JPH0648825Y2 - 成長装置用ウエハキャリア - Google Patents
成長装置用ウエハキャリアInfo
- Publication number
- JPH0648825Y2 JPH0648825Y2 JP1987113205U JP11320587U JPH0648825Y2 JP H0648825 Y2 JPH0648825 Y2 JP H0648825Y2 JP 1987113205 U JP1987113205 U JP 1987113205U JP 11320587 U JP11320587 U JP 11320587U JP H0648825 Y2 JPH0648825 Y2 JP H0648825Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- groove
- support
- wafer carrier
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987113205U JPH0648825Y2 (ja) | 1987-07-23 | 1987-07-23 | 成長装置用ウエハキャリア |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987113205U JPH0648825Y2 (ja) | 1987-07-23 | 1987-07-23 | 成長装置用ウエハキャリア |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6418726U JPS6418726U (fr) | 1989-01-30 |
JPH0648825Y2 true JPH0648825Y2 (ja) | 1994-12-12 |
Family
ID=31352832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987113205U Expired - Lifetime JPH0648825Y2 (ja) | 1987-07-23 | 1987-07-23 | 成長装置用ウエハキャリア |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648825Y2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0447023U (fr) * | 1990-08-28 | 1992-04-21 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS589579B2 (ja) * | 1974-12-03 | 1983-02-22 | 株式会社東芝 | ハンドウタイソウチノ セイゾウソウチ |
-
1987
- 1987-07-23 JP JP1987113205U patent/JPH0648825Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6418726U (fr) | 1989-01-30 |
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