DE69304639D1 - Verformbarer spiegel und korrespondierende lasereinrichtung - Google Patents
Verformbarer spiegel und korrespondierende lasereinrichtungInfo
- Publication number
- DE69304639D1 DE69304639D1 DE69304639T DE69304639T DE69304639D1 DE 69304639 D1 DE69304639 D1 DE 69304639D1 DE 69304639 T DE69304639 T DE 69304639T DE 69304639 T DE69304639 T DE 69304639T DE 69304639 D1 DE69304639 D1 DE 69304639D1
- Authority
- DE
- Germany
- Prior art keywords
- deformable mirror
- corresponding laser
- laser
- deformable
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0732—Shaping the laser spot into a rectangular shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Optical Elements Other Than Lenses (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9202949A FR2688601B1 (fr) | 1992-03-12 | 1992-03-12 | Miroir deformable et installation a laser correspondante. |
PCT/FR1993/000244 WO1993018427A1 (fr) | 1992-03-12 | 1993-03-11 | Miroir deformable et installation a laser correspondante |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69304639D1 true DE69304639D1 (de) | 1996-10-17 |
DE69304639T2 DE69304639T2 (de) | 1997-03-20 |
Family
ID=9427609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69304639T Expired - Fee Related DE69304639T2 (de) | 1992-03-12 | 1993-03-11 | Verformbarer spiegel und korrespondierende lasereinrichtung |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0584353B1 (de) |
JP (1) | JPH06507740A (de) |
DE (1) | DE69304639T2 (de) |
ES (1) | ES2094562T3 (de) |
FR (1) | FR2688601B1 (de) |
WO (1) | WO1993018427A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08108289A (ja) * | 1994-10-07 | 1996-04-30 | Sumitomo Electric Ind Ltd | レーザ加工用光学装置 |
DE29617111U1 (de) * | 1996-10-01 | 1996-12-05 | O'Hara-Smith, Stephen C., Celbridge, Co. Kildare | Justierbarer Reflektor |
DE102006031654A1 (de) * | 2006-04-24 | 2007-10-25 | Carl Zeiss Smt Ag | Facettenspiegel mit einer Vielzahl von Spiegelsegmenten |
CN111812133B (zh) * | 2020-07-16 | 2023-02-28 | 北京大学 | 一种可调节聚焦半径的单色器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4056313A (en) * | 1976-06-15 | 1977-11-01 | Arbogast Porter R | Multiple mirrored apparatus utilizing solar energy |
US4116539A (en) * | 1977-09-20 | 1978-09-26 | Evans Ralph S | Multi-position focusing apparatus |
US4226506A (en) * | 1978-04-10 | 1980-10-07 | Saint-Gobain Industries | Swiveling solar reflector with multiple reflecting elements supported by prefabricated cambered members |
DE3036083A1 (de) * | 1980-09-25 | 1982-04-29 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Spiegel mit variabler kruemmung |
FR2528585B1 (fr) * | 1982-06-11 | 1986-03-21 | Gleizes Raymond | Procede de fabrication de miroir cylindrique, miroir cylindrique et appareil d'irradiation par un faisceau laser |
FR2584824B1 (fr) * | 1985-07-10 | 1987-09-25 | Commissariat Energie Atomique | Miroir deformable |
-
1992
- 1992-03-12 FR FR9202949A patent/FR2688601B1/fr not_active Expired - Fee Related
-
1993
- 1993-03-11 JP JP5515409A patent/JPH06507740A/ja active Pending
- 1993-03-11 ES ES93918755T patent/ES2094562T3/es not_active Expired - Lifetime
- 1993-03-11 WO PCT/FR1993/000244 patent/WO1993018427A1/fr active IP Right Grant
- 1993-03-11 EP EP93918755A patent/EP0584353B1/de not_active Expired - Lifetime
- 1993-03-11 DE DE69304639T patent/DE69304639T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0584353B1 (de) | 1996-09-11 |
FR2688601A1 (fr) | 1993-09-17 |
ES2094562T3 (es) | 1997-01-16 |
JPH06507740A (ja) | 1994-09-01 |
FR2688601B1 (fr) | 1994-04-29 |
WO1993018427A1 (fr) | 1993-09-16 |
DE69304639T2 (de) | 1997-03-20 |
EP0584353A1 (de) | 1994-03-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |