, the displacement of the vertical position of the mounted article due to the sinking of the slide table is suppressed to be small, and the positional accuracy of the mounted article is further improved.

Therefore, according to this means, in addition to the effect of the above-described second means, the sinking of the slide table can be suppressed to a small value, so that the positional accuracy of the load can be further improved.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the hydrostatic slide table apparatus of the present invention will be clearly and fully described in the following examples so that those skilled in the art can understand the present invention.

Embodiment 1 (Structure of Embodiment 1) As shown in FIG. 1, a static pressure slide table apparatus according to Embodiment 1 of the present invention includes a support 1 mounted horizontally on a base, A slide table 2 slidably supported along a vertical direction of the table 1 (a front-back direction perpendicular to the paper surface of FIG. 1).

The support table 1 has a pair of upper and lower guide surfaces 11 and 12 facing each other at a predetermined interval corresponding to a size obtained by adding a predetermined gap to the thickness of the slide table 2. In addition, the support base 1 has a pair of guide surfaces 13 facing each other on the inner side surfaces on both left and right sides with a predetermined interval corresponding to a size obtained by adding a predetermined gap to the width in the left-right direction of the slide table 2. . On the other hand, the slide table 2 is a substantially rectangular parallelepiped block, and has a pair of upper and lower sliding surfaces 21 and 22 facing the guide surfaces 11 and 12 of the support base 1 with a predetermined gap, respectively. The surface has a pair of left and right sliding surfaces 13.

The guide surfaces 11 and 12 of the support table 1 and the slide surfaces 21 and 22 of the slide table 2 are opposed to each other with a predetermined gap via lubricating oil, and are respectively in a horizontal plane. Further, the guide surface 13 of the support base 1 and the slide surface 23 of the slide table 2 also face each other with a predetermined gap through the lubricating oil, but the guide surface 13 and the slide surface 23 Are vertical planes parallel to each other.

The support base 1 has a pair of left and right supply holes 3 for supplying the lubricating oil pressurized to a predetermined pressure to the slide table 2. On the other hand, the slide table 2 applies the lubricating oil supplied from the supply hole 3 of the support base 1 to each of the sliding surfaces 21 to 21.
23 has a distribution hole 6 inside. Further, the slide table 2 is provided with a plurality of static pressure pockets 83 (FIG. 3) which are concave portions formed in the respective sliding surfaces 21, 22, and 23 by being supplied with lubricating oil from the distribution holes 6 and opening in a predetermined range. And FIG.
See).

When lubricating oil is supplied from the hydraulic pressure source S to the supply hole 3 of the support base 1 through a pipe P made of a rigid steel pipe, the lubricating oil flows through the relay port 5 and the distribution hole 6 of the slide table 2. And is distributed to the guide surfaces 11 to 13 through the respective guide surfaces. Then, lubricating oil is supplied from each of the static pressure pockets 83 to the gap between the opposing guide surfaces 11 to 13 and the sliding surfaces 21 to 23. The static pressure of the lubricating oil causes the slide table 2 to support the slide table 2. 1 is slidably supported.

Here, the supply holes 3 of the support table 1 extend from the lower guide surface 11 to the respective sliding surfaces 21 to 22 of the slide table 2.
Among them has an open end 4 opening toward the lower surface 21. On the other hand, the slide table 2 is a pair of right and left relay ports, each of which is a groove-shaped recess having a predetermined width and formed on the lower surface 21 of each of the sliding surfaces 21 to 23, and each of the distribution holes 6 communicates with each other. Has 5 As shown in FIG. 4, both relay ports 5 are formed at positions different from the respective static pressure pockets 83 on both lower surfaces 21 of the sliding surface of the slide table 2 in the lateral direction (the inner side in the left-right direction). . Each relay port 5 is provided at least in the movable range of the slide table 2.
And has a function of relaying the lubricating oil supplied from the open end 4 of the supply hole 3 to the respective distribution holes 6.

