JPH0650794B2 - Method of treating copper foil for printed circuits - Google Patents

Method of treating copper foil for printed circuits

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Publication number
JPH0650794B2
JPH0650794B2 JP1112226A JP11222689A JPH0650794B2 JP H0650794 B2 JPH0650794 B2 JP H0650794B2 JP 1112226 A JP1112226 A JP 1112226A JP 11222689 A JP11222689 A JP 11222689A JP H0650794 B2 JPH0650794 B2 JP H0650794B2
Authority
JP
Japan
Prior art keywords
copper foil
treatment
printed circuits
copper
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1112226A
Other languages
Japanese (ja)
Other versions
JPH02292894A (en
Inventor
英治 日野
敬亮 山西
Original Assignee
日鉱グールド・フォイル株式会社
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Filing date
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Application filed by 日鉱グールド・フォイル株式会社 filed Critical 日鉱グールド・フォイル株式会社
Priority to JP1112226A priority Critical patent/JPH0650794B2/en
Priority to EP90108140A priority patent/EP0396056B1/en
Priority to DE90108140T priority patent/DE69005691T2/en
Priority to US07/515,927 priority patent/US5019222A/en
Publication of JPH02292894A publication Critical patent/JPH02292894A/en
Publication of JPH0650794B2 publication Critical patent/JPH0650794B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明は、印刷回路用銅箔の処理方法に関するものであ
り、特には良好な耐熱性とアルカリエッチング性を具備
し、しかも帯磁性の小さな印刷回路用銅箔を生成する処
理方法に関する。本発明銅箔は、例えばファインパター
ン印刷回路、磁気ヘッド用FPC(Frexible Printed C
ircuit)として特に適する。
Description: FIELD OF THE INVENTION The present invention relates to a method for treating a copper foil for a printed circuit, and particularly to a printed circuit having good heat resistance and alkali etching properties and having a small magnetic susceptibility. TECHNICAL FIELD The present invention relates to a processing method for producing a copper foil for use. The copper foil of the present invention is used, for example, in a fine pattern printed circuit, an FPC (Frexible Printed C) for a magnetic head.
Particularly suitable as an ircuit).

発明の背景 印刷回路用銅箔は一般に、合成樹脂等の基材に高温高圧
下で積層接着され、その後目的とする回路を形成するべ
く必要な回路を印刷した後、不要部を除去してエッチン
グ処理が施される。最終的に、所要の素子が半田付けさ
れて、エレクトロニクスデバイス用の種々の印刷回路板
を形成する。
BACKGROUND OF THE INVENTION Copper foil for printed circuits is generally laminated and adhered to a base material such as a synthetic resin under high temperature and high pressure, and after printing a necessary circuit to form a target circuit, an unnecessary portion is removed and etched. Processing is performed. Finally, the required elements are soldered to form various printed circuit boards for electronic devices.

印刷配線板用銅箔に対する品質要求は、樹脂基材と接着
される面(所謂粗化面)と、非接着面(所謂光沢面)と
で異なり、両者を同時に満足させることが重要である。
Quality requirements for a copper foil for a printed wiring board are different between a surface bonded to a resin substrate (so-called roughened surface) and a non-bonded surface (so-called glossy surface), and it is important to satisfy both at the same time.

粗化面に対する要求としては、主として、 保存時における酸化変色のないこと、 基材との引き剥し強さが高温加熱、湿式処理、半田付
け、薬品処理等の後でも充分なこと、 基材との積層、エッチング後に生じる所謂積層汚点の
ないこと 等が挙げられる。
The requirements for the roughened surface are mainly that there is no oxidative discoloration during storage, that the peel strength with the substrate is sufficient even after high temperature heating, wet treatment, soldering, chemical treatment, etc. The absence of so-called laminated stain after the laminating and etching, etc. can be mentioned.

他方、光沢面に対しては、 外観が良好なこと及び保存時における酸化変色のない
こと、 半田濡れ性が良好なこと、 高温加熱時に酸化変色がないこと レジストとの密着性が良好なこと 等が要求される。
On the other hand, for glossy surface, good appearance, no oxidative discoloration during storage, good solder wettability, no oxidative discoloration at high temperature heating, good adhesion with resist, etc. Is required.

