JPS6348809Y2 - - Google Patents

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Publication number
JPS6348809Y2
JPS6348809Y2 JP9206984U JP9206984U JPS6348809Y2 JP S6348809 Y2 JPS6348809 Y2 JP S6348809Y2 JP 9206984 U JP9206984 U JP 9206984U JP 9206984 U JP9206984 U JP 9206984U JP S6348809 Y2 JPS6348809 Y2 JP S6348809Y2
Authority
JP
Japan
Prior art keywords
air supply
pocket
air
movable table
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9206984U
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Japanese (ja)
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JPS617617U (en
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Filing date
Publication date
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Priority to JP9206984U priority Critical patent/JPS617617U/en
Publication of JPS617617U publication Critical patent/JPS617617U/en
Application granted granted Critical
Publication of JPS6348809Y2 publication Critical patent/JPS6348809Y2/ja
Granted legal-status Critical Current

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【考案の詳細な説明】 産業上の利用分野 この考案は静圧空気軸受を用いて、移動テーブ
ルをガイド部に対して非接触状態で移動させるよ
うにした静圧スライドに関するものである。
[Detailed Description of the Invention] Industrial Application Field This invention relates to a static pressure slide that uses a static air bearing to move a moving table in a non-contact manner with respect to a guide portion.

従来の技術 静圧空気軸受を用いた静圧スライドは、第7図
及び第8図に示す様に、テーブルガイド1にこれ
を抱持するように移動テーブル2を設け、且つテ
ーブルガイド1と移動テーブル2との間の微小な
軸受すきま9を形成し、この軸受すきまへ圧縮空
気を導入して適当な圧力分布を作り、これに荷重
を負荷させて移動テーブル2を移動させるように
構成してある。このような静圧スライドは軸受す
きまへ圧縮空気を導く方法として通常、移動テー
ブル2へエアーホース3を介して圧縮空気を供給
し、移動テーブル2から軸受すきまへ圧縮空気を
噴出させている。
PRIOR ART As shown in Figures 7 and 8, a hydrostatic slide using a hydrostatic air bearing is configured such that a moving table 2 is provided on a table guide 1 so as to embrace it, and a minute bearing gap 9 is formed between the table guide 1 and the moving table 2, and compressed air is introduced into this bearing gap to create an appropriate pressure distribution, and a load is applied to this to move the moving table 2. In such a hydrostatic slide, the usual method of introducing compressed air into the bearing gap is to supply compressed air to the moving table 2 via an air hose 3, and have the compressed air jet out from the moving table 2 into the bearing gap.

考案が解決しようとする問題点 前記の如き静圧スライドは、高精度な直進性及
び位置決めが要求される分野で多く使用され、近
時ではサブミクロンの高精度が要求される分野で
も使用される。ところが移動テーブル2にエアー
ホース3が接続されていると、移動テーブル2の
移動に伴うエアーホース2の撓み時の抵抗を受け
て移動テーブル2の直進性が損なわれ、サブミク
ロンの高精度な直進性及び位置決めが得られない
といつた問題があつた。
Problems to be Solved by the Invention Hydrostatic slides as described above are often used in fields that require highly accurate straightness and positioning, and have recently also been used in fields that require high submicron precision. . However, when the air hose 3 is connected to the movable table 2, the linearity of the movable table 2 is impaired due to resistance when the air hose 2 is bent as the movable table 2 moves, and it is not possible to move the movable table 2 in a straight line with high accuracy. There was a problem that the accuracy and positioning could not be obtained.

即ち、移動テーブル2に接続されるエアーホー
ス3は大量の圧縮空気を流通させる為に太い径の
パイプが用いられており、可撓性を有する素材で
形成してあつても、圧縮空気の流通時には棒状に
なろうとする為、移動テーブル2の移動に伴つて
エアーホース3が撓むときには抵抗が大きく直進
性が損なわれることがあつた。また抵抗を小さく
する為にエアーホース3の径を細くすると圧縮空
気の流量が不足して軸受性能が低下するといつた
問題を生じる。
That is, the air hose 3 connected to the moving table 2 is a pipe with a large diameter in order to circulate a large amount of compressed air, and even if it is made of a flexible material, the air hose 3 does not allow the flow of compressed air. Since the air hose 3 sometimes tends to become rod-shaped, when the air hose 3 bends as the movable table 2 moves, the resistance is large and the ability to move straight is sometimes impaired. Further, if the diameter of the air hose 3 is made thinner in order to reduce the resistance, problems such as insufficient flow rate of compressed air and deterioration of bearing performance occur.

さらにエアーホース3は移動テーブル2の移動
を許容できるように長尺なものが使用される為、
このエアーホース3が移動テーブル2やテーブル
ガイド1と干渉しないように配設せねばならず、
広い設置スペースが必要であつた。
Furthermore, since the air hose 3 is long to allow movement of the moving table 2,
This air hose 3 must be arranged so that it does not interfere with the moving table 2 or table guide 1.
A large installation space was required.

そこで上記の如き問題点を解決するためには、
テーブルガイド1にエアーホース3を設けて、テ
ーブルガイド1側から軸受すきまへ向けて圧縮空
気を供給するようにすればよいが、このようにす
るには多くの問題があつた。即ち、静圧スライド
は、移動テーブル2がどの位置へ移動しても移動
テーブル2とテーブルガイド1との間に全面に亘
つて圧縮空気を供給せねばならない。ところが、
移動テーブル2の移動範囲の全域に圧縮空気を供
給できるように、第9図に示す如く、テーブルガ
イド1に長手方向に給気通路4を形成し、且つ給
気通路4から分岐させて給気孔5,5…をテーブ
ルガイド1の略全面に設けると、移動テーブル2
と対向しない給気孔5,5…から圧縮空気が漏れ
て大量に放出されるので、圧縮空気の消費量が多
くなつてランニングコストが高くつくと共に給気
通路4の内圧も低くなつて軸受の負荷容量も低下
するといつた問題があつた。従つて移動テーブル
2の移動ストロークが長くなると適用できない。
Therefore, in order to solve the above problems,
An air hose 3 may be provided on the table guide 1 to supply compressed air from the table guide 1 side to the bearing clearance, but there are many problems in doing so. That is, the static pressure slide must supply compressed air over the entire surface between the movable table 2 and the table guide 1, no matter what position the movable table 2 moves to. However,
In order to supply compressed air to the entire movement range of the movable table 2, as shown in FIG. 5, 5... are provided on almost the entire surface of the table guide 1, the movable table 2
Since compressed air leaks and is released in large quantities from the air supply holes 5, 5, etc., which are not opposed to the air supply holes 5, 5, etc., the consumption of compressed air increases, increasing running costs, and the internal pressure of the air supply passage 4 decreases, which increases the load on the bearings. There was a problem that the capacity also decreased. Therefore, this method cannot be applied if the movement stroke of the moving table 2 becomes long.

また移動テーブル2の移動ストロークが短い場
合には、第10図に示す様に、移動テーブル2の
移動範囲内でテーブルガイド1の中央部に給気孔
6,6…を集約させて形成すると、圧縮空気の漏
れがなく負荷容量も高くなるが、移動テーブル2
の移動に伴つて軸受すきま9内の圧縮空気の圧力
分布が不均一になつて移動テーブル2が傾き、極
端な場合には移動テーブル2がテーブルガイド1
に接触して移動不可能になるといつた問題があつ
た。
In addition, when the moving stroke of the moving table 2 is short, as shown in FIG. Although there is no air leakage and the load capacity is high, the moving table 2
, the pressure distribution of the compressed air within the bearing clearance 9 becomes uneven, causing the movable table 2 to tilt, and in extreme cases, the movable table 2 may overturn the table guide 1
I had a problem where I could not move when I came in contact with something.