Next, the relay port 5 will be described in more detail. As shown in FIG. 2, it is assumed that a load L including a spindle device L1 and a headstock L2 is mounted on the slide table 2 so as to be biased forward. Then, an eccentric load is generated by the weight W of the load L eccentrically mounted on the slide table 2, and as a result, a head lowering moment for tilting the slide table 2 forward acts on the slide table 2.
Therefore, as shown in FIG. 4 again, the relay port 5 is moved below the slide table 2 so that the head lowering moment is almost completely canceled by the static pressure of the lubricating oil generated in the opening of the relay port 5 and its periphery. The center of the area of the opening in the side sliding surface 21 is formed so as to be deviated forward.

The support table 1 has a slide table 2
The weight W of the load L is added in addition to the weight of the slide table 2, and a force to sink the slide table 2 downward with respect to the support table 1 acts on the slide table 2. If no countermeasure is taken in such a state, the slide table 2 sinks to some extent, and the gap formed on the lower side of the slide table 2 becomes smaller than the gap formed on the upper side. Therefore, the relay port 5 causes the slide table 2 to move by the static pressure of the lubricating oil generated in the opening and the periphery thereof.
The shape and area of the opening are set so as to substantially completely cancel the weight of the load L.

As shown in FIG. 1 again, the support base 1 includes, in order from the bottom, a base 15 fixed to the base, a pair of left and right lower guide rails 16 fixed to the base 15,
It comprises a side guide rail 17 and an upper guide rail 18. Each of the guide rails 16 to 18 is a rectangular parallelepiped block member, and has smooth guide surfaces 11 to 13 formed on a surface facing the slide table 2. Since the width of the lower guide rail 16 is wider than that of the upper guide rail 18, the lower guide surface 11 and the sliding surface 21 are
It is wider and larger in area than the upper guide surface 13 and the sliding surface 23.

On the other hand, a pair of left and right distribution holes 6 are formed inside the slide table 2 as described above, but from the distribution holes 6 to the sliding surfaces 21 to 23, both distribution holes 6 are formed. Through orifices 7 embedded in each open end. Here, each orifice 7 has a function of properly adjusting the static pressure of the pressurized lubricating oil.

That is, the pressurized lubricating oil extends from the distribution hole 6 through the orifice 7 in the longitudinal direction, and is supplied to the oil supply groove 81 formed in each of the sliding surfaces 21 to 23. The lubricating oil supplied to the oil supply groove 81 is supplied to a number of static pressure pockets 83 through the respective distribution grooves 82 as shown in FIGS. 3 and 4 again. The oil supply groove 81, the distribution groove 82, and the static pressure pocket 83 are formed so that the lubricating oil can be distributed to all the sliding surfaces 21 to 23.
The slide table 2 is levitated and supported on the support table 1 by the static pressure of the lubricating oil pressing the 3.

That is, at a predetermined pressure from the hydraulic pressure source S through the rigid pipe P, the hydrostatic slide table apparatus of the present embodiment forms the following oil passage for lubricating oil. That is, the oil passage is arranged in order of the supply hole 3 of the support base 1 and the slide table 2.
Relay port 5, distribution hole 6, orifice 7, oil supply groove 8
1. The distribution groove 82 and the static pressure pocket 83 are formed symmetrically.

As shown in FIGS. 2 to 4, when the slide table 2 is at a neutral position with respect to the support table 1, the supply hole 3 of the support table 1 Is formed so as to be biased forward so that the opening 4 is located at the center. On the other hand, the distribution hole 6 of the slide table 2 is formed at the center of the slide table 2 in the front-rear direction so as to open at the center of the oil supply groove 81 in the front-rear direction.

Therefore, the slide table 2 is not only bilaterally symmetric but also symmetrical in the front-rear direction except for the relay port 5. Similarly, an oil supply groove 81, a distribution groove 82 and a static pressure pocket 83 of the slide table 2
Are formed on the upper sliding surface 22 in the same manner as the lower sliding surface 21. Accordingly, the slide table 2 is vertically symmetrical except for the relay port 5, a part of the distribution hole 6, and the means for attaching the load L.

