FR2688321B1 - Miroir deformable. - Google Patents

Miroir deformable.

Info

Publication number
FR2688321B1
FR2688321B1 FR9302435A FR9302435A FR2688321B1 FR 2688321 B1 FR2688321 B1 FR 2688321B1 FR 9302435 A FR9302435 A FR 9302435A FR 9302435 A FR9302435 A FR 9302435A FR 2688321 B1 FR2688321 B1 FR 2688321B1
Authority
FR
France
Prior art keywords
deformable mirror
deformable
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9302435A
Other languages
English (en)
Other versions
FR2688321A1 (fr
Inventor
Michael Brill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diehl Verwaltungs Stiftung
Original Assignee
Diehl GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diehl GmbH and Co filed Critical Diehl GmbH and Co
Publication of FR2688321A1 publication Critical patent/FR2688321A1/fr
Application granted granted Critical
Publication of FR2688321B1 publication Critical patent/FR2688321B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
FR9302435A 1992-03-04 1993-03-03 Miroir deformable. Expired - Fee Related FR2688321B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19924206792 DE4206792A1 (de) 1992-03-04 1992-03-04 Deformierbarer spiegel

Publications (2)

Publication Number Publication Date
FR2688321A1 FR2688321A1 (fr) 1993-09-10
FR2688321B1 true FR2688321B1 (fr) 1995-01-06

Family

ID=6453198

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9302435A Expired - Fee Related FR2688321B1 (fr) 1992-03-04 1993-03-03 Miroir deformable.

Country Status (2)

Country Link
DE (1) DE4206792A1 (fr)
FR (1) FR2688321B1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4304059A1 (de) * 1993-02-11 1994-08-18 Diehl Gmbh & Co Spiegeleinrichtung mit einem deformierbaren Spiegelelement
US5535043A (en) * 1994-08-22 1996-07-09 Hughes Aircraft Company Replaceable actuator assembly for optical mirror with kinematic mount
US6467915B2 (en) * 2000-01-19 2002-10-22 Diehl Munitionssysteme Gmbh & Co. Kg Deformable mirror, in particular for a laser beam material machining apparatus
DE10106724B4 (de) * 2001-02-14 2007-12-13 Robert Bosch Gmbh Vorrichtung zur Entkopplung eines Aktuators von einem Getriebe
US6951397B1 (en) * 2002-03-19 2005-10-04 Lockheed Martin Corporation Composite ultra-light weight active mirror for space applications
DE102013209012A1 (de) * 2013-05-15 2014-05-28 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem Formgedächtniselement
CN103728723B (zh) * 2014-01-06 2016-03-16 中国工程物理研究院应用电子学研究所 一种主动冷却型一维波面校正装置
DE102014215159A1 (de) 2014-08-01 2014-09-25 Carl Zeiss Smt Gmbh Transportsicherung für ein optisches system mit formgedächtnisaktuatoren
DE102019122064A1 (de) 2019-08-16 2021-02-18 Bystronic Laser Ag Bearbeitungsvorrichtung zur Laserbearbeitung eines Werkstücks, Teilesatz für eine Bearbeitungsvorrichtung zur Laserbearbeitung eines Werkstücks und Verfahren zur Laserbearbeitung eines Werkstücks
DE102023200390A1 (de) 2023-03-03 2024-03-14 Carl Zeiss Smt Gmbh Adaptiver Spiegel mit temperierten Aktuatoren

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2343262A1 (fr) * 1976-03-05 1977-09-30 Anvar Miroirs a focale variable par elasticite et procedes d'obtention
EP0162961A3 (fr) * 1984-04-27 1988-03-02 Siemens Aktiengesellschaft Fixage d'un élément optique
DE3502024A1 (de) * 1985-01-23 1986-07-24 Diehl GmbH & Co, 8500 Nürnberg Verformbarer spiegel

Also Published As

Publication number Publication date
FR2688321A1 (fr) 1993-09-10
DE4206792A1 (de) 1993-09-09

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Legal Events

Date Code Title Description
ST Notification of lapse