JPH0648958Y2 - 基板搬送装置 - Google Patents
基板搬送装置Info
- Publication number
- JPH0648958Y2 JPH0648958Y2 JP1986087360U JP8736086U JPH0648958Y2 JP H0648958 Y2 JPH0648958 Y2 JP H0648958Y2 JP 1986087360 U JP1986087360 U JP 1986087360U JP 8736086 U JP8736086 U JP 8736086U JP H0648958 Y2 JPH0648958 Y2 JP H0648958Y2
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- substrate
- substrates
- pushing
- loader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 62
- 210000000078 claw Anatomy 0.000 claims description 16
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- -1 and in FIG. 12 Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986087360U JPH0648958Y2 (ja) | 1986-06-09 | 1986-06-09 | 基板搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986087360U JPH0648958Y2 (ja) | 1986-06-09 | 1986-06-09 | 基板搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62197897U JPS62197897U (enrdf_load_stackoverflow) | 1987-12-16 |
JPH0648958Y2 true JPH0648958Y2 (ja) | 1994-12-12 |
Family
ID=30944494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986087360U Expired - Lifetime JPH0648958Y2 (ja) | 1986-06-09 | 1986-06-09 | 基板搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648958Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003094259A (ja) * | 2001-09-18 | 2003-04-03 | Sanyo Electric Co Ltd | 基板搬送ライン |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59163038A (ja) * | 1983-03-07 | 1984-09-14 | Nissan Motor Co Ltd | トランスフアプレスにおけるワ−ク搬送用フインガ−の位置調整装置 |
JPS6113997U (ja) * | 1984-06-29 | 1986-01-27 | パイオニア株式会社 | プリント基板搬送装置 |
-
1986
- 1986-06-09 JP JP1986087360U patent/JPH0648958Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS62197897U (enrdf_load_stackoverflow) | 1987-12-16 |
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