こうした要求に答えるべく、印刷配線板用銅箔に対して
多くの処理方法が提唱されてきた。処理方法は、圧延銅
箔と電解銅箔とで異なるが、脱脂後の銅箔に、必要に応
じてめっき及び粗化処理を含む予備処理施した後、所要
の銅箔表面を形成する合金めっきを行ない、防錆処理を
行ない、更には必要に応じシラン処理、更には焼鈍を行
なう方法が有用な方法の一つとして確立されている。
In order to meet these demands, many treatment methods have been proposed for copper foils for printed wiring boards. The treatment method is different between rolled copper foil and electrolytic copper foil, but after degreasing, the copper foil is subjected to pretreatment including plating and roughening treatment, if necessary, and then alloy plating to form the required copper foil surface. It has been established that one of the useful methods is to perform rust prevention treatment, silane treatment, and if necessary silane treatment.

従来技術 上述した合金めっき処理は銅箔の表面性状を決定するも
のとして、大きな鍵を握っている。合金めっきの代表的
処理方法として、本件出願人は既に、Cu-Ni処理(特開
昭52−145769号)及びCu-Co処理(特公昭63
−2158号)を提唱し、成果を納めてきた。
2. Description of the Related Art The alloy plating treatment described above holds a major key in determining the surface properties of a copper foil. As a typical treatment method for alloy plating, the applicant of the present invention has already proposed that Cu-Ni treatment (JP-A-52-145769) and Cu-Co treatment (JP-B-63).
No. 2158) was proposed and the results were paid.

前者のCu-Ni処理は、耐熱性剥離強度及び耐塩酸性に優
れる反面、塩化銅(CuCl2)エッチング液でもエッチン
グしずらく、150μピッチ回路巾以下の印刷回路には
不適であり、更に悪いことにはアルカリエッチング液で
はエッチング出来なかった。
The former Cu-Ni treatment is excellent in heat-resistant peel strength and hydrochloric acid resistance, but it is difficult to etch even with a copper chloride (CuCl 2 ) etching solution, and it is not suitable for printed circuits with a circuit width of 150μ pitch or less, and worse. It could not be etched with an alkaline etching solution.

後者のCu-Co処理は、塩化銅(CuCl2)エッチング液で1
50μピッチ回路巾以下の印刷回路をエッチングでき、
アルカリエッチングも可能としたが、耐熱性剥離強度及
び耐塩酸性がCi-Ni処理の場合よりも劣った。
The latter Cu-Co treatment is performed with a copper chloride (CuCl 2 ) etching solution.
Printed circuits with a width of 50μ pitch or less can be etched,
Alkali etching was also possible, but the heat-resistant peel strength and hydrochloric acid resistance were inferior to those of the case of Ci-Ni treatment.

発明が解決しようとする課題 最近の印刷回路のファインパターン化及び多様化への趨
勢にともない、 Cu-Ni処理の場合と同じ耐熱性剥離強度及び耐塩酸性
を有すること、及び CuCl2エッチング液で150μピッチ回路巾以下の印
刷回路をエッチングでき、しかもアルカリエッチングも
可能とすること が要求されるようになった。即ち、回路が細くなると、
塩酸エッチング液により回路が剥離し易くなる傾向が強
まり、その防止が必要である。回路が細くなると、半田
等の適用時の高温により回路がやはり剥離し易くなり、
その防止もまた必要である。ファインパターン化が進む
現在、CuCl2エッチング液で150μピッチ回路巾以下
の印刷回路をエッチングできることはもはや必須の要件
であり、レジスト等の多様化にともないアルカリエッチ
ングも必要要件となりつつある。
Problems to be Solved by the Invention With the recent trend toward fine patterning and diversification of printed circuits, it has the same heat-resistant peel strength and hydrochloric acid resistance as in the case of Cu-Ni treatment, and 150μ in CuCl 2 etching solution. It has become necessary to be able to etch printed circuits with a pitch circuit width or less and also to be able to perform alkaline etching. That is, as the circuit becomes thinner,
The hydrochloric acid etching solution increases the tendency of the circuit to be easily peeled off, and its prevention is necessary. If the circuit becomes thin, the circuit will easily peel off due to the high temperature when solder is applied,
The prevention is also necessary. In the current fine patterning, it is already an essential requirement to be able to etch printed circuits having a circuit width of 150 μ pitch or less with a CuCl 2 etching solution, and alkali etching is becoming a necessary requirement as resists are diversified.

更に重要な問題として、印刷回路の高性能化及び用途の
拡大、特に磁気ヘッド用FPCとしての応用に鑑み、磁
気媒体に近接して配置されることが多くなることから
も、印刷回路の帯磁性に新たな関心が持たれつつある。
従来のCu-Co合金に見られたような帯磁性の大きな合金
は使用出来ず、飽和磁化、残留磁化及び保磁力が所定の
水準以下に規制されねばならない。
More importantly, in view of higher performance of the printed circuit and expansion of its application, especially application as an FPC for a magnetic head, the printed circuit is often arranged close to the magnetic medium. There is a new interest in.
Alloys with large magnetic susceptibility as found in conventional Cu-Co alloys cannot be used, and the saturation magnetization, remanent magnetization and coercive force must be regulated to below a predetermined level.

発明の目的 本発明の目的は、印刷回路銅箔として上述した多くの一
般的特性を具備することはもちろんのこと、特にCu-N
i処理の場合と同じ耐熱性剥離強度及び耐塩酸性を有す
ること、CuCl2エッチング液で150μピッチ回路巾
以下の印刷回路をエッチングでき、しかもアルカリエッ
チングも可能とすること及び帯磁性が許容水準以下で
あることという要件を満たす印刷回路用銅箔を提供する
ことである。
OBJECTS OF THE INVENTION It is an object of the invention, of course, to provide many of the general properties described above for printed circuit copper foils, especially Cu-N.
It has the same heat-resistant peel strength and hydrochloric acid resistance as in the case of i-treatment, it can etch printed circuits with a CuCl 2 etching solution of less than 150μ pitch circuit width, and it can also perform alkaline etching. It is an object of the present invention to provide a copper foil for a printed circuit that satisfies the requirement of being.

発明の概要 本発明者等は、上記目的に向け検討を重ねた結果、所定
のコバルト及びニッケル含有量を有する銅−コバルト−
ニッケルを含む三元合金でもって上記目的を満たしうる
ことを見出すに至った。コントロールされたコバルト及
びニッケル含有量を有する三元合金とすることにより、
Cu-Ni合金及びCu-Co合金の長所をおおきく生かし、しか
もしかもそれらの短所が排除されうることがここに初め
て見出されたものである。コバルトを上記のエッチン
グ性要件を満たすに充分量含めても帯磁性を許容水準以
下に低減しうること並びにコバルトの添加によってもCu
-Ni合金の場合と同じ耐熱性剥離強度及び耐塩酸性を保
持しうることは予想外の知見であった。
SUMMARY OF THE INVENTION As a result of repeated studies aimed at the above objects, the inventors of the present invention have found that copper-cobalt-containing cobalt and nickel having predetermined cobalt and nickel contents.
It has been found that a ternary alloy containing nickel can satisfy the above purpose. By having a ternary alloy with controlled cobalt and nickel contents,
It was for the first time found here that the advantages of Cu-Ni alloys and Cu-Co alloys can be fully exploited and their disadvantages eliminated. Even if cobalt is included in an amount sufficient to satisfy the above-mentioned etching property requirements, it is possible to reduce the magnetic susceptibility to below an acceptable level, and also by adding cobalt, Cu
It was an unexpected finding that the same heat resistant peel strength and hydrochloric acid resistance as in the case of -Ni alloy can be maintained.

こうした知見に基づいて、本発明は、 (1)印刷回路用銅箔の処理方法において、処理すべき
銅箔の表面に銅、コバルト及びニッケルから成る電気め
っき層を形成することを特徴とする印刷回路用銅箔の処
理方法、及び (2)前記電気めっき層を形成した後に防錆処理を施す
ことを特徴とする前記(1)記載の印刷回路用銅箔の処
理方法 を提供する。
Based on these findings, the present invention provides (1) a method for treating a copper foil for a printed circuit, wherein an electroplating layer made of copper, cobalt and nickel is formed on the surface of the copper foil to be treated. There is provided a method for treating a copper foil for a circuit, and (2) a method for treating a copper foil for a printed circuit according to (1) above, which comprises performing rustproofing treatment after forming the electroplated layer.

