JPH06507740A - 変形可能なミラーおよびタイミングレーザ装置 - Google Patents

変形可能なミラーおよびタイミングレーザ装置

Info

Publication number
JPH06507740A
JPH06507740A JP5515409A JP51540993A JPH06507740A JP H06507740 A JPH06507740 A JP H06507740A JP 5515409 A JP5515409 A JP 5515409A JP 51540993 A JP51540993 A JP 51540993A JP H06507740 A JPH06507740 A JP H06507740A
Authority
JP
Japan
Prior art keywords
mirror
deformable
deformable mirror
thin plate
lamina
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5515409A
Other languages
English (en)
Japanese (ja)
Inventor
アルフィル，ジャン−パスカル
ポティーケ，リリアン
ストックマン，ベルナール
Original Assignee
コミッサレ・ア・レナジイ・アトミック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コミッサレ・ア・レナジイ・アトミック filed Critical コミッサレ・ア・レナジイ・アトミック
Publication of JPH06507740A publication Critical patent/JPH06507740A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0732—Shaping the laser spot into a rectangular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP5515409A 1992-03-12 1993-03-11 変形可能なミラーおよびタイミングレーザ装置 Pending JPH06507740A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9202949A FR2688601B1 (fr) 1992-03-12 1992-03-12 Miroir deformable et installation a laser correspondante.
FR92/02949 1992-03-12
PCT/FR1993/000244 WO1993018427A1 (fr) 1992-03-12 1993-03-11 Miroir deformable et installation a laser correspondante

Publications (1)

Publication Number Publication Date
JPH06507740A true JPH06507740A (ja) 1994-09-01

Family

ID=9427609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5515409A Pending JPH06507740A (ja) 1992-03-12 1993-03-11 変形可能なミラーおよびタイミングレーザ装置

Country Status (6)

Country Link
EP (1) EP0584353B1 (de)
JP (1) JPH06507740A (de)
DE (1) DE69304639T2 (de)
ES (1) ES2094562T3 (de)
FR (1) FR2688601B1 (de)
WO (1) WO1993018427A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08108289A (ja) * 1994-10-07 1996-04-30 Sumitomo Electric Ind Ltd レーザ加工用光学装置
DE29617111U1 (de) * 1996-10-01 1996-12-05 O'Hara-Smith, Stephen C., Celbridge, Co. Kildare Justierbarer Reflektor
DE102006031654A1 (de) * 2006-04-24 2007-10-25 Carl Zeiss Smt Ag Facettenspiegel mit einer Vielzahl von Spiegelsegmenten
CN111812133B (zh) * 2020-07-16 2023-02-28 北京大学 一种可调节聚焦半径的单色器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056313A (en) * 1976-06-15 1977-11-01 Arbogast Porter R Multiple mirrored apparatus utilizing solar energy
US4116539A (en) * 1977-09-20 1978-09-26 Evans Ralph S Multi-position focusing apparatus
US4226506A (en) * 1978-04-10 1980-10-07 Saint-Gobain Industries Swiveling solar reflector with multiple reflecting elements supported by prefabricated cambered members
DE3036083A1 (de) * 1980-09-25 1982-04-29 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Spiegel mit variabler kruemmung
FR2528585B1 (fr) * 1982-06-11 1986-03-21 Gleizes Raymond Procede de fabrication de miroir cylindrique, miroir cylindrique et appareil d'irradiation par un faisceau laser
FR2584824B1 (fr) * 1985-07-10 1987-09-25 Commissariat Energie Atomique Miroir deformable

Also Published As

Publication number Publication date
FR2688601A1 (fr) 1993-09-17
DE69304639T2 (de) 1997-03-20
FR2688601B1 (fr) 1994-04-29
ES2094562T3 (es) 1997-01-16
EP0584353A1 (de) 1994-03-02
WO1993018427A1 (fr) 1993-09-16
EP0584353B1 (de) 1996-09-11
DE69304639D1 (de) 1996-10-17

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