JPS617617U

JPS617617U - hydrostatic slide

Info

Publication number: JPS617617U
Application number: JP9206984U
Authority: JP
Inventors: 静山崎; 紀男伊藤; 芳夫藤川
Original assignee: エヌ・テ−・エヌ東洋ベアリング株式会社
Priority date: 1984-06-20
Filing date: 1984-06-20
Publication date: 1986-01-17
Also published as: JPS6348809Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は本考案に係る静圧スライドの縦断面図、第２図
は本考案の静圧スライドの斜視図、第３−図は移動テー
ブルの内面形状を示す要部平面図、第一図は移動テーブ
ルのポケットと補助溝の形状を示す拡大断面図、第５図
は他の実施例を示す移動テーブルの要部平面図、第６図
は他の実施例のポケットの形状を示す拡大縦断面図、第
７図は従来の静圧スライドの斜視図、第８図は静圧スラ
イトの原理を示す図面、第９図乃至第１１図は従来の不
都合を示す要部断面図である。１０・・・テーブルガイド、１１・・・給気通路、１２
・・・給気孔、１３・・・オリフイス、１４・・・移動
テープル、１５・・・軸受すきま、１６・・・排気溝、
１８・・・ポケット、１９・・・補助溝、２０・・・軸
受溝、２１・・・エアーホース。Fig. 1 is a vertical cross-sectional view of the static pressure slide according to the present invention, Fig. 2 is a perspective view of the static pressure slide of the invention, Fig. 3 is a plan view of the main part showing the inner shape of the moving table, Fig. 1 5 is an enlarged cross-sectional view showing the shape of the pocket and auxiliary groove of the movable table, FIG. 5 is a plan view of the main part of the movable table showing another embodiment, and FIG. 6 is an enlarged longitudinal cross-sectional view showing the shape of the pocket of another embodiment. 7 is a perspective view of a conventional static pressure slide, FIG. 8 is a diagram showing the principle of the static pressure slide, and FIGS. 9 to 11 are sectional views of main parts showing disadvantages of the conventional method. 10...Table guide, 11...Air supply passage, 12
... Air supply hole, 13 ... Orifice, 14 ... Moving table, 15 ... Bearing clearance, 16 ... Exhaust groove,
18...Pocket, 19...Auxiliary groove, 20...Bearing groove, 21...Air hose.

Claims

[Scope of utility model registration request]

The movable table is held by the table guide, a minute bearing gap is formed between the movable table and the table guide, compressed air is introduced into this bearing gap to create an appropriate pressure distribution, and a load is applied to this. In a static pressure slide that moves a moving table within a short range, an air supply hole is formed in the center of the table guide in the longitudinal direction, and an air supply hole that branches from the air passage and opens on the surface of the table guide. forming a pocket on the inner surface of the movable table facing the air supply hole and having a groove width slightly wider than the diameter of the air supply hole and a length equal to or slightly longer than the movement stroke of the movable table. A static pressure slide characterized in that an auxiliary groove having a narrow groove width and a deep depth is formed in the inner part of the pocket in the direction of movement, and further a bearing groove is formed branching from the auxiliary groove.