JPH0650795B2 - Method of treating copper foil for printed circuits - Google Patents

Method of treating copper foil for printed circuits

Info

Publication number
JPH0650795B2
JPH0650795B2 JP1112227A JP11222789A JPH0650795B2 JP H0650795 B2 JPH0650795 B2 JP H0650795B2 JP 1112227 A JP1112227 A JP 1112227A JP 11222789 A JP11222789 A JP 11222789A JP H0650795 B2 JPH0650795 B2 JP H0650795B2
Authority
JP
Japan
Prior art keywords
copper foil
treatment
printed circuit
plating
copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1112227A
Other languages
Japanese (ja)
Other versions
JPH02292895A (en
Inventor
英治 日野
敬亮 山西
Original Assignee
日鉱グールド・フォイル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日鉱グールド・フォイル株式会社 filed Critical 日鉱グールド・フォイル株式会社
Priority to JP1112227A priority Critical patent/JPH0650795B2/en
Priority to DE90108140T priority patent/DE69005691T2/en
Priority to EP90108140A priority patent/EP0396056B1/en
Priority to US07/515,927 priority patent/US5019222A/en
Publication of JPH02292895A publication Critical patent/JPH02292895A/en
Publication of JPH0650795B2 publication Critical patent/JPH0650795B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、印刷回路用銅箔の処理方法に関するものであ
り、特には比較的良好な剥離強度特性とアルカリエッチ
ング性を具備し、しかも帯磁性の小さな印刷回路用銅箔
を生成する処理方法に関する。本発明銅箔は、例えばフ
ァインパターン印刷回路、磁気ヘッド用FPC(Frexib
le Printed Circuit)として特に適する。
Description: TECHNICAL FIELD The present invention relates to a method for treating a copper foil for a printed circuit, and in particular, it has a relatively good peel strength property and alkali etching property, and has a magnetic property. The present invention relates to a processing method for producing a small copper foil for a printed circuit. INDUSTRIAL APPLICABILITY The copper foil of the present invention is used, for example, in a fine pattern printed circuit, an FPC (Frexib) for a magnetic head.
Especially suitable as a le Printed Circuit).

発明の背景 印刷回路用銅箔は一般に、合成樹脂等の基材に高温高圧
下で積層接着され、その後目的とする回路を形成するべ
く必要な回路を印刷した後、不要部を除去してエッチン
グ処理が施される。最終的に、所要の素子が半田付けさ
れて、エレクトロニクスデバイス用の種々の印刷回路板
を形成する。
BACKGROUND OF THE INVENTION Copper foil for printed circuits is generally laminated and adhered to a base material such as a synthetic resin under high temperature and high pressure, and after printing a necessary circuit to form a target circuit, an unnecessary portion is removed and etched. Processing is performed. Finally, the required elements are soldered to form various printed circuit boards for electronic devices.

印刷配線板用銅箔に対する品質要求は、樹脂基材と接着
される面(所謂粗化面)と、非接着面(所謂光沢面)と
で異なり、両者を同時に満足させることが重要である。
Quality requirements for a copper foil for a printed wiring board are different between a surface bonded to a resin substrate (so-called roughened surface) and a non-bonded surface (so-called glossy surface), and it is important to satisfy both at the same time.

粗化面に対する要求としては、主として、 保存時における酸化変色のないこと、 基材との引き剥し強さが高温加熱、湿式処理、半田付
け、薬品処理等の後でも充分なこと、 基材との積層、エッチング後に生じる所謂積層汚点の
ないこと 等が挙げられる。
The requirements for the roughened surface are mainly that there is no oxidative discoloration during storage, that the peel strength with the substrate is sufficient even after high temperature heating, wet treatment, soldering, chemical treatment, etc. The absence of so-called laminated stain after the laminating and etching, etc. can be mentioned.

他方、光沢面に対しては、 外観が良好なこと及び保存時における酸化変色のない
こと、 半田濡れ性が良好なこと、 高温加熱時に酸化変色がないこと レジストとの密着性が良好なこと 等が要求される。
On the other hand, for glossy surface, good appearance, no oxidative discoloration during storage, good solder wettability, no oxidative discoloration at high temperature heating, good adhesion with resist, etc. Is required.

