JPH0646982Y2 - 高純度石英母材製造用加熱炉 - Google Patents
高純度石英母材製造用加熱炉Info
- Publication number
- JPH0646982Y2 JPH0646982Y2 JP1242689U JP1242689U JPH0646982Y2 JP H0646982 Y2 JPH0646982 Y2 JP H0646982Y2 JP 1242689 U JP1242689 U JP 1242689U JP 1242689 U JP1242689 U JP 1242689U JP H0646982 Y2 JPH0646982 Y2 JP H0646982Y2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- furnace core
- base material
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 title claims description 68
- 239000000463 material Substances 0.000 title claims description 46
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 31
- 239000010453 quartz Substances 0.000 title claims description 20
- 238000005192 partition Methods 0.000 claims description 46
- 239000005373 porous glass Substances 0.000 claims description 31
- 238000007789 sealing Methods 0.000 claims description 9
- 238000003860 storage Methods 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 31
- 229910052799 carbon Inorganic materials 0.000 description 31
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 27
- 239000012298 atmosphere Substances 0.000 description 27
- 229910001873 dinitrogen Inorganic materials 0.000 description 19
- 238000000638 solvent extraction Methods 0.000 description 16
- 239000011521 glass Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 238000010926 purge Methods 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 239000013307 optical fiber Substances 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- 239000012080 ambient air Substances 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 208000005156 Dehydration Diseases 0.000 description 4
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000003570 air Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000004031 devitrification Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- -1 3Al 2 O 3 .2SiO 2 Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005352 clarification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910021397 glassy carbon Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 229920002449 FKM Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1242689U JPH0646982Y2 (ja) | 1989-02-02 | 1989-02-02 | 高純度石英母材製造用加熱炉 |
| AU46870/89A AU626362B2 (en) | 1988-12-29 | 1989-12-19 | Furnace for producing high purity quartz glass preform |
| GB8928691A GB2226628B (en) | 1988-12-29 | 1989-12-20 | Furnace |
| US07/459,299 US5032079A (en) | 1988-12-29 | 1989-12-29 | Furnace for producing high purity quartz glass preform |
| KR898920189A KR920001386B1 (en) | 1988-12-29 | 1989-12-29 | Heating furnace for producing high-purity quartz preform |
| EP90106551A EP0450124B1 (en) | 1988-12-29 | 1990-04-05 | Furnace for producing high purity quartz glass preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1242689U JPH0646982Y2 (ja) | 1989-02-02 | 1989-02-02 | 高純度石英母材製造用加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02136036U JPH02136036U (enrdf_load_stackoverflow) | 1990-11-13 |
| JPH0646982Y2 true JPH0646982Y2 (ja) | 1994-11-30 |
Family
ID=31515903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1242689U Expired - Lifetime JPH0646982Y2 (ja) | 1988-12-29 | 1989-02-02 | 高純度石英母材製造用加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0646982Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-02-02 JP JP1242689U patent/JPH0646982Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02136036U (enrdf_load_stackoverflow) | 1990-11-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |