CN110587424A - High-precision hydrostatic guide rail for ultra-precise aspheric surface molding grinding machine - Google Patents
High-precision hydrostatic guide rail for ultra-precise aspheric surface molding grinding machine Download PDFInfo
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- CN110587424A CN110587424A CN201911010820.8A CN201911010820A CN110587424A CN 110587424 A CN110587424 A CN 110587424A CN 201911010820 A CN201911010820 A CN 201911010820A CN 110587424 A CN110587424 A CN 110587424A
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- 230000002706 hydrostatic effect Effects 0.000 title claims abstract description 57
- 238000000465 moulding Methods 0.000 title claims abstract description 17
- 238000003825 pressing Methods 0.000 claims abstract description 10
- 230000002146 bilateral effect Effects 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 16
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000003754 machining Methods 0.000 abstract description 3
- 239000003921 oil Substances 0.000 description 89
- 230000003068 static effect Effects 0.000 description 22
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000010720 hydraulic oil Substances 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
Abstract
The invention relates to the technical field of optical part ultra-precision machining equipment, and discloses a high-precision hydrostatic guide rail for an ultra-precision aspheric surface molding grinding machine, which comprises a guide rail base, wherein a workbench and a pressing plate are arranged on the guide rail base, and a first slide rail, a second slide rail and a third slide rail are longitudinally arranged on the guide rail base; a first sliding block, a second sliding block and a third sliding block are arranged on the bottom surface of the mounting plate, and a screw nut seat is arranged on the bottom surface of the third sliding block; the top surfaces of the first sliding block and the second sliding block are both provided with upper oil cavities, the bottom surfaces of the first sliding block and the second sliding block are both provided with lower oil cavities, the left side wall of the third sliding block is provided with a left oil cavity, and the right side wall of the third sliding block is provided with a right oil cavity; the first sliding block is connected with the first sliding rail in a sliding mode, the second sliding block is connected with the second sliding rail in a sliding mode, and the third sliding block is connected with the third sliding rail in a sliding mode; the pressing plate is arranged on the tops of the first sliding rail and the second sliding rail; the invention has the characteristics of high motion precision, stable operation and strong reliability.
Description
Technical Field
The invention relates to the technical field of optical part ultra-precision machining equipment, in particular to a high-precision hydrostatic guide rail for an ultra-precision aspheric surface molding grinding machine.
Background
The hydrostatic guide rail is a linear reciprocating guide rail which inputs lubricating oil with certain pressure into an oil cavity on the guide rail surface through a throttle to form a bearing oil film so as to ensure that the guide rail surfaces are in a pure liquid friction state; compared with the traditional linear guide rail, the linear guide rail has the advantages that the change of the motion speed of the guide rail has little influence on the thickness of an oil film, the change of the bearing load has little influence on the thickness of the oil film, the friction coefficient of the friction of the liquid is only about 0.005, the vibration resistance of the oil film is good, and the like; therefore, the application of the hydrostatic guideway to precise and ultra-precise machine tools is more and more extensive.
