JPS6193623U - - Google Patents

Info

Publication number
JPS6193623U
JPS6193623U JP17913684U JP17913684U JPS6193623U JP S6193623 U JPS6193623 U JP S6193623U JP 17913684 U JP17913684 U JP 17913684U JP 17913684 U JP17913684 U JP 17913684U JP S6193623 U JPS6193623 U JP S6193623U
Authority
JP
Japan
Prior art keywords
air supply
supply passage
movable table
guide
supply hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17913684U
Other languages
Japanese (ja)
Other versions
JPS6348810Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17913684U priority Critical patent/JPS6348810Y2/ja
Publication of JPS6193623U publication Critical patent/JPS6193623U/ja
Application granted granted Critical
Publication of JPS6348810Y2 publication Critical patent/JPS6348810Y2/ja
Expired legal-status Critical Current

Links

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの考案のスライドテーブル装置の斜
面図、第2図及び第3図は第1図のA−A線及び
B−B線に於ける縦断面図、第4図は移動テーブ
ルの上下の板材の平面図、第5図及び第6図はそ
の側面図及び正面図、第7図は移動テーブルの両
側の板材の平面図、第8図及び第9図はその側面
図及び正面図、第10図は従来のスライドテーブ
ル装置の斜面図、第11図はスライドテーブル装
置の原理を示す図面、第12図乃至第14図は従
来の不都合を示す要部断面図である。 10……テーブルガイド、10a……ガイド部
、11……第1給気通路、12……第1給気孔、
13……移動テーブル、13a,13b……板材
、14a,14b……軸受すきま、15……排気
溝、16……ランド部、17……軸受部、18…
…中央溝、19……第2給気孔、20……第2給
気通路、21……第3給気通路、22……第4給
気通路、23……第3給気孔、24……オリフイ
ス、25……第4給気孔、26……軸受溝、27
……補助溝、28……排気溝、29……軸受部、
30……第5給気通路、31……第6給気通路、
32……オリフイス、33……第5給気孔、34
……軸受溝、35……補助溝、36……エアーホ
ース。
Fig. 1 is a perspective view of the slide table device of this invention, Figs. 2 and 3 are longitudinal sectional views taken along lines A-A and B-B in Fig. 1, and Fig. 4 is a top and bottom view of the movable table. 5 and 6 are a side view and a front view thereof, FIG. 7 is a plan view of the plates on both sides of the moving table, and FIGS. 8 and 9 are a side view and a front view thereof, FIG. 10 is a perspective view of a conventional slide table device, FIG. 11 is a diagram showing the principle of the slide table device, and FIGS. 12 to 14 are sectional views of essential parts showing disadvantages of the conventional slide table device. DESCRIPTION OF SYMBOLS 10... Table guide, 10a... Guide part, 11... First air supply passage, 12... First air supply hole,
13...Moving table, 13a, 13b...Plate material, 14a, 14b...Bearing clearance, 15...Exhaust groove, 16...Land part, 17...Bearing part, 18...
...Central groove, 19...Second air supply hole, 20...Second air supply passage, 21...Third air supply passage, 22...Fourth air supply passage, 23...Third air supply hole, 24... Orifice, 25... Fourth air supply hole, 26... Bearing groove, 27
... Auxiliary groove, 28 ... Exhaust groove, 29 ... Bearing part,
30...Fifth air supply passage, 31...Sixth air supply passage,
32... Orifice, 33... Fifth air supply hole, 34
... Bearing groove, 35 ... Auxiliary groove, 36 ... Air hose.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 移動テーブルをテーブルガイドに把持させると
共に、移動テーブルとテーブルガイドとの間に微
小な軸受すきまを形成し、この軸受すきまへ圧縮
空気を導入して適当な圧力分布を作り、これに荷
重を負荷させて移動テーブルを短い範囲内で移動
させるスライドテーブル装置に於いて、テーブル
ガイドの中心部に給気通路を形成し、かつ、給気
通路から分岐してテーブルガイドの表面に開口す
る給気孔を形成し、前記移動テーブルの内面に前
記給気孔と対向させて、該給気孔の直径より僅か
に広い幅で、かつ、移動テーブルの移動ストロー
クと同等或いはそれより僅かに長い長さの溝を形
成し、この溝と連通する給気通路を移動テーブル
の内部に形成すると共に、この給気通路と連通す
る給気通路を移動テーブルの移動方向に沿つて形
成し、更に、この給気通路の数個所に該給気通路
から分岐して移動テーブルの内面に開口され、そ
の内端部に圧縮空気を絞る為のオリフイスを設け
た給気孔を形成したことを特徴とするスライドテ
ーブル装置。
The movable table is gripped by the table guide, a minute bearing gap is formed between the movable table and the table guide, compressed air is introduced into this bearing gap to create an appropriate pressure distribution, and a load is applied to this. In a slide table device that moves a movable table within a short range, an air supply passage is formed in the center of the table guide, and an air supply hole is formed that branches from the air supply passage and opens on the surface of the table guide. and forming a groove on the inner surface of the movable table facing the air supply hole and having a width slightly wider than the diameter of the air supply hole and a length equal to or slightly longer than the movement stroke of the movable table. , an air supply passage communicating with this groove is formed inside the movable table, an air supply passage communicating with this air supply passage is formed along the moving direction of the movable table, and furthermore, several places of this air supply passage are formed. A slide table device characterized in that an air supply hole is formed which branches from the air supply passage and opens into the inner surface of the movable table, and has an orifice at the inner end thereof for restricting compressed air.
JP17913684U 1984-11-26 1984-11-26 Expired JPS6348810Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17913684U JPS6348810Y2 (en) 1984-11-26 1984-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17913684U JPS6348810Y2 (en) 1984-11-26 1984-11-26

Publications (2)

Publication Number Publication Date
JPS6193623U true JPS6193623U (en) 1986-06-17
JPS6348810Y2 JPS6348810Y2 (en) 1988-12-15

Family

ID=30736699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17913684U Expired JPS6348810Y2 (en) 1984-11-26 1984-11-26

Country Status (1)

Country Link
JP (1) JPS6348810Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100237A1 (en) * 2003-05-12 2004-11-18 Nikon Corporation Stage apparatus, exposure apparatus, and device-producing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100237A1 (en) * 2003-05-12 2004-11-18 Nikon Corporation Stage apparatus, exposure apparatus, and device-producing method

Also Published As

Publication number Publication date
JPS6348810Y2 (en) 1988-12-15

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