JPS61145276U - - Google Patents
Info
- Publication number
- JPS61145276U JPS61145276U JP2626985U JP2626985U JPS61145276U JP S61145276 U JPS61145276 U JP S61145276U JP 2626985 U JP2626985 U JP 2626985U JP 2626985 U JP2626985 U JP 2626985U JP S61145276 U JPS61145276 U JP S61145276U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- laminate
- pad
- cooling
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 239000000498 cooling water Substances 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2626985U JPH0648831Y2 (ja) | 1985-02-27 | 1985-02-27 | 基板冷却装置用パッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2626985U JPH0648831Y2 (ja) | 1985-02-27 | 1985-02-27 | 基板冷却装置用パッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61145276U true JPS61145276U (enExample) | 1986-09-08 |
| JPH0648831Y2 JPH0648831Y2 (ja) | 1994-12-12 |
Family
ID=30522118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2626985U Expired - Lifetime JPH0648831Y2 (ja) | 1985-02-27 | 1985-02-27 | 基板冷却装置用パッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648831Y2 (enExample) |
-
1985
- 1985-02-27 JP JP2626985U patent/JPH0648831Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648831Y2 (ja) | 1994-12-12 |