In the hydrostatic slide table apparatus of this embodiment, the drive device including the feed motor M and the ball screw B is omitted in FIG. 1 and the like, but as shown in FIG. Installed as with technology. The weight of the slide table 2 itself includes the weight of the ball screw B.

(Effects of Embodiment 1) Since the hydrostatic slide table device of this embodiment is configured as described above, the following effects are obtained.

That is, in the hydrostatic slide table device of the present embodiment, as described above, the lubricating oil is pressure-fed from the hydraulic source S to the supply hole 3 of the support base 1 via the rigid pipe P. Then, the lubricating oil supplied at a predetermined pressure flows from the opening end 4 of the supply hole 3 opening in the guide surface 11 of the support base 1 to the relay surface formed on the lower sliding surface 21 of the opposing slide table 2. Supplied inside port 5. And this lubricating oil
As schematically shown in FIG. 5, recesses are formed in the upper, lower, left and right sliding surfaces 21 to 23 of the slide table 2 from the relay port 5 via distribution holes 6 formed in the slide table 2. The oil is distributed to each oil supply groove 81. As a result, the lubricating oil is distributed from each oil supply groove 81 to each distribution groove 82 and each static pressure pocket 83, and these concave portions 81, 8
The entire guide surfaces 11 to 13 including 2 and 83 are distributed.

Then, lubricating oil having an appropriate static pressure is supplied to the oil supply groove 81, the distribution groove 82, and the static pressure pocket 83 via the orifice 7. Since the lubricating oil is supplied via the orifice 7, the upper and lower gaps of the sliding surfaces 21 and 22 are properly balanced, and the left and right gaps of the sliding surface 23 are also equal to each other. That is, from the relay port 5 to the distribution hole 6
The lubricating oil is distributed to each of the sliding surfaces 21 to 23 via the lubricating oil groove 81, the distribution groove 82, the static pressure pocket 83, and the static pressure of the lubricating oil generated in and around the slide table 2.
Floats in the lubricating oil.

In such a state, as shown in FIG. 1 again, the guide surfaces 11 to 13 of the support table 1 and the slide table 2
The sliding surfaces 21 to 23 do not contact each other with a gap. Then, only a slight Newtonian frictional force caused by the viscosity of the lubricating oil is generated between the guide surfaces 11 to 13 and the sliding surfaces 21 to 23, and the Coulomb frictional force with which the solid surfaces rub against each other does not act. as a result,
The slide table 2 smoothly slides on the support table 1 with a small force.

At this time, as shown in FIG. 4 again, the relay port 5 is located on the lower sliding surface 23 of the slide table 2 at a position different from the oil supply groove 81, the distribution groove 82 and the static pressure pocket 83. Is formed. Therefore, the relay port 5 includes the oil supply groove 81, the distribution groove 82, and the static pressure pocket 8
Unlike the case 3, the lubricating oil does not need to be arranged so that the lubricating oil spreads over the entire sliding surface.

Therefore, according to the static pressure slide table apparatus of this embodiment, the degree of freedom in designing the shape and arrangement of the relay port 5 is increased, and the degree of freedom in designing the static pressure distribution of the lubricating oil is increased. effective. As a result, there is an effect that a more appropriate static pressure distribution can be designed in accordance with a request of the load L or the like.

Therefore, as shown in FIGS. 2 and 4, the relay port 5 is disposed at a position on the sliding surface 21 which is biased forward.

Then, since the lubricating oil is supplied to the relay port 5 with a predetermined static pressure, the static pressure distribution on the sliding surface 21 differs depending on the range where the relay port 5 is formed. That is, since the relay port 5 exists from the middle portion to the front of the lower sliding surface 21, as shown by the static pressure p in FIG. 5 again, the high static pressure (there is no pressure drop by the orifice 7). Is formed. On the other hand, in the rear part of the lower sliding surface 21, since there is no relay port 5, a part to which a low static pressure p ′ with pressure loss due to the orifice 7 is applied is formed.

When the distribution of the static pressure is different between the front and the rear, the moment of tilting the slide table caused by the weight W of the load L mounted on the slide table 2 is offset to the front. . Therefore, even if the load L is placed on the slide table 2 so as to be biased forward, the inclination of the slide table 2 can be reduced. As a result, a shift in the vertical position of the load L and a shift in the attitude of the load L due to the inclination of the slide table 2 are also reduced, and the positional accuracy and the attitude accuracy of the load L are improved.

Therefore, according to the static pressure slide table device of the present embodiment, the inclination of the slide table 2 is almost eliminated and the slide table 2 is substantially horizontal even though the load L is mounted to be biased forward. Is kept. As a result, there is an effect that the position accuracy and the posture accuracy of the load L are improved, and the machining accuracy of the spindle device L1 is also improved.

As described above, the slide table 2
That the static pressure p acting on the relay port 5 formed on the lower surface 21 and the vicinity thereof among the sliding surfaces 21 to 23 is high,
Due to the area of the lower surface 21 being larger than the upper surface 22,
A levitation force is generated on the slide table 2. The levitation force of the relay port 5 is generated such that the levitation force cancels out the weight W of the load L (see FIG. 2), the weight of the slide table 2 itself, and the weight of the ball screw B (see FIG. 6). The range is designed. Therefore, even if the load L having a considerable weight is placed on the slide table 2, the support 1
Of the slide table 2 with respect to. As a result, the vertical displacement of the load L caused by the sinking of the slide table 2 is almost eliminated, and the load L
Position accuracy is further improved.

Therefore, according to the hydrostatic slide table apparatus of the present embodiment, the slide table 2 hardly sinks, so that the positional accuracy of the load L is further improved. As a result, there is an effect that the machining accuracy of the spindle device L1 mounted on the slide table 2 is further improved.

(Manufacturing method of the present embodiment) In the static pressure slide table apparatus of the present embodiment, the distribution hole 6, the oil supply groove 81, the distribution groove 82, and the static pressure pocket 83 are provided with lubricating oil on the entire sliding surfaces 21 to 23. Ready-made so that you can get around. Then, only the relay port 5 can be made custom-made according to the weight and the center of gravity of the load L and the driving device. In this way, it is possible to meet the requirements of individual orders while achieving mass production effects, so, like the easy order, a static pressure slide table device with characteristics suitable for individual orders at a low price similar to mass-produced products Can be provided. Therefore, according to such a manufacturing method, there is an effect that a great merit can be obtained in terms of cost while satisfying performance.

In designing the relay port 5, the distribution of the static pressure on the upper and lower sliding surfaces 21 and 23 is considered to be approximated again as shown in FIG. 5 (actually, slightly different). The formation range can be designed based on this. That is, based on the pressure distribution of the upper and lower sliding surfaces 21 and 23,
The appropriate longitudinal length and lateral width of the relay port 5 are calculated so that the pitching moment and the levitation force that offset the effect of the unbalanced load of the load L and the like act on the slide table 2. If the relay port 5 is designed based on such a concept, the position and the attitude of the spindle device L1 can be set quite precisely.

In the case where more precise positioning is required, the relay port 5 is formed to be slightly shorter in the initial stage, and the actual operation and measurement of the attitude and position are performed. The relay port 5 may be extended. In this way, the position and orientation of the load L can be set more precisely than in a manufacturing method in which the dimensions of the relay port 5 are determined in advance by theoretical calculation.

(Modification 1 of Embodiment 1) As a modification 1 of the present embodiment, when introducing the pipe from the hydraulic pressure source S to the support base 1, the pipe is directly indicated by P 'in FIG. ,
It is possible to implement a static pressure slide table device configured to introduce lubricating oil into the pair of left and right lower guide rails 16.

According to the static pressure slide table device of this modified embodiment, since the supply holes 3 do not need to be formed inside the base 15, there is an effect that the cost is lower than that of the first embodiment. Not only that, even when there is a major design change in the position of the relay port 5 due to the replacement of the load L or the like, only the lower guide rail 16 of the support base 1 needs to be modified or newly constructed. In such a case, there is an effect that the cost is lower than that of the first embodiment.