The static pressure guide rail is mainly composed of a guide rail base, a pressure plate, a static pressure slide block and a workbench, wherein the static pressure slide block is an important component of the static pressure guide rail, and the arrangement mode of the static pressure slide block in the static pressure guide rail can influence the integral performance of the static pressure guide rail; at present, the arrangement schemes of hydrostatic sliding blocks in hydrostatic guide rails for precision and ultra-precision machine tools are mainly two, respectively:
1. (3 + 3) scheme: two sides of the bottom of the workbench are respectively provided with a static pressure slide block (shown in figure 1) with three cavities, wherein the static pressure slide block arranged on the left side of the bottom of the workbench is provided with an upper oil cavity, a lower oil cavity and a left oil cavity, and the static pressure slide block arranged on the right side of the bottom of the workbench is provided with an upper oil cavity, a lower oil cavity and a right oil cavity; however, this solution has certain disadvantages: the parallelism of the cavities on the two sides arranged in the X-axis direction has the problem of larger error after multi-stage transmission of the parallelism error between the left surface and the right surface of the static pressure slide block and the parallelism error between the static pressure slide block and the mounting surface of the workbench, and because three oil cavities are formed in one static pressure slide block, the influence of thermal deformation on the static pressure slide block is larger, so that the motion precision of the static pressure guide rail is poorer;
2. (4 + 2) scheme: a four-cavity static pressure slide block and a two-cavity static pressure slide block (as shown in figure 2) are respectively arranged on two sides of the bottom of the workbench, wherein the four-cavity static pressure slide block is used for positioning in the X direction and the Z direction, and the two-cavity static pressure slide block is used for auxiliary use; the static pressure slide blocks of the four cavities are provided with an upper oil cavity, a lower oil cavity, a left oil cavity and a right oil cavity, and the static pressure slide blocks of the two cavities are provided with an upper oil cavity and a lower oil cavity; however, the scheme has certain defects, the left oil cavity and the right oil cavity for positioning the X direction are only positioned on one side of the movable part, the problem of uneven stress during the movement of the workbench can be caused, meanwhile, the thermal deformation degrees of the two sides are different along with the rise of the temperature, and the movement precision of the hydrostatic guide rail can be directly influenced by errors generated by the thermal deformation.
Therefore, a high-precision hydrostatic guideway for precision and ultra-precision machine tools is urgently needed.
Disclosure of Invention
In view of the above, the invention provides a high-precision hydrostatic guideway for an ultraprecise aspheric surface molding grinder.
In order to solve the technical problems, the technical scheme of the invention is as follows: the utility model provides a high ultra-precision aspheric surface shaping hydrostatic guideway for grinding machine of precision, includes guide rail base, its characterized in that: the guide rail base is provided with a workbench and a pressing plate, and the guide rail base is longitudinally provided with a first slide rail, a second slide rail and a third slide rail, wherein the third slide rail is arranged in the middle of the guide rail base;
the bottom surface of the workbench is provided with a first sliding block, a second sliding block and a third sliding block, wherein the third sliding block is arranged in the middle of the bottom surface of the workbench, and the bottom surface of the third sliding block is provided with a screw nut seat; the first sliding block and the second sliding block are arranged at the positions close to two sides of the bottom surface of the workbench in a bilateral symmetry mode by taking the longitudinal center line of the workbench as a symmetry line; the top surfaces of the first sliding block and the second sliding block are both provided with upper oil cavities, the bottom surfaces of the first sliding block and the second sliding block are both provided with lower oil cavities, the left side wall of the third sliding block is provided with a left oil cavity, and the right side wall of the third sliding block is provided with a right oil cavity; the first sliding block is connected with the first sliding rail in a sliding mode, the second sliding block is connected with the second sliding rail in a sliding mode, the third sliding block is connected with the third sliding rail in a sliding mode, and the workbench is connected with the first sliding rail, the second sliding rail and the third sliding rail in a sliding mode through sliding connections among the first sliding block, the second sliding block and the third sliding rail and the guide rail base in a sliding mode;
the clamp plate all has the setting at the top of first slide rail and second slide rail, and the clamp plate is used for restricting the degree of freedom of first slider and second slider upper and lower direction.
Preferably, the clearance between the sliding surface of the first slide block in sliding connection with the first slide rail and the corresponding slide rail surface in the first slide rail is 2 μm-2.5 μm, and the clearance between the top surface of the first slide block and the bottom surface of the corresponding side pressure plate is 2 μm-2.5 μm.
Preferably, the gap between the sliding surface of the second slide block slidably connected in the second slide rail and the corresponding slide rail surface in the second slide rail is 2 μm to 2.5 μm, and the gap between the top surface of the second slide block and the bottom surface of the corresponding side pressure plate is 2 μm to 2.5 μm.