こうした要求に答えるべく、印刷配線板用銅箔に対して
多くの処理方法が提唱されてきた。処理方法は、圧延銅
箔と電解銅箔とで異なるが、脱脂後の銅箔に、必要に応
じてめっき及び粗化処理を含む予備処理施した後、所要
の銅箔表面を形成する合金めっきを行ない、防錆処理を
行ない、更には必要に応じシラン処理、更には焼鈍を行
なう方法が有用な方法の一つとして確立されている。
In order to meet these demands, many treatment methods have been proposed for copper foils for printed wiring boards. The treatment method is different between rolled copper foil and electrolytic copper foil, but after degreasing, the copper foil is subjected to pretreatment including plating and roughening treatment, if necessary, and then alloy plating to form the required copper foil surface. It has been established that one of the useful methods is to perform rust prevention treatment, silane treatment, and if necessary silane treatment.

従来技術 上述した合金めっき処理は銅箔の表面性状を決定するも
のとして、大きな鍵を握っている。合金めっきの代表的
処理方法として、本件出願人は既に、Cu-Co処理(特公
昭63−2158号)を提唱し、成果を納めてきた。
2. Description of the Related Art The alloy plating treatment described above holds a major key in determining the surface properties of a copper foil. As a typical processing method for alloy plating, the applicant of the present invention has already proposed Cu-Co processing (Japanese Patent Publication No. 63-2158) and has achieved results.

CU-Co処理は、塩化銅(CuCl2)エッチング液150μピ
ッチ回路巾以下の印刷回路をエッチングでき、アルカリ
エッチングも可能とし、しかも剥離強度特性が比較的良
好であり、今後の印刷回路用銅箔として有用性が期待さ
れる。
The CU-Co treatment can etch printed circuits with a copper chloride (CuCl 2 ) etchant of less than 150μ pitch circuit width, enables alkaline etching, and has relatively good peel strength characteristics. Copper foil for future printed circuits Is expected to be useful.

発明が解決しようとする課題 最近の印刷回路のファインパターン化及び多様化への趨
勢に伴い、CuCl2エッチング液で150μピッチ回路巾
以下の印刷回路をエッチングできることはもはや必須の
要件であり、レジスト等の多様化にともないアルカリエ
ッチングも必要要件となりつつある。
Problems to be Solved by the Invention With the recent trend toward fine patterning and diversification of printed circuits, it is no longer essential to be able to etch printed circuits with a circuit width of 150 μpitch or less with CuCl 2 etching solution. With the diversification of the above, alkali etching is becoming a necessary requirement.

更に重要な問題として、印刷回路の高性能化及び用途の
拡大、特に磁気ヘッド用FPCとしての応用に鑑み、磁
気媒体に近接して配置されることが多くなることから
も、印刷回路の帯磁性に新たな関心が持たれつつある。
従来のCu-Co合金に見られたような帯磁性の大きな合金
は使用出来ず、飽和磁化、残留磁化及び保磁力が所定の
水準以下に規制されねばならない。
More importantly, in view of higher performance of the printed circuit and expansion of its application, especially application as an FPC for a magnetic head, the printed circuit is often arranged close to the magnetic medium. There is a new interest in.
Alloys with large magnetic susceptibility as found in conventional Cu-Co alloys cannot be used, and the saturation magnetization, remanent magnetization and coercive force must be regulated to below a predetermined level.

発明の目的 本発明の目的は、印刷回路銅箔として上述した多くの一
般的特性を具備することはもちろんのこと、良好な剥離
強度特性を保持しつつ、CuCl2エッチング液で150μ
ピッチ回路巾以下の印刷回路をエッチングでき、しかも
アルカリエッチングも可能とし、更には帯磁性が許容水
準以下である印刷回路用銅箔を提供することである。
OBJECT OF THE INVENTION The object of the present invention is not only to have many of the general characteristics described above as a printed circuit copper foil, but also to maintain good peel strength characteristics, while using a CuCl 2 etching solution of 150 μm.
It is an object of the present invention to provide a copper foil for a printed circuit, which can etch a printed circuit having a pitch circuit width or less, can also be alkali-etched, and has a magnetic susceptibility of an acceptable level or less.

発明の概要 本発明者等は、上記目的に向け検討を重ねた結果、従来
用いられてきたCu-Co合金よりもコバルト含有量の少な
い銅−コバルト2元合金の方がむしろ上記目的を満たす
ことを改めて見出すに至った。更に、その後の防錆処理
も重要で、合金めっき層上にクロム酸化物単独の皮膜処
理或いはクロム酸化物と亜鉛/亜鉛酸化物との混合物皮
膜処理が本発明目的に適することを見出した。
SUMMARY OF THE INVENTION As a result of repeated studies aimed at the above objects, the present inventors found that a copper-cobalt binary alloy having a smaller cobalt content than the conventionally used Cu-Co alloy fulfills the above objects. I came to find out again. Further, the subsequent rust-prevention treatment is also important, and it has been found that the coating treatment of chromium oxide alone or the coating treatment of a mixture of chromium oxide and zinc / zinc oxide is suitable for the purpose of the present invention on the alloy plating layer.

コントロールされたコバルト含有量を有する2元合金と
することにより、従来からのCu-Co合金の長所を生かし
たまま、帯磁性を許容水準以下に低減しうることを見出
したものである。これは予想外の知見であった。
It has been found that by using a binary alloy having a controlled cobalt content, the magnetic susceptibility can be reduced to an allowable level or lower while maintaining the advantages of the conventional Cu-Co alloy. This was an unexpected finding.

こうした知見に基づいて、本発明は、 (1)印刷回路用銅箔の処理方法において、処理すべき
銅箔の表面に銅20〜40mg/dm2とコバルト100〜
3000μg/dm2から成る電気メッキ層を形成するこ
とを特徴とする印刷回路用銅箔の処理方法、及び (2)前記電気メッキ層を形成した後に防錆処理を施す
ことを特徴とする前記(1)記載の印刷回路用銅箔の処
理方法 を提供する。
Based on these findings, the present invention provides (1) a method for treating a copper foil for a printed circuit, wherein the surface of the copper foil to be treated has 20 to 40 mg / dm 2 of copper and 100 to 100 cobalt.
A method for treating a copper foil for a printed circuit, which comprises forming an electroplating layer of 3000 μg / dm 2 , and (2) a rustproofing treatment after the formation of the electroplating layer. 1) A method for treating a copper foil for a printed circuit according to 1) is provided.

発明の具体的説明 本発明において使用する銅箔は、電解銅箔或いは圧延銅
箔いずれでも良い。
Detailed Description of the Invention The copper foil used in the present invention may be either an electrolytic copper foil or a rolled copper foil.

通常、銅箔の、樹脂基材と接着する面即ち粗化面には積
層後の銅箔の引き剥し強さを向上させることを目的とし
て、脱脂後の銅箔の表面に例えば銅のふしこぶ状の電着
を行なう粗化処理が施される。こうした銅のふしこぶ状
の電着はいわゆるヤケ電着により容易にもたらされる。
粗化前の前処理として通常の銅めっきがそして粗化後の
仕上げ処理として通常の銅めっきが行なわれることもあ
る。その他の公知の方法での粗化処理も実施可能であ
る。圧延銅箔と電解銅箔とでは処理の内容を異にする。
或る種の圧延銅箔では粗化処理自体が省略されることも
ある。本発明においては、こうした処理を総称して予備
処理と云う。
Usually, on the surface of the copper foil that is bonded to the resin substrate, that is, the roughened surface, for the purpose of improving the peeling strength of the copper foil after lamination, the surface of the copper foil after degreasing, for example, is made of copper A roughening treatment for performing electrodeposition is performed. Such copper kinky electrodeposition is easily brought about by so-called burn electrodeposition.
Conventional copper plating may be performed as a pretreatment before roughening and as a finishing treatment after roughening. Roughening treatment by other known methods can also be carried out. The rolled copper foil and the electrolytic copper foil have different processing contents.
The roughening treatment itself may be omitted in some types of rolled copper foil. In the present invention, such processing is generically called preprocessing.

