JPH0648825Y2 - 成長装置用ウエハキャリア - Google Patents

成長装置用ウエハキャリア

Info

Publication number
JPH0648825Y2
JPH0648825Y2 JP1987113205U JP11320587U JPH0648825Y2 JP H0648825 Y2 JPH0648825 Y2 JP H0648825Y2 JP 1987113205 U JP1987113205 U JP 1987113205U JP 11320587 U JP11320587 U JP 11320587U JP H0648825 Y2 JPH0648825 Y2 JP H0648825Y2
Authority
JP
Japan
Prior art keywords
wafer
groove
support
wafer carrier
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987113205U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6418726U (en:Method
Inventor
徹 鶴見
正広 米森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1987113205U priority Critical patent/JPH0648825Y2/ja
Publication of JPS6418726U publication Critical patent/JPS6418726U/ja
Application granted granted Critical
Publication of JPH0648825Y2 publication Critical patent/JPH0648825Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987113205U 1987-07-23 1987-07-23 成長装置用ウエハキャリア Expired - Lifetime JPH0648825Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987113205U JPH0648825Y2 (ja) 1987-07-23 1987-07-23 成長装置用ウエハキャリア

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987113205U JPH0648825Y2 (ja) 1987-07-23 1987-07-23 成長装置用ウエハキャリア

Publications (2)

Publication Number Publication Date
JPS6418726U JPS6418726U (en:Method) 1989-01-30
JPH0648825Y2 true JPH0648825Y2 (ja) 1994-12-12

Family

ID=31352832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987113205U Expired - Lifetime JPH0648825Y2 (ja) 1987-07-23 1987-07-23 成長装置用ウエハキャリア

Country Status (1)

Country Link
JP (1) JPH0648825Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0447023U (en:Method) * 1990-08-28 1992-04-21

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589579B2 (ja) * 1974-12-03 1983-02-22 株式会社東芝 ハンドウタイソウチノ セイゾウソウチ

Also Published As

Publication number Publication date
JPS6418726U (en:Method) 1989-01-30

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