発明の具体的説明 本発明において使用する銅箔は、電解銅箔或いは圧延銅
箔いずれでも良い。
Detailed Description of the Invention The copper foil used in the present invention may be either an electrolytic copper foil or a rolled copper foil.

通常、銅箔の、樹脂基材と接着する面即ち粗化面には積
層後の銅箔の引き剥し強さを向上させることを目的とし
て、脱脂後の銅箔の表面に例えば銅のふしこぶ状の電着
を行なう粗化処理が施される。こうした銅のふしこぶ状
の電着はいわゆるヤケ電着により容易にもたらされる。
粗化前の前処理として通常の銅めっきがそして粗化後の
仕上げ処理として通常の銅めっきが行なわれることもあ
る。その他の公知の方法での粗化処理も実施可能であ
る。圧延銅箔と電解銅箔とでは処理の内容を異にする。
或る種の圧延銅箔では粗化処理自体が省略されることも
ある。本発明においては、こうした処理を総称して予備
処理と云う。
Usually, on the surface of the copper foil that is bonded to the resin substrate, that is, the roughened surface, for the purpose of improving the peeling strength of the copper foil after lamination, the surface of the copper foil after degreasing, for example, is made of copper A roughening treatment for performing electrodeposition is performed. Such copper kinky electrodeposition is easily brought about by so-called burn electrodeposition.
Conventional copper plating may be performed as a pretreatment before roughening and as a finishing treatment after roughening. Roughening treatment by other known methods can also be carried out. The rolled copper foil and the electrolytic copper foil have different processing contents.
The roughening treatment itself may be omitted in some types of rolled copper foil. In the present invention, such processing is generically called preprocessing.

本発明は予備処理後の銅箔の処理と関係する。予備処理
後、銅箔の少なくとも一面に、印刷回路用表面として要
求される多くの性質を与える合金表面がめっきにより形
成される。
The present invention relates to the treatment of copper foil after pretreatment. After pretreatment, an alloy surface is formed by plating on at least one side of the copper foil, which provides many of the properties required for a printed circuit surface.

本発明に従えば、この合金めっきは、電解めっきによ
り、20〜40mg/dm2銅−100〜3000μg/dm2
コバルト−100〜1000μg/dm2ニッケル3元系
合金を形成するように実施される。コバルトが100μ
g/dm2未満だと、耐熱性が悪化し、またエッチング性
が悪くなる。他方コバルトが3000μg/dm2を超え
ると、磁性の影響が大きくなり好ましくない。ニッケル
が100μg/dm2未満であると耐熱性が悪くなりそし
て1000μg/dm2を超えるとエッチング残が多くな
る。
According to the invention, this alloy plating is performed by electroplating 20-40 mg / dm 2 copper-100-3000 μg / dm 2
Cobalt-100 to 1000 [mu] g / dm < 2 > Nickel implemented to form a ternary alloy. 100μ cobalt
If it is less than g / dm 2 , heat resistance is deteriorated and etching property is deteriorated. On the other hand, when the cobalt content exceeds 3000 μg / dm 2 , the influence of magnetism becomes large, which is not preferable. If the nickel content is less than 100 μg / dm 2 , the heat resistance will be poor, and if it exceeds 1000 μg / dm 2 , etching residue will be large.

このCu−Co−Ni3元系合金層の厚みは、銅箔の素
面に凹凸があり、また合金となった場合の真比重が不明
のため一義的に決めることは難しい。
It is difficult to uniquely determine the thickness of the Cu-Co-Ni ternary alloy layer because the copper foil has irregularities on the surface and the true specific gravity when the alloy is formed is unknown.