本発明は予備処理後の銅箔の処理と関係する。予備処理
後、銅箔の少なくとも一面に、印刷回路用表面として要
求される多くの性質を与える合金表面がめっきにより形
成される。
The present invention relates to the treatment of copper foil after pretreatment. After pretreatment, an alloy surface is formed by plating on at least one side of the copper foil, which provides many of the properties required for a printed circuit surface.

本発明に従えば、この合金めっきは、電解めっきによ
り、20〜40mg/dm2銅−100〜3000μg/dm2
コバルト2元系合金を形成するように実施される。コバ
ルトが100μg/dm2未満だと、剥離特性(耐熱劣化
及び耐塩酸性)及び耐熱性が悪化し、またエッチング性
が悪くなる。他方コバルトが3000μg/dm2を超え
ると、磁気の影響が大きくなり好ましくない。
According to the invention, this alloy plating is performed by electroplating 20-40 mg / dm 2 copper-100-3000 μg / dm 2
Conducted to form a cobalt binary alloy. If the cobalt content is less than 100 μg / dm 2 , the peeling characteristics (heat deterioration and hydrochloric acid resistance) and heat resistance deteriorate, and the etching property deteriorates. On the other hand, when the cobalt content exceeds 3000 μg / dm 2 , the influence of magnetism becomes large, which is not preferable.

このCu−Co2元合金層の厚みは、銅箔素面に凹凸が
あり、また合金となった場合の真比重が不明のため一義
的に定めることは難しい。
It is difficult to uniquely determine the thickness of the Cu—Co binary alloy layer because the surface of the copper foil has irregularities and the true specific gravity of the alloy is unknown.

そこで、仮に、Cu及びCo単独の真比重を用い且つ凹
凸を無視し、その計算上の平均の厚みで表わすと、0.2
〜0.5μm、好ましくは0.3〜0.4μmである。0.2μm未
満だと剥離強度が低下しそして耐熱性及び耐薬品性が悪
化し、他方0.5μmを超えると処理層が脆くなりエッチ
ング残となりやすい。
Therefore, if the true specific gravity of Cu and Co alone is used and the unevenness is ignored and the average thickness is calculated, it is 0.2
.About.0.5 .mu.m, preferably 0.3 to 0.4 .mu.m. If it is less than 0.2 μm, the peel strength is lowered and the heat resistance and chemical resistance are deteriorated. On the other hand, if it exceeds 0.5 μm, the treated layer becomes brittle and etching residue tends to remain.

また、同様にして、Cu−Co2元合金層中のCo含有
量は以下の通りとなる。Co含有量は重量%で1〜10
%が好ましく、1%未満では耐熱性が悪くなり、他方1
0%を超えると磁性の影響が大きくなる。
Similarly, the Co content in the Cu—Co binary alloy layer is as follows. Co content is 1 to 10% by weight
% Is preferable, and if it is less than 1%, the heat resistance tends to be poor.
If it exceeds 0%, the effect of magnetism becomes large.

こうした2元系合金を形成するための一般的浴及びめっ
き条件は次の通りである。
The general bath and plating conditions for forming such a binary alloy are as follows.

