JPH0644594Y2 - セラミック盤 - Google Patents

セラミック盤

Info

Publication number
JPH0644594Y2
JPH0644594Y2 JP1986167053U JP16705386U JPH0644594Y2 JP H0644594 Y2 JPH0644594 Y2 JP H0644594Y2 JP 1986167053 U JP1986167053 U JP 1986167053U JP 16705386 U JP16705386 U JP 16705386U JP H0644594 Y2 JPH0644594 Y2 JP H0644594Y2
Authority
JP
Japan
Prior art keywords
polishing table
ceramic
transparent body
identification mark
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986167053U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6374267U (enExample
Inventor
純司 大江
康信 川江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1986167053U priority Critical patent/JPH0644594Y2/ja
Publication of JPS6374267U publication Critical patent/JPS6374267U/ja
Application granted granted Critical
Publication of JPH0644594Y2 publication Critical patent/JPH0644594Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986167053U 1986-10-30 1986-10-30 セラミック盤 Expired - Lifetime JPH0644594Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986167053U JPH0644594Y2 (ja) 1986-10-30 1986-10-30 セラミック盤

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986167053U JPH0644594Y2 (ja) 1986-10-30 1986-10-30 セラミック盤

Publications (2)

Publication Number Publication Date
JPS6374267U JPS6374267U (enExample) 1988-05-18
JPH0644594Y2 true JPH0644594Y2 (ja) 1994-11-16

Family

ID=31098620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986167053U Expired - Lifetime JPH0644594Y2 (ja) 1986-10-30 1986-10-30 セラミック盤

Country Status (1)

Country Link
JP (1) JPH0644594Y2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0683956B2 (ja) * 1988-05-25 1994-10-26 昭和電工株式会社 炭化けい素セラミックス製トッププレート
JPH0710493Y2 (ja) * 1991-02-05 1995-03-08 株式会社エンヤシステム ウエーハ貼付板
CN101375374A (zh) * 2006-01-25 2009-02-25 Jsr株式会社 化学机械研磨垫及其制造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841559Y2 (ja) * 1979-01-17 1983-09-20 株式会社スリ−ボンド 表示体
JPS5944185B2 (ja) * 1982-03-04 1984-10-27 不二越機械工業株式会社 ポリシング用セラミツク定盤の固定装置

Also Published As

Publication number Publication date
JPS6374267U (enExample) 1988-05-18

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