JPH0648327Y2 - 膜厚測定装置 - Google Patents
膜厚測定装置Info
- Publication number
- JPH0648327Y2 JPH0648327Y2 JP2963489U JP2963489U JPH0648327Y2 JP H0648327 Y2 JPH0648327 Y2 JP H0648327Y2 JP 2963489 U JP2963489 U JP 2963489U JP 2963489 U JP2963489 U JP 2963489U JP H0648327 Y2 JPH0648327 Y2 JP H0648327Y2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- film thickness
- light
- air
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2963489U JPH0648327Y2 (ja) | 1989-03-14 | 1989-03-14 | 膜厚測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2963489U JPH0648327Y2 (ja) | 1989-03-14 | 1989-03-14 | 膜厚測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02120007U JPH02120007U (ko) | 1990-09-27 |
JPH0648327Y2 true JPH0648327Y2 (ja) | 1994-12-12 |
Family
ID=31254014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2963489U Expired - Lifetime JPH0648327Y2 (ja) | 1989-03-14 | 1989-03-14 | 膜厚測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0648327Y2 (ko) |
-
1989
- 1989-03-14 JP JP2963489U patent/JPH0648327Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH02120007U (ko) | 1990-09-27 |
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