浴組成及びめっき条件 Cu: 10〜20g/ Co: 1〜10g/ pH: 1〜4 温度: 40〜50℃ 電流密度D: 20〜30A/dm2 時間: 1〜5秒 この後、防錆処理が実施される。本発明においては、防
錆処理は、クロム酸化物単独の皮膜処理或いはクロム酸
化物と亜鉛/亜鉛酸化物との混合物皮膜処理として行な
われる。クロム酸化物と亜鉛/亜鉛酸化物との混合物皮
膜処理とは、亜鉛塩または酸化亜鉛とクロム酸塩とを含
むめっき浴を用いて電気めっきにより亜鉛または酸化亜
鉛とクロム酸化物とより成る亜鉛−クロム基混合物の防
錆層を被覆する処理である。めっき浴としては、代表的
には、K2Cr2O7、Na2Cr2O7等の重クロム酸塩やCrO3等の
少なくとも一種と、水溶性亜鉛塩、例えばZnO、ZnSO4
7H2O等の少なくとも一種と、水酸化アルカリとの混合水
溶液が用いられる。
Bath composition and plating conditions Cu: 10 to 20 g / Co: 1 to 10 g / pH: 1 to 4 Temperature: 40 to 50 ° C. Current density D x : 20 to 30 A / dm 2 hours: 1 to 5 seconds Processing is performed. In the present invention, the anticorrosion treatment is carried out as a coating treatment of chromium oxide alone or a coating treatment of a mixture of chromium oxide and zinc / zinc oxide. Chromium oxide and zinc / zinc oxide mixture coating treatment means zinc or zinc consisting of zinc oxide and chromium oxide by electroplating using a plating bath containing zinc salt or zinc oxide and chromate. This is a treatment for coating the anticorrosion layer of the chromium-based mixture. The plating bath is typically K 2 Cr 2 O 7 , at least one dichromate such as Na 2 Cr 2 O 7 or CrO 3, and a water-soluble zinc salt such as ZnO or ZnSO 4.
A mixed aqueous solution of at least one such as 7H 2 O and alkali hydroxide is used.

代表的なめっき溶組成と電解条件は次の通りである: K2Cr2O7 (Na2Cr2O7或いはCrO3)2〜10g/ NaOH或いはKOH 10〜50g/ ZnO或いはZnSO4・7H2O 0.05〜10g/ pH 7〜13 浴温 20〜80℃ 電流密度 0.05〜5A/dm2 時間 5〜30秒 アノード Pt-Ti板、
ステンレス鋼板等 クロム酸化物はクロム量として15μg/dm2以上そし
て亜鉛は30μg/dm2以上の被覆量が要求される。粗
面側と光沢面側とで厚さを異ならしめても良い。こうし
た防錆方法は、特公昭58−7077、61−3390
8、62−14040等に記載されている。但し、本Cu
-Co合金との適合性については知られていない。
Typical plating solution composition and electrolysis conditions are as follows: K 2 Cr 2 O 7 (Na 2 Cr 2 O 7 or CrO 3 ) 2 to 10 g / NaOH or KOH 10 to 50 g / ZnO or ZnSO 4 .7H 2 O 0.05-10 g / pH 7-13 Bath temperature 20-80 ° C. Current density 0.05-5 A / dm 2 hours 5-30 seconds Anode Pt-Ti plate,
Stainless steel plates, etc. Chromium oxides are required to have a chromium content of 15 μg / dm 2 or more, and zinc is required to have a coating amount of 30 μg / dm 2 or more. The rough surface side and the glossy surface side may have different thicknesses. Such rust prevention methods are disclosed in Japanese Examined Patent Publications Sho 58-7077 and 61-3390.
8, 62-14040 and the like. However, this Cu
-Not known for compatibility with Co alloys.

こうして得られた銅箔は、従来からのCu-Co合金よりコ
バルトが大幅に低減されているにもかかわらず、それと
匹敵する剥離強度特性(耐熱劣化及び耐塩酸性)保持
し、しかもCuCl2エッチング液で150μピッチ回路巾
以下の印刷回路をエッチングでき、しかもアルカリエッ
チングも可能とするという優れた特徴を損なうことな
く、帯磁性を低減する。
The copper foil thus obtained retains peel strength characteristics (heat deterioration and hydrochloric acid resistance) comparable to that of the conventional Cu-Co alloy, even though the content of cobalt is greatly reduced, and the CuCl 2 etching solution is used. In this way, it is possible to etch a printed circuit having a circuit width of 150 μ pitch or less, and further, it is possible to reduce the magnetic susceptibility without impairing the excellent feature that alkali etching is possible.