Preferably, the gap between the sliding surface of the third sliding block slidably connected in the third sliding rail and the corresponding sliding rail surface in the third sliding rail is 2 μm to 2.5 μm.
Preferably, the screw nut seat is longitudinally provided with a threaded hole penetrating through the screw nut seat, and the threaded hole is used for screwing the screw.
Preferably, the threshold value of the working pressure in the upper oil cavity formed on the first sliding block and the second sliding block is 3-27 bar.
Preferably, the threshold value of the working pressure in the lower oil cavity formed on the first sliding block and the second sliding block is 3-27 bar.
Preferably, the threshold value of the working pressure in the left oil cavity and the right oil cavity which are formed on the side walls of the two sides of the third sliding block is 3-27 bar.
Preferably, the left oil chamber and the right oil chamber are the same in shape and size, and are arranged on the side walls of the two sides of the third sliding block in a bilateral symmetry mode by taking the longitudinal center line of the third sliding block as a symmetry line.
Preferably, when the mounting plate slides in the guide rail base, the upper oil cavity and the lower oil cavity formed in the first sliding block and the second sliding block are equal to the pressure values in the left oil cavity and the right oil cavity formed in the side walls of the two sides of the third sliding block.
Compared with the prior art, the invention has the advantages that:
1. according to the invention, the first slide block, the second slide block and the third slide block are arranged, the upper oil cavity and the lower oil cavity are formed on the first slide block and the second slide block, and the left oil cavity and the right oil cavity are formed on the third slide block, so that the upper oil cavity, the lower oil cavity, the left oil cavity and the right oil cavity are separated, and oil cavities distributed in a multi-shaft manner do not need to be arranged on a single slide block; in the aspect of processing, the first sliding block, the second sliding block and the third sliding block which are only provided with two cavities are easier to process compared with the sliding blocks which are provided with three cavities or four cavities, and the processing precision is easier to ensure; in the aspect of assembly, because first slider, second slider and third slider all are the slider in two chambeies, consequently in the assembling process to first slider and second slider, the form and position error of Z axle and the form and position error of X axle do not mutually interfere on same slider, in the assembling process to the third slider, the form and position error of Y axle and the form and position error of X axle do not mutually interfere on same slider, the assembly degree of difficulty of slider has been reduced, assurance assembly precision that can be better, good reliability has.
2. According to the invention, the screw nut seat is arranged on the bottom surface of the third sliding block, and the left oil cavity and the right oil cavity which are formed on the side walls of the two sides of the third sliding block are identical in shape and size, so that the screw nut seat moves along the screw when the screw rotates, and the torque generated from the center of gravity of the whole workbench to the acting point of the oil cavities can be well eliminated when the workbench moves, so that the stress states of the left oil cavity and the right oil cavity are kept in certain balance, the stability of the workbench during operation is increased, the movement precision of the hydrostatic guideway is improved, and the hydrostatic guideway has good reliability.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a 3+3 scheme;
FIG. 2 is a schematic diagram of the structure of the 4+2 scheme;
FIG. 3 is a schematic structural view of the present invention;
FIG. 4 is a schematic structural diagram of the arrangement of the first slider, the second slider and the third slider in the present invention;
FIG. 5 is a schematic straight line view of the table surface level fluctuation during the motion of the hydrostatic guideway of the 3+3 scheme;
FIG. 6 is a schematic straight line view of the table surface level fluctuation during movement of the hydrostatic guideway of the 4+2 embodiment;
fig. 7 is a schematic straight line view of the table surface level fluctuation during the movement of the hydrostatic guideway according to the present invention.