また軸受すきま9全体へ圧縮空気を均一に供給
するために第11図に示す様に、テーブルガイド
1の中央部に給気孔7を形成し、移動テーブル2
の内面に給気孔7と対応させて移動方向にポケツ
ト8を形成し、ポケツト8から軸受すきま9へ圧
縮空気を噴出させるようにすると、テーブルガイ
ド1と移動テーブル2との間に均一な圧力分布を
作るには容量の大きいポケツト8が必要で、その
ため深さを深くすると、空気の圧縮性のために自
励振動を生じて直進性が損なわれるといつた問題
があつた。従つてサブミクロンの位置決めが要求
されるものでは、テーブルガイド1側へエアーホ
ースを接続することができなかつた。
In addition, in order to uniformly supply compressed air to the entire bearing clearance 9, an air supply hole 7 is formed in the center of the table guide 1, as shown in FIG.
A pocket 8 is formed on the inner surface of the table guide 1 in the direction of movement in correspondence with the air supply hole 7, and compressed air is jetted from the pocket 8 into the bearing clearance 9, thereby creating a uniform pressure distribution between the table guide 1 and the moving table 2. In order to create a pocket 8, a large-capacity pocket 8 is required, and if the depth is increased, self-excited vibrations occur due to the compressibility of air, which impairs straight-line performance. Therefore, if submicron positioning is required, it is not possible to connect an air hose to the table guide 1 side.

問題点を解決するための手段 この考案はテーブルガイドに沿つて移動テーブ
ルが短い範囲内で移動する静圧スライドにおい
て、テーブルガイドの中心部に長手方向に沿つて
給気通路を形成し、且つ給気通路から直交方向に
分岐してテーブルガイドの表面に開口する給気孔
を複数形成し、移動テーブルの内面に前記給気孔
と対向させて給気孔から供給される圧縮空気の流
量に対して自励振動を生じないような容積を有
し、しかも給気孔の直径より僅かに幅広で且つ移
動テーブルの移動ストロークと同等か或いはそれ
より僅かに長い長さのポケツトを形成し、このポ
ケツトの奥部に幅狭で深い補助溝を形成し、さら
に補助溝から分岐させて幅狭な軸受溝を多数形成
したもので、テーブルガイドの給気通路から給気
孔を介して移動テーブルのポケツトへ圧縮空気を
供給し、ポケツト内の圧力分布を均一になすと共
に移動テーブルの自励振動を生じないようにした
ものである。
Means for Solving the Problems This invention is a static pressure slide in which a movable table moves within a short range along a table guide. A plurality of air supply holes are formed that branch from the air passage in a direction perpendicular to each other and open on the surface of the table guide, and are arranged on the inner surface of the movable table to face the air supply holes so as to be self-excited with respect to the flow rate of compressed air supplied from the air supply holes. Form a pocket that has a volume that does not cause vibration, is slightly wider than the diameter of the air supply hole, and has a length that is equal to or slightly longer than the moving stroke of the moving table, and a A narrow and deep auxiliary groove is formed, and many narrow bearing grooves are branched from the auxiliary groove to supply compressed air from the air supply passage of the table guide to the pocket of the movable table via the air supply hole. However, the pressure distribution inside the pocket is made uniform and self-excited vibration of the moving table is prevented.

実施例 第1図及び第2図は本考案の一実施例を示す図
面で、同図において、10はテーブルガイドで門
形に形成され、その水平なガイド部10aの中心
部に長手方向に沿つて一方の端部から略全長に亘
つて給気通路11を形成し、且つ給気通路11の
途中2個所において、給気通路11と直交させて
小径の給気孔12,12を複数個、例えば上下面
に4個宛、側面に2個宛形成してある。この給気
孔12,12…は開口部近傍にオリフイス13,
13…を形成してある。
Embodiment FIGS. 1 and 2 are drawings showing an embodiment of the present invention. In the figures, 10 is a table guide formed in a portal shape, and the horizontal guide portion 10a has a central portion along the longitudinal direction. An air supply passage 11 is formed over substantially the entire length from one end, and a plurality of small-diameter air supply holes 12, 12 are formed perpendicularly to the air supply passage 11 at two locations in the middle of the air supply passage 11, for example. Four pieces are formed on the top and bottom surfaces, and two pieces are formed on the sides. These air supply holes 12, 12... have an orifice 13 near the opening,
13... are formed.

