JPH06448Y2 - 薄膜形成装置の遮蔽板 - Google Patents

薄膜形成装置の遮蔽板

Info

Publication number
JPH06448Y2
JPH06448Y2 JP1987125437U JP12543787U JPH06448Y2 JP H06448 Y2 JPH06448 Y2 JP H06448Y2 JP 1987125437 U JP1987125437 U JP 1987125437U JP 12543787 U JP12543787 U JP 12543787U JP H06448 Y2 JPH06448 Y2 JP H06448Y2
Authority
JP
Japan
Prior art keywords
thin film
shield plate
shielding plate
film forming
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987125437U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6430354U (enExample
Inventor
敦 小野
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP1987125437U priority Critical patent/JPH06448Y2/ja
Publication of JPS6430354U publication Critical patent/JPS6430354U/ja
Application granted granted Critical
Publication of JPH06448Y2 publication Critical patent/JPH06448Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1987125437U 1987-08-18 1987-08-18 薄膜形成装置の遮蔽板 Expired - Lifetime JPH06448Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987125437U JPH06448Y2 (ja) 1987-08-18 1987-08-18 薄膜形成装置の遮蔽板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987125437U JPH06448Y2 (ja) 1987-08-18 1987-08-18 薄膜形成装置の遮蔽板

Publications (2)

Publication Number Publication Date
JPS6430354U JPS6430354U (enExample) 1989-02-23
JPH06448Y2 true JPH06448Y2 (ja) 1994-01-05

Family

ID=31376044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987125437U Expired - Lifetime JPH06448Y2 (ja) 1987-08-18 1987-08-18 薄膜形成装置の遮蔽板

Country Status (1)

Country Link
JP (1) JPH06448Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7044166B2 (ja) 2018-09-14 2022-03-30 ヤマハ株式会社 スピーカ筐体

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6379958A (ja) * 1986-09-22 1988-04-09 Matsushita Electric Ind Co Ltd 蒸着用マスクとその製造法

Also Published As

Publication number Publication date
JPS6430354U (enExample) 1989-02-23

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