Reference numerals: 1. a guide rail base; 11. a work table; 12. pressing a plate; 13. a first slide rail; 14. a second slide rail; 15. a third slide rail; 2. a first slider; 3. a second slider; 4. an upper oil chamber; 5. a lower oil chamber; 6. a left oil chamber; 7. a right oil chamber; 8. a third slider; 9. a lead screw nut seat; 91. a threaded hole; 10. and a lead screw.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 3 and 4, the invention provides a high-precision hydrostatic guideway for an ultraprecise aspheric surface molding grinder, which comprises a guideway base 1, wherein the guideway base 1 is provided with a workbench 11 and a pressing plate 12, the guideway base 1 is longitudinally provided with a first slide rail 13, a second slide rail 14 and a third slide rail 15, the third slide rail 15 is arranged in the middle of the guideway base 1, and the first slide rail 13 and the second slide rail 14 are arranged at positions close to two sides of the guideway base 1 in a bilateral symmetry manner by taking a longitudinal central line of the guideway base 1 as a symmetry line; the top surface of the workbench 11 is used for mounting a workpiece and a clamp, the bottom surface is provided with a first slide block 2, a second slide block 3 and a third slide block 8, wherein the third slide block 8 is arranged in the middle of the bottom surface of the workbench 11, the bottom surface of the third slide block 8 is provided with a lead screw nut seat 9, and the lead screw nut seat 9 and the third slide block 8 are arranged together in an integrated structure; the first slide block 2 and the second slide block 3 are arranged on the bottom surface of the workbench 11 close to two sides in a bilateral symmetry manner by taking the longitudinal central line of the workbench 11 as a symmetry line; the top surfaces of the first sliding block 2 and the second sliding block 3 are both provided with upper oil cavities 4, the bottom surfaces of the first sliding block and the second sliding block are both provided with lower oil cavities 5, the left side wall of the third sliding block 8 is provided with a left oil cavity 6, and the right side wall is provided with a right oil cavity 7; the first sliding block 2 is connected with the first sliding rail 13 in a sliding manner, the second sliding block 3 is connected with the second sliding rail 14 in a sliding manner, the third sliding block 8 is connected with the third sliding rail 15 in a sliding manner, and the workbench 11 is connected with the guide rail base 1 in a sliding manner through the sliding connections among the first sliding block 2, the second sliding block 3, the third sliding block 8, the first sliding rail 13, the second sliding rail 14 and the third sliding rail 15; the pressing plate 12 is arranged on the tops of the first sliding rail 13 and the second sliding rail 14, and the pressing plate 12 is used for limiting the freedom degree of the first sliding block 2 and the second sliding block 3 in the vertical direction; in the invention, the top surfaces of the first slide block 2, the second slide block 3 and the third slide block 8 are fixedly connected by the fixed connection mode in the prior art, if the screw connection is connected with the bottom surface of the working platform 11, the first slide block 2, the second slide block 3 and the third slide block 8 can be replaced by a static pressure slide block which is commercially available and is available in the Haoyuo music series HS50-C, the top surface of the third slide block 8 is fixedly connected by the prior art, such as a screw connection, is connected with the bottom surface of the worktable 11, and at the same time, when the third slide block 8 is processed, the positioning reference of the left oil cavity 6 and the right oil cavity 7 during processing and the positioning reference of the whole appearance of the screw nut seat 9 are kept unchanged, so as to ensure the parallelism of the left oil cavity 6 and the right oil cavity 7 and the center of the screw nut seat 9, thereby ensuring the integral movement precision of the hydrostatic guideway when the third slide block 8 and the lead screw nut seat 9 are assembled on the guideway base 1.
Furthermore, the clearance between the sliding surface of the first slide block 2 which is connected in the first slide rail 13 in a sliding way and the corresponding slide rail surface in the first slide rail 13 is 2 μm-2.5 μm, and the clearance between the top surface of the first slide block 2 and the bottom surface of the corresponding side pressure plate 12 is 2 μm-2.5 μm; when the remaining gap is used for a hydrostatic system on the same machine tool to provide oil for the hydrostatic guide rail, the oil can form a bearing oil film in the gap to assist the first slide block 2 to slide between the first slide rail 13 and the corresponding side pressure plate 12.
Furthermore, the gap between the sliding surface of the second slide block 3 connected in a sliding manner in the second slide rail 14 and the corresponding slide rail surface in the second slide rail 14 is 2 μm to 2.5 μm, and the gap between the top surface of the second slide block 3 and the bottom surface of the corresponding side pressure plate 12 is 2 μm to 2.5 μm; when the remaining gap is used for a hydrostatic system on the same machine tool to provide oil for the hydrostatic guide rail, the oil can form a bearing oil film in the gap to assist the second slide block 3 to slide between the second slide rail 14 and the corresponding side pressure plate 12.
Furthermore, the gap between the sliding surface of the third slide block 8 connected in a sliding manner in the third slide rail 15 and the corresponding slide rail surface in the third slide rail 15 is 2 μm-2.5 μm; the sliding surface of the third slide block 8 is two side surfaces provided with oil cavities, and when the reserved gap is used for a hydrostatic system on the same machine tool to provide oil for the hydrostatic guide rail, the oil can form a bearing oil film in the gap to assist the third slide block 8 to slide in the third slide rail 15.
Further, a threaded hole 91 penetrating through the screw nut seat 9 is longitudinally formed in the screw nut seat 9, and the threaded hole 91 is used for being screwed with the screw 10; the screw rod 10 is used for being in transmission connection with a driving motor on the same machine tool and providing power input for the sliding of the workbench 11 on the guide rail base 1.
Further, the threshold value of the working pressure in the upper oil chamber 4 formed on the first slide block 2 and the second slide block 3 is 3-27 bar.
Further, the threshold value of the working pressure in the lower oil cavity 5 formed on the first slide block 2 and the second slide block 3 is 3-27 bar.
Furthermore, the threshold value of the working pressure in the left oil chamber 6 and the right oil chamber 7 which are arranged on the side walls of the two sides of the third slide block 8 is 3-27 bar.
Further, the left oil chamber 6 and the right oil chamber 7 have the same shape and size, and the left oil chamber 6 and the right oil chamber 7 are symmetrically arranged on the side walls of the third slider 8 at the two sides of the third slider 8 with the longitudinal center line of the third slider 8 as a symmetry line.
Further, when the workbench 11 slides in the guide rail base 1, the upper oil cavity 4 and the lower oil cavity 5 formed on the first slide block 2 and the second slide block 3 are equal to the pressure values in the left oil cavity 6 and the right oil cavity 7 formed on the side walls of the two sides of the third slide block 8; the pressure values in all the oil cavities are equal, so that the motion precision of the hydrostatic guideway during working can be ensured.
Example 1: the invention can be used as a multi-axis hydrostatic guide rail on a precise and ultra-precise machine tool, and is not only suitable for a single axis; referring to fig. 3 and 4, after the assembly of the present invention is completed, the gaps between the first slider 2 and the first slide rail 13 and the corresponding press plate 12, between the second slider 3 and the second slide rail 14 and the corresponding press plate 12, and between the third slider 8 and the third slide rail 15 need to be measured, and it is required to ensure that each gap at the same installation position is between 2 μm and 2.5 μm, which allows the difference in the value of each gap; when the hydraulic oil loading device works, firstly, hydraulic oil is injected into the hydrostatic guide rail through a hydrostatic system arranged on the same machine tool, when the hydraulic oil forms bearing ink in the hydrostatic guide rail, a driving motor on the same machine tool can be controlled to start working to drive the lead screw 10 to rotate, so that the lead screw nut seat 9 moves linearly along the lead screw 10, and the workbench 11 slides on the guide rail base 1; in the working process, the pressure value in each oil cavity needs to be detected in real time, and the pressure value in each oil cavity can be detected by arranging a pressure sensor; when the pressure value in any oil cavity is detected to be larger than 27bar, the movement of the hydrostatic guide rail needs to be stopped immediately, the pressure value is waited to be reduced to 25bar, at the moment, the hydrostatic guide rail can be restarted to recover the movement, when the pressure value in any oil cavity is detected to be smaller than 3bar, the movement of the hydrostatic guide rail also needs to be stopped immediately, the pressure value is waited to be recovered to 4bar, at the moment, the hydrostatic guide rail can be restarted to recover the movement again; when the pressure value in any oil chamber is abnormal, for example, the pressure value is high or low, at this time, the operator should stop the operation of the hydrostatic guideway and should check the hydrostatic guideway in terms of mechanical damage, thermal deformation, insufficient cooling of hydraulic oil, and abnormal pressure of the oil pump.