そこで、仮にCu、Co及びNi単独の真比重を用い且
つ凹凸を無視し、その計算上の平均の厚みで表わすと、
0.2〜0.5μm、好ましくは0.3〜0.4μmである。0.2μ
m未満だと、剥離強度が低下し、そして耐熱性及び耐薬
品性が悪化し、他方0.5μmを超えると処理層が脆くな
り、エッチング残となりやすい。
Therefore, if the true specific gravities of Cu, Co, and Ni alone are used and the unevenness is ignored, and expressed by the calculated average thickness,
The thickness is 0.2 to 0.5 μm, preferably 0.3 to 0.4 μm. 0.2μ
If it is less than m, the peel strength is lowered and the heat resistance and chemical resistance are deteriorated.

また、同様にしてCu−Co−Ni3元系合金層中のC
o及びNi含有量は以下の通りとなる。まず、Co含有
量は、重量%で、1〜8%が好ましく、1%未満では耐
熱性が悪くなり、他方8%を超えると磁性の影響が大き
くなる。一方、Ni含有量は重量%で、0.5〜3%が好
ましく、0.5%未満では耐熱性及び耐薬品性が悪化し、
他方3%を超えるとアルカリエッチング液でエッチング
できなくなる。また、Co+Niの合計の含有量は20
0〜4000μg/dm2が好ましい。
Similarly, C in the Cu-Co-Ni ternary alloy layer
The contents of o and Ni are as follows. First, the Co content is preferably 1 to 8% by weight, and if it is less than 1%, the heat resistance becomes poor, and if it exceeds 8%, the influence of magnetism becomes large. On the other hand, the Ni content is preferably 0.5 to 3% by weight, and if less than 0.5%, the heat resistance and the chemical resistance are deteriorated,
On the other hand, if it exceeds 3%, etching cannot be performed with an alkaline etching solution. Further, the total content of Co + Ni is 20
0 to 4000 μg / dm 2 is preferable.

こうした三元系合金を形成するための一般的浴及びめっ
き条件は次の通りである。
The general bath and plating conditions for forming such a ternary alloy are as follows.

浴組成及びめっき条件 Cu: 10〜20g/ Co: 1〜10g/ Ni: 1〜10g/ pH: 1〜4 温度: 40〜50℃ 電流密度D: 20〜30A/dm2 時間: 1〜5秒 この後、防錆処理が実施される。本発明において好まし
い防錆処理は、クロム酸化物単独の皮膜処理或いはクロ
ム酸化物と亜鉛/亜鉛酸化物との混合物皮膜処理であ
る。クロム酸化物と亜鉛/亜鉛酸化物との混合物皮膜処
理とは、亜鉛塩または酸化亜鉛とクロム酸塩とを含むめ
っき浴を用いて電気めっきにより亜鉛または酸化亜鉛と
クロム酸化物とより成る亜鉛−クロム基混合物の防錆層
を被覆する処理である。めっき浴としては、代表的に
は、K2Cr2O7、Na2Cr2O7等の重クロム酸塩やCrO3等の少
なくとも一種と、水溶性亜鉛塩、例えばZnO、ZnSO4・7H
2O等少なくとも一種と、水酸化アルカリとの混合水溶液
が用いられる。代表的なめっき組成と電解条件は次の通
りである: K2Cr2O7 (Na2Cr2O7或いはCrO3)2〜10g/ NaOH或いはKOH 10〜50g/ ZnO或いはZnSO4・7H2O 0.05〜10g/ pH 7〜13 浴温 20〜80℃ 電流密度 0.05〜5A/dm2 時間 5〜30秒 アノード Pt-Ti板、ステンレス鋼板
等 クロム酸化物はクロム量として15μg/dm2以上そし
て亜鉛は30μg/dm2以上の被覆量が要求される。粗
面側と光沢面側とで厚さを異ならしめても良い。こうし
た防錆方法は、特公昭58−7077、61−3390
8、62−14040等に記載されている。
Bath composition and plating conditions Cu: 10 to 20 g / Co: 1 to 10 g / Ni: 1 to 10 g / pH: 1 to 4 Temperature: 40 to 50 ° C. Current density D k : 20 to 30 A / dm 2 hours: 1 to 5 Seconds After this, anticorrosion treatment is performed. In the present invention, the preferred rust preventive treatment is a coating treatment of chromium oxide alone or a coating treatment of a mixture of chromium oxide and zinc / zinc oxide. Chromium oxide and zinc / zinc oxide mixture coating treatment means zinc or zinc consisting of zinc oxide and chromium oxide by electroplating using a plating bath containing zinc salt or zinc oxide and chromate. This is a treatment for coating the anticorrosion layer of the chromium-based mixture. The plating bath is typically K 2 Cr 2 O 7 , at least one of dichromates such as Na 2 Cr 2 O 7 and CrO 3, and a water-soluble zinc salt such as ZnO, ZnSO 4 .7H
A mixed aqueous solution of at least one of 2 O and alkali hydroxide is used. Typical plating compositions and electrolysis conditions are as follows: K 2 Cr 2 O 7 (Na 2 Cr 2 O 7 or CrO 3 ) 2-10 g / NaOH or KOH 10-50 g / ZnO or ZnSO 4 .7H 2 O 0.05 to 10 g / pH 7 to 13 Bath temperature 20 to 80 ° C. Current density 0.05 to 5 A / dm 2 hours 5 to 30 seconds Anode Pt-Ti plate, stainless steel plate, etc. Chromium oxide has a chromium content of 15 μg / dm 2 or more and zinc 30 [mu] g / dm 2 or more coverage is required. The rough surface side and the glossy surface side may have different thicknesses. Such rust prevention methods are disclosed in Japanese Examined Patent Publications Sho 58-7077 and 61-3390.
8, 62-14040 and the like.

こうして得られた銅箔は、ニッケル量が大幅に低減され
且つコバルトがかなり含まれているにもかかわらずCu-N
i処理の場合と匹敵する耐熱性剥離強度及び耐塩酸性を
有し、しかもCuCl2エッチング液で150μピッチ回路
巾以下の印刷回路をエッチングでき、しかもアルカリエ
ッチングも可能とする。アルカリエッチング液として
は、例えば、NH4OH:6モル/;NH4Cl:5モル/;
CuCl2:2モル/(温度50℃)等の液が知られてい
る。コバルトを含有するにもかかわらず、帯磁性が許容
水準以下である。ここで「帯磁性が許容水準以下であ
る」とは、飽和磁化Mを160emu/cc以下、残留磁
化Mを70emu/cc以下そして保磁力Hを3000e
以下とすることを現時点での一応の基準とする。本発明
においては、飽和磁化Mを50emu/cc以下、残留磁
化Mを40emu/cc以下そして保磁力Hを220e以
下を容易に実現することができる。
The copper foil thus obtained had a significantly reduced nickel content and contained a considerable amount of cobalt, and thus Cu-N
It has heat-resistant peel strength and hydrochloric acid resistance comparable to the case of i-treatment, and can etch printed circuits with a circuit width of 150 μ pitch or less with CuCl 2 etching solution, and also enables alkali etching. Examples of the alkaline etching solution include NH 4 OH: 6 mol /; NH 4 Cl: 5 mol /;
Liquids such as CuCl 2 : 2 mol / (temperature of 50 ° C.) are known. Despite containing cobalt, the magnetic susceptibility is below the allowable level. Here, "the magnetic susceptibility is below an allowable level" means that the saturation magnetization M s is 160 emu / cc or less, the remanent magnetization M r is 70 emu / cc or less, and the coercive force H c is 3000 e.
The following are tentative standards at the present time. In the present invention, the saturation magnetization M s of 50 emu / cc or less, the residual magnetization M r of 40 emu / cc or less, and the coercive force H c of 220 e or less can be easily realized.

更に、好ましくは、銅箔と樹脂基板との接着力の改善を
主目的として、防錆層上の少なくとも粗化面にシランカ
ップリング剤を塗布して薄膜が形成するシラン処理が施
される。塗布方法は、シランカップリング剤溶液のスプ
レーによる吹き付け、コーターでの塗布、浸漬、流しか
け等いずれでもよい。例えば、特公昭60−15654
号は、銅箔の粗面側にクロメート処理を施した後シラン
カップリング剤処理を行なうことによって銅箔と樹脂基
板との接着力を改善することを記載しているので、詳細
はこれを参照されたい。
Further, preferably, for the main purpose of improving the adhesive force between the copper foil and the resin substrate, a silane coupling agent is applied to at least the roughened surface of the anticorrosion layer to perform a silane treatment for forming a thin film. The coating method may be spraying of a silane coupling agent solution, coating with a coater, dipping, pouring, or the like. For example, Japanese Patent Publication No. 60-15654
No. 6 describes that the adhesion between the copper foil and the resin substrate is improved by subjecting the rough surface side of the copper foil to a chromate treatment and then a silane coupling agent treatment, so refer to this for details. I want to be done.

この後、必要なら、銅箔の延性を改善する目的で焼鈍処
理を施すこともある。
Thereafter, if necessary, an annealing treatment may be performed for the purpose of improving the ductility of the copper foil.

実施例及び比較例 圧延銅箔に通常の粗化処理を含む予備処理を施した後、
本発明及び比較目的での幾種かの合金めっき処理を行な
った。
Examples and Comparative Examples After subjecting the rolled copper foil to pretreatment including ordinary roughening treatment,
Several alloy plating treatments were carried out for the purposes of the present invention and comparative purposes.

銅粗化処理の条件は次の通りであった。The conditions for the copper roughening treatment were as follows.

銅粗化処理 Cu: 10〜25g/ H2SO4:20〜100g/ 温度: 20〜40℃ D: 30〜70A/dm2 時間: 1〜5秒 Cu-Niめっき(特開昭52−145769号に実質従
う) Cu: 5〜10g/ Ni: 10〜20g/ pH: 1〜4 温度: 20〜40℃ D: 10〜30A/dm2 時間: 2〜5秒 Cu-Coめっき(特公昭63−2158号に実質従う) Cu: 2.5g/ Co: 20g/ pH: H2SO45g/ 温度: 30℃ D: 7A/dm2 時間: 60秒 Cu-Co-Niめっき(本発明) Cu: 5〜25g/ Co: 3〜15g/ Ni: 3〜15g/ pH: 1〜4 温度: 20〜50℃ D: 10〜30A/dm2 時間: 2〜5秒 これら材料に防錆処理後、表面層成分分析、剥離強度特
性、磁気性質及びエッチング特性を評価した。
Copper roughening treatment Cu: 10 to 25 g / H 2 SO 4 : 20 to 100 g / Temperature: 20 to 40 ° C. D k : 30 to 70 A / dm 2 hours: 1 to 5 seconds Cu-Ni plating (JP-A-52- Substantially according to No. 145769) Cu: 5-10 g / Ni: 10-20 g / pH: 1-4 Temperature: 20-40 ° C. Dk : 10-30 A / dm 2 hours: 2-5 seconds Cu-Co plating (special Substantially according to Kosho 63-2158) Cu: 2.5 g / Co: 20 g / pH: H 2 SO 4 5 g / Temperature: 30 ° C. D k : 7 A / dm 2 hours: 60 seconds Cu-Co-Ni plating (book) Invention) Cu: 5 to 25 g / Co: 3 to 15 g / Ni: 3 to 15 g / pH: 1 to 4 Temperature: 20 to 50 ° C. Dk : 10 to 30 A / dm 2 hours: 2 to 5 seconds After the rust treatment, surface layer component analysis, peel strength characteristics, magnetic properties and etching characteristics were evaluated.

磁気特性は次のようにして行なった。The magnetic characteristics were measured as follows.

サンプル 5.5mm直径サンプルに穴あけポンチで処理箔を打ち抜
き、20枚を重ねそしてVSM測定した。処理表面積S
は0.0475dm2であった。
Samples 5.5 mm diameter samples were punched with punched punches, 20 plies were stacked and VSM measured. Processing surface area S
Was 0.0475 dm 2 .

評価項目 飽和磁化M(emu/cc) 残留磁化M(emu/cc) 保磁力H(0e) 測定 東栄工業(株)製VSMを使用してヒステリシス曲線を
描かせ、各特性値を読取った。最大印加磁場は10kOe
とした。残留磁化及び保磁力については、±両方の値を
読み、平均値を採用した。
Evaluation item Saturation magnetization M s (emu / cc) Remanent magnetization M r (emu / cc) Coercive force H c (0e) Measurement Use a VSM made by Toei Industry Co., Ltd. to draw a hysteresis curve and read each characteristic value. It was Maximum applied magnetic field is 10 kOe
And Regarding the residual magnetization and the coercive force, both values were read and the average value was adopted.

剥離強度については、サンプルをガラスクロス基材エポ
キシ樹脂板に積層接着し、常態(室温)剥離強度(kg/
cm)を測定し、耐熱劣化は180℃×48時間加熱後の
剥離強度の劣化率(%)として示しそして耐塩酸劣化は
18%塩酸に1時間浸漬した後の剥離強度を0.2mm巾の
回路で測定した場合の劣化率(%)として示した。
Regarding the peel strength, the sample was laminated and adhered to a glass cloth base epoxy resin plate, and the normal (room temperature) peel strength (kg /
cm), and the heat resistance deterioration is shown as the deterioration rate (%) of the peel strength after heating at 180 ° C. for 48 hours, and the hydrochloric acid resistance deterioration is the peel strength after dipping in 18% hydrochloric acid for 1 hour. Deterioration rate (%) when measured by.

結果を次の表にまとめて示す。The results are summarized in the table below.

アルカリエッチングは、前記したアルカリエッチング液
を使用してのエッチング状態の目視による観察結果であ
る。
The alkali etching is the result of visual observation of the etching state using the above-mentioned alkali etching solution.

発明の効果 本発明は、近時の半導体デバイスの急激な発展に伴なう
印刷回路用の高密度及び高多層化に対応し得る銅箔の処
理方法を提供する。本方法による銅箔は、耐熱性剥離強
度及び耐塩酸性を有し、しかもCuCl2エッチング液で1
50μピッチ回路巾以下の印刷回路をエッチングでき、
しかもアルカリエッチングをも可能とする。しかも、今
後重要性を増す磁気性質についても、帯磁性を許容水準
以下とすることに成功した。本発明は特に、ファインパ
ターンで且つ磁気ヘッド用FPCとして使用しうる。
Effects of the Invention The present invention provides a method for treating a copper foil capable of accommodating high density and high number of layers for a printed circuit accompanying the recent rapid development of semiconductor devices. The copper foil produced by this method has heat-resistant peel strength and hydrochloric acid resistance, and it has a CuCl 2 etching solution
Printed circuits with a width of 50μ pitch or less can be etched,
Moreover, alkali etching is also possible. Moreover, with regard to magnetic properties that will become more important in the future, we succeeded in keeping the magnetic susceptibility below the allowable level. The present invention can be used particularly as a fine pattern and as an FPC for a magnetic head.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】印刷回路用銅箔の処理方法において、処理
すべき銅箔の表面に銅、コバルト及びニッケルから成る
電気めっき層を形成することを特徴とする印刷回路用銅
箔の処理方法。
1. A method of treating a copper foil for a printed circuit, comprising forming an electroplating layer made of copper, cobalt and nickel on the surface of the copper foil to be treated.
【請求項2】前記電気めっき層を形成した後に防錆処理
を施すことを特徴とする特許請求の範囲第1項記載の印
刷回路用銅箔の処理方法。
2. The method for treating a copper foil for a printed circuit according to claim 1, further comprising a rustproofing treatment after the electroplating layer is formed.
JP1112226A 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits Expired - Lifetime JPH0650794B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1112226A JPH0650794B2 (en) 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits
EP90108140A EP0396056B1 (en) 1989-05-02 1990-04-27 Treatment of copper foil for printed circuits
DE90108140T DE69005691T2 (en) 1989-05-02 1990-04-27 Treatment of copper foil for printed circuits.
US07/515,927 US5019222A (en) 1989-05-02 1990-04-27 Treatment of copper foil for printed circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1112226A JPH0650794B2 (en) 1989-05-02 1989-05-02 Method of treating copper foil for printed circuits

Publications (2)

Publication Number Publication Date
JPH02292894A JPH02292894A (en) 1990-12-04
JPH0650794B2 true JPH0650794B2 (en) 1994-06-29

Family

ID=14581409

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JPH0650794B2 (en)

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