14はテーブルガイド10のガイド部10aに
スライド自在に抱持させた移動テーブルで、角筒
状に形成してあり、移動テーブル14の内面とテ
ーブルガイド10の外面との間に微小な軸受すき
ま15を形成してある。この移動テーブル14の
上面は水平面に形成して各種装置を取付け得るよ
うにしてある。また移動テーブル14の内面、例
えば上下面には、第3図及び第4図に示す様に、
田の字状に排気溝16を形成して四分割されたラ
ンド17,17…を形成し、各ランド17,17
…にはテーブルガイド10の給気孔12,12…
と対応する中央部に移動方向に沿つてポケツト1
8,18…を形成し、このポケツト18,18…
の奥部に幅狭で深さの深い補助溝19,19…を
略同じ長さで形成し、さらに補助溝19,19…
から分岐させてランド17の全域に格子状に伸び
る軸受溝20,20…を形成してある。
Reference numeral 14 denotes a movable table that is slidably held by the guide portion 10a of the table guide 10, and is formed into a rectangular tube shape, with a minute bearing clearance 15 between the inner surface of the movable table 14 and the outer surface of the table guide 10. has been formed. The upper surface of this moving table 14 is formed into a horizontal surface so that various devices can be attached thereto. Further, on the inner surface of the moving table 14, for example, the upper and lower surfaces, as shown in FIGS. 3 and 4,
An exhaust groove 16 is formed in a square shape to form lands 17, 17 divided into four parts, and each land 17, 17 is divided into four parts.
The air supply holes 12, 12 of the table guide 10 are...
Pocket 1 along the direction of movement in the center corresponding to
8, 18..., and these pockets 18, 18...
Narrow and deep auxiliary grooves 19, 19... are formed in the inner part of the auxiliary grooves 19, 19... with approximately the same length, and further auxiliary grooves 19, 19...
Bearing grooves 20, 20, . . . are formed branching from the land 17 and extending in a grid pattern over the entire area of the land 17.

前記ポケツト18は移動テーブル14の移動ス
トロークと同等か或いはそれより僅かに長い長さ
と、給気孔12の直径寸法より僅か(0.5〜1mm)
広い溝幅とを有し、しかも内部に供給される圧縮
空気が外乱の影響を受けて自励振動を生じない容
量となる深さ(10〜30μm)に形成してある。ま
た補助溝19はポケツト18の容量不足を補つて
ポケツト18内の圧力分布が均一となる容量にで
きる深さと溝幅、例えば深さを30〜100μm、溝
幅を0.5〜1.0mmの範囲で適宜選択形成してある。
また軸受溝20は補助溝19より少し幅狭で且つ
深さも浅く形成してある。
The length of the pocket 18 is equal to or slightly longer than the movement stroke of the moving table 14, and the length is slightly larger than the diameter of the air supply hole 12 (0.5 to 1 mm).
It has a wide groove width and is formed at a depth (10 to 30 μm) that allows the compressed air supplied to the inside to have a capacity that does not cause self-excited vibrations under the influence of external disturbances. In addition, the auxiliary groove 19 has a depth and groove width that can compensate for the lack of capacity of the pocket 18 and provide a uniform pressure distribution within the pocket 18, for example, a depth of 30 to 100 μm and a groove width of 0.5 to 1.0 mm. Selection has been formed.
Further, the bearing groove 20 is formed to be slightly narrower and shallower than the auxiliary groove 19.

尚、前記ポケツト18及び補助溝19、軸受溝
20は移動テーブル14の上下内面だけでなく左
右両側内面においても同様に形成してあり、移動
テーブル14の全周に亘つて静圧空気軸受を構成
するようにしてある。
The pockets 18, auxiliary grooves 19, and bearing grooves 20 are formed not only on the upper and lower inner surfaces of the movable table 14, but also on both left and right inner surfaces, and constitute a static air bearing over the entire circumference of the movable table 14. It is designed to do so.

21はテーブルガイド10の給気通路11に接
続したエアーホースで、コンプレツサー(図示せ
ず)にて発生した圧縮空気を給気通路11へ供給
する。
An air hose 21 is connected to the air supply passage 11 of the table guide 10, and supplies compressed air generated by a compressor (not shown) to the air supply passage 11.

上記構造の静圧スライドはコンプレツサーで発
生する圧縮空気をエアーホース21を介してテー
ブルガイド10の給気通路11へ供給すると、圧
縮空気は給気通路11から各給気孔12,12…
を通りオリフイス13,13…にて絞られて噴出
し、対向するポケツト18,18…内に入り、こ
こでポケツト18,18…及び補助溝19,19
…内に分散され、さらに軸受溝20,20…へ流
れ、ポケツト18,18…及び軸受溝20,20
…から均一な圧力で軸受すきま15に導かれて均
一な圧力分布を作り、これにより移動テーブル1
4を負荷する。そしてこの状態でボールネジ或い
はリニヤモータ等の適宜の駆動手段(図示せず)
にて移動テーブル14を往復移動させて移動テー
ブル14上の装置により各種加工を行う。
In the static pressure slide having the above structure, when compressed air generated by the compressor is supplied to the air supply passage 11 of the table guide 10 through the air hose 21, the compressed air is transferred from the air supply passage 11 to each air supply hole 12, 12, . . .
It passes through the orifices 13, 13... and squirts out, enters the opposing pockets 18, 18, where it enters the pockets 18, 18... and the auxiliary grooves 19, 19.
... and further flows into the bearing grooves 20, 20..., and flows into the pockets 18, 18... and the bearing grooves 20, 20.
A uniform pressure is introduced into the bearing clearance 15 from ... to create a uniform pressure distribution, and as a result, the moving table 1
Load 4. In this state, a suitable driving means (not shown) such as a ball screw or a linear motor is activated.
The movable table 14 is moved back and forth, and various types of processing are performed using the devices on the movable table 14.

第5図及び第6図は他の実施例を示す図面で、
これはポケツト18の奥部に2本の補助溝22,
22を設けたものである。
5 and 6 are drawings showing other embodiments,
This has two auxiliary grooves 22 at the back of the pocket 18,
22.

考案の効果 この考案は移動テーブルに形成したポケツトの
奥部に溝幅が狭く、且つ深さの深い補助溝を形成
したので、ポケツトの形状を小さくしてもポケツ
ト内に圧力勾配が生じない程度に十分に、ポケツ
ト内を流体が流れることができ、自励振動を生じ
ることなく、圧力分布を均一にして負荷能力を高
くすることができる。一般に移動テーブルに形成
したポケツトは容量を多くすれば圧力分布を均一
にできるが、自励振動を生じる。
Effects of the invention This invention forms an auxiliary groove with a narrow groove width and a deep depth at the back of the pocket formed on the movable table, so that even if the shape of the pocket is made smaller, no pressure gradient will occur inside the pocket. The fluid can flow sufficiently within the pocket, and the pressure distribution can be made uniform and the load capacity can be increased without causing self-excited vibration. Generally, if the capacity of the pocket formed in the movable table is increased, the pressure distribution can be made uniform, but self-excited vibration occurs.

即ち、ポケツトに供給される圧縮空気が長手方
向へ流れる流量Qは次式で表される。
That is, the flow rate Q of the compressed air supplied to the pocket flowing in the longitudinal direction is expressed by the following equation.

Q=1/μ・Bh3/12・2p/2x 但し、μ:流体の粘性計数、B:溝幅、h:深
さ、x:長手方向寸法、p:圧力 前記式を変形すると、 2P/2x=12・μ・Q・1/B・h3 となり、本式から分かるように、給気孔からポケ
ツトへ供給される圧縮空気の流量が一定であれ
ば、ポケツト内の圧力変化は溝幅Bの1乗及び深
さhの3乗に反比例することになり、長手方向の
圧力変化を少なくするには、ポケツトの溝幅を狭
くして深さを深くすることがよい。
Q=1/μ・Bh 3 /12・2p/2x However, μ: Fluid viscosity coefficient, B: Groove width, h: Depth, x: Longitudinal dimension, p: Pressure When the above equation is transformed, 2P/ 2x=12・μ・Q・1/B・h 3 , and as can be seen from this formula, if the flow rate of compressed air supplied from the air supply hole to the pocket is constant, the pressure change inside the pocket will be equal to the groove width B. It is inversely proportional to the first power of h and the cube of the depth h. Therefore, in order to reduce the pressure change in the longitudinal direction, it is preferable to narrow the groove width of the pocket and increase the depth.

従つて本考案のようにしたものではポケツトの
溝幅を給気孔の直径より僅かに広くしてもこれの
深さを浅くし、溝幅が狭く且つ深さの深い補助溝
にてポケツト内の流体が流れやすくしたので、自
励振動を抑え、しかもポケツト内の圧力勾配をな
くして軸受すきまに均一な圧力分布をつくること
ができ、負荷容量の高い静圧スライドを構成でき
る。さらに圧縮空気を送るエアーホースをテーブ
ルガイドへ設けることができるので、移動テーブ
ルの移動時の抵抗が少なく、高精度な位置決めを
行い得、本考案をビデオデイスクの原板に情報を
記録するストロークの短い位置決め装置等に適用
すれば、高精度な位置決めを行うことができる。
Therefore, in the device according to the present invention, even if the groove width of the pocket is slightly wider than the diameter of the air supply hole, the depth of the groove is made shallow, and the auxiliary groove, which is narrow in groove width and deep, is used to fill the inside of the pocket. By making it easier for fluid to flow, it is possible to suppress self-excited vibrations, eliminate pressure gradients within the pocket, create a uniform pressure distribution in the bearing clearance, and construct a static pressure slide with a high load capacity. Furthermore, since an air hose that sends compressed air can be provided to the table guide, there is less resistance when moving the moving table, and highly accurate positioning can be achieved. If applied to a positioning device or the like, highly accurate positioning can be performed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係る静圧スライドの縦断面
図、第2図は本考案の静圧スライドの斜視図、第
3図は移動テーブルの内面形状を示す要部平面
図、第4図は移動テーブルのポケツトと補助溝の
形状を示す拡大断面図、第5図は他の実施例を示
す移動テーブルの要部平面図、第6図は他の実施
例のポケツトの形状を示す拡大縦断面図、第7図
は従来の静圧スライドの斜視図、第8図は静圧ス
ライドの原理を示す図面、第9図乃至第11図は
従来の不都合を示す要部断面図である。 10……テーブルガイド、11……給気通路、
12……給気孔、13……オリフイス、14……
移動テーブル、15……軸受すきま、16……排
気溝、18……ポケツト、19……補助溝、20
……軸受溝、21……エアーホース。
Fig. 1 is a vertical cross-sectional view of the static pressure slide according to the present invention, Fig. 2 is a perspective view of the static pressure slide of the invention, Fig. 3 is a plan view of the main part showing the inner shape of the moving table, and Fig. 4 is FIG. 5 is an enlarged cross-sectional view showing the shape of the pocket and auxiliary groove of the movable table, FIG. 5 is a plan view of the main part of the movable table showing another embodiment, and FIG. 6 is an enlarged longitudinal cross-sectional view showing the shape of the pocket of another embodiment. 7 is a perspective view of a conventional hydrostatic slide, FIG. 8 is a drawing showing the principle of the hydrostatic slide, and FIGS. 9 to 11 are sectional views of main parts showing disadvantages of the conventional slide. 10...Table guide, 11...Air supply passage,
12... Air supply hole, 13... Orifice, 14...
Moving table, 15...Bearing clearance, 16...Exhaust groove, 18...Pocket, 19...Auxiliary groove, 20
...Bearing groove, 21...Air hose.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 移動テーブルをテーブルガイドに抱持させると
共に移動テーブルとテーブルガイドとの間に微小
な軸受すきまを形成し、この軸受すきまへ圧縮空
気を導入して適当な圧力分布を作り、これに荷重
を負荷させて移動テーブルを短い範囲内で移動さ
せる静圧スライドにおいて、テーブルガイドの中
心部に長手方向に給気通路を形成し、且つ給気通
路から分岐してテーブルガイドの表面に開口する
給気孔を形成し、前記移動テーブルの内面に前記
給気孔と対向させて、給気孔の直径より僅かに広
い溝幅で且つ移動テーブルの移動ストロークと同
等か或いはそれより僅かに長い長さのポケツトを
形成し、前記ポケツトの奥部に溝幅が狭く且つ深
さの深い補助溝を移動方向に形成し、さらに補助
溝から分岐させて軸受溝を形成したことを特徴と
する静圧スライド。
The movable table is held by the table guide, a minute bearing gap is formed between the movable table and the table guide, compressed air is introduced into this bearing gap to create an appropriate pressure distribution, and a load is applied to this. In a static pressure slide that moves a moving table within a short range, an air supply passage is formed in the center of the table guide in the longitudinal direction, and an air supply hole is formed that branches from the air supply passage and opens on the surface of the table guide. forming a pocket on the inner surface of the movable table, facing the air supply hole, having a groove width slightly wider than the diameter of the air supply hole and a length equal to or slightly longer than the movement stroke of the movable table; A static pressure slide characterized in that an auxiliary groove having a narrow groove width and a deep depth is formed in the inner part of the pocket in the movement direction, and further a bearing groove is formed branching from the auxiliary groove.
JP9206984U 1984-06-20 1984-06-20 hydrostatic slide Granted JPS617617U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9206984U JPS617617U (en) 1984-06-20 1984-06-20 hydrostatic slide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9206984U JPS617617U (en) 1984-06-20 1984-06-20 hydrostatic slide