ここでいうアルカリエッチング液としては、例えば、NH
4OH:6モル/;NH4Cl:5モル/;CuCl2:2モル
/(温度50℃)等の液が知られている。
Examples of the alkaline etching solution here include NH
Liquids such as 4 OH: 6 mol /; NH 4 Cl: 5 mol /; CuCl 2 : 2 mol / (temperature 50 ° C.) are known.

コバルトを含有するにもかかわらず、帯磁性が許容水準
以下である。ここで「帯磁性が許容水準以下である」と
は、飽和磁化Mを160emu/cc以下、残留磁化M
を70emu/cc以下そして保磁力Hを3000e以下と
することを現時点での一応の基準とする。
Despite containing cobalt, the magnetic susceptibility is below the allowable level. Here, "the magnetic susceptibility is equal to or lower than the allowable level" means that the saturation magnetization M s is 160 emu / cc or lower and the residual magnetization M r is
Is 70 emu / cc or less, and the coercive force H c is 3000 e or less.

本発明においては、飽和磁化Mを50emu/cc以下、
残留磁化Mを40emu/cc以下そして保磁力Hを2
200e以下を容易に実現することができる。
In the present invention, the saturation magnetization M s is 50 emu / cc or less,
The residual magnetization M r 40 emu / cc or less and 2 the coercive force H c
It is possible to easily realize 200e or less.

更に、好ましくは、銅箔と樹脂基板との接着力の改善を
主目的として、防錆層上の少なくとも粗化面にシランカ
ップリング剤を塗布して薄膜が形成するシラン処理が施
される。塗布方法は、シランカップリング剤溶液のスプ
レーによる吹付け、コーターでの塗布、浸漬、流しかけ
等いずれでもよい。例えば、特公昭60−15654号
は、銅箔の粗面側にクロメート処理を施した後シランカ
ップリング剤処理を行なうことによって銅箔と樹脂基板
との接着力を改善することを記載しているので、詳細は
これを参照されたい。
Further, preferably, for the main purpose of improving the adhesive force between the copper foil and the resin substrate, a silane coupling agent is applied to at least the roughened surface of the anticorrosion layer to perform a silane treatment to form a thin film. The coating method may be spraying of a silane coupling agent solution, coating with a coater, dipping, pouring, or the like. For example, Japanese Examined Patent Publication No. 60-15654 describes that the adhesion between the copper foil and the resin substrate is improved by subjecting the rough surface side of the copper foil to a chromate treatment and then a silane coupling agent treatment. Please refer to this for details.

この後、必要に応じ、銅箔の延性を改善する目的で焼鈍
処理を施すこともある。焼鈍は、例えば酸素を含まない
雰囲気(O2≦10ppm以下、10-3トール+N2ガス注入)
中で、圧延銅箔の場合150〜200℃の温度で5〜9
時間実施される。電解銅箔の場合は温度が300〜50
0℃と高められる。
Thereafter, if necessary, an annealing treatment may be performed for the purpose of improving the ductility of the copper foil. Annealing is performed, for example, in an oxygen-free atmosphere (O 2 ≦ 10 ppm or less, 10 −3 Torr + N 2 gas injection)
In the case of rolled copper foil, at a temperature of 150 to 200 ° C., 5 to 9
Will be carried out for hours. In the case of electrolytic copper foil, the temperature is 300-50.
Increased to 0 ℃.

実施例及び比較例 圧延銅箔に通常の粗化処理を含む予備処理を施した後、
本発明及び比較目的で、本発明及び従来例に従う合金め
っき処理を行なった。
Examples and Comparative Examples After subjecting the rolled copper foil to pretreatment including ordinary roughening treatment,
For the purpose of the present invention and comparative purposes, the alloy plating treatment according to the present invention and the conventional example was performed.

銅粗化処理の条件は次の通りであった。The conditions for the copper roughening treatment were as follows.

