DE69304639D1 - Verformbarer spiegel und korrespondierende lasereinrichtung - Google Patents

Verformbarer spiegel und korrespondierende lasereinrichtung

Info

Publication number
DE69304639D1
DE69304639D1 DE69304639T DE69304639T DE69304639D1 DE 69304639 D1 DE69304639 D1 DE 69304639D1 DE 69304639 T DE69304639 T DE 69304639T DE 69304639 T DE69304639 T DE 69304639T DE 69304639 D1 DE69304639 D1 DE 69304639D1
Authority
DE
Germany
Prior art keywords
deformable mirror
corresponding laser
laser
deformable
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69304639T
Other languages
English (en)
Other versions
DE69304639T2 (de
Inventor
Jean-Pascal Alfille
Liliane Potiquet
Bernard Stockmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69304639D1 publication Critical patent/DE69304639D1/de
Application granted granted Critical
Publication of DE69304639T2 publication Critical patent/DE69304639T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot
    • B23K26/0732Shaping the laser spot into a rectangular shape
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0866Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
DE69304639T 1992-03-12 1993-03-11 Verformbarer spiegel und korrespondierende lasereinrichtung Expired - Fee Related DE69304639T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9202949A FR2688601B1 (fr) 1992-03-12 1992-03-12 Miroir deformable et installation a laser correspondante.
PCT/FR1993/000244 WO1993018427A1 (fr) 1992-03-12 1993-03-11 Miroir deformable et installation a laser correspondante

Publications (2)

Publication Number Publication Date
DE69304639D1 true DE69304639D1 (de) 1996-10-17
DE69304639T2 DE69304639T2 (de) 1997-03-20

Family

ID=9427609

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69304639T Expired - Fee Related DE69304639T2 (de) 1992-03-12 1993-03-11 Verformbarer spiegel und korrespondierende lasereinrichtung

Country Status (6)

Country Link
EP (1) EP0584353B1 (de)
JP (1) JPH06507740A (de)
DE (1) DE69304639T2 (de)
ES (1) ES2094562T3 (de)
FR (1) FR2688601B1 (de)
WO (1) WO1993018427A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08108289A (ja) * 1994-10-07 1996-04-30 Sumitomo Electric Ind Ltd レーザ加工用光学装置
DE29617111U1 (de) * 1996-10-01 1996-12-05 O'Hara-Smith, Stephen C., Celbridge, Co. Kildare Justierbarer Reflektor
DE102006031654A1 (de) * 2006-04-24 2007-10-25 Carl Zeiss Smt Ag Facettenspiegel mit einer Vielzahl von Spiegelsegmenten
CN111812133B (zh) * 2020-07-16 2023-02-28 北京大学 一种可调节聚焦半径的单色器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056313A (en) * 1976-06-15 1977-11-01 Arbogast Porter R Multiple mirrored apparatus utilizing solar energy
US4116539A (en) * 1977-09-20 1978-09-26 Evans Ralph S Multi-position focusing apparatus
US4226506A (en) * 1978-04-10 1980-10-07 Saint-Gobain Industries Swiveling solar reflector with multiple reflecting elements supported by prefabricated cambered members
DE3036083A1 (de) * 1980-09-25 1982-04-29 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Spiegel mit variabler kruemmung
FR2528585B1 (fr) * 1982-06-11 1986-03-21 Gleizes Raymond Procede de fabrication de miroir cylindrique, miroir cylindrique et appareil d'irradiation par un faisceau laser
FR2584824B1 (fr) * 1985-07-10 1987-09-25 Commissariat Energie Atomique Miroir deformable

Also Published As

Publication number Publication date
EP0584353B1 (de) 1996-09-11
FR2688601A1 (fr) 1993-09-17
ES2094562T3 (es) 1997-01-16
JPH06507740A (ja) 1994-09-01
FR2688601B1 (fr) 1994-04-29
WO1993018427A1 (fr) 1993-09-16
DE69304639T2 (de) 1997-03-20
EP0584353A1 (de) 1994-03-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee