JPH0648831Y2 - 基板冷却装置用パッド - Google Patents

基板冷却装置用パッド

Info

Publication number
JPH0648831Y2
JPH0648831Y2 JP2626985U JP2626985U JPH0648831Y2 JP H0648831 Y2 JPH0648831 Y2 JP H0648831Y2 JP 2626985 U JP2626985 U JP 2626985U JP 2626985 U JP2626985 U JP 2626985U JP H0648831 Y2 JPH0648831 Y2 JP H0648831Y2
Authority
JP
Japan
Prior art keywords
substrate
pad
laminate
front surface
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2626985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61145276U (enExample
Inventor
和行 駒形
清 小松
宗治 小宮
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP2626985U priority Critical patent/JPH0648831Y2/ja
Publication of JPS61145276U publication Critical patent/JPS61145276U/ja
Application granted granted Critical
Publication of JPH0648831Y2 publication Critical patent/JPH0648831Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP2626985U 1985-02-27 1985-02-27 基板冷却装置用パッド Expired - Lifetime JPH0648831Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2626985U JPH0648831Y2 (ja) 1985-02-27 1985-02-27 基板冷却装置用パッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2626985U JPH0648831Y2 (ja) 1985-02-27 1985-02-27 基板冷却装置用パッド

Publications (2)

Publication Number Publication Date
JPS61145276U JPS61145276U (enExample) 1986-09-08
JPH0648831Y2 true JPH0648831Y2 (ja) 1994-12-12

Family

ID=30522118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2626985U Expired - Lifetime JPH0648831Y2 (ja) 1985-02-27 1985-02-27 基板冷却装置用パッド

Country Status (1)

Country Link
JP (1) JPH0648831Y2 (enExample)

Also Published As

Publication number Publication date
JPS61145276U (enExample) 1986-09-08

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