銅粗化処理 Cu: 10〜25g/ H2SO4:20〜100g/ 温度: 20〜40℃ D: 30〜70A/dm2 時間: 1〜5秒 従来からのCu-Coめっき(特公昭63−2158号に実
質従う) Cu: 2.5g/ Co: 20g/ pH: H2SO45g/ 温度: 30℃ D: 7A/dm2 時間: 60秒 本発明Cu-Coめっき Cu: 5〜25g/ Co: 3〜15g/ pH: 1〜4 温度: 20〜50℃ D: 10〜30A/dm2 時間: 2〜5秒 これら材料に防錆処理後、表面層成分分析、剥離強度特
性、磁気性質及びエッチング特性を評価した。
Copper roughening treatment Cu: 10 to 25 g / H 2 SO 4 : 20 to 100 g / Temperature: 20 to 40 ° C. D k : 30 to 70 A / dm 2 hours: 1 to 5 seconds Conventional Cu-Co plating (Japanese Patent Publication No. 63-2158) Cu: 2.5 g / Co: 20 g / pH: H 2 SO 4 5 g / Temperature: 30 ° C. D k : 7 A / dm 2 hours: 60 seconds Cu-Co plating Cu: 5 of the present invention -25 g / Co: 3-15 g / pH: 1-4 Temperature: 20-50 ° C Dk : 10-30 A / dm 2 hours: 2-5 seconds After rust-proofing these materials, surface layer component analysis and peel strength The properties, magnetic properties and etching properties were evaluated.

磁気特性は次のようにして行なった。The magnetic characteristics were measured as follows.

サンプル 5.5mm直径サンプルに穴あけポンチで処理箔を打ち抜
き、20枚を重ねそしてVSM測定した。処理表面積S
は0.0475dm2であった。
Samples 5.5 mm diameter samples were punched with punched punches, 20 plies were stacked and VSM measured. Processing surface area S
Was 0.0475 dm 2 .

評価項目 飽和磁化M(emu/cc) 残留磁化M(emu/cc) 保磁力H(0e) 測定 東栄工業(株)製VSMを使用してヒステリシス曲線を
描かせ、各特性値を読取った。最大印加磁場は10kOe
とした。残留磁化及び保磁力については±両方の値を読
み、平均値を採用した。
Evaluation item Saturation magnetization M s (emu / cc) Remanent magnetization M r (emu / cc) Coercive force H c (0e) Measurement Use a VSM made by Toei Industry Co., Ltd. to draw a hysteresis curve and read each characteristic value. It was Maximum applied magnetic field is 10 kOe
And Regarding the remanent magnetization and the coercive force, both values were read and the average value was adopted.

剥離強度については、サンプルをガラスクロス基材エポ
キシ樹脂板に積層接着し、常態(室温)剥離強度(kg/
cm)を測定し、耐熱劣化は180℃×48時間加熱後の
剥離強度の劣化率(%)として示しそして耐塩酸劣化は
18%塩酸に1時間浸漬した後の剥離強度を0.2mm巾の
回路で測定した場合の劣化率(%)として示した。
Regarding the peel strength, the sample was laminated and adhered to a glass cloth base epoxy resin plate, and the normal (room temperature) peel strength (kg /
cm), and the heat resistance deterioration is shown as the deterioration rate (%) of the peel strength after heating at 180 ° C. for 48 hours, and the hydrochloric acid resistance deterioration is the peel strength after dipping in 18% hydrochloric acid for 1 hour. Deterioration rate (%) when measured by.

アルカリエッチングは、前記したアルカリエッチング液
を使用してのエッチング状態の目視による観察結果であ
る。
The alkali etching is the result of visual observation of the etching state using the above-mentioned alkali etching solution.

結果を次の表にまとめて示す。The results are summarized in the table below.

発明の効果 本発明は、近時の半導体デバイスの急激な発展に伴なう
印刷回路用の高密度及び高多層化に対応し得る銅箔の処
理方法を提供する。本方法による銅箔は、許容水準の耐
熱性剥離強度及び耐塩酸性をふぃきめての剥離特性を有
し、しかもCuCl2エッチング液で150μピッチ回路巾
以下の印刷回路をエッチングでき、しかもアルカリエッ
チングをも可能とする。しかも、今後重要性を増す磁気
性質についても、帯磁性を許容水準以下とすることに成
功した。本発明は特に、ファインパターンで且つ磁気ヘ
ッド用FPCとして使用しうる。
Effects of the Invention The present invention provides a method for treating a copper foil capable of accommodating high density and high number of layers for a printed circuit accompanying the recent rapid development of semiconductor devices. The copper foil obtained by this method has peeling characteristics including heat-resistant peel strength and hydrochloric acid resistance of acceptable levels, and it can etch printed circuits with a circuit width of 150 μ pitch or less with CuCl 2 etching solution, and can also be etched with alkali. Is also possible. Moreover, with regard to magnetic properties that will become more important in the future, we succeeded in keeping the magnetic susceptibility below the allowable level. The present invention can be used particularly as a fine pattern and as an FPC for a magnetic head.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】印刷回路用銅箔の処理方法において、処理
すべき銅箔の表面に銅20〜40mg/dm2とコバルト1
00〜3000μg/dm2から成る電気メッキ層を形成
することを特徴とする印刷回路用銅箔の処理方法。
1. A method for treating a copper foil for a printed circuit, comprising: 20-40 mg / dm 2 of copper and 1 cobalt on the surface of the copper foil to be treated.
A method for treating a copper foil for a printed circuit, which comprises forming an electroplating layer comprising 0 to 3000 μg / dm 2 .
【請求項2】前記電気メッキ層を形成した後に防錆処理
を施すことを特徴とする特許請求の範囲第1項記載の印
刷回路用銅箔の処理方法。
2. The method for treating a copper foil for a printed circuit according to claim 1, wherein a rust preventive treatment is performed after the electroplated layer is formed.
JP1112227A 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits Expired - Lifetime JPH0650795B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1112227A JPH0650795B2 (en) 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits
DE90108140T DE69005691T2 (en) 1989-05-02 1990-04-27 Treatment of copper foil for printed circuits.
EP90108140A EP0396056B1 (en) 1989-05-02 1990-04-27 Treatment of copper foil for printed circuits
US07/515,927 US5019222A (en) 1989-05-02 1990-04-27 Treatment of copper foil for printed circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1112227A JPH0650795B2 (en) 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits

Publications (2)

Publication Number Publication Date
JPH02292895A JPH02292895A (en) 1990-12-04
JPH0650795B2 true JPH0650795B2 (en) 1994-06-29

Family

ID=14581434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1112227A Expired - Lifetime JPH0650795B2 (en) 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits

Country Status (1)

Country Link
JP (1) JPH0650795B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5506368B2 (en) * 2009-12-17 2014-05-28 Jx日鉱日石金属株式会社 Copper foil for environmentally friendly printed wiring boards
MY161040A (en) 2010-05-07 2017-04-14 Jx Nippon Mining & Metals Corp Copper foil for printed circuit
US9049795B2 (en) 2011-03-25 2015-06-02 Jx Nippon Mining & Metals Corporation Rolled copper or copper-alloy foil provided with roughened surface
KR20130121985A (en) 2011-03-30 2013-11-06 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 Copper foil for printed circuit
US9115441B2 (en) 2011-10-18 2015-08-25 Nan Ya Plastics Corporation Process to manufacture surface fine grain copper foil with high peeling strength and environmental protection for printed circuit boards
EP2590487B1 (en) 2011-11-03 2014-05-14 Nan-Ya Plastics Corporation Process to manufacture fine grain surface copper foil with high peeling strength and environmental protection for printed circuit boards
TWI526302B (en) 2012-09-28 2016-03-21 Jx Nippon Mining & Metals Corp The copper foil of the attached carrier and the copper-clad laminate with the attached copper foil

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682486B2 (en) * 1986-06-20 1994-10-19 松下電器産業株式会社 Rotating magnetic sheet device

Also Published As

Publication number Publication date
JPH02292895A (en) 1990-12-04

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