JPH0648737Y2 - イオン処理装置 - Google Patents

イオン処理装置

Info

Publication number
JPH0648737Y2
JPH0648737Y2 JP13559088U JP13559088U JPH0648737Y2 JP H0648737 Y2 JPH0648737 Y2 JP H0648737Y2 JP 13559088 U JP13559088 U JP 13559088U JP 13559088 U JP13559088 U JP 13559088U JP H0648737 Y2 JPH0648737 Y2 JP H0648737Y2
Authority
JP
Japan
Prior art keywords
disk
signal
signal output
beam current
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13559088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256342U (enrdf_load_stackoverflow
Inventor
靖明 西上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP13559088U priority Critical patent/JPH0648737Y2/ja
Publication of JPH0256342U publication Critical patent/JPH0256342U/ja
Application granted granted Critical
Publication of JPH0648737Y2 publication Critical patent/JPH0648737Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP13559088U 1988-10-18 1988-10-18 イオン処理装置 Expired - Lifetime JPH0648737Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13559088U JPH0648737Y2 (ja) 1988-10-18 1988-10-18 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13559088U JPH0648737Y2 (ja) 1988-10-18 1988-10-18 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH0256342U JPH0256342U (enrdf_load_stackoverflow) 1990-04-24
JPH0648737Y2 true JPH0648737Y2 (ja) 1994-12-12

Family

ID=31395352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13559088U Expired - Lifetime JPH0648737Y2 (ja) 1988-10-18 1988-10-18 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0648737Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0256342U (enrdf_load_stackoverflow) 1990-04-24

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