(Modification 2 of Embodiment 1) As Modification 2 of the present embodiment, when the center of gravity or the external force of the load L or the like is applied to the slide table 2 in a left and right direction, the left and right sides are formed to have different widths. It is possible to implement a static pressure slide table device having a relay port 5 which is provided. According to this modification, the imbalance between the right and left forces and moments applied to the slide table 2 is also canceled by the appropriately designed left-right asymmetric relay port 5, and as in the first embodiment, the posture and position are extremely precise. There is an effect that the accuracy of is obtained.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing a configuration of a static pressure slide table device according to a first embodiment.

FIG. 2 is a side sectional view showing a configuration of a static pressure slide table device according to the first embodiment.

FIG. 3 is another side sectional view showing the configuration of the static pressure slide table device according to the first embodiment.

FIG. 4 is a bottom view showing the configuration of the slide table in the first embodiment.

FIG. 5 is a graph showing a pressure distribution applied to a sliding surface in the first embodiment.

FIG. 6 is a side view showing an inconvenience of the conventional static pressure slide table device.

[Explanation of symbols]

1: Support base 11-13: Guide surface (11: Lower guide surface, 12: Upper guide surface, 13: Side guide surface) 15: Base 16-18: Guide rail (16: Lower guide rail 17: Side guide) Rail 18: upper guide rail 3: supply hole 4: open end 2: slide table 21 to 23: sliding surface (21: lower surface, 22: upper surface, 23:
5) Relay port 6: Distribution hole 7: Orifice 81: Oil supply groove 82: Distribution groove 83: Static pressure pocket (3 to 7, 81, 82, 83: oil passage) L: Load L1: Spindle device L2: Headstock
W: Weight S: Hydraulic source P, P ': Piping (has high rigidity against internal pressure) M: Feed motor B: Ball screw p: Static pressure (portion with relay port) p': Static pressure (relay port is No part)

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Hideki Iwai 1-1-1 Asahi-cho, Kariya-shi, Aichi F-term (reference) 3C048 BC02 CC07 DD01 EE08 3J102 AA02 BA05 BA13 CA11 CA40 EA03 EA08 EA10 EA12 GA07

Claims (3)

[Claims] 1. A support table having at least a pair of upper and lower guide surfaces facing each other at a predetermined interval, and a slide table having at least a pair of upper and lower sliding surfaces respectively facing the guide surfaces with a predetermined gap. The support table has a supply hole for supplying lubricating oil pressurized to a predetermined pressure to the slide table, and the slide table transmits the lubricating oil supplied from the supply hole of the support table. A distributing hole for distributing, and a static pressure pocket which is a concave portion formed by opening the lubricating oil from the distributing hole to each of the sliding surfaces in a predetermined range, wherein the lubricating oil has the static pressure. A static pressure slurry is supplied from a pocket to the gap between the guide surface and the sliding surface facing each other, and the slide table is slidably supported on the support base by the static pressure of the lubricating oil. In the slide table device, the supply hole of the support table has an open end that opens from a lower one of the two guide surfaces to a lower surface of the two slide surfaces of the slide table. Has a relay port which is a recess formed in the lower surface of the sliding surface and communicates with the distribution hole, and the relay port is formed in the lower surface of the slide table with the static pressure pocket. Being formed at different positions and having a function of covering the opening end of the supply hole at least in the movable range of the slide table and relaying the lubricating oil supplied from the supply hole to the distribution hole. A static pressure slide table device. 2. The relay port is formed such that the center of the area of the opening in the guide surface is deviated so as to cancel the moment generated by the weight of the object mounted deviated on the slide table and tilting the slide table. The static pressure slide table device according to claim 1, wherein: 3. The static pressure slide table device according to claim 2, wherein the relay port has an area of the opening set so as to offset the weight of the slide table and the load.