Example 2: referring to fig. 1 and 2, fig. 1 and 2 are a schematic structural diagram of a 3+3 scheme and a schematic structural diagram of a 4+2 scheme in the prior art; referring to fig. 5, 6 and 7, in the present embodiment, the fluctuation of the levelness of the surface of the table is detected when the hydrostatic guideway adopting the 3+3 scheme, the hydrostatic guideway adopting the 4+2 scheme and the hydrostatic guideway of the present invention are in motion, in the present embodiment, the levelness of the surface of the table is detected by using a level meter, and the test length of the horizontal operation of the hydrostatic guideway table adopting the 3+3 scheme, the test length of the horizontal operation of the hydrostatic guideway table adopting the 4+2 scheme and the test length of the horizontal operation of the hydrostatic guideway table of the present invention are 2000 mm; as can be seen from fig. 5, the levelness fluctuation of the table surface of the hydrostatic guideway employing the 3+3 scheme reaches 3.8 μm, as can be seen from fig. 6, the levelness fluctuation of the table surface of the hydrostatic guideway employing the 4+2 scheme is 3.3 μm, and as can be seen from fig. 7, the levelness fluctuation of the table surface of the hydrostatic guideway of the present invention is 2.8 μm, which is reduced by 1 μm compared to the 3+3 scheme and by 0.5 μm compared to the 4+2 scheme; on a precise and ultra-precise machine tool, such as an ultra-precise aspheric surface molding grinder, which is used for processing an optical lens, the requirement on the processing precision is very high, the manufacturing cost of the optical lens is very expensive, the cost material of single processing on the ultra-precise aspheric surface molding grinder is as high as hundreds of thousands, and the processing cost and the product quality of the optical lens can be well reduced every 0.1 mu m of error is reduced; compared with the hydrostatic guide rail in the prior art, the hydrostatic guide rail has the advantages that the error of 0.5 mu m is reduced at least, the material cost in the process of machining a precise and ultra-precise machine tool is greatly reduced, and the quality of the product is well improved.
In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "disposed," "connected," "secured," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate, and may be communication between two elements or interaction relationship between two elements, unless otherwise specifically limited, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to specific situations.
The above are only typical examples of the present invention, and besides, the present invention may have other embodiments, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of the present invention as claimed.
Claims (10)
1. The utility model provides a high ultra-precision aspheric surface shaping hydrostatic guideway for grinding machine of precision, includes guide rail base (1), its characterized in that: the guide rail base (1) is provided with a workbench (11) and a pressing plate (12), the guide rail base (1) is longitudinally provided with a first slide rail (13), a second slide rail (14) and a third slide rail (15), wherein the third slide rail (15) is arranged in the middle of the guide rail base (1), and the first slide rail (13) and the second slide rail (14) are arranged at the positions, close to the two sides, of the guide rail base (1) in a bilateral symmetry manner by taking the longitudinal central line of the guide rail base (1) as a symmetry line;
a first sliding block (2), a second sliding block (3) and a third sliding block (8) are arranged on the bottom surface of the workbench (11), wherein the third sliding block (8) is arranged in the middle of the bottom surface of the workbench (11), and a screw nut seat (9) is arranged on the bottom surface of the third sliding block (8); the first sliding block (2) and the second sliding block (3) are arranged at the positions close to two sides of the bottom surface of the workbench (11) in a bilateral symmetry manner by taking the longitudinal central line of the workbench (11) as a symmetry line; the top surfaces of the first sliding block (2) and the second sliding block (3) are respectively provided with an upper oil cavity (4), the bottom surfaces of the first sliding block and the second sliding block are respectively provided with a lower oil cavity (5), the left side wall of the third sliding block (8) is provided with a left oil cavity (6), and the right side wall is provided with a right oil cavity (7); the first sliding block (2) is connected with the first sliding rail (13) in a sliding mode, the second sliding block (3) is connected with the second sliding rail (14) in a sliding mode, the third sliding block (8) is connected with the third sliding rail (15) in a sliding mode, and the workbench (11) is connected with the guide rail base (1) in a sliding mode through sliding connections among the first sliding block (2), the second sliding block (3), the third sliding block (8), the first sliding rail (13), the second sliding rail (14) and the third sliding rail (15);
the pressing plate (12) is arranged on the tops of the first sliding rail (13) and the second sliding rail (14), and the pressing plate (12) is used for limiting the freedom degree of the first sliding block (2) and the second sliding block (3) in the up-and-down direction.
2. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: the clearance between the sliding surface of the first sliding block (2) which is connected in a sliding way in the first sliding rail (13) and the corresponding sliding rail surface in the first sliding rail (13) is 2-2.5 mu m, and the clearance between the top surface of the first sliding block (2) and the bottom surface of the corresponding side pressure plate (12) is 2-2.5 mu m.
3. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: the gap between the sliding surface of the second sliding block (3) which is connected in a sliding way in the second sliding rail (14) and the corresponding sliding rail surface in the second sliding rail (14) is 2-2.5 mu m, and the gap between the top surface of the second sliding block (3) and the bottom surface of the corresponding side pressure plate (12) is 2-2.5 mu m.
4. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: the gap between the sliding surface of the third sliding block (8) which is connected in a sliding way in the third sliding rail (15) and the corresponding sliding rail surface in the third sliding rail (15) is 2-2.5 mu m.
5. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 4, characterized in that: the screw rod nut seat (9) is longitudinally provided with a threaded hole (91) penetrating through the screw rod nut seat (9), and the threaded hole (91) is used for screwing the screw rod (10).
6. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: the threshold value of the working pressure in the upper oil cavity (4) formed on the first sliding block (2) and the second sliding block (3) is 3-27 bar.
7. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: the threshold value of the working pressure in the lower oil cavity (5) formed on the first sliding block (2) and the second sliding block (3) is 3-27 bar.
8. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: the threshold value of the working pressure in the left oil cavity (6) and the right oil cavity (7) which are arranged on the side walls of the two sides of the third sliding block (8) is 3-27 bar.
9. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 8, characterized in that: the left oil cavity (6) and the right oil cavity (7) are the same in shape and size, and the left oil cavity (6) and the right oil cavity (7) are arranged on the side walls of the two sides of the third sliding block (8) in a bilateral symmetry mode by taking the longitudinal center line of the third sliding block (8) as a symmetry line.
10. The hydrostatic guideway for the ultra-precise aspheric surface molding grinder with high precision according to claim 1, characterized in that: when the workbench (11) slides in the guide rail base (1), the pressure values in an upper oil cavity (4) and a lower oil cavity (5) which are formed in the first sliding block (2) and the second sliding block (3) are equal to the pressure values in a left oil cavity (6) and a right oil cavity (7) which are formed in the side walls of the two sides of the third sliding block (8).
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| CN114043258A (en) * | 2021-12-03 | 2022-02-15 | 浙江亚微精密机床有限公司 | Hydrostatic guide rail capable of inhibiting thermal deformation |
| WO2022205542A1 (en) * | 2021-03-29 | 2022-10-06 | 华辰精密装备（昆山）股份有限公司 | Negative-pressure adsorption static-pressure supporting guide rail of machining machine tool, and cylindrical grinding machine comprising negative-pressure adsorption static-pressure supporting guide rail |
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