Publications (2)

Publication Number Publication Date
JPS617617U JPS617617U (en) 1986-01-17
JPS6348809Y2 true JPS6348809Y2 (en) 1988-12-15

Family

ID=30648526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9206984U Granted JPS617617U (en) 1984-06-20 1984-06-20 hydrostatic slide

Country Status (1)

Country Link
JP (1) JPS617617U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8277123B2 (en) 2009-02-04 2012-10-02 Fanuc Ltd Fluid bearing structure and method of forming bearing concaves in fluid bearing structure
CN112576622A (en) * 2020-11-19 2021-03-30 西北工业大学 Air-floating type moving device for short-stroke guide rail air supply

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645059Y2 (en) * 1988-09-26 1994-11-16 豊田工機株式会社 Sliding guide support device
US5148340A (en) * 1990-04-18 1992-09-15 International Business Machines Corporation Bifurcated air bearing actuator assembly for a disk drive system
WO2008004306A1 (en) * 2006-07-07 2008-01-10 Hirata Corporation Hydrostatic liner guide unit
CN113833763A (en) * 2021-09-22 2021-12-24 哈尔滨工业大学 Precise movement air floatation supporting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8277123B2 (en) 2009-02-04 2012-10-02 Fanuc Ltd Fluid bearing structure and method of forming bearing concaves in fluid bearing structure
CN112576622A (en) * 2020-11-19 2021-03-30 西北工业大学 Air-floating type moving device for short-stroke guide rail air supply

Also Published As

Publication number Publication date
JPS617617U (en) 1986-01-17

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